CN102435363A - Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof - Google Patents
Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof Download PDFInfo
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- CN102435363A CN102435363A CN201110281593XA CN201110281593A CN102435363A CN 102435363 A CN102435363 A CN 102435363A CN 201110281593X A CN201110281593X A CN 201110281593XA CN 201110281593 A CN201110281593 A CN 201110281593A CN 102435363 A CN102435363 A CN 102435363A
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Abstract
The invention discloses an ultrasonic wave accurate measurement connection piece with an ultrasonic wave sensor, and a technology and application thereof, wherein the ultrasonic wave accurate measurement connection piece with the ultrasonic wave sensor comprises a connection part, and is characterized in that: an original ultrasonic wave sensor is arranged on the outer end surface of the connection part, i.e. on the outer end surface of the connection part, a first passivating layer is arranged at the innermost layer, a piezoelectric layer is arranged at the middle of the upper surface of the first passivating layer, a second passivating layer is arranged on the first passivating layer which is arranged at the upper surface and the periphery of the piezoelectric layer, an electrode layer is arranged at the middle of the upper surface of the second passivating layer, and has two electrodes which are isolated from each other, a third passivating layer is arranged on the second passivating layer which is arranged at the upper surface and the periphery of the electrode layer, and a mechanical protection layer is arranged on the third passivating layer. The invention has the positive effects that: the original sensor on the connection part can still be kept stably running for a long time under the high temperature over 500 DEG C, is simultaneously waterproof, chemical etching resistant and high-energy radiation resistant, and the working stability of the original sensor is kept. The detection result is accurate. Any connection part can be detected during the equipment maintenance period, so the detection is convenient.
Description
Technical field
The invention belongs to a kind of connection parts mechanically, particularly a kind of have low, high temperature, water, the WS, chemicals, and high-energy radiation in still can keep the technology of its stable ultrasonic sensor apparatus.Connect the pretightning force of parts in the time of passing through ultrasonic meter to assembling, pulling force and torsion are measured accurately.Ultrasonic sensor of the present invention has hierarchy, and its functional layer, electrode layer and piezoelectric layer fix through physics and chemical passivation layer or embed, and comes further to reduce the chemical activity face through the layer structure of compactness.Utilize these passivation layers to suppress diffusion, oxidation, the deoxidation that excites by high temperature or high-energy radiation, chemical degradation processes such as minimizing and corrosion.Make the minimizing of ultrasonic sensor apparatus chemical mobility of the surface be achieved through further fixing in the physical chemistry protective layer of compactness and embedding.
Background technology
At present, the mechanical connection parts when utilizing ultrasonic detection technology to assembling detect, like the detection to screw or pretightning force, pulling force and the torsion of bolt when assembling.In detection; Ultrasonic sensor is set connecting on the end face of parts, when general ultrasonic sensor shortcoming was to surpass 200 ℃, its functional layer will diffusion, oxidation, deoxidation reduces and corrosion; Consequence is to lose the piezoelectricity function fully, can't carry out normal testing; Another shortcoming is after water and liquid immerse, and can cause the defunctionalization of electrode layer and piezoelectric layer.In present ultrasonic sensor, used PVDF membrane material, its shortcoming is a non-refractory, and temperature just begins to wear out when surpassing about 70 ℃; Under extreme case even possibly dissolve; And surface observation less than, therefore utilize impaired like this ultrasonic sensor to detect, can cause measurement result inaccurate; The error rate that is taken place reaches 40%, even can't carry out ultrasonic measurement.
In addition; When the measurement face of mechanical connection parts uses the coupling ultrasonic wave sensor of coupling gel to measure and be not suitable for; Because when the probe location, small difference can cause the ultrasound wave coupling difference of readiness time, can't realize the degree of accuracy of required measurement.
Summary of the invention
The purpose of this invention is to provide a kind of ultrasound wave that can carry out accurately measures and has web member and the technology and the purposes of ultrasonic sensor; Its sensor is more than 1500 ℃ during high temperature; Still can stable for extended periods of time move; While is water-fast, the etch and the high-energy radiation of chemicals, and keeps its job stability.
Technical scheme provided by the invention is following: it comprises web member; It is characterized in that: on end face of web member or both ends of the surface, the ultrasonic sensor original paper is set, its structure is, successively embedding degree piezoelectric layer respectively; Passivation layer and electrode layer; Be that innermost layer is provided with first passivation layer, the middle part is provided with piezoelectric layer on first passivation layer, on piezoelectric layer and above first passivation layer of piezoelectric layer periphery, second passivation layer is set; The top middle part of second passivation layer is provided with ring-type first electrode layer; In ring-type first electrode layer, the second electrode lay is set, the 3rd passivation layer is set, the mechanical protection layer is set on the 3rd passivation layer at ring-type first electrode layer with above the second electrode lay and above second passivation layer of periphery.
