CN104459201B - Accelerometer - Google Patents
Accelerometer Download PDFInfo
- Publication number
- CN104459201B CN104459201B CN201310426729.0A CN201310426729A CN104459201B CN 104459201 B CN104459201 B CN 104459201B CN 201310426729 A CN201310426729 A CN 201310426729A CN 104459201 B CN104459201 B CN 104459201B
- Authority
- CN
- China
- Prior art keywords
- substrate
- accelerometer
- detection mass
- mass
- comb teeth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
The present invention provides a kind of accelerometer, including substrate, detect mass and support pedestal, support pedestal is fixed on substrate, detection mass is suspended at the surface of support pedestal by a shell fragment being oppositely arranged in a non-symmetrical way, when accelerometer has one with the acceleration of substrate surface vertical direction, detect that mass is rotated by axle of straight line where shell fragment, substrate includes cavity and the first limited block, cavity is arranged at the larger side of detection mass quality, for preventing detection mass from touching substrate in rotation process, first limited block is located between support pedestal and cavity, for limiting the maximum position that detection mass can be gone to.The advantage of the invention is that, first limited block is set close to support pedestal, the restoring force of detection mass can be significantly increased, cavity is set on substrate, it is to avoid because the first limited block is touched close to the caused detection mass of support pedestal setting with the raised edge touched or detect mass on substrate with the substrate.
Description
Technical field
The present invention relates to accelerometer technical field, more particularly to a kind of accelerometer of high restoring force.
Background technology
There is a mass inside capacitive accelerometer, from the point of view of individual unit, it is the plate condenser of standard.
The change of acceleration drives the movement of movable mass block so as to change the spacing and facing area at capacity plate antenna the two poles of the earth, passes through measurement
Capacitance change calculates acceleration.Capacitive accelerometer has high, low in energy consumption sensitivity, good temp characteristic, can be operated in
The advantages of under dynamic balance closed loop mode, thus obtained extensive research and application.But current capacitive accelerometer
Restoring force is not met by demand.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of accelerometer, can have higher restoring force.
In order to solve the above problems, the invention provides a kind of accelerometer, including substrate, detection mass and branch support group
Seat, the support pedestal is fixed on the substrate, and the detection mass is by a shell fragment being oppositely arranged with asymmetrical
Mode is suspended at the surface of the support pedestal, when the accelerometer has the acceleration of one and substrate surface vertical direction
When, the detection mass is rotated by axle of straight line where shell fragment, and the substrate includes cavity and the first limited block, the cavity
The larger side of the detection mass quality is arranged at, for preventing the detection mass from touching in rotation process described
Substrate, first limited block is located between the support pedestal and the cavity, can be with for limiting the detection mass
The maximum position gone to.
Further, the accelerometer includes an insulating barrier, the full cavity of insulating barrier filling.
Further, the accelerometer includes at least one first comb teeth-shaped capacitance group, the first comb teeth-shaped capacitance group
Including the first sense capacitance plate on the substrate is fixedly installed, it is arranged on the detection mass and the described first sensing
Second sense capacitance plate of capacitor board relevant position, when the accelerometer has a first direction parallel with substrate surface
During acceleration, the electric capacity of the first comb teeth-shaped capacitance group changes.
Further, the first comb teeth-shaped capacitance group is also including being arranged on support pedestal and the first sense capacitance plate
3rd sense capacitance plate of relevant position.
Further, the accelerometer includes two the first comb teeth-shaped capacitance groups, the first comb teeth-shaped capacitance group along with
The parallel first direction of substrate surface is oppositely arranged two-by-two.
Further, the accelerometer includes at least one second comb teeth-shaped capacitance group, the second comb teeth-shaped capacitance group
Including the first sense capacitance plate on the substrate is fixedly installed, it is arranged on the detection mass and the described first sensing
Second sense capacitance plate of capacitor board relevant position, when the accelerometer has a second direction parallel with substrate surface
During acceleration, the electric capacity of the second comb teeth-shaped capacitance group changes, and the first direction is vertical with the second direction.
