CN103557781A - Dual monopole capacitor differential displacement sensor - Google Patents
Dual monopole capacitor differential displacement sensor Download PDFInfo
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- CN103557781A CN103557781A CN201310409915.3A CN201310409915A CN103557781A CN 103557781 A CN103557781 A CN 103557781A CN 201310409915 A CN201310409915 A CN 201310409915A CN 103557781 A CN103557781 A CN 103557781A
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Abstract
The invention provides a dual monopole capacitor differential displacement sensor with a signal processing electronic device. The dual monopole capacitor differential displacement sensor comprises an upper sensing piece, a target piece and a lower sensing piece orderly. Both the upper sensing piece and the lower sensing piece are connected with the signal processing electronic device. The target piece is connected with the ground line of the signal processing electronic device. Both the upper sensing piece and the lower sensing piece comprise capacitance shielding bodies and capacitance inducting bodies. The induction surfaces of the capacitance inducting bodies face the surface of the target piece. The shapes of corresponding surfaces are matched with each other, and the displacement is measured through capacitance change. The invention also provides a compound dual monopole capacitor differential displacement sensor which is formed through the combination of a plurality of dual monopole capacitor differential displacement sensors.
Description
Technical field
The present invention relates to measure the displacement transducer using, particularly a kind of pair of one pole capacitance difference displacement component sensor, also relates to a kind of compound two one pole capacitance difference displacement component sensors.
Background technology
The capacitance displacement sensor of the high measurement sensitivity that can buy from the market at present has two classes.One class is the bipolar capacitance displacement sensor of producing as German Physik Instrumente (PI).The one pole capacitance displacement sensor that another kind of Shi Ru Britain Queensgate and German Micro-Epsilon produce.The meaning of " one pole electric capacity " is that one of two electrodes of electric capacity are connected with ground wire, without particular lead.The measurement of electric capacity comes from that non-ground wire utmost point.And " bipolar electric capacity ", the measurement of electric capacity comes from two non-ground wire utmost points.These two electrodes all need the particular lead of oneself.This two classes displacement transducer all needs point-device location and installation to reach between sensitive face and sensitive face (bipolar electric capacity), or between sensitive face and measurement face (one pole electric capacity), the very high depth of parallelism just can obtain specified measurement function.Although these displacement transducers itself are by using expensive material and processing can reach less being acted upon by temperature changes, but after accurate location and installation, because locating device is also acted upon by temperature changes, whole measurement system is difficult to produce a desired effect, unless dropped into huge expense in the material of locating device and processing.Bipolar capacitance displacement sensor is measured highly sensitive than one pole capacitance displacement sensor.Both need high-accuracy being processed into.Therefore production cost is all higher.Capacitive transducer, except induction electrode, also has supplemantary electrode to play the external noise of shielding and reduces electric capacity and run off.The spinoff of these supplemantary electrodes is to have increased constant electric capacity, has therefore increased integral capacitor, causes signal to change into time growth, has reduced signal sampling rate.In addition, two parts of bipolar capacitance displacement sensor are all connected with wire and weight is larger, have caused and have used limitation and bad dynamic performance.The sensitivity of one pole capacitance displacement sensor is poor.Higher stimulation voltage and the longer bodily form of need of higher sensitivity.
Summary of the invention
For this reason, technical matters to be solved by this invention is to provide a kind of pair of one pole capacitance difference displacement component sensor.By to the particular design of parts (induction pieces and target part) structure with integrally-built particular design is reduced to constant electric capacity reach raising sampling rate, offset common noise and reach increase measurement sensitivity, manufacture to simplify to reach and reduce production costs, the weight that reduces movement parts reaches the dynamic property that strengthens sensing device, and symmetrical the reaching of formation reduces the impact of whole sensing device on temperature variation.Of the present invention pair of one pole capacitance difference displacement component sensing passes device and guaranteed measurement face and the location of the high-precision between sensitive face in sensor, causes easy to use low with use cost.The problems referred to above are achieved through the following technical solutions:
First the present invention proposes a kind of pair of one pole capacitance difference displacement component sensor, has signal processing electronic equipment, and its improvement is, comprises successively induction pieces, target part and lower induction pieces; Described upper induction pieces is connected with signal processing electronic equipment with lower induction pieces, and described target part is connected with the ground wire of signal processing electronic equipment; Described upper induction pieces and lower induction pieces all comprise capacitance shield body and capacitive sensing body, and the sensitive surface of described capacitive sensing body is relative with target part surface, and described sensitive surface shape and target part surface configuration match.
Adopt the technical program, the gap between upper electric capacity inductor and objective body is d1, and they form a variable single-stage capacitor C 1 jointly.Gap between lower capacitive sensing body and objective body is d2, and they form another variable single-stage capacitor C 2 jointly.When target part is during to the parallel displacement of inductor direction, gap d 1 and d2 mono-increase one and change with subtracting.Thereby capacitor C 1 and C2 also one increase one and change with subtracting.Capacitance difference (C1-C2) is recorded by electronic equipment, records thus displacement, is a kind of novel sensor.Wherein upper and lower induction pieces has following three kinds of implementations.
One: described capacitive sensing body and capacitance shield body are the metallic conductor parts of surface insulation;
In described capacitance shield body, have storage tank, described capacitive sensing body is slim lamellar body and is arranged in the storage tank of capacitance shield body by a thin-walled hollow web member.Its two: described capacitive sensing body is metallic conductor parts, and described capacitance shield body is that surface is through the dielectric member of conductor; In described capacitance shield body, have storage tank, described capacitive sensing body is slim lamellar body and is arranged in the storage tank of capacitance shield body by a thin-walled hollow web member.Adopt above-mentioned two kinds of modes, in terms of existing technologies, between capacitive sensing body and capacitance shield body, by minimum surface of contact, realize bondingly, can effectively reduce the constant electric capacity in induction pieces.Signal sampling rate and larger measurement sensitivity have been improved.
Its three: described upper induction pieces and lower induction pieces comprise insulating body, described capacitive sensing body is arranged on the first metal conductor layer of insulating body upper surface, this the first metal conductor layer periphery has insulated ring exposed by insulating body and that form, and described capacitance shield body is the second metal conductor layer that is coated in main body part except the first metal conductor layer and insulated ring.Wherein, described induction pieces is on double-layer printing circuit board, to use photoetching corrosion method to form insulated ring, and double-layer printing circuit board two sides are coated with metal conductor layer.
