CN113916422B - Insulation shielding structure for hollow fastener ultrasonic sensor processing - Google Patents
Insulation shielding structure for hollow fastener ultrasonic sensor processing Download PDFInfo
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- CN113916422B CN113916422B CN202111150539.1A CN202111150539A CN113916422B CN 113916422 B CN113916422 B CN 113916422B CN 202111150539 A CN202111150539 A CN 202111150539A CN 113916422 B CN113916422 B CN 113916422B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/25—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons
- G01L1/255—Measuring force or stress, in general using wave or particle radiation, e.g. X-rays, microwaves, neutrons using acoustic waves, or acoustic emission
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/24—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for determining value of torque or twisting moment for tightening a nut or other member which is similarly stressed
- G01L5/246—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for determining value of torque or twisting moment for tightening a nut or other member which is similarly stressed using acoustic waves
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- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention provides an insulating shielding structure used in the processing of a hollow fastener ultrasonic sensor, which comprises a fastener substrate, a piezoelectric layer, an insulating protective layer and a metal electrode layer, wherein the piezoelectric layer, the insulating protective layer and the metal electrode layer are sequentially arranged on the end face of the fastener substrate, a central hole is formed in the middle of the fastener substrate, an inner insulating ring and an outer insulating ring are sequentially arranged on the outer side of the central hole of the metal electrode layer, and the inner insulating ring and the outer insulating ring are coaxial with the central hole. The insulating shielding structure applied to the processing of the hollow fastening piece ultrasonic sensor provided by the invention enhances the stability of the sensor double-electrode structure, ensures the formation of a closed loop, is beneficial to the smooth completion of the conversion between an electric signal and a mechanical signal of the ultrasonic sensor, and greatly improves the qualification rate of the ultrasonic sensor prepared on the hollow pin shaft fastening piece.
Description
Technical Field
The invention belongs to the field of hollow pin sensors, and particularly relates to an insulating shielding structure used in processing of hollow fastener ultrasonic sensors.
Background
According to the distribution rule of the shearing stress on the cross section when the circular shaft is twisted, the magnitude of the shearing stress at each point on the cross section is in direct proportion to the distance from the point to the shaft center, so that the shearing stress at the shaft center is zero, and the material close to the shaft center can be simply considered to not fully play a role. The shaft is designed into a hollow pin shaft, so that materials can be fully utilized, and the quality of parts is reduced. A large number of experimental results show that the hollow pin shaft with reasonable wall thickness design can maintain the mechanical property and service life equivalent to those of the solid shaft under the condition of the same load. The design of hollow pins is very common in some mechanical devices with strict requirements on quality.
Ultrasonic sensors for intelligent bolts have been developed for two generations: the first generation adopts a patch type ultrasonic sensor, and the patch type ultrasonic sensor is adhered to the head or tail end of a bolt; the second generation of permanent ultrasonic sensors are grown in situ at the head or tail end of the bolt in a physical vapor deposition mode, so that the problems of poor stability, adhesive aging and the like of the patch type ultrasonic sensors are solved. At present, the technology of preparing an ultrasonic sensor on a fastener through physical vapor deposition and then completing signal acquisition and processing by utilizing a corresponding measuring instrument becomes a research hot spot, and has wide application prospect.
The permanent ultrasonic sensor generally comprises a piezoelectric layer, an insulating layer and a metal layer, and under the existing processing mode, after the piezoelectric layer and the insulating layer are prepared, an insulating shielding ring mold with a certain size is adhered to the processing end face according to the specification and the head shape of a fastener, the deposition of the metal layer is physically shielded, and finally, a complete closed loop taking the surface center circular metal layer and the rest part of the part as electrodes is formed. However, the pin shaft of the hollow cylinder cannot avoid metal deposition on the inner wall to form a film in the process of preparing the metal layer, and finally the whole part is connected in series, so that a double-electrode structure cannot be formed, a closed loop cannot be formed, an electric signal cannot be excited to generate a mechanical signal, and the pretightening force cannot be measured; the deposition mode is tried to be changed, the tool is not rotated, the sample is vertically and directly opposite to the target material for static deposition, the processing end face and the target material surface are kept parallel, the deposition and the adhesion of a metal layer are still difficult to avoid by the inner wall, the difference of resistance values of all parts of the part is obvious, and the measurement of the pretightening force cannot be completed.
