CN102456825A - 发光二极管及其制造方法 - Google Patents
发光二极管及其制造方法 Download PDFInfo
- Publication number
- CN102456825A CN102456825A CN2010105197323A CN201010519732A CN102456825A CN 102456825 A CN102456825 A CN 102456825A CN 2010105197323 A CN2010105197323 A CN 2010105197323A CN 201010519732 A CN201010519732 A CN 201010519732A CN 102456825 A CN102456825 A CN 102456825A
- Authority
- CN
- China
- Prior art keywords
- electrode
- emitting diode
- light
- layer
- lead
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 238000009792 diffusion process Methods 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229910002601 GaN Inorganic materials 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
- 235000010210 aluminium Nutrition 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04042—Bonding areas specifically adapted for wire connectors, e.g. wirebond pads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05638—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/05644—Gold [Au] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48617—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
- H01L2224/48624—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48638—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/48644—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/49105—Connecting at different heights
- H01L2224/49107—Connecting at different heights on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0103—Zinc [Zn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01049—Indium [In]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12041—LED
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Led Devices (AREA)
Abstract
本发明涉及一种发光二极管,包括基板、生长于基板上的缓冲层、生长于缓冲层上的发光层、生长于发光层上的欧姆接触层、生长于欧姆接触层上的电流扩散层、电极及导线,所述导线的一端与电极打线连接,所述导线与电极经打线形成连接结构,该连接结构与电极的接合面积大于等于电极面积的60%。增大导线与电极的连接诶面积能够使导线与电极连接更加紧密和牢固,使导线不易脱落。本发明还涉及一种发光二极管的制造方法。
Description
技术领域
本发明涉及一种发光二极管,还涉及一种发光二极管的制造方法。
背景技术
相比于传统的发光源,发光二极管(LightEmittingDiode,LED)具有重量轻、体积小、污染低、寿命长等优点,其作为一种新型的发光源,已经被越来越多地应用到各领域当中,如路灯、交通灯、信号灯、射灯及装饰灯等等。
发光二极管的核心为发光二极管芯片,在封装过程中,发光二极管芯片需与外界电源进行连接才能实现发光二极管的发光效果。现有技术一般采用打线方式将发光二极管芯片电连接于电路结构中,但是在实际生产中经常出现导线与发光二极管芯片脱落的现象,造成发光二极管良率不佳。
发明内容
有鉴于此,本发明旨在提供一种导线不易脱落的发光二极管结构。
一种发光二极管,包括基板、生长于基板上的缓冲层、生长于缓冲层上的发光层、生长于发光层上的欧姆接触层、生长于欧姆接触层上的电流扩散层、电极及导线,所述导线的一端与电极打线连接,所述导线与电极经打线形成连接结构,该连接结构与电极的接合面积大于等于电极面积的60%。
一种发光二极管制造方法,包括以下步骤:
形成基板并在基板上依次生长缓冲层、发光层、欧姆接触层和电流扩散层;
在发光二极管上形成电极;
将电极与导线打线连接,并且打线中形成的熔融金属与电极接合形成连接结构,该连接结构与电极的接合面积大于等于电极面积的60%。
增加导线与发光二极管芯片电极表面接合的面积使其大于等于60%,能够使导线与电极连接更加紧密和牢固,使导线不易脱落,提高发光二极管的良率。
下面参照附图,接合具体实施例对本发明作进一步的描述。
附图说明
图1为本发明一实施例的发光二极管芯片打线结构的示意图。
图2为图1所示的发光二极管芯片打线结构的俯视示意图。
图3为本发明另一实施例的发光二极管芯片打线结构的示意图。