This mode is another important improvement of the present invention, and the mode that it can use printed circuit board (PCB), makes upper and lower induction pieces with doubling plate.Structure based on its statement, only needs to use the mode of photoetching corrosion that above-mentioned insulated ring is made, and the both sides of doubling plate are used same metal conductor layer coated, just can realize the making of induction pieces.Certainly the statement based on said structure, it can also carry out conductor to its surface with materials such as pottery, glass and make upper and lower induction pieces, the disposal route of surface conductor again metal vacuum evaporation coating, surface metal-layer is pasted and the mode such as plasticity electronic conductor printing, and it is more easy that the mode of use printed circuit board (PCB) is made capacitive sensing part.
Any scheme in such scheme, described capacitive sensing body sensitive surface and target part surface be shaped as circle, square, rectangle or ellipse.And the shape of capacitance shield body does not limit, it can be circle, square, rectangle or ellipse equally.The change of shape, makes sensor of the present invention can have stronger applicability.
The invention allows for a kind of two one pole capacitance difference displacement component sensors with through hole, its this enter to be a little: on described upper induction pieces and lower induction pieces, be provided with through hole; Described target part is fixedly installed between upper and lower induction pieces by elastomeric element; The both sides of described target part are provided with impeller, and impeller runs through the through hole of induction pieces and lower induction pieces.
Wherein, described elastomeric element is connected with target part one, and its main body is the spring lamellar body that is parallel to target part neighboring.The number of described spring lamellar body is at least three, is evenly arranged in the outer rim of target part.The one or both sides of described target part are bonded with reinforced sheet, and described reinforced sheet is identical with target part shape.The other end of described spring lamellar body is connected with flexible fastening body.
Can also adopt, comprise at least two described target part, each target part connects described elastic strip body, described elastic strip body is connected with flexible fastening body, between each target part, by intermediate support and perimeter support body, separate, the shape of described intermediate support and target part is identical, and the shape of described perimeter support body and flexible fastening body matches.
Can also adopt, described elastomeric element is that paired parallel longitudinal arranges cantilever spring.
In above-mentioned all technical schemes, described target part is connected with upper and lower induction pieces and arranges or be independent of upper and lower induction pieces and be fixedly installed separately.
In such scheme, through hole operated by rotary motion is at the center of upper and lower induction pieces, to guarantee that impeller can be arranged on the center of whole sensor.Target part in the present invention adopts at least three to be parallel to above target part edge and to be positioned at the mode of the spring lamellar body of same level with target part, can effectively avoid due to the impact of temperature variation on target part, when temperature variation, can there is along target part neighboring the rotation of small horizontal direction in spring lamellar body, and can not cause unusual fluctuation longitudinally.By the mode of reinforced sheet is set, can further avoid the distortion occurring due to external force in the process of target part translation.In addition, the present invention has still used the design of double cantilever beam, and it can arrange the mode of double cantilever beam on single target part, can be also that two target part are set up in parallel and the mode of the automatic double cantilever beam forming up and down.The mode of double cantilever beam can effectively ensure that target part is parallel with upper and lower induction pieces all the time in moving process.And target part can be wholely set by spacer and upper and lower induction pieces, also can be arranged on other peripheral fixed parts that are independent of upper and lower induction pieces.
The invention allows for two one pole capacitance difference displacement component sensors that a kind of impeller arranges separately, its this enter to be a little: also include the second impeller that is independent of upper and lower induction pieces and target part setting; Described target part is fixedly installed between upper and lower induction pieces by elastomeric element, and the second impeller forces in target part and makes it to move horizontally towards upper induction pieces or lower induction pieces direction.
Wherein, described elastomeric element is connected with target part one, and it is parallel to the spring lamellar body of target part neighboring for main body.The number of described spring lamellar body is at least three, is evenly arranged in the outer rim of target part.The one or both sides of described target part are bonded with reinforced sheet, and described reinforced sheet is identical with target part shape.The other end of described spring lamellar body is connected with flexible fastening body.
Can also adopt, comprise at least two described target part, each target part connects described elastic strip body, described elastic strip body is connected with flexible fastening body, between each target part, by intermediate support and perimeter support body, separate, the shape of described intermediate support and target part is identical, and the shape of described perimeter support body and flexible fastening body matches.
Can also adopt, described elastomeric element is that paired parallel longitudinal arranges cantilever spring.
In above-mentioned arbitrary scheme, described target part is independent of upper and lower induction pieces and is fixedly installed separately.
In such scheme, disclose a kind of upper and lower induction pieces not with the mode of through hole, impeller independently arranges on certain position of side outside, and it can be arranged in certain stationary installation of periphery, and drives target part towards upper induction pieces or lower induction pieces parallel.This programme also has advantages of above-mentioned the first scheme, again no longer repeats statement.
The invention allows for the moving and motionless two one pole capacitance difference displacement component sensors of target part of a kind of induction pieces, its this enter to be a little: also include the 3rd impeller that is independent of upper and lower induction pieces and target part setting; Described upper and lower induction pieces one side is fixedly installed on respectively the both sides of target part by upper end elastic component and lower end elastic component, described upper and lower induction pieces opposite side is connected by connecting link; The 3rd impeller forces in induction pieces or lower induction pieces with respect to target part parallel.
In such scheme, disclose a kind of target part and fixed, and the mode that upper and lower induction pieces arranges by elastic component, impeller independently arranges certain position of side outside, and drives upper and lower induction pieces with respect to target part parallel.
Similarly, the invention allows for a kind of pair of one pole capacitance difference displacement component sensor, its this enter to be a little: also include and be independent of the 4th impeller that upper and lower induction pieces and target part arrange;
Described upper and lower induction pieces both sides are fixedly installed on respectively the both sides of target part by upper elastic component and lower elastic component, the 4th impeller forces in induction pieces or lower induction pieces with respect to target part parallel.
The feature of this sensor is that upper and lower induction pieces moves and the different another kind of mode of target part.No matter adopting above-mentioned that mode, is all in order to obtain the change in displacement between target part and induction pieces, and obtains the variation of electric capacity.
The invention allows for a kind of compound pair of one pole capacitance difference displacement component sensor, comprise at least two described pair one pole capacitance difference displacement component sensor; Between each pair of one pole capacitance difference displacement component sensor, separate or separate by intershield device; Wherein, each pair of one pole capacitance difference displacement component sensor comprises induction pieces, target part and lower induction pieces successively; Described on each induction pieces in parallel, each time induction pieces is in parallel, and is finally connected with signal processing electronic equipment, described each target part parallel connection, and being finally connected with the ground wire of signal processing electronic equipment; Described upper induction pieces and lower induction pieces all comprise capacitance shield body and capacitive sensing body, and the sensitive surface of described capacitive sensing body is relative with target part surface, and described sensitive surface shape and target part surface configuration match.
