CN202793305U - Multi-ring parallel type capacitor displacement sensor - Google Patents
Multi-ring parallel type capacitor displacement sensor Download PDFInfo
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- CN202793305U CN202793305U CN 201220411836 CN201220411836U CN202793305U CN 202793305 U CN202793305 U CN 202793305U CN 201220411836 CN201220411836 CN 201220411836 CN 201220411836 U CN201220411836 U CN 201220411836U CN 202793305 U CN202793305 U CN 202793305U
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- movable plate
- sided
- plate electrode
- annulus
- single face
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Abstract
The utility model discloses a multi-ring parallel type capacitor displacement sensor comprising a dynamic pole and a static pole, the static pole comprises a single side static pole shaft, a dual side circular ring static pole plate, and a single side circular ring static pole plate coaxially arranged from inside to outside; the dynamic pole comprises a first dual side circular ring dynamic pole plate and a second dual side circular ring dynamic pole plate coaxially arranged according to the static pole; and when the dynamic pole follows a member to be tested to move along an axial direction corresponding to the static pole, more than four sets of ring shape parallel capacitors can be formed, so when the mobile member to be tested drives the dynamic pole to move along the axial direction, changes with same form are generated on all effective coving areas between two pole plates of each set of capacitors, differential variation of each set is accumulated, so if a volume is not changed, total variation of areas between the dynamic pole and the static pole are greatly increased in micro motion, capacitor total variation is increased in micro motion, precision and sensitivity in micro-distance measurement is greatly improved, and requirements of micromation application occasions are satisfied.
Description
Technical field
The present invention relates to the capacitive displacement transducer art, refer in particular to the parallel capacitance displacement sensor of a kind of many rings.
Background technology
Along with the development of science and technology, the demand of high precision position shift measurement and non-cpntact measurement is more and more, and the application surface of capacitance measurement technology is also more and more wider.The distributed capacitance that exists along with capacitive transducer, the shortcoming such as non-linear are overcome, and the capacitance measurement product of high precision, high stability is come out one after another.The attainable resolution of high-accuracy capacitor micrometer is high, and has preferably Frequency Response, therefore becomes in recent years one of several main detecting sensors of high precision micromotion platform FEEDBACK CONTROL.
Present existing capacitance displacement sensor mainly contains following two large classes:
1, differential variable-pole is apart from the type capacitive transducer
Its structural principle is shown in Fig. 1 a and Fig. 1 b, in Fig. 1 a, the two-sided pole plate 20 that is positioned at central authorities is movable plate electrode, be connected with moving member, the single face pole plate 10 and the single face pole plate 30 that are positioned at both sides are fixed polar plate, link to each other with fixed pedestal, the relative position between single face pole plate 10 and the single face pole plate 30 immobilizes.During measurement, the moving member that is used for measured aiming drives two-sided pole plate 20 and vertically moves Δ d, causes each to the synchronous variation of the distance between pole plate, and the two-sided pole plate 20 after the variation is respectively d with the gap of single face pole plate 10 and single face pole plate 30
1And d
2(shown in Fig. 1 b).Usually, plane-parallel capacitor, electric capacity are C=ε S/d, and wherein, ε is the specific inductive capacity of medium between pole plate, and S is polar plate area, and d is the distance between pole plate.If d
0Be initial pole span, C
0For the sensitivity of electric capacity initial value and capacitive transducer is K, aforementioned d
1=d
0-△ d, d
2=d
0+ △ d, C
1And C
2Form differential capacitor, differential capacitor is connected to respectively adjacent two arms of electric bridge, capacitance change △ C can be written as: △ C=C
1-C
2=△ C
1+ △ C
2=2C
0* △ d/d
0, the sensitivity K that can obtain thus this kind capacitive transducer is K=△ C/ △ d=2 ε S/d
0 2
2, differential type capacitor sensor with changed area, wherein, capacitor sensor with changed area has two kinds on angular displacement type and displacement of the lines type.