Further, the accelerometer includes two the second comb teeth-shaped capacitance groups, the second comb teeth-shaped capacitance group along with
The parallel second direction of substrate surface is oppositely arranged two-by-two.
Further, the substrate also includes the second limited block, and second limited block corresponds to the detection mass matter
Measure less side to set, for limiting the maximum position that the detection mass can be gone to.
Further, in addition at least two electrodes, described two electrodes are oppositely arranged on substrate and correspond respectively to institute
Detection mass quality larger side and the less side of quality are stated, for forming electric capacity with the detection mass.
Further, the support pedestal is fixed on the substrate by the way of multiple spot fixation.
It is an advantage of the current invention that the first limited block is set close to support pedestal, detection mass can be significantly increased
Restoring force, cavity is set on substrate, it is to avoid due to the first limited block close to support pedestal set caused by detection mass
Touched with the raised touching on the substrate or the edge of detection mass with the substrate.
Brief description of the drawings
Fig. 1 show the top view of the embodiment of accelerometer first of the present invention；
Fig. 2 show A-A in Fig. 1 to schematic cross-section；
Fig. 3 show the structural representation of another embodiment of accelerometer of the present invention；
Fig. 4 A show the schematic diagram before being moved in the first limited block；
Fig. 4 B show the schematic diagram after being moved in the first limited block；
Fig. 5 show the top view of the embodiment of accelerometer second of the present invention；
Accompanying drawing 6 show the schematic diagram for the accelerometer that insulating barrier is set on substrate.
Embodiment
The embodiment of the accelerometer provided below in conjunction with the accompanying drawings the present invention elaborates.
It is the top view of the embodiment of accelerometer first of the present invention shown in Fig. 1.The A-A that Fig. 2 is shown in Fig. 1 is cut
Face schematic diagram.Referring to shown in Fig. 1 and Fig. 2, the accelerometer 100 includes substrate 1, detection mass 2 and support pedestal 3.
The support pedestal 3 is fixed on the substrate 1, in this embodiment, and the support pedestal 3 uses one
The fixed mode of point is fixed on substrate 1, in another embodiment of the invention, and the support pedestal 3 uses many solid points
Fixed mode is fixed on substrate 1.
The detection mass 2 is suspended at the support pedestal in a non-symmetrical way by a shell fragment 21 being oppositely arranged
3 surface.The shell fragment 21 can be realized using structures such as cantilevered, spiral shape, branch beam type.The asymmetrical mode refers to
, using the place straight line of shell fragment 21 as line of demarcation, the quality that detection mass 2 is located at the both sides of shell fragment 21 is unequal, detects quality
The quality that block 2 is located at the side of shell fragment 21 is more than the quality that detection mass 2 is located at the opposite side of shell fragment 21.Here, defining the inspection
The larger side of the mass of mass metering block 2 is the first mass 23, and the less side of the detection mass of mass 2 is the second mass
24.When the accelerometer 100 presence one and the acceleration of the surface vertical direction of substrate 1, for example, accelerometer 100 is present
The acceleration of one Z-direction, the detection mass 2 is rotated by axle of the place straight line of shell fragment 21.Because detection mass 2 is with non-
Symmetrical mode is suspended at the surface of support pedestal 3 by being oppositely arranged shell fragment 21, so, the detection mass 2 is with shell fragment
21 place straight lines are the axial direction side Sloped rotating of the first mass 23.
The substrate 1 includes the first limited block 11, for limiting the maximum position that the detection mass 2 can be gone to.
In the case where the detection mass 2 is moved to the substrate 1, when the first mass 23 is close to substrate 1 to certain distance, institute
State the first mass 23 that the first limited block 11 touches the detection mass 2 so that detection mass 2 is made by a power
With detection mass 2 stops moving and resetting to substrate 1, can in the side of the first mass 23 so as to limit the detection mass 2
With the maximum position gone to, prevent detection mass 2 from touching the substrate 1.In the present invention, the power is defined as detecting mass
2 restoring force F.First limited block 11 it is in a unlimited number, can according to the design of specific accelerometer need and set.
