CN102435363B - Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof - Google Patents
Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof Download PDFInfo
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- CN102435363B CN102435363B CN201110281593.XA CN201110281593A CN102435363B CN 102435363 B CN102435363 B CN 102435363B CN 201110281593 A CN201110281593 A CN 201110281593A CN 102435363 B CN102435363 B CN 102435363B
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Abstract
The invention discloses an ultrasonic wave accurate measurement connection piece with an ultrasonic wave sensor, and a technology and application thereof, wherein the ultrasonic wave accurate measurement connection piece with the ultrasonic wave sensor comprises a connection part, and is characterized in that: an original ultrasonic wave sensor is arranged on the outer end surface of the connection part, i.e. on the outer end surface of the connection part, a first passivating layer is arranged at the innermost layer, a piezoelectric layer is arranged at the middle of the upper surface of the first passivating layer, a second passivating layer is arranged on the first passivating layer which is arranged at the upper surface and the periphery of the piezoelectric layer, an electrode layer is arranged at the middle of the upper surface of the second passivating layer, and has two electrodes which are isolated from each other, a third passivating layer is arranged on the second passivating layer which is arranged at the upper surface and the periphery of the electrode layer, and a mechanical protection layer is arranged on the third passivating layer. The invention has the positive effects that: the original sensor on the connection part can still be kept stably running for a long time under the high temperature over 500 DEG C, is simultaneously waterproof, chemical etching resistant and high-energy radiation resistant, and the working stability of the original sensor is kept. The detection result is accurate. Any connection part can be detected during the equipment maintenance period, so the detection is convenient.
Description
Technical field
The invention belongs to a kind of connection parts mechanically, particularly a kind of technology with the ultrasonic sensor apparatus that still can keep its stability in low and high temperature, water, aqueous solution, chemicals and high-energy radiation.By ultrasonic meter to the pretightning force connecting parts during assembling, pulling force and torsion are measured accurately.Ultrasonic sensor of the present invention has hierarchy, and its functional layer, electrode layer and piezoelectric layer are fixed by physics and chemistry passivation layer or embed, and reduce chemical activity face further by compact Rotating fields.Utilize these passivation layers to suppress excited by high temperature or high-energy radiation diffusion, oxidation, deoxidation, reduce and the chemical degradative processes such as corrosion.By further fixing and embed in compact physical chemistry protective layer, the minimizing of ultrasonic sensor apparatus chemical mobility of the surface is achieved.
Background technology
At present, ultrasonic detection technology is utilized to detect mechanical connection parts during assembling, as the detection of pretightning force, pulling force and torsion when assembling to screw or bolt.In the detection, the end face connecting parts arranges ultrasonic sensor, when general ultrasonic sensor shortcoming is more than 200 DEG C, its functional layer will spread, be oxidized, deoxidation reduces and corrode, consequence loses piezoelectricity function completely, cannot carry out normal testing; Another shortcoming, after water and liquid immerse, can cause the defunctionalization of electrode layer and piezoelectric layer.PVDF membrane material is employed in current ultrasonic sensor, its shortcoming is non-refractory, temperature just starts aging when exceeding about 70 DEG C, even may dissolve in extreme circumstances, and surface observation less than, therefore utilize ultrasonic sensor impaired like this to detect, measurement result can be caused inaccurate, the error rate occurred reaches 40%, even cannot carry out ultrasonic measurement.
In addition, be not suitable for when the measuring surface being mechanically connected parts uses the coupling ultrasonic wave sensor of coupling gel to measure, because when popping one's head in location, small difference can cause the difference of ultrasonic wave-coupled readiness time, the required degree of accuracy measured cannot be realized.
Summary of the invention
The object of this invention is to provide and a kind ofly can carry out the web member with ultrasonic sensor that ultrasound wave accurately measures and technique and purposes, its sensor is more than 1500 DEG C during high temperature, still can stable for extended periods of time run, the simultaneously etch of water-fast, chemicals and high-energy radiation, and keep its job stability.
Technical scheme provided by the invention is as follows: it comprises web member, it is characterized in that: on an end face or both ends of the surface of web member, ultrasonic sensor original paper is set, its structure is, successively distinguish embedding degree piezoelectric layer, passivation layer and electrode layer, namely innermost layer arranges the first passivation layer, on the first passivation layer, Middle face arranges piezoelectric layer, above first passivation layer of face and piezoelectric layer periphery over the piezoelectric layer, the second passivation layer is set, the upper Middle face of the second passivation layer arranges ring-type first electrode layer, in ring-type first electrode layer, the second electrode lay is set, on ring-type first electrode layer and the second electrode lay and above the second passivation layer of periphery, the 3rd passivation layer is set, on the 3rd passivation layer, mechanical protection layer is set.