Shown in Fig. 2 a and Fig. 2 b, it has shown planar line displacement type typical structure, this movable plate electrode 50 is used for being connected with moving member, fixed plate 40 links to each other with fixed pedestal, and its relative position with respect to fixed pedestal is constant, during measurement, measured moving member drives movable plate electrode 50 along continuous straight runs and moves, cause the synchronous change of area of effective coverage between two-plate, thereby obtain the change of electric capacity, capacitance change △ C can be written as: △ C=C
1-C
0=ε b
0△ L/d
0, wherein, b
0Be the effective cover width of pole plate, △ L is the displacement of movable plate electrode, d
0Be pole span.K=△C/△L=εb
0/d
0。
Shown in Fig. 3 a and Fig. 3 b, it has shown angular displacement type typical structure, and when movable plate electrode 70 has a corner, and the mutual area that covers just changes between the fixed plate 60, thereby causes electric capacitance change.If its corner is △ a, pole plate radius is r, capacitance change is △ C=ε △ ar
2/ 2d
0, its sensitivity is K=△ C/ △ a=ε r
2/ 2d
0
From foregoing, be not difficult to find out, for sensitivity and the range that improves sensor, just must increase pole plate over against area and pole span, on volume, just be difficult to like this realize microminiaturized so that the capacitive transducer application scenario is subject to great limitation.
Summary of the invention
In view of this, the present invention is directed to the disappearance of prior art existence, its fundamental purpose provides the parallel capacitance displacement sensor of a kind of many rings, its Effective Raise measuring accuracy, more can satisfy the requirements such as high measurement accuracy in the micro displacement workbench, high sensitivity and wide range.
For achieving the above object, the present invention adopts following technical scheme:
The parallel capacitance displacement sensor of a kind of many rings includes the moving utmost point that cooperatively interacts and decides the utmost point, this decide the utmost point include coaxial and from inside to outside the single face that arranges of spacing decide pole axis, two-sided annulus fixed plate, single face annulus fixed plate; Should include corresponding decide utmost point setting and coaxial the first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode by the moving utmost point, be formed with the first accommodating cavity in this first two-sided annulus movable plate electrode, be formed with the second accommodating cavity between this first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode; Should moving utmost point can be axially movable be nested in fixed extremely in, aforementioned single face is decided pole axis and is matched with in the first accommodating cavity and with the first two-sided annulus movable plate electrode internal face and consists of the first electric capacity; Aforementioned two-sided annulus fixed plate is matched with in the second accommodating cavity and its inside and outside wall consists of second and third electric capacity with the outside wall surface of the first two-sided annulus movable plate electrode, the internal face of the second two-sided annulus movable plate electrode respectively; It is peripheral that aforementioned single face annulus fixed plate is matched with the second two-sided annulus movable plate electrode, and the outside wall surface of single face annulus fixed plate and the second two-sided annulus movable plate electrode consists of the 4th electric capacity.
As a kind of preferred version, the internal diameter of the described first two-sided annulus movable plate electrode is decided the external diameter of pole axis greater than single face, the spacing of this first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode is greater than the thickness of two-sided annulus fixed plate, and the internal diameter of this single face annulus fixed plate is greater than the external diameter of the second two-sided annulus movable plate electrode.
As a kind of preferred version, the axial length that described single face is decided pole axis, two-sided annulus fixed plate, single face annulus fixed plate, the first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode equates and two ends are corresponding flushes.
As a kind of preferred version, the diameter of the spacing, the first two-sided annulus movable plate electrode that described single face is decided pole axis and the spacing of two-sided annulus fixed plate, two-sided annulus fixed plate and single face annulus fixed plate and the spacing of the second two-sided annulus movable plate electrode, the cylindrical groove in the first two-sided annulus movable plate electrode all equates.
As a kind of preferred version, the thickness that described single face is decided the diameter of pole axis and two-sided annulus fixed plate, single face annulus fixed plate, the first two-sided annulus movable plate electrode, the second two-sided annulus movable plate electrode all equates.