In present embodiment, first limited block 11 is two, is set corresponding to first mass 23, described to prevent
Detection mass 2 touches the substrate 1.As shown in fig. 1, the first limited block 11 is represented using dotted line.
Further, in order to limit it is described detection mass 2 the rotary maximum position of the second mass 24, it is ensured that institute
State detection mass 2 and do not touch the substrate 1 in motion process, the substrate 1 also includes the second limited block 22, described second
Limited block 22 corresponds to the less side of the detection mass of mass 2 and set, i.e., set corresponding to the second mass 24.In the inspection
In the case that mass metering block 2 is moved to the substrate 1, when the second mass 24 of detection mass 2 is close to the spacing of substrate 1 to one
From second limited block 22 touches second mass 24 so that detection mass 2 is acted on by a power, second
Mass 24 stops moving and resetting to substrate 1, so that limiting the detection mass 2 can go in the side of the second mass 24
Maximum position, prevent detection mass 2 touch the substrate 1.Second limited block 22 it is in a unlimited number, can be according to tool
The design of body accelerometer needs and set.In this embodiment, second limited block 22 be two, and with it is described
First limited block 11 is correspondingly arranged.In other embodiments of the invention, the limited block of the first limited block 11 and second
22 be one, as shown in figure 3, the first limited block 11 and the second limited block 22 are separately positioned on the first mass 23 and the second matter
The centre of gauge block 24.
Detect the restoring force F and the first limited block 11 positioned at the lower section of the first mass 23 to the place of shell fragment 21 of mass 2
Straight line apart from L have a functional relation：
F=K/L2
Wherein K is the rotational stiffness of detection mass 2, the first limited block 11 below the first mass 23 to shell fragment
21 place straight lines are shown in Fig. 1 apart from L.
In the case where detection mass 2 is constant, detect that the rotational stiffness K of mass 2 is constant.It is constant in rotational stiffness K
In the case of, the restoring force F and the first limited block 11 positioned at the lower section of the first mass 23 to the place straight line of shell fragment 21 away from
Square being inversely proportional from L, i.e. the first limited block 11 is smaller apart from L to the place straight line of shell fragment 21, and restoring force F is bigger.
The present invention compared with prior art, will be moved in the first limited block 11, be shortened and be located at the of the lower section of the first mass 23
One limited block 11 to the place straight line of shell fragment 21 apart from L so that increase detection mass 2 restoring force.But, the first limited block
Moved in 11 and there are two obstructions：If the distance the first, moved in the first limited block 11 is excessive, the side of the first mass 23 can be caused
Edge touches substrate 1, causes to detect the adhesion of mass 2 and the substrate 1；2nd, surface may not during manufacture for substrate 1
It is smooth, there is small projection, after being moved in the first limited block 11, the raised position does not change, and may touch the inspection
Mass metering block 2, causes to detect the adhesion of mass 2 and the substrate 1.
Fig. 4 A show the schematic diagram before being moved in the first limited block 11, and Fig. 4 B show showing after being moved in the first limited block 11
It is intended to.Referring to shown in Fig. 4 A, on substrate 1 with a projection 12, described raised 12 be probably the surface in the fabrication process of substrate 1
It is rough to bring.Described raised 12 are located between the first limited block 11 and the support pedestal 3, in this case, and first
Mass 23, which is moved down, can touch the first limited block 11 first, without touching projection 12.Referring to shown in Fig. 4 B, first is spacing
Moved in block 11, first limited block 11 is located between described raised 12 and the support pedestal 3, in this case, first
Mass 23, which is moved down, can touch projection 12 first, and this is the result for being not intended to obtain.