Above-mentioned piezoelectric layer material is selected from following material: zinc paste, monox, barium titanate, lithium niobate or gallium phosphate.
Above-mentioned electrode layer material is from following material selection: titanium, titanium nitride, titanium silicon nitride, titanium aluminium nitride, silit or carbonitride of silicium.
Above-mentioned mechanical protection layer material is from following material selection: titanium nitride, titanium silicon nitride, titanium aluminium nitride, silicon nitride, aluminium nitride or silit.
Above-mentioned passivation material is from following material selection: silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium.
These embedding degree layers of the present invention, can be made up of to meet various uses various different material.Them are made to have the characteristic such as moisture resistant and Korrosionsmedium by different material structures.
Above-mentioned web member can be screw, bolt, stud, hollow nail, rivet, pin, flange, pull bar, engine part or airplane parts etc.
The manufactured materials of above-mentioned web member preferably selects just high-alloy steel, special steel, titanium, titanium alloy, aluminum and its alloy, nickel alloy, brass, non-magnetic steel, macromolecular material.
Above-mentioned piezoelectric layer surface arranges angle of inclination with suitable transmitting with accept longitudinal direction and linear transverse polarization ultrasound wave.
Good effect of the present invention is: the chemical degradative processes such as the diffusion excited by high temperature or high radiation between the structural sheet energy mortifier Physicochemical passivation layer of embedding degree sensor, oxidation, deoxidation, minimizing and corrosion.The active contact face of chemistry is reduced by compact hierarchy.The physical chemistry protective layer (mechanical layer) utilizing embedding degree compact reduces the chemical activity of ultrasonic transducer apparatus surface.Ultrasonic sensor apparatus on web member, when higher than more than 500 DEG C high temperature, still can stable for extended periods of time run, the simultaneously etch of water-fast, chemicals and high-energy radiation, and keeps its job stability.Testing result is more accurate.Can detect any web member at any time during plant maintenance, easy to detect.
Accompanying drawing explanation
Fig. 1 is the structural profile schematic diagram of ultrasonic sensor of the present invention.
Fig. 2 is the embedding schematic diagram being plated in web member two end faces of ultrasonic sensor.
Fig. 3 is that the first electrode layer and the second electrode lay plane arrange schematic diagram.
Fig. 4 is that the present invention connects ultrasonic detecting equipment schematic diagram.
Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9 are the schematic diagram that several difformity web member arranges ultrasonic sensor apparatus.
Embodiment
See Fig. 1,2,3, specific embodiment 1 structure is as follows: connection parts of the present invention are the stud 10 of band connecting thread 1, and when assembling, it is screwed into screw or the nut of parts.On an end face 2 or two end faces 2,12 of stud 10, (see figure 2) arranges ultrasonic sensor apparatus 11, the structure of ultrasonic sensor apparatus 11 is: on the end face of stud 10, i.e. innermost layer embedding plating first passivation layer 9, first passivation layer 9 adopts materials silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium, middle part on the first passivation stratification layer 9 is embedding is pressure-plated with electric layer 3, and piezoelectric layer 3 adopts zinc paste, monox, barium titanate, lithium niobate or gallium phosphate; Second passivation layer 8, second passivation layer 8 is set on piezoelectric layer 3 and above the first passivation layer of piezoelectric layer periphery and adopts silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium; At the upper Middle face of the second passivation layer 8, electrode layer is set, electrode layer is provided with two mutually isolated electrodes, two electrodes of the present embodiment: be provided with ring-type first electrode 4, in ring-type first electrode 4, arrange the second electrode 5, electrode layer material can select titanium, titanium nitride, titanium silicon nitride, titanium aluminium nitride, silit or carbonitride of silicium.Also can adopt the electrode that two parallel.3rd passivation layer the 7, three passivation layer 7 is set on ring-type first electrode 4 and the second electrode 5 and above the second passivation layer 8 of periphery and adopts silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium material; On the 3rd passivation layer, mechanical protection layer 6 is set; Mechanical protection layer 6 selects titanium nitride, titanium silicon nitride, titanium aluminium nitride, silicon nitride, aluminium nitride or silit (selecting different materials as required).
The hierarchy of ultrasonic sensor and and web member end face between there is the adhesion (being greater than 50 Newton per square millimetre) of height, can avoid connection error occurs, can travel-time of more accurate measuring-signal, thus measure the pulling force of web member, torsion and pretightning force more accurately.The embedding plating of each Rotating fields of ultrasonic waves sensor and and the embedding plating of web member end face can adopt any one technique below: the coating process that the self-organizing structures of PVD technique (physical vapour deposition (PVD)), CVD technique (chemical vapor deposition), thermal spray, PACVD technique (plasma-assisted chemical vapour deposition), electrochemical deposition process, organic or inorganic is formed.According to the selected piezoelectric property material for the manufacture of piezoelectric layer, can effective ultrasonic signal be produced before temperature reaches Curie temperature, thus realize accurate ultrasonic measurement.
See Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9, web member shown in each figure is respectively polygonal in outer-hexagonal nut and bolt, circle cap and pulls hole bolt, screw, hollow bolt and interiorly polygonally pull hole screw.Only represent section connecting element shape in figure, also have rivet, pin, flange, valve, pull bar, pad, bearing parts, engine parts, airplane parts, engine part etc. are not expressed in the drawings.The various web members of expressing in the various figures, one end arranges ultrasonic sensor 11.See Fig. 2, web member in fig. 2, its both ends of the surface arrange ultrasonic sensor 11.
The material of above-mentioned web member preferably selects high-alloy steel, special steel, titanium, titanium alloy, aluminum and its alloy, nickel alloy, brass, non-magnetic steel etc.
See Fig. 4, web member the present invention with ultrasonic sensor apparatus connects ultrasonic detecting equipment 13, connected mode is: the signal transmssion line 14 contact ultrasonic sensor 11 of ultrasonic detecting equipment 13, another signal transmssion line 15 contact stud 10.The ultrasonic pulse sent to stud 10 by ultrasonic detecting equipment 13 and ultrasonic sensor and the ultrasound of reflection, and measure pretightning force, torsion and pulling force by ultrasonic detecting equipment 13.
The web member with ultrasonic sensor apparatus provided by the invention can be widely used in the product scopes such as Aero-Space, the energy, wind energy, machinery, automobile, internal combustion engine and variator.Such as be applicable to the aircraft engine that working temperature is high, even the web member of outside, aircraft engine firing chamber, temperature can reach 500 DEG C; And be repeatedly elevated by temperature the pulsating stress brought; Be equally applicable on the higher equipment of nuclear power plant's working temperature, and the working temperature of other field is elevated on the large equipment of the temperature difference.As the satellite technology in cryogenic applications field, aircraft and missilery, cryostat application or high-temperature applications, if the operating temperature requirements in combustion gas turbine, aircraft engine, firing chamber district is at-270 ° of C to 1500 ° of C.
The ultrasonic sensor proposed in the present invention itself can stand temperature cycles frequently, and the feature of these temperature cycles is: the very short heating-up time, only have a few minutes, lasting high-temperature load, and cooling slowly.The work that ultrasonic sensor still can be remained valid completely after standing these temperature cycles, there will not be the partial dissolving phenomena that can affect the ultrasonic signal propagation time within hierarchy.The hierarchy of ultrasonic sensor has the adhesion (being greater than 50 Newton per square millimetre) of height, can avoid connection error occurs, can travel-time of more accurate measuring-signal, thus measure the pulling force of web member, torsion and pretightning force more accurately.Ultrasonic sensor is made to have water resistant and aqueous solution performance by arranging the hydrophobicity of physical chemistry protective layer.
Claims (10)
1. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure, it comprises web member, it is characterized in that: on an end face or both ends of the surface of web member, ultrasonic sensor original paper is set, its structure is, successively distinguish embedding degree piezoelectric layer, passivation layer, electrode layer and mechanical protection layer, namely innermost layer arranges the first passivation layer, to reduce from the chemical activity of web member material to piezoelectric layer itself, on the first passivation layer, Middle face arranges piezoelectric layer, above first passivation layer of face and piezoelectric layer periphery over the piezoelectric layer, the second passivation layer is set, the upper Middle face of the second passivation layer arranges ring-type first electrode layer, in ring-type first electrode layer, the second electrode lay is set, on ring-type first electrode layer and the second electrode lay and above the second passivation layer of periphery, the 3rd passivation layer is set, on the 3rd passivation layer, mechanical protection layer is set, the diffusion excited by high temperature or high-energy radiation between embedding degree sensor construction layer energy mortifier Physicochemical passivation layer, oxidation, deoxidation, the chemical degradative processes reducing and corrode, reduces the active contact face of chemistry by compact hierarchy, ultrasonic sensor web member hierarchy adopts the manufacture of physical gas-phase deposition method, avoids occurring to dissolve or local detachment phenomenon.
2. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure according to claim 1, is characterized in that: piezoelectric layer material selection zinc paste, monox, barium titanate, lithium niobate or gallium phosphate.
3. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure according to claim 1, is characterized in that: electrode layer material selects titanium, titanium nitride, titanium silicon nitride, titanium aluminium nitride, silit or carbonitride of silicium.
4. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure according to claim 1, is characterized in that: mechanical protection layer material selects titanium nitride, titanium silicon nitride, titanium aluminium nitride, silicon nitride, aluminium nitride or silit.
5. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure according to claim 1, is characterized in that: passivation material selects silicon dioxide, silicon oxynitride, aluminium oxide, silit or carbonitride of silicium.
6. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure according to claim 1, is characterized in that: web member is screw, bolt, stud, hollow nail, rivet, pin, flange, pull bar, engine part or airplane parts.
7. the web member with ultrasonic sensor that can carry out ultrasound wave and accurately measure according to claim 1, it is characterized in that: between each structural sheet of ultrasonic sensor and and web member end face between adhesion for being greater than 50 Newton per square millimetre, avoid connection error occurs, the travel-time of high-strength adhesion more accurately measuring-signal, thus measure the pulling force of web member more accurately, torsion and pretightning force.
8.
oneplant the technique with the web member of ultrasonic sensor can carried out ultrasound wave as claimed in claim 1 and accurately measure, it is characterized in that the hierarchy of ultrasonic sensor adopts chemical vapor deposition method, plasma-assisted chemical vapour deposition technique, hot-spraying technique, galvanochemistry or chemical deposition process manufacture.
9. the purposes with the web member of ultrasonic sensor can carried out ultrasound wave as claimed in claim 1 and accurately measure, it is characterized in that: the range of application of ultrasonic sensor is between-270 ° of C to 1500 ° of C, and it still can keep working stability after standing repeatedly temperature cycles or after superhigh temperature or low temperature.
10. carrying out the purposes with the web member of ultrasonic sensor that ultrasound wave is accurately measured as claimed in claim 1, it is characterized in that: making ultrasonic sensor have water resistant and aqueous solution performance by arranging the hydrophobicity of mechanical protection layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110281593.XA CN102435363B (en) | 2011-09-21 | 2011-09-21 | Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110281593.XA CN102435363B (en) | 2011-09-21 | 2011-09-21 | Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof |
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| Publication Number | Publication Date |
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| CN102435363A CN102435363A (en) | 2012-05-02 |
| CN102435363B true CN102435363B (en) | 2015-03-11 |
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| CN201110281593.XA Expired - Fee Related CN102435363B (en) | 2011-09-21 | 2011-09-21 | Ultrasonic wave accurate measurement connection piece with ultrasonic wave sensor, and technology and application thereof |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102862339B (en) * | 2012-09-26 | 2015-03-11 | 中国人民解放军装甲兵工程学院 | Intelligent coating and preparation method thereof |
| CN103644997B (en) * | 2013-12-25 | 2015-12-23 | 武汉科技大学 | A kind of tools for bolts ' pretension force snesor based on piezoelectric intelligent material |
| CN110787984B (en) * | 2019-12-04 | 2023-09-22 | 航天精工股份有限公司 | Fastener with ultrasonic transducer, manufacturing process and use |
| CN113916422B (en) * | 2021-09-29 | 2023-09-12 | 航天精工股份有限公司 | Insulation shielding structure for hollow fastener ultrasonic sensor processing |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5131276A (en) * | 1990-08-27 | 1992-07-21 | Ultrafast, Inc. | Ultrasonic load indicating member with transducer |
| US5461923A (en) * | 1994-05-16 | 1995-10-31 | Raymond Engineering Inc. | Acoustic transducer, transducerized fastener and method of manufacture |
| CN1222973A (en) * | 1996-05-03 | 1999-07-14 | 超快公司 | Minimizing the effect of bending on ultrasonic measurements in load-bearing member |
| US6354152B1 (en) * | 1996-05-08 | 2002-03-12 | Edward Charles Herlik | Method and system to measure dynamic loads or stresses in aircraft, machines, and structures |
| US6186010B1 (en) * | 1997-12-17 | 2001-02-13 | Toyota Jidosha Kabushiki Kaisha | Bolt for ultrasonic axial tension measurement |
| ATE553305T1 (en) * | 2001-01-29 | 2012-04-15 | Innovation Plus L L C | LOAD INDICATOR WITH IDENTIFICATION MARKING |
| US6501211B1 (en) * | 2001-07-13 | 2002-12-31 | Masoud Nasrollahzadeh | Ultra-sonic transducer assembly incorporated into a printed circuit board for determining tension forces in a bolt |
| DE102004061796A1 (en) * | 2004-12-22 | 2006-07-13 | Robert Bosch Gmbh | Micromechanical capacitive sensor element |
| DE202006006990U1 (en) * | 2006-04-27 | 2006-07-13 | Pfw Technologies Gmbh | Connecting component with temperature-resistant sensor element |
| DE102009060441B4 (en) * | 2009-12-22 | 2014-11-20 | Amg Intellifast Gmbh | sensor element |
| CN202216785U (en) * | 2011-09-21 | 2012-05-09 | 陈威 | Connecting piece capable of conducting accurate ultrasonic measurement and having ultrasonic sensor |
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2011
- 2011-09-21 CN CN201110281593.XA patent/CN102435363B/en not_active Expired - Fee Related
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