As a kind of preferred version, the periphery of the described second two-sided annulus movable plate electrode arranges shading ring, aforementioned single face annulus fixed plate is between shading ring and the second two-sided annulus movable plate electrode, and the spacing of shading ring and the second two-sided annulus movable plate electrode is greater than the thickness of single face annulus fixed plate.
As a kind of preferred version, the outside wall surface of described single face annulus fixed plate is screen layer.
As a kind of preferred version, the described moving utmost point includes circular substrate, and the aforementioned first two-sided annulus movable plate electrode, the second two-sided annulus movable plate electrode and shading ring all form from the extension of circular substrate front side one.
As a kind of preferred version, describedly to decide the utmost point and include circular substrate, aforementioned single face is decided pole axis, two-sided annulus fixed plate, single face annulus fixed plate and is all extended from circular substrate rear side one and form.
As a kind of preferred version, the described moving utmost point the and decide utmost point by peripheral micro screw location, each micro screw overlap separately to have stage clip to control to move the utmost point and reset.
The present invention compared with prior art has obvious advantage and beneficial effect, and particularly, as shown from the above technical solution, it mainly is:
One, by moving the utmost point and deciding extremely all to be designed to comprise plural coaxial circles circumpolar plate, should move the utmost point and the mutually nested combination of each pole plate of deciding the utmost point, can form four groups of above ring-type shunt capacitances, so, the moving utmost point with measured object when deciding the utmost point and move vertically, each organizes the variation that the area of effective coverage between the two-plate of electric capacity all produces homomorphosis, it is cumulative that each organizes the differential change amount, under the prerequisite of constancy of volume, when having increased to a great extent fine motion the moving utmost point with decide the interpolar area total variation, electric capacity total variation when having increased fine motion, thereby precision and sensitivity when greatly having improved the microspur measurement, it more can satisfy the demand of microminiaturized application scenario.
Two, aforementioned decide the utmost point and moving extremely all be to extend respective electrode plate by circular substrate one side one, it is simple in structure, be easy to processing and fabricating, has reduced production cost.
Three, the moving utmost point and the periphery of decide utmost point are provided with screen layer, have effectively reduced the impact of edge effect on measuring accuracy, higher precision and sensitivity when being conducive to guarantee the microspur measurement.
For more clearly setting forth architectural feature of the present invention and effect, the present invention is described in detail below in conjunction with accompanying drawing and specific embodiment.
Description of drawings
Fig. 1 a and Fig. 1 b be in the prior art differential variable-pole apart from type capacitive transducer principle schematic;
Fig. 2 a and Fig. 2 b are differential type capacitor sensor with changed area principle schematic in the prior art (planar line displacement type typical structure);
Fig. 3 a and Fig. 3 b are differential type capacitor sensor with changed area principle schematic in the prior art (angular displacement type typical structure);
Fig. 4 a is the structural representation of the present invention's preferred embodiment;
Fig. 4 b is the moving utmost point and decide the structural representation of the utmost point in the present invention's the preferred embodiment;
Fig. 4 c is the moving utmost point and the binding site synoptic diagram of deciding the utmost point in the present invention's the preferred embodiment.
The accompanying drawing identifier declaration:
10, single face pole plate 20, two-sided pole plate
30, single face pole plate
40, fixed plate 50, movable plate electrode
60, fixed plate 70, movable plate electrode
100, the moving utmost point 101, circular substrate
102, the first two-sided annulus movable plate electrode 103, the second two-sided annulus movable plate electrode
104, shading ring 105, the first accommodating cavity
106, the second accommodating cavity
200, decide the utmost point 201, circular substrate
202, single face is decided pole axis 203, two-sided annulus fixed plate
204, single face annulus fixed plate 205, screen layer
301, micro screw 302, stage clip
Embodiment
Please refer to shown in Fig. 4 a to Fig. 4 C, it has demonstrated the concrete structure of the present invention's preferred embodiment.Should the parallel capacitance displacement sensors of many rings, it includes decides the utmost point 200 and can be axially movable being nested in decided the interior moving utmost point 100 of the utmost point 200, and it is similar to cylindrical wire displacement type capacitance type sensor.When applying the present invention to the fine motion range finding, the moving utmost point 100 is experienced the object under test small displacement by gauge head, decide the utmost point 200 and link to each other with fixed base, thereby the position of deciding the utmost point 200 remains unchanged, the moving utmost point 100 that links to each other with fine motion object to be measured is by relative to the variation of moving the realization polar plate area of deciding the utmost point 200.
