CN103644836A - Target-material thickness measuring instrument - Google Patents

Target-material thickness measuring instrument Download PDF

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Publication number
CN103644836A
CN103644836A CN201310645952.4A CN201310645952A CN103644836A CN 103644836 A CN103644836 A CN 103644836A CN 201310645952 A CN201310645952 A CN 201310645952A CN 103644836 A CN103644836 A CN 103644836A
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CN
China
Prior art keywords
target
range cells
thickness measurement
measurement equipment
slide block
Prior art date
Application number
CN201310645952.4A
Other languages
Chinese (zh)
Inventor
李胜斌
高连龙
董斌
车奉周
Original Assignee
京东方科技集团股份有限公司
北京京东方显示技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 京东方科技集团股份有限公司, 北京京东方显示技术有限公司 filed Critical 京东方科技集团股份有限公司
Priority to CN201310645952.4A priority Critical patent/CN103644836A/en
Publication of CN103644836A publication Critical patent/CN103644836A/en

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Abstract

The invention discloses a target-material thickness measuring instrument and relates to the technical field of measuring tools. The measuring instrument is invented to improve accuracy of measurement data and to simplify the target-material thickness measurement process and improve work efficiency. The target-material measuring instrument includes a support body and a ranging unit. The support is used for being arranged at a side opposite to a to-be-tested area of the target material. The ranging unit is supported on the support body. The ranging unit is arranged to be facing the to-be-tested area and the ranging unit is used for measuring the thickness of the target material. The measuring instrument is mainly used for measuring the allowance of the target material.

Description

A kind of target thickness measurement equipment

Technical field

The present invention relates to the technical field of survey instrument, relate in particular to a kind of target thickness measurement equipment.

Background technology

Target is that the coating system by magnetron sputtering, multi-arc ion coating or other types is suitably sputtering at the sputtering source that forms various function films on substrate under process conditions.In other words, target is the target material of high speed lotus energy particle bombardment, in sputter (Sputter) technique, when different capacity density, different output can energy high energy particle during with different target interaction, can produce different splash effect.

When carrying out sputtering technology, along with the increase of substrate upper film thickness, target is consumed gradually, and the thickness of target is attenuate thereupon.The surplus thickness of target is to affect the important parameter that apparatus and process is adjusted, and by this parameter, not only can judge whether target needs to change, but also can again adjust for technical parameter, further to improve target utilization, provides foundation.

The specific purpose tool of measuring at present target surplus thickness adopts traditional survey instrument: vernier caliper.During measurement, first the instrument (for example steel ruler) with flat surface is lain on the surface to be measured of target, with vernier caliper, take steel ruler again and measure the distance between steel ruler and target surface to be measured as benchmark, then record the data that now vernier caliper records, last according to target the known thickness before carrying out sputtering technology, can calculate the surplus thickness of target.This measuring method conventionally needs a staff to take vernier caliper to measure, and keep vertical between vernier caliper and steel ruler simultaneously, another person's record data, but hand takes vernier caliper inevitably to make vernier caliper rock or to tilt, cause the data of measurement inaccurate, and this measuring method needs two people jointly to cooperate, operating process is comparatively loaded down with trivial details, reduces work efficiency.

Summary of the invention

Embodiments of the invention provide a kind of target thickness measuring admeasuring apparatus, not only can improve preferably the accuracy of measurement data, and measuring process that can simplified measurement target thickness, increase work efficiency.

For achieving the above object, embodiments of the invention adopt following technical scheme:

The embodiment of the present invention provides a kind of target thickness measurement equipment, comprise supporter, range cells, described supporter is for being arranged on a side relative with the district to be measured of target, range cells described in described supporter upper support, described range cells and described district to be measured are oppositely arranged, and described range cells is for measuring the thickness of described target.

Wherein, described supporter comprises base and back up pad, and described back up pad is fixed on described base, range cells described in described back up pad upper support, and described back up pad is arranged on a side relative with the district to be measured of described target.

Wherein, described base is used for being supported on a platform, and described platform is used for supporting described target, and after described target is supported on described platform, described back up pad and described target are parallel to each other.