Wherein, described upper induction pieces and lower induction pieces comprise insulating body, described capacitive sensing body is arranged on the first metal conductor layer of insulating body upper surface, this the first metal conductor layer periphery has insulated ring exposed by insulating body and that form, and described capacitance shield body is the second metal conductor layer that is coated in main body part except the first metal conductor layer and insulated ring; Described intershield device is the dielectric member that is coated with metal conductor layer.
Wherein, described induction pieces on each, each time induction pieces and intershield device are provided with through hole; Described each target part series connection is integrated, and the target part at two ends is connected with impeller respectively; Described each target part is fixedly installed between each upper and lower induction pieces by elastomeric element.
Wherein, described elastomeric element is connected with target part one, and it is to be parallel to target part edge and to be positioned at the spring lamellar body of same level with target part.The number of described spring lamellar body is at least three, is arranged in uniformly in the outer rim of target part.The one or both sides of described target part are bonded with reinforced sheet, and described reinforced sheet is identical with target part shape.The other end of described spring lamellar body is provided with the flexible fastening body of fixed target part, described flexible fastening body be provided with up and down spacer.
Can also adopt, comprise at least two described target part, each target part connects described elastic strip body, described elastic strip body is connected with flexible fastening body, between each target part, by intermediate support and perimeter support body, separate, the shape of described intermediate support and target part is identical, and the shape of described perimeter support body and flexible fastening body matches.
Can also adopt, described elastomeric element is that paired parallel longitudinal arranges cantilever spring.
Can also adopt, described target part is connected setting or is independent of upper and lower induction pieces and setting separately with upper and lower induction pieces one.
In technique scheme, the lower induction pieces that described intershield device and being attached thereto connects and upper induction pieces are by forming insulated rings to four layer printed circuit boards through photoetching corrosion methods, and these four layer printed circuit boards two sides are coated with metal conductor layer; All the other upper and lower induction pieces are on double-layer printing circuit board, to use photoetching corrosion method to form insulated ring, and double-layer printing circuit board two sides are coated with metal conductor layer.
Above-mentioned compound pair of one pole capacitance difference displacement component sensor formed by a plurality of pairs of single-stage capacitance difference displacement component sensor combinations, what the most easily realize is the mode that adopts printed circuit board (PCB), dual platen can be made upper and lower induction pieces, and four sides plate can be made intershield body and the assembly of the upper and lower induction pieces that is attached thereto.This composite structure can be realized at extending design longitudinally, reduces the size in the horizontal direction of target part and induction pieces that is:, and by increasing compound quantity, increases the measurement range of whole sensor.
Technique scheme of the present invention has the following advantages compared to existing technology, by the structural design of induction pieces being reduced to the constant electric capacity of global displacement sensing device, so that improves sampling rate and increases and measure sensitivity.By the structural design of induction pieces is reached, manufacture is easy and production cost is low.By the structural design of target part being strengthened to the dynamic property of global displacement sensing device, reduce the impact of global displacement sensing device on temperature variation, and it is easy to be low with production cost to reach manufacture.By to induction pieces, the structural design of the entire combination of target part and other parts of periphery further reduce global displacement sensing device to the impact of temperature variation and reach manufacture easy.Because the present invention is connected two induction pieces and a target part, without any additional point-device location and installation, reach the very high depth of parallelism between sensitive face and measurement face, so just improve fabricator's manufacture repeatability and product quality, reduced user's cost of use simultaneously.In addition, the present invention adopts two induction pieces and a target part to reach differential effect, thereby common noise is offseted, reaches the raising of measuring sensitivity.For example: when sampling rate is 10,000 times per second, resolution up to 100,000/.
The present invention can be used as for measuring the sensor of displacement, also can be applied in the measurement purposes of measuring the physical quantity relevant with electric capacity such as weight, pressure.
Accompanying drawing explanation
For content of the present invention is more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation.
Fig. 1 is the two one pole capacitance difference displacement component sensor one-piece construction schematic diagram of the present invention.；
Fig. 2 A is the structural representation of the induction pieces of surface insulation conductor part formation, is provided with through hole on it.
Fig. 2 B is that Fig. 2 A is along the diagrammatic cross-section of C-C.
Fig. 3 A is the structural representation of the induction pieces of surface insulation conductor part formation, is not provided with through hole on it.
Fig. 3 B is that Fig. 3 A is along the diagrammatic cross-section of C-C.
Fig. 4 is a kind of induction pieces structural representation of existing bipolar capacitance displacement sensor.
Fig. 5 A is that capacitive sensing body is metallic conductor and the structural representation of the induction pieces that insulator that capacitance shield body is surface conductor forms is provided with through hole on it, and capacitance shield body be circle.
Fig. 5 B is that Fig. 5 A is along the diagrammatic cross-section of C-C.
Fig. 6 A is that capacitive sensing body is metallic conductor and the structural representation of the induction pieces that insulator that capacitance shield body is surface conductor forms is not provided with through hole on it, and capacitance shield body is square.
Fig. 6 B is that Fig. 6 A is along the diagrammatic cross-section of C-C.
The main body that Fig. 7 A makes for use P.e.c. method for making is insulator, and upper surface has the first metal conductor layer, and periphery has insulated ring, remainder is the second metal conductor layer and the induction pieces that forms, on it, be provided with through hole, capacitive sensing body is circular, and main body is circular.
Fig. 7 B is that Fig. 7 A is along the diagrammatic cross-section of C-C.
The main body that Fig. 8 A makes for use P.e.c. method for making is insulator, and upper surface has the first metal conductor layer, and periphery has insulated ring, remainder is the second metal conductor layer and the induction pieces that forms, on it, be provided with through hole, capacitive sensing body is oval, and main body is rectangle.
Fig. 8 B is that Fig. 8 A is along the diagrammatic cross-section of C-C.
The main body that Fig. 9 A makes for use P.e.c. method for making is insulator, and upper surface has the first metal conductor layer, and periphery has insulated ring, remainder is the second metal conductor layer and the induction pieces that forms, on it, be provided with through hole, capacitive sensing body is square, and main body is square.
Fig. 9 B is that Fig. 9 A is along the diagrammatic cross-section of C-C.
The main body that Figure 10 A makes for use P.e.c. method for making is insulator, and upper surface has the first metal conductor layer, and periphery has insulated ring, remainder is the second metal conductor layer and the induction pieces that forms, on it, be provided with through hole, capacitive sensing body is rectangle, and main body is rectangle.
Figure 10 B is that Figure 10 A is along the diagrammatic cross-section of C-C.
Figure 11 A is for being used P.e.c. method for making to make compound.
Figure 11 B is that Figure 11 A is along the diagrammatic cross-section of C-C.
