CN102453952B - Gas supplying apparatus for crystal growth furnace - Google Patents
Gas supplying apparatus for crystal growth furnace Download PDFInfo
- Publication number
- CN102453952B CN102453952B CN201010512687.9A CN201010512687A CN102453952B CN 102453952 B CN102453952 B CN 102453952B CN 201010512687 A CN201010512687 A CN 201010512687A CN 102453952 B CN102453952 B CN 102453952B
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- pneumatic tube
- pod
- crucible
- thermal insulation
- insulation layer
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Abstract
The invention related to a gas supplying apparatus for a crystal growth furnace. With the gas supplying apparatus, the impurity concentration can be effectively reduced, such that the crystal quality can be improved. The gas supplying apparatus comprises: a thermal insulation layer oppositely covered on the peripheral of a crucible, a gas conveying pipe arranged on the thermal insulation layer, and a plurality of gas discharging ports arranged on the thermal insulation layer. A set of flow guiding covers are arranged at the port of the gas conveying pipe, wherein the angles of the flow guiding covers can be adjusted, such that the free surface of a solution can be synchronically subject to the blowing of guiding flows. Therefore, the impurities can be removed from the free surface more rapidly, and the impurity concentration can be effectively reduced, such that the crystal quality after the solution is cooled and cured can be improved.
Description
Technical field
The present invention is applied to the air feeder growing brilliant stove, espespecially a kind of brilliant stove air feeder of length that effectively can reduce impurity concentration about a kind of.
Background technology
As everyone knows, solar cell utilizes sunlight and material to interact directly to produce the pollution-free renewable energy resources of one of electric power, especially solar cell in use can't discharge any gas comprising carbonic acid gas, the problem of global greenhouse effect of obviously can improving the ecological environment, solve.
Solar cell is device solar energy converting being become electric energy, and do not need through ionogen to transmit conductive ion, but change adopt semi-conductor produce PN junction to obtain current potential, when semi-conductor is subject to the irradiation of sunlight, a large amount of unbound electrons is adjoint and give birth to, and the movement of this electronics creates electric current, namely produce potential difference at PN junction place.
At present, solar cell mainly divides amorphous, monocrystalline and polycrystalline three kinds; Wherein, as shown in Figure 1, for the brilliant stove of a kind of length in order to manufacture silicon crystal, it mainly melts the crucible 21 of soup 11 for splendid attire silicon based on one, and outside crucible 21, be arranged with side thermal insulation layer 22 and upper thermal insulating layer 23, make the thermal field that formation one seals, and in the middle of thermal field, be provided with well heater 24 in order to heat silicon metal.
Moreover upper thermal insulating layer 23 place of thermal field is provided with one for the pneumatic tube 25 connecting rare gas element, and quantity venting hole 26 not etc.Make, in silicon METAL HEATING PROCESS melting process, to coordinate the gas being inputted predetermined flow velocity by pneumatic tube 25, use the air-flow produced by thermal field, so that the oxide compound easily forming impurity is discharged.
Overall long brilliant stove then can adopt reduce well heater 24 power the silicon in crucible 21 is melted mode that soup 11 solidifies obtains crystal 12 (casting), or adopt side thermal insulation layer 22 moves radiation cooling the silicon in crucible 21 is melted mode that soup 11 solidifies obtains crystal 12 (direct cure system).
Even, a pillar 28 can be connected with further between crucible 21 and base 27; Make to drive crucible 21 to be displaced downwardly to cold-zone through pillar 28, the mode that the silicon in crucible 21 melts soup 11 solidification is made to obtain crystal 12 (Bu Shi method), or import cooling fluid in pillar 28, make the mode that the silicon in crucible 21 melts soup 11 solidification obtain crystal 12 (heat exchanger method).
But, pneumatic tube 25 in the middle of the air feeder of the brilliant stove of the similar length commonly used only outline stretches in the thermal field below upper thermal insulating layer 23, therefore it is as easy as rolling off a log because the mouth of pipe of pneumatic tube 25 and the inner silicon of crucible 21 melt the free surface (silicon melts the surface in contact of soup and gas) of soup 11 apart from long, cause discharge pneumatic tube 25 air-flow cannot effectively by impurity band from free surface, make the crystal impurities concentration of formation higher, thus reduce crystal mass.