Disclosure of Invention
Therefore, the invention aims to provide an insulating shielding structure for processing the hollow fastening piece ultrasonic sensor so as to solve the problem that the traditional single insulating shielding ring sensor is applied to the two-electrode short circuit of the hollow pin fastening piece.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
the utility model provides an insulating shielding structure for in hollow class fastener ultrasonic sensor processing, includes fastener base member, piezoelectricity layer, insulating protection layer, metal electrode layer, and piezoelectricity layer, insulating protection layer, metal electrode layer set gradually on the fastener base member terminal surface, be equipped with the centre bore in the middle of the fastener base member, metal electrode layer is equipped with inner insulating ring and outer insulating ring in the outside of centre bore in proper order, and inner insulating ring and outer insulating ring are coaxial with the centre bore.
Further, the distance between the inner wall of the outer insulating ring and the outer wall of the inner insulating ring is at least 1.5mm, so that the probe is convenient to install and collect and measure signals.
Further, the widths of the outer insulating ring and the inner insulating ring are 1-3mm. The widths of the outer insulating ring and the inner insulating ring can facilitate attachment and removal of the outer insulating ring and the inner insulating ring, and the outer insulating ring and the inner insulating ring can be easily maintained in a ring-shaped structure.
Further, the fastener matrix is a bolt, the diameter of the inner ring of the inner insulating ring is at least the diameter of the central hole, and insulation between the inner wall of the central hole of the fastener matrix and the central electrode can be ensured. The diameter of the inner ring of the outer insulating ring does not exceed the small diameter of the screw thread of the bolt, so that the effective transmission of ultrasonic waves can be ensured.
Further, the coaxiality of the inner insulating ring and the outer insulating ring with the hollow pin is 0.1mm at most. The coaxiality can ensure the stability of the electrode structure and signals.
Further, the metal electrode layer has a thickness of at least 2 μm. The thickness of the metal electrode layer ensures the conductivity of the electrode and plays a role in protecting the whole structure of the sensor.
A processing method of an insulating shielding structure used in hollow fastener ultrasonic sensor processing comprises the following steps:
s1, preparing a piezoelectric layer (3) and an insulating protection layer (2) on a fastener matrix (4);
s2: preparing an inner insulating ring mold and an outer insulating ring mold with certain sizes on the high polymer heat-resistant adhesive adhered to the high temperature-resistant plate in a laser processing mode;
s3: detecting the resistance of a sample before depositing a metal electrode layer (1), and attaching a double-insulation shielding ring die to a processing end face as required after the sample is qualified, taking care of keeping coaxiality;
s4: and after the metal electrode layer (1) is deposited, the inner insulating ring mold and the outer insulating ring mold are removed, and the sensor preparation is completed.
Further, the heating temperature of the polymer heat-resistant adhesive used in S1 is at least 300 ℃, and the thickness is at least 0.05mm. The high-molecular heat-resistant adhesive has high heating temperature, good adhesiveness and good adhesion, does not remain adhesive after use, and the thickness requirement ensures that the metal electrode layers inside and outside the ring cannot be conducted. When the double insulating rings are adhered and removed, the processed film layer is protected, and the film layer collision scratch caused by operation is reduced.
Further, the laser processing in S1 has a laser rate of 15-20mm/S, a laser power of 70% -90% and a laser frequency of 20kHz. The parameters of the laser can ensure the accuracy of the annular size and the regularity of the edge, and the appearance of the final sensor. When a voltage is applied between the center electrode and the peripheral electrode, the peripheral electrode transmits the voltage to the lower side of the piezoelectric layer through the fastener matrix, and the center electrode transmits the voltage to the upper side of the piezoelectric layer due to the double-insulation shielding ring structure, so that the voltage cannot be connected with the fastener matrix to form a short circuit, as shown in fig. 5.