Figure 12 is a kind of compound pair of one pole capacitance difference displacement component sensor one-piece construction schematic diagram in the present invention.
Figure 13 is the schematic diagram of two one pole capacitance difference displacement component sensing entire combination in the present invention.
Figure 14 is the structural representation of target part in the present invention.
Figure 15 is the structural representation of a composite object part in the present invention.
Figure 16 is another structural representation that in the present invention, upper and lower induction pieces is combined with target part.
Figure 17 is the structural representation again that in the present invention, upper and lower induction pieces is combined with target part.
Figure 18 is the schematic diagram of both arms beam in the present invention.
Embodiment
The invention discloses the structural design of a kind of pair of one pole capacitance difference displacement component sensing device.It has comprised the structural design of upper induction pieces, target part and lower induction pieces, and discloses the multiple specific implementation form of upper and lower induction pieces and target part.These structures combine with other signal processing electronic equipment, finally form a two one pole capacitance difference displacement component sensing device.
Fig. 1 is the principle schematic of of the present invention pair of one pole capacitance difference displacement component sensor, and two one pole capacitance difference displacement component sensors comprise induction pieces, target part, lower induction pieces successively, and other auxiliary sandwich structure forms.Emphasis of the present invention improves and is, upper induction pieces has capacitance shield body 5 and capacitive sensing body 3, lower induction pieces has capacitance shield body 8 and capacitive sensing body 2, is provided with the target part 1A of displacement sensing between the capacitive sensing body of upper induction pieces and the capacitive sensing body of lower induction pieces.Gap between upper electric capacity inductor and target part surface is d1, and they form a variable single-stage capacitor C 1 jointly.Gap between lower capacitive sensing body and objective body surface is d2, and they form another variable single-stage capacitor C 2 jointly.When target part is during to the parallel displacement of inductor direction, gap d 1 and d2 mono-increase one and change with subtracting.Thereby capacitor C 1 and C2 also one increase one and change with subtracting.Electric capacity difference (C1-C2) is recorded by electronic equipment, records thus displacement.The capacitive sensing body 3,2 of upper and lower induction pieces is connected with signal processing electronic equipment with external insulation shielded conductor respectively.Capacitance shield body 5, the 8 use external insulation shielded conductors of upper and lower induction pieces are connected with the ground wire of signal processing electronic equipment.Wire or other conductor parts for target part, be connected with the ground wire of signal processing electronic equipment.
Figure 13 has shown a specific embodiments of of the present invention pair of one pole capacitance difference displacement component sensor, and each parts launch in the vertical direction to show.As shown in the figure, the capacitance shield body 5 that this sandwich sensing arrangement comprises induction pieces, the capacitance shield body 8 of lower induction pieces.The capacitive sensing body 3 that has upper induction pieces in the capacitance shield body 5 of upper induction pieces, has the capacitive sensing body 2 of lower induction pieces in the capacitance shield body 8 of lower induction pieces.The target part 1A that has displacement sensing between the capacitive sensing body 3 of upper induction pieces and the capacitive sensing body 2 of lower induction pieces.This target part 1A is arranged between upper and lower induction pieces by elastomeric element.This elastomeric element is the spring lamellar body 1B extending out from target part outer rim, and spring lamellar body 1B horizontal parallel (spring lamellar body and objective body are positioned at same level) is in the edge of target part, and the other end of this spring lamellar body 1B is provided with spring fixed body 1C.Described target part 1A, spring lamellar body 1B and spring fixed body 1C can be integrated metal lamellar bodies.In the present embodiment, target part has 4 spring lamellar bodies that evenly arrange along its circumferential edges.
In order to realize the connection of induction pieces and target part, the capacitance shield body edge of upper and lower induction pieces respectively arranges four mounting holes, on spring fixed body 1C, offer mounting hole, in addition, in order to make target part and upper and lower induction pieces there is distance, between the capacitance shield body edge of upper induction pieces and the spring fixed body of target part, be provided with four spacers 9,46,10,44 with mounting hole.Between the capacitance shield body edge of lower induction pieces and the spring fixed body of target part, be provided with four spacers 13,47,14,45 with mounting hole.By screw, nut, complete the connection of a upper induction pieces, a lower induction pieces, a target part and eight spacers, thereby form a sensing arrangement body in addition.This structure is the structural design that target part and upper and lower induction pieces are connected to one.Target part can also be fixed on separately on other detent mechanism, can form equally the structure of target part in the middle of upper and lower induction pieces, as shown in following Figure 16 and Figure 17.
In the present embodiment, there is respectively through hole the centre of the capacitive sensing body 3 of the capacitance shield body 8 of the capacitance shield body 5 of upper induction pieces, lower induction pieces, upper induction pieces and the capacitive sensing body 2 of lower induction pieces, and these four through holes are on same axis.Target part 1A upper and lower surface respectively has target part impeller 7,6, and upper and lower two impellers are respectively through the through hole of the centre of capacitance shield body, the capacitance shield body of lower induction pieces, the capacitive sensing body of upper induction pieces and the capacitive sensing body of lower induction pieces of upper induction pieces.Outside makes inductor produce translation and capacitance variations by impeller, so that records displacement.
Below multiple design and the combination to induction pieces and target part is respectively further described.First be target part, wherein the function of target part is to form electric capacity with the inductor of induction pieces, and is an electrode of this electric capacity.All these requires the surface of the surface of target part and the induction pieces inductor of formed electric capacity to keep certain parallel always, even if relative motion is occurring for target part and induction pieces, between them, relative distance changes.Keeping target part surface this characteristic parallel with induction pieces inductor surface is to reach by the geometric configuration of target part and the design of other parts of periphery.
So, for an important improvement of target part, be, in target part outer rim, be evenly provided with the spring lamellar body described at least three.The advantage of this design is, can guarantee being parallel to each other of objective body surface and induction pieces inductor surface.Another improvement of target part is characterised in that the trend of spring lamellar body, spring lamellar body from objective body to circumferencial direction or nearly circumferencial direction launch, as shown in figure 13, when target part be circle, spring lamellar body 1B along the circumferential direction launches, and is the arc arms that is parallel to this circumference.When target part is while being square, it need to be arranged in parallel with square rim, and this shape and structure makes whole displacement sensing apparatus have volume little and be subject to a plurality of advantages such as influence of temperature change is little.When target part is because temperature variation heat rises or during shrinkage, the direction of its variation is that the direction along circumference changes, and can not cause the injustice on target part surface, make target part all the time with the sensitive surface keeping parallelism of induction pieces.By the structural design of target part being strengthened to the dynamic property of global displacement sensing device, reduce the impact of global displacement sensing device on temperature variation, and reach easy manufacture and reduce production costs.