Shown in Fig. 4 b, should moving utmost point 100 include circular substrate 101 and extend from circular substrate 101 front side one and form and the first two-sided annulus movable plate electrode 102, second two-sided annulus movable plate electrode 103 and the shading ring 104 of coaxial setting, this shading ring 104 is arranged at the periphery of the second two-sided annulus movable plate electrode 103, and the spacing of this shading ring 104 and the second two-sided annulus movable plate electrode 103 is greater than the thickness of following single face annulus fixed plate 204; Be formed with the first accommodating cavity 105 in this first two-sided annulus movable plate electrode 102, be formed with the second accommodating cavity 106 between this first two-sided annulus movable plate electrode 102 and the second two-sided annulus movable plate electrode 103; Should decide the utmost point 200 include circular substrate 201 and form and the single face of coaxial setting is decided pole axis 202, two-sided annulus fixed plate 203, single face annulus fixed plate 204 from circular substrate 201 rear side one extension; And the axial length that aforementioned single face is decided pole axis 202, two-sided annulus fixed plate 203, single face annulus fixed plate the 204, first two-sided annulus movable plate electrode 102 and the second two-sided annulus movable plate electrode 103 equates and two ends are corresponding flushes.
The diameter of the spacing, the first two-sided annulus movable plate electrode 102 that aforementioned single face is decided pole axis 202 and the spacing of two-sided annulus fixed plate 203, two-sided annulus fixed plate 203 and single face annulus fixed plate 204 and the spacing of the second two-sided annulus movable plate electrode 103, the cylindrical groove in the first two-sided annulus movable plate electrode 103 all equates; The thickness that aforementioned single face is decided the diameter of pole axis 202 and two-sided annulus fixed plate 203, single face annulus fixed plate the 204, first two-sided annulus movable plate electrode 102, the second two-sided annulus movable plate electrode 103 all equates; The internal diameter of this first two-sided annulus movable plate electrode 102 is decided the external diameter of pole axis 202 greater than single face, the spacing of this first two-sided annulus movable plate electrode 102 and the second two-sided annulus movable plate electrode 103 is greater than the thickness of two-sided annulus fixed plate 203, and the internal diameter of this single face annulus fixed plate 204 is greater than the external diameter of the second two-sided annulus movable plate electrode 103; Shown in Fig. 4 c, be M if set the moving utmost point 100 with each coaxial circles circumpolar plate thickness of deciding on the utmost point 200, spacing is N, then spacing N must greater than thickness M, so, can satisfy and leave certain interval between each corresponding pole plate for adding electrolyte.
And for example shown in Fig. 4 c, this first two-sided annulus movable plate electrode 102 is matched with between single face annulus fixed plate 204 and the two-sided annulus fixed plate 203, and the moving utmost point 103 plates of the second two-sided annulus are matched with two-sided annulus fixed plate 203 and single face is decided between the pole axis 202.So, this single face internal face of deciding the outside wall surface of internal face, this second two-sided annulus movable plate electrode 103 of the outside wall surface of internal face, this two-sided annulus fixed plate 203 of the outside wall surface of internal face, this first two-sided annulus movable plate electrode 102 of the outside surface of pole axis 202 and the first two-sided annulus movable plate electrode 102 and two-sided annulus fixed plate 203 and the second two-sided annulus movable plate electrode 103 and single face annulus fixed plate 204 consists of respectively totally four groups of capacitor C 1, C2, C3, C4; Certainly, also can and decide the extremely upper how corresponding pole plate that arranges in the moving utmost point, thereby consist of the electric capacity of more groups of numbers.