With continued reference to Fig. 1 and Fig. 2, for above mentioned problem, accelerometer 100 of the present invention corresponds to the first matter on substrate 1
The position of gauge block 23 is provided with a cavity 13.Set on substrate 1 after cavity 13, in figs. 4 a and 4b shown projection 12
In cavity 13, in this case, detection mass 2 is rotated to substrate 1, and the first limited block 11 is touched first, without
Touch projection 12.Preferably, the outer ledge of the cavity 13 protrudes from the edge of the first mass 23, so that, in detection
Mass 2 to substrate 1 rotate when, the substrate 1 is not touched at the edge of the first mass 23.
Accelerometer 100 of the present invention coordinates cavity 13 with the first limited block 11, when detection mass 2 is rotated to substrate 1
When, in the case where the detection mass 2 touches first limited block 11, the detection mass 2 does not touch the base
Plate 1.The present invention can improve the restoring force of detection mass 2, can guarantee that detection mass 2 does not touch substrate 1 again, will not occur
Detect the situation that mass 2 is adhered to the substrate 1.
The accelerometer 100 also includes at least two electrodes 4, and described two electrodes 4 are oppositely arranged on substrate 1
And correspond respectively to the larger side and the less side of quality of the detection mass of mass 2, for the detection quality
Block formation electric capacity, i.e., respectively at the mass 24 of the first mass 23 and second formation electric capacity.In this embodiment,
Accelerometer 100 includes four electrodes 4, and four electrodes 4 are relative two-by-two to correspond respectively to the first of the detection mass
The mass 24 of mass 23 and second, as shown in phantom in Figure 1.When the accelerometer 100 is vertical with the surface of substrate 1 in the presence of one
During the acceleration in direction, the detection mass 2 is rotated by axle of the place straight line of shell fragment 21, due to the matter of the first mass 23
Amount is more than the quality of the second mass 24, then the first mass 23 is tilted to substrate 1, and the second mass 24 is away from substrate 1, at this
In the case of kind, the electric capacity between the first mass 23, the second mass 24 and electrode 4 changes, by measuring the differential electrical
Hold, acceleration of the accelerometer 100 in Z-direction can be measured, so as to detect the object for laying the accelerometer 100 in Z
The acceleration of direction of principal axis.
Further, in the second embodiment of the invention, in order to detect the acceleration and Y direction of X-direction
Acceleration, the accelerometer 100 is additionally provided with comb teeth-shaped capacitance group.
Fig. 5 show the top view of the embodiment of accelerometer second of the present invention.It is shown in Figure 5, it is described to accelerate
Degree meter 100 includes at least one first comb teeth-shaped capacitance group 5, in this embodiment, including two the first comb teeth-shaped electricity
Appearance group 5.Described two first comb teeth-shaped capacitance groups 5 are oppositely arranged two-by-two along the first direction parallel with the surface of substrate 1.In this tool
In body embodiment, the first direction is X-direction.The first comb teeth-shaped capacitance group 5 includes being fixedly installed on the base
The first sense capacitance plate 51 on plate 1, is arranged on the detection mass 2 and the relevant position of the first sense capacitance plate 51
The second sense capacitance plate 52, can also include be arranged on support pedestal 3 on and the relevant position of the first sense capacitance plate 51
The 3rd sense capacitance plate 53.
When the accelerometer 100 has the acceleration of a first direction, the detection mass 2 is put down in the first direction
Move, cause the first sense capacitance plate 51 and the second sense capacitance plate 52 and the first sense capacitance plate 51 and the 3rd sense capacitance plate 53
Between overlapping area change, so as to cause the electric capacity of the first comb teeth-shaped capacitance group 5 to change, thereby measure acceleration
100 acceleration in a first direction is counted, the acceleration of the object of the accelerometer 100 in a first direction is laid so as to detect.