Summary of the invention
In view of this, namely the present invention is providing long brilliant stove one effectively can reduce impurity concentration, and using the air feeder promoting crystal mass, is its main purpose.
For reaching above-mentioned purpose, air feeder of the present invention includes: a thermal insulation layer, relatively covering at crucible periphery is located at the pneumatic tube on thermal insulation layer, and some venting holes being located at thermal insulation layer, make to coordinate the gas being inputted predetermined flow velocity by pneumatic tube, use the air-flow produced by thermal field, to be discharged by the oxide compound easily forming impurity; Especially, the mouth of pipe place of pneumatic tube is provided with one group can for the pod of adjustment angle, and its air-flow by pneumatic tube is under the effect of pod, and what make the free surface of molten soup synchronously be accepted air-guiding brushes effect, reach the object effectively reducing impurity concentration, and then promote the quality of crystal.
The air feeder of the brilliant stove of length of the present invention can be provided with a regulating mechanism at pneumatic tube place further, make with the free surface height according to crucible height during actually operating or molten soup, and adjust the relative position of pneumatic tube, remain in predetermined spacing range with the free surface of the molten soup of the mouth of pipe and crucible inside accurately controlling pneumatic tube, make with under the condition of same gas flow velocity, the flow velocity of free surface gas can be increased, the impurity gas mixture of gasification can be taken away rapidly the free surface of molten soup, and accelerate the speed of impurity band from free surface.
Accompanying drawing explanation
Fig. 1 is the air feeder structural representation of the brilliant stove of length commonly using long brilliant stove.
Fig. 2 is the brilliant furnace structure sectional view of length of first embodiment of the invention.
Fig. 3 is the structure sectional view of air feeder in first embodiment of the invention.
Fig. 4 is the adjustment view of pod in first embodiment of the invention.
Fig. 5 is the air feeder structure sectional view of second embodiment of the invention.
Fig. 6 is the adjustment view of pod in second embodiment of the invention.
Fig. 7 is the face profile schematic diagram of crucible and pod in third embodiment of the invention.
Fig. 8 is the face profile schematic diagram of crucible and pod in fourth embodiment of the invention.
Fig. 9 is under the design of different pneumatic tube, causes the impurity concentration curve figure contained by different crystal growing height.
[figure number explanation]
11 silicon melt soup
12 crystal
21 crucibles
22 side thermal insulation layers
23 upper thermal insulating layers
24 well heaters
25 pneumatic tubes
26 venting holes
27 bases
28 pillars
31 crucibles
32 thermal insulation layers
33 pneumatic tubes
331 thread sections
34 venting holes
35 screw sheels
36 pods
361 tracks
362 pull bars
363 hinges
37 well heaters
38 pillars
39 cover plates
41 molten soup
42 crystal.
Embodiment
The present invention mainly provides long brilliant stove one effectively can reduce impurity concentration, use the air feeder promoting crystal mass, as shown in Figure 2, the brilliant stove of length of the present invention mainly melts the crucible 31 of soup 41 for splendid attire silicon based on one, and outside crucible 31, be arranged with thermal insulation layer 32, make the thermal field that formation one seals, and in the middle of thermal field, be provided with well heater 37 in order to heat silicon metal.
Wherein, air feeder of the present invention includes: one is located at the pneumatic tube 33 on this thermal insulation layer 32, and some venting holes 34 being located at this thermal insulation layer 32; Make to coordinate the gas being inputted predetermined flow velocity by pneumatic tube 33, use the air-flow produced by thermal field, so that the oxide compound easily forming impurity is discharged; It is characterized in that:
The mouth of pipe place of this pneumatic tube 33 is provided with one group can for the pod 36 of adjustment angle, in order to the air-flow by pneumatic tube 33 is guided around the mouth of pipe of pneumatic tube 33, what make the free surface of molten soup 41 synchronously be accepted air-guiding brushes effect, and accelerate the speed of impurity band from free surface, effectively to reduce impurity concentration, use the crystal mass after carrying molten soup 41 cooling curing; Certainly, separately cover plate 39 can be provided with further on this crucible 31, as shown in Figure 3, and this cover plate 39 is provided with the venting hole 34 of pre-determined quantity, and the angle of this pneumatic tube 33 and this pod 36 can between 80 ~ 160 degree, as shown in Figures 2 and 4, wherein with 150 degree for the best.