When target part is carried out translation and increased or reduce the distance between inductor and target part, the sensitive surface 1A of target part can produce some and be reluctant to be out of shape, because it is the transfer body of power.Although can pass through the selection to target part thickness, the selection of spring lamellar body 1B length and width be reduced to the distortion of target part sensitive surface 1A.The present invention proposes the another kind of embodiment that effectively reduces the distortion of target part sensitive surface is, as shown in figure 14, and at the sticky reinforced sheet 40,41 that adds of one or both sides of objective body.Generally, adopt monolithic target part, the thickness of monolithic target part is between 0.025mm to 10mm.
Refer to shown in Figure 15, sometimes, external driving force does not act in the axis of movement direction of objective body, even also with moment of torsion.In this case, in order to prevent being displaced sideways and swinging of objective body, need combined type target part.The present invention proposes a kind of combined type target part, and its improvement is, comprises at least two above-mentioned monolithic target part 1-1,1-2, has an intermediate support 29 between them, and a plurality of perimeter support body 22,23,33,35.Wherein, the shape of intermediate support 29 is identical with target part with size, and adopts lightweight material to form, and can be that metal (lightweight aluminium) can be also nonmetal, can also adopt hollow out supporting structure.Wherein, perimeter support body is separate part, and its quantity, shape are with big or small identical with spring fixed body, and thickness is identical with the thickness of intermediate support.Each target part is by intermediate support and structure with multipair twin beams semi-girder of the mutual bonding formation of perimeter support body, make each target part there is certain spacing, by the supporting role of supporter, can make interconnective target part keep smooth, be conducive to the realization of effect of the present invention.In addition, a plurality of target part are connected to one, and the spring lamellar body of upper and lower target part can form the effect of both arms beam, when target part is when induction pieces moves, can guarantee that target part remains parallel with respect to induction pieces, as shown in figure 18.
For the various structures of induction pieces, introduced below.
Refer to Fig. 4 A and Fig. 4 B, it is the induction pieces structure of existing bipolar capacitance displacement sensor on market.Whole induction pieces is comprised of three parts, capacitive sensing body 22, one capacitance shield bodies 28, and an intermediate isolating body 23.Three parts are all made by metallic conductor, and process through surface insulation.From capacitive sensing body and shield, draw corresponding wire.The capacitances in series that the electric capacity that the constant electric capacity that inductor and shield form is formed by inductor and intermediate isolating body and intermediate isolating body and shield form forms.Due to the contact area of inductor and intermediate isolating body and the area of intermediate isolating body and shield all larger, between them, be again zero distance contact, so the variable capacitance that the constant capacity ratio forming between them will be surveyed is much larger.This has just caused the ratio of variable capacitance and constant electric capacity (variable signal and not varying signal) very little, thereby resolution is lower.Meanwhile, large overall capacitance needs signal processing time longer, causes that signal output is slow, sampling rate is low.
The present invention is by the structural design of induction pieces being reduced to the constant electric capacity of global displacement sensing device, so that improves sampling rate and increase and measure sensitivity, obtains manufacturing the easy and advantage such as reduce production costs simultaneously.
The material of main part of induction pieces can be conductor, can be also insulator (nonconductor).If the material of induction pieces is metallic conductor, as copper or aluminium, insulating processing need to be carried out in the capacitance shield body of induction pieces and capacitive sensing surface, to prevent that capacitive sensing body from directly contacting with capacitance shield body.And the method that surface insulationization is processed comprises anodic oxidation and surface coating plated film.If the material of main part of induction pieces is insulator, as pottery, glass and answer printed circuit board (PCB) material, main body local surfaces need to be carried out conductor processing, forms conductor shielding body and conductor inductor.The method that surface conductorization is processed comprises metal vacuum evaporation coating, surface metal-layer stickup and the printing of plasticity electronic conductor.
Fig. 3 A and Fig. 3 B are depicted as first concrete structure design embodiment of induction pieces of the present invention.Whole induction pieces is comprised of two parts, and the one, capacitive sensing body 12, another is capacitance shield body 18.The shape of capacitive sensing body 12 can be cylindrical for thin-walled hollow by highly very low cylindrical (the slim lamellar bodies of lamellar body or other shapes) and a thin-walled web member 120(, can be also thin metal connecting sheet) form.Highly very low columniform upper surface is sensitive surface.The outer shape of capacitance shield body 18 is square, and its central upper portion is dug out a storage tank 180, and for coordinating columniform capacitive sensing body, this storage tank is cylinder groove, and volume is far longer than the volume of capacitive sensing body.Capacitive sensing body and capacitance shield body are all made by metallic conductor, and process and draw corresponding wire through surface insulation.Two parts link into an integrated entity by bonded adhesives.Obviously, the induction pieces of Fig. 3 A and Fig. 3 B is manufactured easy to be low with production cost than the induction pieces of Fig. 4 A and Fig. 4 B.Structure that the more important thing is Fig. 3 A and Fig. 3 B induction pieces causes the constant electric capacity of its constant capacity ratio Fig. 4 A and Fig. 4 B induction pieces little a lot.Therefore, Fig. 3 A and Fig. 3 B induction pieces can have high a lot of signal sampling rate and larger measurement sensitivity.This is one of main effect of the present invention.
Fig. 2 A and 2B are depicted as second concrete structure design embodiment of induction pieces of the present invention.Whole induction pieces is comprised of two parts, and the one, capacitive sensing body 2, another is capacitance shield body 8.The shape of capacitive sensing body 2 is comprised of a porose cylindrical and thin-walled hollow cylindrical 201 in height Hen Di center.Highly very low columniform upper surface is sensitive surface.The central upper portion of capacitance shield body 8 has been dug a cylinder groove 80， bottom centre to be had through hole is set equally.Two parts are all made by metallic conductor, and process and draw corresponding wire through surface insulation.Two parts link into an integrated entity by bonded adhesives.Two induction pieces up and down that form the difference displacement sensing apparatus of Figure 13 come from this induction pieces embodiment.And the induction pieces that comes from first embodiment is applied to the overall construction design of Figure 16 and Figure 17.