Above-mentioned piezoelectric layer material is selected for use from following material: zinc paste, monox, barium titanate, lithium niobate or gallium phosphate.
Above-mentioned electrode layer material is from following material selection: titanium, titanium nitride, titanium silicon nitride, titanium aluminium nitride, silit or carbonitride of silicium.
Above-mentioned mechanical protection layer material is from following material selection: titanium nitride, titanium silicon nitride, titanium aluminium nitride, silicon nitride, aluminium nitride or silit.
Above-mentioned passivation material is from following material selection: silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium.
These embedding degree layers of the present invention can be made up of to satisfy various uses various material.Make them have characteristics such as anti-humidity and Korrosionsmedium through different material structures.
Above-mentioned web member can be screw, bolt, double-screw bolt, hollow nail, rivet, pin, flange, pull bar, engine part or airplane parts etc.
The manufactured materials of above-mentioned web member is preferably selected just high-alloy steel, special steel, titanium, titanium alloy, aluminium and aluminium alloy, nickel alloy, brass, non-magnetic steel, macromolecular material for use.
Above-mentioned piezoelectric layer surface is provided with the angle of inclination with the vertical and linear transverse polarization ultrasound wave of emission and acceptance that suits.
Good effect of the present invention is: the structural sheet of embedding degree sensor can suppress between the physical chemistry passivation layer chemical degradation processes such as diffusion, oxidation, deoxidation, minimizing and corrosion by high temperature or high radiation excited.Reduce the active surface of contact of chemistry through the hierarchy of compactness.Utilize the compact physical chemistry protective layer (mechanical layer) of embedding degree to reduce the chemical activity of ultrasonic transducer apparatus surface.Ultrasonic sensor apparatus on the web member still can the stable for extended periods of time operation when being higher than more than 500 ℃ high temperature, the etch and the high-energy radiation of water-fast simultaneously, chemicals, and keep its job stability.Testing result is more accurate.During plant maintenance, can detect any web member at any time, easy to detect.
Description of drawings
Fig. 1 is the structural profile synoptic diagram of ultrasonic sensor of the present invention.
Fig. 2 is the synoptic diagram that the ultrasonic sensor embedding is plated in two end faces of web member.
Fig. 3 is that first electrode layer and the second electrode lay plane are provided with synoptic diagram.
Fig. 4 is that the present invention connects ultrasound examination equipment synoptic diagram.
Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9 are the synoptic diagram that several kinds of difformity web members are provided with ultrasonic sensor apparatus.
Embodiment
See Fig. 1,2,3, specific embodiment 1 structure is following: connection parts of the present invention are the double-screw bolt 10 of band connecting thread 1, and when assembling, it is screwed into the screw or the nut of parts.(see figure 2) is provided with ultrasonic sensor apparatus 11 on end face 2 of double-screw bolt 10 or two end faces 2,12; The structure of ultrasonic sensor apparatus 11 is: on the end face of double-screw bolt 10; Be that first passivation layer 9 is plated in the innermost layer embedding; First passivation layer 9 adopts material silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium, the middle part embedding plating piezoelectric layer 3 on the first passivation stratification layer 9, and piezoelectric layer 3 adopts zinc paste, monox, barium titanate, lithium niobate or gallium phosphate; Second passivation layer, 8, the second passivation layers 8 are set on piezoelectric layer 3 and above first passivation layer of piezoelectric layer periphery adopt silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium; The middle part is provided with electrode layer on second passivation layer 8; Electrode layer is provided with two electrodes of isolating each other; Two electrodes of present embodiment: be provided with ring-type first electrode 4; In ring-type first electrode 4, second electrode 5 is set, electrode layer material can be selected titanium, titanium nitride, titanium silicon nitride, titanium aluminium nitride, silit or carbonitride of silicium for use.Also can adopt two parallel electrodes.The 3rd passivation layer 7, the three passivation layers 7 are set at ring-type first electrode 4 with above second electrode 5 and above second passivation layer 8 of periphery adopt silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium material; Mechanical protection layer 6 is set on the 3rd passivation layer; Mechanical protection layer 6 is selected titanium nitride, titanium silicon nitride, titanium aluminium nitride, silicon nitride, aluminium nitride or silit (selecting material different as required for use) for use.