The brilliant stove of length that air feeder of the present invention is applied, the brilliant stove of length that heater power makes molten soup 41 cooling curing (casting) in crucible 31 can be directly reduced for adopting, or thermal insulation layer 32 to move the brilliant stove of length that radiation cooling makes molten soup 41 cooling curing (direct cure system) in crucible 31.
Certainly, the brilliant stove of length that air feeder of the present invention is applied can be connected with a pillar 38 further bottom crucible 31; Make to drive crucible 31 to be displaced downwardly to cold-zone through pillar, make molten soup 41 cooling curing (Bu Shi method) in crucible 31, or import cooling fluid in pillar, make molten soup 41 cooling curing (heat exchanger method) in crucible 31, and air feeder of the present invention all can be utilized effectively to reduce impurity concentration, use crystal 42 quality after promoting molten soup 41 cooling curing.
Moreover, air feeder of the present invention can be provided with one in order to regulate the regulating mechanism of this pneumatic tube 33 relative position at this pneumatic tube 33 place further, the screw sheel 35 that this regulating mechanism can be located on this thermal insulation layer 32 by one is main body, the outer of this pneumatic tube 33 is arranged with for the thread section 331 with this screw sheel 35 bolt, make when this pneumatic tube 33 and this screw sheel 35 formed relatively rotate time, screw action can be utilized to adjust the relative position of this pneumatic tube.
Namely the air feeder of overall long brilliant stove is able to the free surface height according to crucible 31 height during actually operating or molten soup 41, adjust the relative position of this pneumatic tube 33, remain in predetermined spacing range with the free surface of the molten soup 41 of the mouth of pipe and crucible 31 inside accurately controlling pneumatic tube 33, make with under the condition of same gas flow velocity, increase the flow velocity of free surface gas, the impurity gas mixture of gasification can be taken away rapidly the free surface of molten soup 41, and accelerate the speed of impurity band from free surface.
In time implementing, pod 36 of the present invention is on average laid with the track 361 of some configurations in radial line on its cover body, separately between each track 361 and this pneumatic tube 33, be connected with pull bar 362, make with under the effect of pull bar 362 and track 361, the angle that pod 36 and pneumatic tube 33 can be done between 80 ~ 160 degree adjusts; Or be that as shown in Figures 5 and 6, be provided with some hinges 363 and be connected between the cover body of this pod 36 and the body of this pneumatic tube 33, the angle that pod 36 and pneumatic tube 33 can be done between 80 ~ 160 degree adjusts, to meet the user demand of gas with various flow velocity.
Moreover the circumference shape of this pod 36 and this crucible 31 in-profile shape can be as square in being all shown in Fig. 7, or the circumference shape of this pod 36 and this crucible 31 in-profile shape are all circle as shown in Figure 8; And the outer rim of this pod 332 and the inner edge of this crucible 31 maintain a predetermined spacing.
Air feeder of the present invention mainly utilizes the pod 36 at this pneumatic tube 33 mouth of pipe place to design, making can under the effect of pod 36 by the air-flow of pneumatic tube 33, what make the free surface of molten soup 41 synchronously be accepted air-guiding brushes effect, reaches the object effectively reducing impurity concentration.
Under being illustrated in figure 9 the design of different pneumatic tube, cause the impurity concentration curve figure contained by different crystal growing height, wherein, including habit has pneumatic tube to design (experimental group one), and the angle of pneumatic tube and pod is respectively 90 degree (experimental group two) and 150 degree (experimental group three) etc. and tests group, and under identical crystal height (such as crystal height is 80 ㎜), experimental group one designs the impurity concentration of this crystal lower about containing 1.6ppma, the impurity concentration of this experimental group 2 design this crystal lower about containing 1.25ppma, and the impurity concentration of this experimental group 3 design this crystal lower about containing 1.05ppma, therefore thermal-field device of the present invention utilizes the effect of this pod, can make in the crystal after molten soup cooling curing containing less impurity concentration, and wherein the angle of this pneumatic tube and pod is better with 150 degree of effects.