The principle of work of the parallel capacitance displacement sensor of ring is as follows more than summary the present invention: the moving utmost point 100 with measured object when deciding the utmost point 200 and move vertically, each pole plate of the moving utmost point 100 and decide effectively changing over against area between each respective electrode plate of the utmost point 200, be that aforementioned four groups of electric capacity change, the capacitance change that the electric capacity total variation of sensor equals four groups of electric capacity adds up, and goes out the fine motion distance of measured object according to the total capacitance variable quantity backwards calculation after cumulative.
Need to prove, the shading ring 104 of the aforementioned moving the utmost point 100 and outside wall surface of single face annulus fixed plate 204 is designed to screen layer 205, its purpose is effectively to reduce edge effect to the impact of measuring accuracy, is conducive to guarantee microspur higher precision and sensitivity when measuring.
In addition, the aforementioned moving the utmost point 100 and decide utmost point 200 by peripheral micro screw 301 location, each micro screw 301 overlap separately to have stage clip 302 to control to move the utmost point 100 and reset.
Design focal point of the present invention is, main system will be by moving the utmost point and deciding extremely all to be designed to comprise plural coaxial circles circumpolar plate, should move the utmost point and the mutually nested combination of each pole plate of deciding the utmost point, can form four groups of above ring-type shunt capacitances, so, the moving utmost point with measured object when deciding the utmost point and move vertically, each organizes the variation that the area of effective coverage between the two-plate of electric capacity all produces homomorphosis, it is cumulative that each organizes the differential change amount, under the prerequisite of constancy of volume, when having increased to a great extent fine motion the moving utmost point with decide the interpolar area total variation, electric capacity total variation when having increased fine motion, thereby greatly improved precision and sensitivity when microspur is measured, it more can satisfy the demand of microminiaturized application scenario.
The above, it only is preferred embodiment of the present invention, be not that technical scope of the present invention is imposed any restrictions, so every foundation technical spirit of the present invention all still belongs in the scope of technical solution of the present invention any trickle modification, equivalent variations and modification that above embodiment does.
Claims (10)
1. the parallel capacitance displacement sensor of ring more than a kind includes the moving utmost point that cooperatively interacts and decides the utmost point, it is characterized in that: this decide the utmost point include coaxial and from inside to outside the single face that arranges of spacing decide pole axis, two-sided annulus fixed plate, single face annulus fixed plate; Should include corresponding decide utmost point setting and coaxial the first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode by the moving utmost point, be formed with the first accommodating cavity in this first two-sided annulus movable plate electrode, be formed with the second accommodating cavity between this first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode; Should moving utmost point can be axially movable be nested in fixed extremely in, aforementioned single face is decided pole axis and is matched with in the first accommodating cavity and with the first two-sided annulus movable plate electrode internal face and consists of the first electric capacity; Aforementioned two-sided annulus fixed plate is matched with in the second accommodating cavity and its inside and outside wall consists of second and third electric capacity with the outside wall surface of the first two-sided annulus movable plate electrode, the internal face of the second two-sided annulus movable plate electrode respectively; It is peripheral that aforementioned single face annulus fixed plate is matched with the second two-sided annulus movable plate electrode, and the outside wall surface of single face annulus fixed plate and the second two-sided annulus movable plate electrode consists of the 4th electric capacity.
2. the parallel capacitance displacement sensor of many rings according to claim 1, it is characterized in that: the internal diameter of the described first two-sided annulus movable plate electrode is decided the external diameter of pole axis greater than single face, the spacing of this first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode is greater than the thickness of two-sided annulus fixed plate, and the internal diameter of this single face annulus fixed plate is greater than the external diameter of the second two-sided annulus movable plate electrode.
3. the parallel capacitance displacement sensor of many rings according to claim 1 is characterized in that: it is equal and two ends are corresponding flushes that described single face decide the axial length of pole axis, two-sided annulus fixed plate, single face annulus fixed plate, the first two-sided annulus movable plate electrode and the second two-sided annulus movable plate electrode.