The hierarchy of ultrasonic sensor and with the web member end face between have adhesion (greater than every square millimeter of 50 newton) highly; Can avoid taking place connection error; Travel-time of accurate measurement signals more, thus pulling force, torsion and the pretightning force of web member measured more accurately.The embedding of each layer of ultrasonic waves sensor structure is plated and can be adopted following any technology with web member end face embedding plating: the coating process that the self-organizing structures of PVD technology (physical vapour deposition (PVD)), CVD technology (chemical vapor deposition), thermal spray, PACVD technology (plasma-assisted chemical vapour deposition), electrochemical deposition process, organic or inorganic forms.According to the selected piezoelectric property material that is used to make piezoelectric layer, before temperature reaches Curie temperature, can produce the effective ultrasonic wave signal, thereby realize accurate ultrasonic measurement.
See Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9, web member shown in each figure be respectively outer-hexagonal nut and bolt, circle in the cap polygonal pull hole bolt, screw, hollow bolt and in the polygonal hole screw of pulling.Only represent the section connecting element shape among the figure, also have rivet, pin, flange, valve, pull bar, pad, bearing parts, engine parts, airplane parts, engine part etc. are not expressed in the drawings.The various web members of in each figure, expressing, one end is provided with ultrasonic sensor 11.See Fig. 2, the web member in Fig. 2, its both ends of the surface are provided with ultrasonic sensor 11.
The material of above-mentioned web member is preferably selected high-alloy steel, special steel, titanium, titanium alloy, aluminium and aluminium alloy, nickel alloy, brass, non-magnetic steel etc. for use.
See Fig. 4; The web member that the present invention is had ultrasonic sensor apparatus connects ultrasound examination equipment 13; Connected mode is: the signal transmssion line 14 contacts contact ultrasonic sensor 11 of ultrasound examination equipment 13, another signal transmssion line 15 contacts contact double-screw bolt 10.The ultrasonic pulse that sends to double-screw bolt 10 through ultrasound examination equipment 13 and ultrasonic sensor and the ultrasonic pulse echo of reflection, and measure pretightning force, torsion and pulling force by ultrasound examination equipment 13.
Web member with ultrasonic sensor apparatus provided by the invention can be adaptable across product scopes such as Aero-Space, the energy, wind energy, machinery, automobile, internal combustion engine and variators.For example be applicable to the aircraft engine that working temperature is high, even the outside web member in aircraft engine firing chamber, temperature can reach 500 ℃; And the pulsating stress that goes up and down to bring repeatedly by temperature; Be equally applicable on the higher equipment of nuclear power plant's working temperature, and on the big equipment of the working temperature up-down temperature difference of other field.As using or high-temperature applications, require at-270 ° of C to 1500 ° of C like the working temperature in combustion gas turbine, aircraft engine, firing chamber district at satellite technology, aircraft and the missilery in cryogenic applications field, cryostat.
Itself can stand frequent temperature cycles the ultrasonic sensor that proposes among the present invention, and the characteristics of these temperature cycles are: the very short heating-up time, have only a few minutes, and lasting high-temperature load, cooling is slowly.The phenomenon that is partly dissolved in ultrasonic signal travel-time can not appear influencing in the work that ultrasonic sensor still can be remained valid after standing these temperature cycles fully within hierarchy.The hierarchy of ultrasonic sensor has the adhesion (greater than every square millimeter of 50 newton) of height, can avoid taking place connection error, travel-time of accurate measurement signals more, thus measure pulling force, torsion and the pretightning force of web member more accurately.Make ultrasonic sensor have anti-water and WS performance through hydrophobicity setting to the physical chemistry protective layer.
Claims (10)
1. one kind can be carried out ultrasound wave and accurately measures the web member with ultrasonic sensor, and it comprises web member, it is characterized in that: on end face of web member or both ends of the surface, the ultrasonic sensor original paper is set; Its structure is; Successively distinguish embedding degree piezoelectric layer, passivation layer, electrode layer and mechanical protection layer, promptly innermost layer is provided with first passivation layer; The middle part is provided with piezoelectric layer on first passivation layer; On piezoelectric layer and above first passivation layer of piezoelectric layer periphery, second passivation layer is set, the top middle part of second passivation layer is provided with ring-type first electrode layer, in ring-type first electrode layer, the second electrode lay is set; At ring-type first electrode layer with above the second electrode lay and above second passivation layer of periphery the 3rd passivation layer is set, the mechanical protection layer is set on the 3rd passivation layer.