Further, the high temperature resistant plate comprises an organic glass plate, an acrylic plate and an epoxy resin plate.
Compared with the prior art, the insulating shielding structure for processing the hollow fastener ultrasonic sensor has the following beneficial effects:
the central electrode is isolated from the inside of the through hole to form a double-insulation shielding ring structure, so that the surface annular central electrode is insulated from the inner wall when the metal electrode layer is deposited. The problem that the traditional single insulating shielding ring sensor is applied to the two-electrode short circuit of the hollow pin fastener is solved. The stability of the double-electrode structure of the sensor is enhanced, the formation of a closed loop is ensured, the ultrasonic sensor can smoothly complete the conversion between an electric signal and a mechanical signal, and the qualification rate of the sensor prepared on the hollow pin fastener is greatly improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute an undue limitation on the invention. In the drawings:
FIG. 1 is a schematic diagram of a permanent sensor;
FIG. 2 is a 3D schematic view of a single insulating ring;
FIG. 3 is a schematic view of the microstructure of a single insulating shadow ring sensor;
FIG. 4 is a 3D schematic diagram of a dual insulating ring;
FIG. 5 is a schematic diagram of the microstructure of a dual insulating shadow ring sensor.
Description of the drawings:
1. a metal electrode layer; 2. an insulating protective layer; 3. a piezoelectric layer; 4. a fastener base; 5. an outer insulating ring; 6. an inner insulating ring; 7. a central bore.
Detailed Description
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other.
In the description of the invention, it should be understood that the terms "center," "longitudinal," "transverse," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships that are based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the invention and simplify the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operate in a particular orientation, and therefore should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the creation of the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
Example 1:
taking a model XXX8-103 hollow pin used by an aeroengine as an example, sequentially completing preparation of a piezoelectric layer and an insulating protective layer on a required processing end face, adhering a double insulating ring die after detecting a resistance value of more than 2MΩ, then sputtering a metal electrode layer, finally removing the insulating ring die, and completing overall preparation of a sensor structure, wherein specific parameters of a double ring type insulating structure are as follows: polyurethane (PU) insulating glue has the temperature of 340 ℃ and the thickness of 0.1mm; laser processing parameters: the speed is 20mm/s, the power is 90 percent, and the frequency is 20kHz; inner insulating ring width=1 mm, outer insulating ring width=2 mm; the diameter phi 1 of the hollow cylinder of the hollow pin is=12.70 mm, the diameter d1 of the inner circle of the inner insulating ring is=12.70 mm, and the diameter d1 of the outer circle is=14.70 mm; the small diameter phi 2 of the external thread of the hollow pin is=17.80 mm, the diameter D1 of the internal circle of the external insulating ring is=17.70 mm, and the diameter D2 of the external circle of the external insulating ring is= 21.70mm; the annular metal electrode layer electrode width l=1.5 mm formed by the double insulating ring; coaxiality of double insulating rings and hollow pins: the thickness of the metal electrode layer is less than or equal to 0.1mm and is 2-5 mu m. 5 groups of measurement points are randomly selected between the central electrode and the peripheral electrode, and the resistance values are measured respectively, and the results are shown in table 1.
Table 1 double insulated shadow ring preparation sensor resistance values
| Measuring point | Resistance value |
| 1 | 2.31MΩ |
| 2 | 3.62MΩ |
| 3 | 3.41MΩ |
| 4 | 2.87MΩ |
| 5 | 3.02MΩ |
Comparative example 1:
taking a model XXX8-103 hollow pin used by an aeroengine as an example, sequentially completing the preparation of a piezoelectric layer and an insulating protective layer on the required processing end face, adhering a single insulating ring die after the detection resistance value is more than 2MΩ, then sputtering a metal electrode layer, finally removing the insulating ring die, completing the integral preparation of the sensor structure, and enabling Polyurethane (PU) insulating adhesive to withstand the temperature of 340 ℃ and the thickness of 0.1mm; laser processing parameters: the speed is 20mm/s, the power is 90 percent, and the frequency is 20kHz; insulating ring width = 2mm; the diameter phi 1 of the hollow cylinder of the hollow pin is 12.70mm, and the diameter d1 of the outer circle is 14.70mm; the small diameter phi 2 of the external thread of the hollow pin is=17.80 mm, the inner diameter D1 of the insulating ring is=17.70 mm, and the outer diameter D2 of the insulating ring is= 21.70mm; the thickness of the metal electrode layer is 2-5 μm.