Fig. 7 A and Fig. 7 B are depicted as the 3rd concrete structure design embodiment of capacitive sensing part of the present invention.Whole induction pieces is by an entity structure part 34(insulating body), on this entity structure part, be provided with a capacitive sensing face 32, these capacitive sensing face 32 peripheries are provided with insulated ring 340, and the periphery of insulated ring 340 is coated with connected capacitance plate lee- side 27,38,39 and forms.Entity structure part 34 is made by non-conducting material.Non-conducting material comprises pottery, glass, and P.e.c. (PCB) sheet material.Capacitive sensing face and capacitance plate lee-side are made by evaporation of metal film plating process or P.e.c. method for making.That is to say, the disclosed induction pieces of present embodiment is that the upper surface at insulator is provided with the first metal conductor layer, and the periphery of this first metal conductor layer is by the method for making of printed circuit board (PCB), weed out metal material and expose insulating body, and form the insulated ring that is looped around the first metal conductor layer periphery, and remaining the second metal conductor layer has formed capacitance shield body.These class methods are compared with machining method for making, produce cost in enormous quantities low and easily produce more complicated sensing surface shape.The circular capacitor inductor that the simplest double-layer printing circuit board of use of this embodiment is made.And Fig. 8 A and Fig. 8 B are oval capacitive sensing bodies.
The capacitive sensing body of induction pieces and the shape of displacement sensing objective body are determined according to concrete applicable cases.If the material of induction pieces is metallic conductor, the inductor shape the most easily realizing is circular and annular (Fig. 2 A, 3A, 7A, 13).The shape of the capacitance shield body of induction pieces will surround around capacitive sensing body.If the material of main part of induction pieces is insulator, owing to having used the job operation of evaporation of metal or P.e.c., multiplely compared with complex plane geometric configuration, be all not difficult to realize.The inductor shape that may use also has square except conventional circle and annular, rectangle, and oval (Fig. 8 A, 9A, 10A).
Fig. 5 A, Fig. 5 B and Fig. 6 A, 6B are depicted as the 4th concrete structure design embodiment of induction pieces of the present invention.Capacitive sensing body 4(Fig. 5 B that induction pieces is made by a metallic conductor) or 25(Fig. 6 B) and capacitance shield body 21(Fig. 5 B of making of another insulating material) or 26 Fig. 6 B form.The shape of inductor is by highly very low cylindrical and thin-walled hollow cylindrical composition.Shield material of main part is insulator, and surface has been carried out conductor and processed to form screen layer.The method that surface conductorization is processed comprises metal vacuum evaporation coating, surface metal-layer stickup and the printing of plasticity electronic conductor.Shield central upper portion has been dug a cylinder groove.Metal inductor crouches in the cylinder groove of shield, and shield surrounds around inductor.Inductor and shield two parts link into an integrated entity by bonded adhesives.According to service condition, inductor center and shield bottom centre can porose (Fig. 5 B), also can atresia (Fig. 6 B).
Figure 11 A and Figure 11 B disclose a kind of composite component, and this compound annex comprises the lower induction pieces being wholely set, an intershield body and a upper induction pieces successively.Lower induction pieces comprises insulating body 54, capacitive sensing body 52 and insulated ring 540 that its upper surface arranges, and insulated ring 540 peripheries have capacitance plate lee-side 58.Upper induction pieces comprises insulating body 55, capacitive sensing body 53 and insulated ring 550 that its lower surface arranges, and insulated ring 550 peripheries have capacitance plate lee-side 56.The intershield body of this composite members comprises insulating body 59.Between lower induction pieces and insulating body 59, have metal screen lee-side 57, between insulating body 59 and upper induction pieces, have metal screen lee-side 50, lower induction pieces, intershield body and upper induction pieces both sides have capacitance shield body 60.Described capacitance plate lee- side 58,57,50,56,60 one connect.This induction pieces can be made with four common layer printed circuit boards, and it need to weed out the upper and lower surface of four layer printed circuit boards a part of metal and form insulated ring, just can complete the making of whole composite members.The superiority of making complicated capacitive sensing part by P.e.c. method for making is apparent.The application of complex capacitance induction pieces will specifically provide below.
In the concept of making electric capacity propagated sensation sensor by P.e.c. method for making document in early days, be once suggested.But never had as concrete (Fig. 7 A, 7B, Fig. 8 A, 8B, Fig. 9 A, 9B, Figure 10 A, 10B, Figure 11 A, 11B) case study on implementation of the present invention.The sensing surface shape and structure scheme of the electric capacity propagated sensation sensor forming by P.e.c. method for making is one aspect of the present invention also.The present invention has also disclosed a kind of compound pair of one pole capacitance difference displacement component sensor, and it comprises at least two described pair one pole capacitance difference displacement component sensor; Between each pair of one pole capacitance difference displacement component sensor, separate or separate by intershield device.Wherein, each pair of one pole capacitance difference displacement component sensor comprises induction pieces, target part and lower induction pieces successively, on each, induction pieces is connected in parallel, each time induction pieces is connected in parallel, each upper and lower induction pieces is finally connected with signal processing electronic equipment, each target part is in parallel, and is finally connected with the ground wire of signal processing electronic equipment.Wherein said upper induction pieces and lower induction pieces all comprise capacitance shield body and capacitive sensing body, and the sensitive surface of described capacitive sensing body is relative with target part surface, and described sensitive surface shape and target part surface configuration match.Induction pieces up and down wherein can be used above-mentioned any induction pieces, and target part is as the same.
Refer to shown in Figure 12 its compound pair of one pole capacitance difference displacement component sensor for using P.e.c. method for making to form.It comprises couple one pole capacitance difference displacement component sensor 6S and lower couple of one pole capacitance difference displacement component sensor 7S, is provided with intershield body 8S between the two.The present embodiment is to use the mode of printed circuit board (PCB) to form, and it comprises two upper induction pieces 62 that formed by dual platen and lower induction pieces 72, and the composite component 70 being formed by four laminates, also has two target part 61,71.Two induction pieces are made (Fig. 7 A and Fig. 7 B) with double-layer printing circuit board.Complex capacitance induction pieces is made (Figure 11 A and Figure 11 B) with four layer printed circuit boards.The shape of these two target part is the same with the target part shown in Figure 13, comprises an inductor 1A, four spring lamellar body 1B, and four spring fixed body 1C.Two target part are connected together by a web member 68, are connected with up and down each one 67,69 of impeller again.In addition, this entire combination also comprises that 16 spacers are as 63-66,73-76.Spacer shape is the same with the spacer shown in Figure 13.They are two induction pieces, complex capacitance induction pieces, and two target part link together.Except above parts, this entire combination also comprises a side direction shield 60.It links together all other shields, and joins with the ground wire of signal processing electronic equipment.Whole displacement sensing apparatus forms four one pole electric capacity.The inductor of two target part tops links together, and the inductor of two target part belows links together.The object of this structure of the present invention is the intensity that increases signal, improves resolution.This combined method can further expand to uses a plurality of complex capacitance induction pieces.As formed six one pole electric capacity by two complex capacitance induction pieces and three target part, by three complex capacitance induction pieces and four target part, form eight one pole electric capacity etc.