主要元件符号说明
基板 10
缓冲层 20
发光层 30、90
N型半导体层 32
P型半导体层 34
外延结构 36
欧姆接触层 40
电流扩散层 50
透明导电层 60
电极 70
第一电极 72
第二电极 74、75
连接结构 76
导线 80
具体实施方式
请参阅图1和图2,该发光二极管自下至上依次生长有基板10,缓冲层20,发光层30、欧姆接触层40、电流扩散层50和透明导电层60。所述发光二极管上设有电极70,该电极70与导线80通过打线连接。
所述基板10的材料可以为蓝宝石(Al2O3)、碳化硅(SiC)、硅(Si)、氮化镓(GaN)或氧化锌(ZnO)中的一种,根据所需要达到的物理性能和光学特性以及成本预算而定。
所述缓冲层20生长于基板10之上,采用材料为氮化镓(GaN)或氮化铝(AlN)等中的一种。
所述发光层30包括紧贴着缓冲层20生长并位于下部的N型半导体层32和位于上部的P型半导体层34,该N型半导体层32具有横向的外延结构36。所述N型半导体层32的材料为N型氮化镓(GaN),前述缓冲层20用于降低基板10与N型半导体层32之间因晶格差异所产生的应力。所述P型半导体层34生长于N型半导体层32之上,该P型半导体层34的材料为P型氮化镓(GaN)。当然在生成该发光层30时,可利用氮化镓铟和氮化镓铝材料不同的配比及掺杂形成不同的结构,如双异质结构、单量子阱结构或多量子阱结构。
在P型半导体层34之上依次形成欧姆接触层40、电流扩散层50和透明导电层60。该欧姆接触层40所用材料可以为掺杂镁(Mg)的氮化镓铟铝(InAlGaN)或者掺杂镁(Mg)的氮化镓(GaN)。透明导电层60的材料可以是氧化铟锡(ITO)。
所述电极70包括第一电极72和第二电极74,所述第一电极72设置于透明导电层60上表面,所述第二电极74设置于N型半导体层32的外延结构36上表面,该第一电极72和第二电极74并行设置在该发光二极管的一侧。该发光二极管经由导线80在第一电极72和第二电极74上打线连接。所述导线80的材料为金、银、铜或铝中的一种,或者其他金属的合金。所述电极70一般采用金或铝材料,当然也可以为其他金属的合金。在打线过程中,导线80在其与电极70接触的末端形成熔融金属,该熔融金属覆盖于电极70的表面,当覆盖面积达到60%以后停止打线,使熔融金属固化,由此得到覆盖电极面积大于等于60%的连接结构76。导线80与电极70的接合面积达到此比例可以使两者连接更加紧密和牢固,避免导线80轻易地与电极70脱落和连接断裂。优选的,当连接结构76与电极70的接合面积达到电极70面积的80%或以上时,导线80与电极70的连接状况最为牢固。特别的,打线过程中,要严格保证熔融金属不溢出电极70的表面,从而污染到晶片表面,由此影响发光二极管的出光效率。
图3为本发明第二实施例的发光二极管的剖面示意图。该发光二极管包括基板10,缓冲层20,发光层90、欧姆接触层40、电流扩散层50和透明导电层60。所述发光二极管上设有电极70,该电极70与导线80通过打线连接。
所述电极70包括第一电极72和第二电极75,与前述实施例不同之处在于,该第二电极75设置于所述基板10的底部,使该发光二极管形成一垂直结构。需要通过打线方式与导线80连接的仅为第一电极72,第二电极75直接与外界电路结构相连。
所述第一电极72与导线80经打线连接时熔融金属形成的连接结构76覆盖第一电极72的面积达第一电极72面积的60%以上,以能够达到80%以上为最优。
本发明的技术内容及技术特点已揭露如上,然而本领域技术人员仍可能基于本发明的教示及揭示而作出种种不背离本发明精神的替换及修饰。因此,本发明的保护范围应不限于实施例所揭示的内容,而应包括各种不背离本发明的替换及修饰,并为所附的权利要求所涵盖。
Claims (10)
1.一种发光二极管,包括基板、生长于基板上的缓冲层、生长于缓冲层上的发光层、生长于发光层上的欧姆接触层、生长于欧姆接触层上的电流扩散层、电极及导线,所述导线的一端与电极打线连接,其特征在于:所述导线与电极经打线形成连接结构,该连接结构与电极的接合面积大于等于电极面积的60%。
2.如权利要求1所述的发光二极管,其特征在于:所述连接结构与电极接合面积大于电极面积的80%。
3.如权利要求1所述的发光二极管,其特征在于:所述电极包括并且并行设置于该发光二极管的同一侧的第一电极和第二电极,该第一电极与第二电极分别与导线连接。
4.如权利要求1所述的发光二极管,其特征在于:所述电极包括第一电极和第二电极,该第一电极设置于电流扩散层上且与导线经由打线连接,该第二电极设置于基板的底部。
5.如权利要求1至4中任一项所述的发光二极管,其特征在于:所述导线的材料为金、银、铜或铝。
6.如权利要求1至4中任一项所述的发光二极管,其特征在于:所述基板的材料为蓝宝石、碳化硅、硅、氮化镓或氧化锌。
7.如权利要求1至4中任一项所述的发光二极管,其特征在于:所述发光层包括N型半导体层和P型半导体层,该N型半导体层为N型氮化镓材料,P型半导体层为P型氮化镓材料。
8.如权利要求1至4中任一项所述的发光二极管,其特征在于:所述发光层为双异质结构、单量子阱结构或多量子阱结构。
9.如权利要求1至4中任一项所述的发光二极管,其特征在于:所述电流扩散层上还形成有一层透明导电层。
10.一种发光二极管制造方法,包括以下步骤:
形成基板并在基板上依次生长缓冲层、发光层、欧姆接触层和电流扩散层;
在发光二极管上形成电极;
将电极与导线打线连接,并且打线中形成的熔融金属与电极接合形成连接结构,该连接结构与电极的接合面积大于等于电极面积的60%。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105197323A CN102456825A (zh) | 2010-10-25 | 2010-10-25 | 发光二极管及其制造方法 |
US13/177,557 US8431934B2 (en) | 2010-10-25 | 2011-07-07 | Light emitting diode chip and manufacturing method thereof |