4. the parallel capacitance displacement sensor of many rings according to claim 1 is characterized in that: the diameter of the cylindrical groove that the spacing, the first two-sided annulus movable plate electrode that described single face decide pole axis and the spacing of two-sided annulus fixed plate, two-sided annulus fixed plate and single face annulus fixed plate and spacing, the first two-sided annulus movable plate electrode of the second two-sided annulus movable plate electrode are interior all equates.
5. the parallel capacitance displacement sensor of many rings according to claim 4 is characterized in that: the thickness that described single face decide the diameter of pole axis and two-sided annulus fixed plate, single face annulus fixed plate, the first two-sided annulus movable plate electrode, the second two-sided annulus movable plate electrode is all equal.
6. the parallel capacitance displacement sensor of many rings according to claim 1, it is characterized in that: the periphery of the described second two-sided annulus movable plate electrode arranges shading ring, aforementioned single face annulus fixed plate is between shading ring and the second two-sided annulus movable plate electrode, and the spacing of shading ring and the second two-sided annulus movable plate electrode is greater than the thickness of single face annulus fixed plate.
7. the parallel capacitance displacement sensor of many rings according to claim 1, it is characterized in that: the outside wall surface of described single face annulus fixed plate is screen layer.
8. the parallel capacitance displacement sensor of many rings according to claim 6, it is characterized in that: the described moving utmost point includes circular substrate, and the aforementioned first two-sided annulus movable plate electrode, the second two-sided annulus movable plate electrode and shading ring all form from the extension of circular substrate front side one.
9. the parallel capacitance displacement sensor of many rings according to claim 1 is characterized in that: describedly decide the utmost point and include circular substrate, aforementioned single face is decided pole axis, two-sided annulus fixed plate, single face annulus fixed plate and is all formed from circular substrate rear side one extension.
10. the parallel capacitance displacement sensor of many rings according to claim 1 is characterized in that: the described moving utmost point the and decide utmost point by peripheral micro screw location, each micro screw overlap separately to have stage clip to control to move the utmost point and reset.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220411836 CN202793305U (en) | 2012-08-17 | 2012-08-17 | Multi-ring parallel type capacitor displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220411836 CN202793305U (en) | 2012-08-17 | 2012-08-17 | Multi-ring parallel type capacitor displacement sensor |
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| Publication Number | Publication Date |
|---|---|
| CN202793305U true CN202793305U (en) | 2013-03-13 |
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ID=47820556
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|---|---|---|---|
| CN 201220411836 Expired - Fee Related CN202793305U (en) | 2012-08-17 | 2012-08-17 | Multi-ring parallel type capacitor displacement sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102840822A (en) * | 2012-08-17 | 2012-12-26 | 华侨大学 | Multi-ring parallel connection type capacitance displacement sensor |
| CN103557781A (en) * | 2013-09-10 | 2014-02-05 | 林立 | Dual monopole capacitor differential displacement sensor |
| CN113218295A (en) * | 2021-05-10 | 2021-08-06 | 上海海事大学 | Swing angle and rope length measuring device and method for double-lifting bridge crane |
-
2012
- 2012-08-17 CN CN 201220411836 patent/CN202793305U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102840822A (en) * | 2012-08-17 | 2012-12-26 | 华侨大学 | Multi-ring parallel connection type capacitance displacement sensor |
| CN102840822B (en) * | 2012-08-17 | 2015-04-15 | 华侨大学 | Multi-ring parallel connection type capacitance displacement sensor |
| CN103557781A (en) * | 2013-09-10 | 2014-02-05 | 林立 | Dual monopole capacitor differential displacement sensor |
| CN113218295A (en) * | 2021-05-10 | 2021-08-06 | 上海海事大学 | Swing angle and rope length measuring device and method for double-lifting bridge crane |
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Granted publication date: 20130313 Termination date: 20130817 |