5 groups of measurement points are randomly selected between the central electrode and the peripheral electrode, and the resistance values are measured respectively, and the results are shown in Table 2.
Table 2 single insulating shadow ring preparation sensor resistance value
| Measuring point | Resistance value |
| 1 | 0.3Ω |
| 2 | 1.1Ω |
| 3 | 0.3Ω |
| 4 | 1.2Ω |
| 5 | 0.6Ω |
As can be seen from example 1 and comparative example 1, the sensor is manufactured using a single insulating shadow ring, and the resistance value between the center electrode and the peripheral electrode is small, corresponding to a short circuit, so that a voltage value large enough to drive the sensor to operate normally cannot be formed between the two electrodes. The measured resistance value in example 1 can meet the requirements, and the center electrode will not be short-circuited with the peripheral electrode through the hollow inner wall, thereby solving the problem of the conventional single insulating shielding ring sensor applied to the short circuit of the two electrodes of the hollow pin type fastener.
The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A processing method of an insulating shielding structure used in hollow fastener ultrasonic sensor processing is characterized in that: the insulating shielding structure comprises a fastener matrix (4), a piezoelectric layer (3), an insulating protective layer (2), a metal electrode layer (1), wherein the piezoelectric layer (3), the insulating protective layer (2) and the metal electrode layer (1) are sequentially arranged on the end face of the fastener matrix (4), a central hole (7) is formed in the middle of the fastener matrix (4), an inner insulating ring (6) and an outer insulating ring (5) are sequentially arranged on the outer side of the central hole of the metal electrode layer (1), and the inner insulating ring (6) and the outer insulating ring (5) are coaxial with the central hole (7);
the processing method of the insulating shielding structure in the processing of the hollow fastener ultrasonic sensor comprises the following steps:
s1, preparing a piezoelectric layer (3) and an insulating protection layer (2) on a fastener matrix (4);
s2: preparing an inner insulating ring mold and an outer insulating ring mold with certain sizes on the high polymer heat-resistant adhesive adhered to the high temperature-resistant plate in a laser processing mode;
s3: detecting the resistance of a sample before depositing a metal electrode layer (1), and attaching a double-insulation shielding ring die to a processing end face as required after the sample is qualified, taking care of keeping coaxiality;
s4: and after the metal electrode layer (1) is deposited, the inner insulating ring mold and the outer insulating ring mold are removed, and the sensor preparation is completed.
2. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the distance between the inner wall of the outer insulating ring (5) and the outer wall of the inner insulating ring (6) is at least 1.5mm.
3. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the widths of the outer insulating ring (5) and the inner insulating ring (6) are 1-3mm.
4. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the fastener matrix (4) is a bolt, the diameter of the inner ring of the inner insulating ring (6) is at least the diameter of the central hole, and the diameter of the inner ring of the outer insulating ring (5) does not exceed the small diameter of the thread of the bolt.
5. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the coaxiality of the inner insulating ring (6) and the outer insulating ring (5) and the central hole (7) is 0.1mm at most.
6. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the thickness of the metal electrode layer (1) is at least 2 mu m.
7. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the heating temperature of the high polymer heat-resistant adhesive used in the step S1 is at least 300 ℃, and the thickness is at least 0.05mm.
8. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the laser processing in the S1 has the laser rate of 15-20mm/S, the laser power of 70% -90% and the laser frequency of 19-21kHz.
9. The method for processing the insulating shielding structure used in the processing of the ultrasonic sensor of the hollow fastener according to claim 1, wherein the method comprises the following steps: the high temperature resistant plate comprises an organic glass plate and an epoxy resin plate.
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