US13/854,143 US8673667B2 (en) | 2010-10-25 | 2013-04-01 | Method for manufacturing light emitting diode chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010105197323A CN102456825A (zh) | 2010-10-25 | 2010-10-25 | 发光二极管及其制造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN102456825A true CN102456825A (zh) | 2012-05-16 |
Family
ID=45972217
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010105197323A Pending CN102456825A (zh) | 2010-10-25 | 2010-10-25 | 发光二极管及其制造方法 |
Country Status (2)
Country | Link |
---|---|
US (2) | US8431934B2 (zh) |
CN (1) | CN102456825A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103904207A (zh) * | 2014-04-04 | 2014-07-02 | 利亚德光电股份有限公司 | 晶片电路 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1441489A (zh) * | 2002-02-26 | 2003-09-10 | 精工爱普生株式会社 | 半导体装置及其制造方法、电路板和电子仪器 |
US20050168127A1 (en) * | 2004-01-30 | 2005-08-04 | Shih-Chang Shei | [white light led] |
TW200924230A (en) * | 2007-11-23 | 2009-06-01 | Epistar Corp | Light emitting device |
TW201001756A (en) * | 2007-11-23 | 2010-01-01 | Epistar Corp | Light emitting device |
US20100109020A1 (en) * | 2001-10-26 | 2010-05-06 | Yoo Myung Cheol | Diode having vertical structure and method of manufacturing the same |
US20100201254A1 (en) * | 2007-09-26 | 2010-08-12 | Nichia Corporation | Light emitting element and light emitting device using the light emitting element |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100286699B1 (ko) * | 1993-01-28 | 2001-04-16 | 오가와 에이지 | 질화갈륨계 3-5족 화합물 반도체 발광디바이스 및 그 제조방법 |
TW522534B (en) * | 2001-09-11 | 2003-03-01 | Hsiu-Hen Chang | Light source of full color LED using die bonding and packaging technology |
US7002180B2 (en) * | 2002-06-28 | 2006-02-21 | Kopin Corporation | Bonding pad for gallium nitride-based light-emitting device |
WO2006013751A1 (ja) * | 2004-08-05 | 2006-02-09 | Seiko Epson Corporation | ボンディング構造、ワイヤボンディング方法、アクチュエータ装置、及び液体噴射ヘッド |
US7875474B2 (en) * | 2005-09-06 | 2011-01-25 | Show A Denko K.K. | Gallium nitride-based compound semiconductor light-emitting device and production method thereof |
JP4137936B2 (ja) * | 2005-11-16 | 2008-08-20 | 昭和電工株式会社 | 窒化ガリウム系化合物半導体発光素子 |
JP2007165613A (ja) * | 2005-12-14 | 2007-06-28 | Showa Denko Kk | 窒化ガリウム系化合物半導体発光素子及びその製造方法 |
US8022419B2 (en) * | 2005-12-19 | 2011-09-20 | Showa Denko K.K. | Flip-chip type semiconductor light-emitting device, method for manufacturing flip-chip type semiconductor light-emitting device, printed circuit board for flip-chip type semiconductor light-emitting device, mounting structure for flip-chip type semiconductor light-emitting device, and light-emitting diode lamp |