2. the ultrasound wave that can carry out according to claim 1 is accurately measured the web member with ultrasonic sensor, it is characterized in that: piezoelectric layer material selection zinc paste, monox, barium titanate, lithium niobate or gallium phosphate.
3. the ultrasound wave that can carry out according to claim 1 is accurately measured the web member with ultrasonic sensor, and it is characterized in that: electrode layer material is selected titanium, titanium nitride, titanium silicon nitride, titanium aluminium nitride, silit or carbonitride of silicium for use.
4. the ultrasound wave that can carry out according to claim 1 is accurately measured the web member with ultrasonic sensor, and it is characterized in that: the mechanical protection layer material is selected titanium nitride, titanium silicon nitride, titanium aluminium nitride, silicon nitride, aluminium nitride or silit for use.
5. the ultrasound wave that can carry out according to claim 1 is accurately measured the web member with ultrasonic sensor, and it is characterized in that: passivation material is selected silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium for use.
6. the ultrasound wave that can carry out according to claim 1 is accurately measured the web member with ultrasonic sensor, and it is characterized in that: web member is screw, bolt, double-screw bolt, hollow nail, rivet, pin, flange, pull bar, engine part or airplane parts.
7. the ultrasound wave that can carry out according to claim 1 is accurately measured the web member with ultrasonic sensor, it is characterized in that: between each structural sheet of ultrasonic sensor and and the web member end face between adhesion for greater than every square millimeter of 50 newton.
8.
OneKind as claimed in claim 1 can carry out the technology that ultrasound wave is accurately measured the web member with ultrasonic sensor, the hierarchy that it is characterized in that ultrasonic sensor apparatus adopts one of following technology manufacturing: physical gas-phase deposition, chemical vapor deposition method, plasma-assisted chemical vapour deposition technology, hot-spraying technique, galvanochemistry or chemical deposition process, utilize the self-organizing structures of organic or inorganic root to form coating process.
9. one kind as claimed in claim 1ly can be carried out the purposes that ultrasound wave is accurately measured the web member with ultrasonic sensor, and it is characterized in that: the range of application of ultrasonic sensor apparatus is between-270 ° of C to 1500 ° of C.
10. one kind as claimed in claim 1ly can be carried out the purposes that ultrasound wave is accurately measured the web member with ultrasonic sensor, it is characterized in that: make ultrasonic sensor have anti-water and WS performance through the hydrophobicity setting to the physical chemistry protective layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110281593.XA CN102435363B (en) | 2011-09-21 | 2011-09-21 | Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201110281593.XA CN102435363B (en) | 2011-09-21 | 2011-09-21 | Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof |
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| Publication Number | Publication Date |
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| CN102435363A true CN102435363A (en) | 2012-05-02 |
| CN102435363B CN102435363B (en) | 2015-03-11 |
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| CN201110281593.XA Expired - Fee Related CN102435363B (en) | 2011-09-21 | 2011-09-21 | Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102862339A (en) * | 2012-09-26 | 2013-01-09 | 中国人民解放军装甲兵工程学院 | Intelligent coating and preparation method thereof |
| CN103644997A (en) * | 2013-12-25 | 2014-03-19 | 武汉科技大学 | Piezoelectric intelligent material based bolt pre-tightening force sensor |
| CN110787984A (en) * | 2019-12-04 | 2020-02-14 | 航天精工股份有限公司 | Fastener with ultrasonic transducer, manufacturing process and application |
| CN113916422A (en) * | 2021-09-29 | 2022-01-11 | 航天精工股份有限公司 | Insulation shielding structure used in processing of hollow fastener ultrasonic sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102862339A (en) * | 2012-09-26 | 2013-01-09 | 中国人民解放军装甲兵工程学院 | Intelligent coating and preparation method thereof |
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| CN103644997A (en) * | 2013-12-25 | 2014-03-19 | 武汉科技大学 | Piezoelectric intelligent material based bolt pre-tightening force sensor |
| CN110787984A (en) * | 2019-12-04 | 2020-02-14 | 航天精工股份有限公司 | Fastener with ultrasonic transducer, manufacturing process and application |
| CN110787984B (en) * | 2019-12-04 | 2023-09-22 | 航天精工股份有限公司 | Fastener with ultrasonic transducer, manufacturing process and use |
| CN113916422A (en) * | 2021-09-29 | 2022-01-11 | 航天精工股份有限公司 | Insulation shielding structure used in processing of hollow fastener ultrasonic sensor |
| CN113916422B (en) * | 2021-09-29 | 2023-09-12 | 航天精工股份有限公司 | Insulation shielding structure for hollow fastener ultrasonic sensor processing |
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