The object of the invention is to by induction pieces, the structural design of the entire combination of target part and other parts of periphery comes further 1) guarantee the parallel between objective body and inductor, 2) reduce non-linear, 3) improve measuring accuracy, 4) reduce the impact of temperature variation, 5) manufacture easy.Figure 13 has shown a concrete whole implementation scheme of of the present invention pair of one pole capacitance difference displacement component sensor.The schematic diagram corresponding with Figure 13 is Fig. 1.Impeller act in target part, produce and inductor between opposing parallel displacement, and then the gap between them (
d1, d2 ) change.The capacitive sensing body of upper induction pieces and the upper surface of objective body form a variable capacitance C1.The capacitive sensing body of lower induction pieces and the lower surface of objective body form another variable capacitance C2.Because these two one pole electric capacity lay respectively at upside and the downside of target part, when target part relative with induction pieces during to any one direction parallel, another reduces one increase of one pole electric capacity, poor (C1-C2) of electric capacity forms differential effect, identical noise is by cancellation mutually, and different variablees is applied and records displacement.
Figure 16 has shown the another kind of operating type of induction pieces and target part, that is: target part is independent of upper and lower induction pieces and is fixedly installed separately.This target part has been used the fixed form of peripheral assembly structure.Specifically, the border of target part 11 connects a pair of length and equiform twin beams beam type spring 16,17, and twin beams beam type spring is directly fixed on peripheral supporter 20, and respectively there is a capacitive sensing part above and below of target part.The detailed structure of induction pieces is referring to Fig. 3 A and 3B.The capacitive sensing body 15 of upper induction pieces forms a variable capacitance C1 with the upper surface of target part 11.The capacitive sensing body 12 of lower induction pieces forms another variable capacitance C2 with the lower surface of objective body.Because these two one pole electric capacity lay respectively at upside and the downside of target part, also comprise independent second impeller arranging (not indicating in figure), when target part is by its promotion and relative induction part during to any one direction parallel, another reduces in two one pole electric capacity one increases, and poor (C1-C2) of electric capacity forms differential effect and record displacement.This technical scheme is different from the scheme that Figure 13 discloses, and in this scheme, target part is not arranged on upper and lower induction pieces, is independently fixedly installed on peripheral supporter.This target part is realized and being fixedly installed by elastomeric element equally, but this elastomeric element is not to have a plurality of spring lamellar bodies, but the cantilever spring that a pair of parallel longitudinal arranges forms both arms girder construction as shown in figure 18, can guarantee that target part is with respect to the parallel of induction pieces.The feature of this structure be cantilever spring not the shield by induction pieces directly and peripheral components be fixed together.
Figure 17 has shown that a target part is fixed and structural design that induction pieces moves.Target part 31 is fixed on peripheral supporter 20 motionless, one end of two induction pieces is connected together by a connecting link 30, the other end links together with a pair of cantilever spring being parallel to each other 36,37 that can form twin beams semi-girder, twin beams beam type spring is directly fixed on peripheral supporter 20, also include the 3rd impeller (not indicating in figure), by it, act on this pair of length and equiform parallel cantilever spring 36,37 or upper and lower induction pieces, two capacitive sensing parts carry out translation with respect to fixing target part.The details of induction pieces is as shown in structural drawing 3A and 3B.The capacitive sensing body 15 of upper induction pieces forms a variable capacitance C1 with the upper surface of target part 31.The capacitive sensing body 12 of lower induction pieces forms another variable capacitance C2 with the lower surface of objective body.Two one pole electric capacity lay respectively at upside and the downside of target part, when induction pieces disjunctor is promoted by the external world and relative induction part during to any one direction parallel, another reduces in two one pole electric capacity one increases, and poor (C1-C2) of electric capacity forms differential effect and record displacement.The feature of this structure is that induction pieces is movable member.
Certainly, can also adopt upper and lower induction pieces both sides to use respectively a pair of cantilever spring to be fixed on peripheral supporter, to form a target part and fix (in figure, not indicating), and induction pieces can with similar structures, it realizes upper and lower induction pieces with respect to the parallel of target part by one the 4th impeller (in figure sign).
Claims (35)
1. two one pole capacitance difference displacement component sensors, have signal processing electronic equipment, it is characterized in that: comprise successively induction pieces, target part and lower induction pieces; Described upper induction pieces is connected with signal processing electronic equipment with lower induction pieces, and described target part is connected with the ground wire of signal processing electronic equipment; Described upper induction pieces and lower induction pieces all comprise capacitance shield body and capacitive sensing body, and the sensitive surface of described capacitive sensing body is relative with target part surface, and described sensitive surface shape and target part surface configuration match.
2. as claimed in claim 1 pair of one pole capacitance difference displacement component sensor, is characterized in that: described capacitive sensing body and capacitance shield body are the metallic conductor parts of surface insulation; In described capacitance shield body, have storage tank, described capacitive sensing body is slim lamellar body and is arranged in the storage tank of capacitance shield body by a thin-walled hollow web member.
3. as claimed in claim 1 pair of one pole capacitance difference displacement component sensor, is characterized in that: described capacitive sensing body is metallic conductor parts, and described capacitance shield body is that surface is through the dielectric member of conductor; In described capacitance shield body, have storage tank, described capacitive sensing body is slim lamellar body and is arranged in the storage tank of capacitance shield body by a thin-walled hollow web member.
4. as claimed in claim 1 pair of one pole capacitance difference displacement component sensor, it is characterized in that: described upper induction pieces and lower induction pieces comprise insulating body, described capacitive sensing body is arranged on the first metal conductor layer of insulating body upper surface, this the first metal conductor layer periphery has insulated ring exposed by insulating body and that form, and described capacitance shield body is the second metal conductor layer that is coated in main body part except the first metal conductor layer and insulated ring.
5. as claimed in claim 4 pair of one pole capacitance difference displacement component sensor, is characterized in that: described induction pieces is on double-layer printing circuit board, to use photoetching corrosion method to form insulated ring, and double-layer printing circuit board two sides are coated with metal conductor layer.
6. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 1 to 5, it is characterized in that: described capacitive sensing body sensitive surface and target part surface be shaped as circle, square, rectangle or ellipse.
7. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 1 to 5, it is characterized in that: on described upper induction pieces and lower induction pieces, be provided with through hole; Described target part is fixedly installed between upper and lower induction pieces by elastomeric element; The both sides of described target part are provided with impeller, and impeller runs through the through hole of induction pieces and lower induction pieces.
8. as claimed in claim 7 pair of one pole capacitance difference displacement component sensor, is characterized in that: described elastomeric element is connected with target part one, and it is parallel to the spring lamellar body of target part neighboring for main body.