JP5047516B2 (ja) * | 2006-03-23 | 2012-10-10 | 昭和電工株式会社 | 窒化ガリウム系化合物半導体発光素子の製造方法、窒化ガリウム系化合物半導体発光素子及びそれを用いたランプ |
KR20090073935A (ko) * | 2007-12-31 | 2009-07-03 | 주식회사 에피밸리 | 3족 질화물 반도체 발광소자 |
JP5586371B2 (ja) * | 2009-09-15 | 2014-09-10 | 昭和電工株式会社 | 発光ダイオード、発光ダイオードランプ及び照明装置 |
-
2010
- 2010-10-25 CN CN2010105197323A patent/CN102456825A/zh active Pending
-
2011
- 2011-07-07 US US13/177,557 patent/US8431934B2/en not_active Expired - Fee Related
-
2013
- 2013-04-01 US US13/854,143 patent/US8673667B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100109020A1 (en) * | 2001-10-26 | 2010-05-06 | Yoo Myung Cheol | Diode having vertical structure and method of manufacturing the same |
CN1441489A (zh) * | 2002-02-26 | 2003-09-10 | 精工爱普生株式会社 | 半导体装置及其制造方法、电路板和电子仪器 |
US20050168127A1 (en) * | 2004-01-30 | 2005-08-04 | Shih-Chang Shei | [white light led] |
US20100201254A1 (en) * | 2007-09-26 | 2010-08-12 | Nichia Corporation | Light emitting element and light emitting device using the light emitting element |
TW200924230A (en) * | 2007-11-23 | 2009-06-01 | Epistar Corp | Light emitting device |
TW201001756A (en) * | 2007-11-23 | 2010-01-01 | Epistar Corp | Light emitting device |
Also Published As
Publication number | Publication date |
---|---|
US20120097969A1 (en) | 2012-04-26 |
US20130252362A1 (en) | 2013-09-26 |
US8673667B2 (en) | 2014-03-18 |
US8431934B2 (en) | 2013-04-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10497745B2 (en) | Light-emitting diode device | |
US8785958B2 (en) | Light emitting element | |
CN103579440B (zh) | 发光二极管结构 | |
CN104022204B (zh) | 发光元件 | |
CN101621101A (zh) | 发光二极管及其制造方法 | |
CN104733598B (zh) | 半导体发光结构及半导体封装结构 | |
CN103426988A (zh) | 半导体发光器件 | |
KR102075147B1 (ko) | 발광 소자 및 발광 소자 패키지 | |
CN105977272A (zh) | 光电元件 | |
CN101276871B (zh) | 光电元件、背光模块装置和照明装置 | |
CN101465398B (zh) | 一种基于二次衬底转移技术的单电极白光led的制备方法 | |
CN103441212B (zh) | Led芯片的制作工艺、led芯片结构及led封装结构 | |
CN104916771A (zh) | 一种换衬底的正装GaN基发光二极管及其制备方法 | |
CN202695522U (zh) | 具有倒装焊接结构的发光二极管 | |
CN103456853A (zh) | 一种白光led芯片及其生产方法 | |
CN102693970B (zh) | 发光二极管装置 | |
CN102456825A (zh) | 发光二极管及其制造方法 | |
TWM255514U (en) | Structure improvement of Gallium Indium Nitride light-emitting diode | |
CN203481264U (zh) | 一种白光led芯片 | |
CN101859863B (zh) | 蓝宝石基新型倒装结构及其用途 | |
CN104064641A (zh) | 通孔垂直型led的制作方法 | |
CN102201427B (zh) | 发光元件 | |
CN104112815B (zh) | 发光二极管装置及其制作方法 | |
CN113140586B (zh) | 一种集成式透明Micro-LED显示装置 | |
CN103178182A (zh) | 发光二极管元件以及覆晶式发光二极管封装元件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C12 | Rejection of a patent application after its publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20120516 |