Further, the accelerometer 100 also includes at least one second comb teeth-shaped capacitance group 6, in this specific embodiment party
In formula, the accelerometer 100 includes two the second comb teeth-shaped capacitance groups 6, described two second comb teeth-shaped capacitance groups 6 along with base
The parallel second direction in the surface of plate 1 is oppositely arranged two-by-two, and the second direction is vertical with the first direction, in this specific implementation
In mode, the second direction is Y direction.The second comb teeth-shaped capacitance group 6 includes being fixedly installed on the substrate 1
First sense capacitance plate 61, is arranged on second with the relevant position of the first sense capacitance plate 61 on the detection mass 2
Sense capacitance plate 62.
When the accelerometer 100 has the acceleration of a second direction, the detection mass 2 is put down in a second direction
Move, cause the distance between the first sense capacitance plate 61 and second sense capacitance plate 62 to change, so as to cause the second broach
The electric capacity of shape capacitance group 6 changes, and thereby measures accelerometer 100 in the acceleration of second direction, is laid so as to detect
Acceleration of the object of the accelerometer 100 in second direction.
Further, in the other embodiment of the present invention, the accelerometer 100 also includes insulating barrier 14, the institute of accompanying drawing 6
It is shown as setting the schematic diagram of the accelerometer 100 of insulating barrier 14 on substrate 1.Referring to shown in accompanying drawing 6, the insulating barrier 14 is filled up
The cavity 13.The insulating barrier 14 can be oxide layer.Because insulating barrier 14 fills up the cavity 13, substrate 1 can be caused
On projection 12 be capped, substrate 1 towards detection mass 2 one-sided smooth, when detect mass 2 moved to substrate 1 when, no
Have the situation generation that detection mass 2 touches projection 12.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (9)
1. a kind of accelerometer, including substrate, detection mass and support pedestal, the support pedestal are fixed on the substrate
On, the detection mass is suspended at the surface of the support pedestal by a shell fragment being oppositely arranged in a non-symmetrical way,
When the accelerometer has one with the acceleration of substrate surface vertical direction, the detection mass is with straight line where shell fragment
Rotated for axle, it is characterised in that the substrate includes cavity and the first limited block, the cavity is arranged at the detection mass
The larger side of quality, for preventing the detection mass from touching the substrate, first limited block in rotation process
Between the support pedestal and the cavity, for limiting the maximum position that the detection mass can be gone to, also wrap
Include at least two electrodes, described two electrodes are oppositely arranged on substrate and to correspond respectively to the detection mass quality larger
Side and the less side of quality, for it is described detection mass formation electric capacity.
2. accelerometer according to claim 1, it is characterised in that the accelerometer further comprises an insulating barrier,
The full cavity of insulating barrier filling.
3. accelerometer according to claim 1, it is characterised in that the accelerometer further comprise at least one
One comb teeth-shaped capacitance group, the first comb teeth-shaped capacitance group includes the first sense capacitance plate on the substrate is fixedly installed,
The second sense capacitance plate with the first sense capacitance plate relevant position on the detection mass is arranged on, is accelerated when described
When degree meter has the acceleration of a first direction parallel with substrate surface, the electric capacity of the first comb teeth-shaped capacitance group becomes
Change.
4. accelerometer according to claim 3, it is characterised in that the first comb teeth-shaped capacitance group also includes being arranged on
Support the 3rd sense capacitance plate with the first sense capacitance plate relevant position on pedestal.
5. the accelerometer according to claim 3 or 4, it is characterised in that the accelerometer includes two the first broach
Shape capacitance group, the first comb teeth-shaped capacitance group is oppositely arranged two-by-two along the first direction parallel with substrate surface.
6. accelerometer according to claim 3, it is characterised in that the accelerometer further comprise at least one
Two comb teeth-shaped capacitance groups, the second comb teeth-shaped capacitance group includes the first sense capacitance plate on the substrate is fixedly installed,
The second sense capacitance plate with the first sense capacitance plate relevant position on the detection mass is arranged on, is accelerated when described
When degree meter has the acceleration of a second direction parallel with substrate surface, the electric capacity of the second comb teeth-shaped capacitance group becomes
Change, the first direction is vertical with the second direction.