Claims (6)
1. an air feeder for long brilliant stove, includes: a thermal insulation layer, relatively covering at crucible periphery is located at the pneumatic tube on thermal insulation layer, and some venting holes being located at thermal insulation layer; It is characterized in that: the mouth of pipe place of this pneumatic tube is provided with one group can for the pod of adjustment angle; Wherein, this pod is on average laid with the track of some configurations in radial line on its cover body, separately between each track and this pneumatic tube, be connected with pull bar, or be provided with and be somely hingedly coupled between the cover body of this pod and the body of this pneumatic tube, wherein, the angle of pneumatic tube and pod is 80-160 degree.
2. grow the air feeder of brilliant stove as claimed in claim 1, it is characterized in that, this pneumatic tube place is provided with one in order to regulate the regulating mechanism of this pneumatic tube relative position.
3. the air feeder of long brilliant stove as claimed in claim 2, it is characterized in that, this regulating mechanism is main body by the screw sheel that is located on this thermal insulation layer, the outer of this pneumatic tube is arranged with for the thread section with this screw sheel bolt, with the relative position utilizing screw action to adjust this pneumatic tube.
4. grow the air feeder of brilliant stove as claimed in claim 1 or 2, it is characterized in that, circumference shape and this crucible in-profile shape of this pod are square.
5. grow the air feeder of brilliant stove as claimed in claim 1 or 2, it is characterized in that, the circumference shape of this pod and this crucible in-profile shape are circular.
6. grow the air feeder of brilliant stove as claimed in claim 1 or 2, it is characterized in that, be provided with cover plate above this crucible, and this cover plate is provided with the venting hole of pre-determined quantity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010512687.9A CN102453952B (en) | 2010-10-20 | 2010-10-20 | Gas supplying apparatus for crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010512687.9A CN102453952B (en) | 2010-10-20 | 2010-10-20 | Gas supplying apparatus for crystal growth furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102453952A CN102453952A (en) | 2012-05-16 |
| CN102453952B true CN102453952B (en) | 2014-12-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010512687.9A Expired - Fee Related CN102453952B (en) | 2010-10-20 | 2010-10-20 | Gas supplying apparatus for crystal growth furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN102453952B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106119957A (en) * | 2016-08-22 | 2016-11-16 | 浙江精功科技股份有限公司 | A kind of Dual-channel type ingot furnace argon inlet method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5795383A (en) * | 1995-12-28 | 1998-08-18 | Shin-Etsu Handotai Co., Ltd. | Method and mechanism for lifting gas flow-guide cylinder of a crystal pulling apparatus |
| EP1384538A1 (en) * | 2002-07-25 | 2004-01-28 | Mitsubishi Materials Corporation | Casting apparatus for manufacturing polycrystalline silicon ingots and method therefor |
| WO2010033885A1 (en) * | 2008-09-19 | 2010-03-25 | Memc Electronic Materials, Inc. | Directional solidification furnace for reducing melt contamination and reducing wafer contamination |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI263713B (en) * | 2004-11-04 | 2006-10-11 | Univ Nat Central | Heat shield and crystal growth equipment |
| TWM378934U (en) * | 2009-12-10 | 2010-04-21 | Sino American Silicon Prod Inc | Heat shield structure of crystal growth oven |
-
2010
- 2010-10-20 CN CN201010512687.9A patent/CN102453952B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5795383A (en) * | 1995-12-28 | 1998-08-18 | Shin-Etsu Handotai Co., Ltd. | Method and mechanism for lifting gas flow-guide cylinder of a crystal pulling apparatus |
| EP1384538A1 (en) * | 2002-07-25 | 2004-01-28 | Mitsubishi Materials Corporation | Casting apparatus for manufacturing polycrystalline silicon ingots and method therefor |
| WO2010033885A1 (en) * | 2008-09-19 | 2010-03-25 | Memc Electronic Materials, Inc. | Directional solidification furnace for reducing melt contamination and reducing wafer contamination |
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| Publication number | Publication date |
|---|---|
| CN102453952A (en) | 2012-05-16 |
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