9. as claimed in claim 8 pair of one pole capacitance difference displacement component sensor, is characterized in that: the number of described spring lamellar body is at least three, is evenly arranged in the outer rim of target part.
10. as claimed in claim 9 pair of one pole capacitance difference displacement component sensor, is characterized in that: the one or both sides of described target part are bonded with reinforced sheet, and described reinforced sheet is identical with target part shape.
11. as claimed in claim 10 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the other end of described spring lamellar body is connected with flexible fastening body.
12. as claimed in claim 11 pairs of one pole capacitance difference displacement component sensors, it is characterized in that: comprise at least two described target part, each target part connects described elastic strip body, described elastic strip body is connected with flexible fastening body, between each target part, by intermediate support and perimeter support body, separate, the shape of described intermediate support and target part is identical, and the shape of described perimeter support body and flexible fastening body matches.
13. as claimed in claim 7 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described elastomeric element is the cantilever spring that paired parallel longitudinal arranges.
14. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 8 to 13, it is characterized in that: described target part is connected with upper and lower induction pieces and arranges or be independent of upper and lower induction pieces and be fixedly installed separately.
15. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 1 to 5, it is characterized in that: also include and be independent of the second impeller that upper and lower induction pieces and target part arrange; Described target part is fixedly installed between upper and lower induction pieces by elastomeric element, and the second impeller forces in target part and makes it to move horizontally towards upper induction pieces or lower induction pieces direction.
16. as claimed in claim 15 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described elastomeric element is connected with target part one, and it is parallel to the spring lamellar body of target part neighboring for main body.
17. as claimed in claim 16 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the number of described spring lamellar body is at least three, are evenly arranged in the outer rim of target part.
18. as claimed in claim 17 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the one or both sides of described target part are bonded with reinforced sheet, described reinforced sheet is identical with target part shape.
19. as claimed in claim 18 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the other end of described spring lamellar body is connected with flexible fastening body.
20. as claimed in claim 19 pairs of one pole capacitance difference displacement component sensors, it is characterized in that: comprise at least two described target part, each target part connects described elastic strip body, described elastic strip body is connected with flexible fastening body, between each target part, by intermediate support and perimeter support body, separate, the shape of described intermediate support and target part is identical, and the shape of described perimeter support body and flexible fastening body matches.
21. as claimed in claim 14 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described elastomeric element is that paired parallel longitudinal arranges cantilever spring.
22. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 14 to 21, it is characterized in that: described target part is independent of upper and lower induction pieces and is fixedly installed separately.
23. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 1 to 5, it is characterized in that: also include and be independent of the 3rd impeller that upper and lower induction pieces and target part arrange; Described upper and lower induction pieces one side is fixedly installed on respectively the both sides of target part by upper end elastic component and lower end elastic component, described upper and lower induction pieces opposite side is connected by connecting link; The 3rd impeller forces in induction pieces or lower induction pieces, makes induction pieces and lower induction pieces with respect to target part parallel.
24. as the two one pole capacitance difference displacement component sensors as described in arbitrary in claim 1 to 5, it is characterized in that: also include and be independent of the 4th impeller that upper and lower induction pieces and target part arrange; Described upper and lower induction pieces both sides are fixedly installed on respectively the both sides of target part by upper elastic component and lower elastic component, the 4th impeller forces in induction pieces or lower induction pieces, make induction pieces and lower induction pieces with respect to target part parallel.
25. 1 kinds compound pair one pole capacitance difference displacement component sensor, is characterized in that: comprise at least two described pair one pole capacitance difference displacement component sensor; Between each pair of one pole capacitance difference displacement component sensor, separate or separate by intershield device; Wherein, each pair of one pole capacitance difference displacement component sensor comprises induction pieces, target part and lower induction pieces successively; Described on each induction pieces in parallel, each time induction pieces is in parallel, and is finally connected with signal processing electronic equipment, described each target part parallel connection, and being finally connected with the ground wire of signal processing electronic equipment; Described upper induction pieces and lower induction pieces all comprise capacitance shield body and capacitive sensing body, and the sensitive surface of described capacitive sensing body is relative with target part surface, and described sensitive surface shape and target part surface configuration match.
26. as compound in claim 25 pairs of one pole capacitance difference displacement component sensors, it is characterized in that: wherein said upper induction pieces and lower induction pieces comprise insulating body, described capacitive sensing body is arranged on the first metal conductor layer of insulating body upper surface, this the first metal conductor layer periphery has insulated ring exposed by insulating body and that form, and described capacitance shield body is the second metal conductor layer that is coated in main body part except the first metal conductor layer and insulated ring; Described intershield device is the dielectric member that is coated with metal conductor layer.
27. as compound in claim 26 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described induction pieces on each, each time induction pieces and intershield device are provided with through hole; Described each target part series connection is integrated, and the target part at two ends is connected with impeller respectively; Described each target part is fixedly installed between each upper and lower induction pieces by elastomeric element.
28. as compound in claim 27 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described elastomeric element is connected with target part one, its main body is the spring lamellar body that is parallel to target part neighboring.
29. as claimed in claim 28 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the number of described spring lamellar body is at least three, is arranged in uniformly in the outer rim of target part.
30. as claimed in claim 29 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the one or both sides of described target part are bonded with reinforced sheet, described reinforced sheet is identical with target part shape.
31. as claimed in claim 30 pairs of one pole capacitance difference displacement component sensors, is characterized in that: the other end of described spring lamellar body is provided with the flexible fastening body of fixed target part, described flexible fastening body be provided with up and down spacer.
32. as claimed in claim 31 pairs of one pole capacitance difference displacement component sensors, it is characterized in that: comprise at least two described target part, each target part connects described elastic strip body, described elastic strip body is connected with flexible fastening body, between each target part, by intermediate support and perimeter support body, separate, the shape of described intermediate support and target part is identical, and the shape of described perimeter support body and flexible fastening body matches.
33. as claimed in claim 27 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described elastomeric element is that paired parallel longitudinal arranges cantilever spring.
34. as claimed in claim 32 pairs of one pole capacitance difference displacement component sensors, is characterized in that: described target part is connected with upper and lower induction pieces one and arranges or be independent of upper and lower induction pieces and be fixedly installed separately.
35. two one pole capacitance difference displacement component sensors as described in claim 26 to 34, it is characterized in that: the lower induction pieces that described intershield device and being attached thereto connects and upper induction pieces are by forming insulated rings to four layer printed circuit boards through photoetching corrosion methods, and these four layer printed circuit boards two sides are coated with metal conductor layer; All the other upper and lower induction pieces are on double-layer printing circuit board, to use photoetching corrosion method to form insulated ring, and double-layer printing circuit board two sides are coated with metal conductor layer.
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