7. accelerometer according to claim 6, it is characterised in that shown accelerometer includes two the second comb teeth-shaped electricity
Appearance group, the second comb teeth-shaped capacitance group is oppositely arranged two-by-two along the second direction parallel with substrate surface.
8. accelerometer according to claim 1, it is characterised in that the substrate also includes the second limited block, described the
Two limited blocks correspond to the less side of detection mass quality and set, and can be gone to for limiting the detection mass
Maximum position.
9. accelerometer according to claim 1, it is characterised in that the support pedestal is consolidated by the way of multiple spot fixation
Determine on the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310426729.0A CN104459201B (en) | 2013-09-18 | 2013-09-18 | Accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310426729.0A CN104459201B (en) | 2013-09-18 | 2013-09-18 | Accelerometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104459201A CN104459201A (en) | 2015-03-25 |
| CN104459201B true CN104459201B (en) | 2017-10-10 |
Family
ID=52905585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310426729.0A Active CN104459201B (en) | 2013-09-18 | 2013-09-18 | Accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104459201B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932608B (en) * | 2015-12-25 | 2020-02-18 | 上海矽睿科技有限公司 | Acceleration sensing unit and accelerometer |
| CN107340866B (en) * | 2017-06-30 | 2020-03-13 | 武汉天马微电子有限公司 | Display panel, display device and acceleration detection method |
| US10502759B2 (en) * | 2017-10-24 | 2019-12-10 | Nxp Usa, Inc. | MEMS device with two-stage motion limit structure |
-
2013
- 2013-09-18 CN CN201310426729.0A patent/CN104459201B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104459201A (en) | 2015-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI375167B (en) | ||
| CN202600661U (en) | Touch screen detection equipment, touch control device and portable electronic equipment | |
| CN103116432B (en) | Three-dimensional manipulating control method, device and the mobile terminal thereof of a kind of touch-screen | |
| CN104459201B (en) | Accelerometer | |
| CN101840294A (en) | Method for scanning projective capacitive touch panel | |
| JP5220201B2 (en) | Method and system for measuring position on a surface capacitive touch panel using a flying capacitor | |
| CN103543292A (en) | Composite accelerometer based on capacitance effect and tunnel effect | |
| CN106484188A (en) | A kind of touch-control display panel and pressure detection method | |
| CN203606385U (en) | Combined type accelerometer based on capacitance effect and tunnel effect | |
| CN102840822B (en) | Multi-ring parallel connection type capacitance displacement sensor | |
| CN104459200B (en) | Three axis accelerometer | |
| CN111220063A (en) | Method for detecting object approaching distance | |
| CN103176660B (en) | Position transducer | |
| CN104764904B (en) | A kind of three axle piezoelectric accelerometers | |
| CN103644836A (en) | Target-material thickness measuring instrument | |
| CN106933433B (en) | A kind of preparation method of touch sensing and touch sensing | |
| CN104978073A (en) | Induction type touch screen and control method thereof | |
| CN208000326U (en) | A kind of ultracapacitor test fixture | |
| CN104459199B (en) | capacitive accelerometer | |
| CN202793305U (en) | Multi-ring parallel type capacitor displacement sensor | |
| CN102052951B (en) | Measurement device and method for multi-phase interface liquid level based on dual-modality sensor | |
| CN101834065A (en) | Variable-area capacitive structure capable of adjusting elasticity coefficient of micro mechanical device | |
| CN203758549U (en) | Capacitive sensor used for simultaneously obtaining inclination angle and liquid level of container | |
| US10712893B2 (en) | Single-surface position sensor and positioning method thereof | |
| JP2014041034A (en) | Measuring device and measuring method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 200000 room 307, floor 3, No. 1328, Dingxi Road, Changning District, Shanghai Patentee after: Shanghai Sirui Technology Co.,Ltd. Address before: 201815 room 3157, building 3, No. 1368, Xingxian Road, Jiading District, Shanghai Patentee before: Shanghai Silicon Technology Co.,Ltd. |
|
| CP03 | Change of name, title or address |