Alternatively, the quantity of described base is two, and is arranged on the both sides that described supporter is relative, at two described bases, is supported on after described platform, and described target is between two described supporters.

Alternatively, described back up pad and described base are one-body molded.

Further, described back up pad is provided with chute, and described chute slidably connects sliding part, and described range cells is installed on described sliding part.

Further, described sliding part comprises slide unit and slide block, and described slide unit is contained in described chute, described slide unit and the rotatable connection of described slide block, by rotate described slide block make described range cells near or away from the district to be measured of described target.

Wherein, described slide block is provided with turning knob, by described turning knob, described slide block is rotated.

Further, described slide block is provided with mounting hole, and described range cells is installed in described mounting hole, at described slide block during perpendicular to described back up pad, and the district to be measured that is axially perpendicular to described target of described mounting hole.

Preferably, described range cells is electronic induction range cells.

When described range cells is electronic induction range cells, described electronic induction range cells comprises sounding rod, spring, ball, electronic induction rule, controller and display module, described sounding rod and described spring fitting are in described mounting hole, and one end of described sounding rod by described spring-compressed in described mounting hole, the other end of described sounding rod stretches out described mounting hole, and roll and be connected with described ball, described ball contacts the district to be measured of described target, described electronic induction rule is arranged on described sounding rod, and described electronic induction rule is arranged on the described controller of described electrical connection, described controller is electrically connected to described display module.

Alternatively, described electronic induction range cells comprises distance measuring sensor, controller and display module, the district to be measured of described distance measuring sensor and described target is relative and be arranged on described slide block, and described distance measuring sensor is electrically connected to described controller, and described controller is electrically connected to described display module.

Further, described display module comprises and shows main body and be embedded in the display screen in described demonstration main body, described demonstration main body is arranged on described slide block, and described demonstration main body is provided with switch key, the button that makes zero, maximal value button, minimum value button and mean value button.

A kind of target thickness measurement equipment that the embodiment of the present invention provides, comprise supporter, range cells, described supporter is for being arranged on a side relative with the district to be measured of target, range cells described in described supporter upper support, described range cells and described district to be measured are oppositely arranged, and described range cells is for measuring the thickness of described target, this compares with the range cells of holding in background technology, the present invention can directly support range cells by supporter, avoid occurring causing by holding range cells rocking or tilting of range cells, improve the accuracy of measurement data, and by range cells, measure after the thickness of target operator, operator can complete separately the record of data, and do not need two people's cooperation, simplified operating process, improved work efficiency.

Accompanying drawing explanation

In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.

One of schematic diagram of the target thickness measurement equipment that Fig. 1 provides for the embodiment of the present invention;

Two of the schematic diagram of the target thickness measurement equipment that Fig. 2 provides for the embodiment of the present invention;

Three of the schematic diagram of the target thickness measurement equipment that Fig. 3 provides for the embodiment of the present invention;

The target thickness measurement equipment that Fig. 4 provides for the embodiment of the present invention is measured the schematic diagram of target.

The schematic diagram of range cells in the target thickness measurement equipment that Fig. 5 provides for the embodiment of the present invention;

The schematic diagram of display module in the target thickness measurement equipment that Fig. 6 provides for the embodiment of the present invention.

Accompanying drawing explanation:

100-target thickness measurement equipment, 10-supporter, 101-back up pad, 102-base, 103-chute, 11-range cells, 110-sounding rod, 111-spring, 112-ball, 113-electronic induction rule, 114-shows main body, 115-display screen, 12-sliding part, 120-slide block, 121-slide unit, 13-turning knob, 130-positioning bead, 200-target, 201-district to be measured, 300-carries on the back copper coin

Embodiment

Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Embodiment based in the present invention, the every other embodiment that those of ordinary skills obtain under the prerequisite of not making creative work, belongs to the scope of protection of the invention.

Shown in Fig. 1, the embodiment of the present invention provides a kind of target thickness measurement equipment 100, comprise supporter 10, range cells 11, wherein, supporter 10 is for being arranged on a side relative with the district to be measured 201 of the target 200 shown in Fig. 4, and supporter 10 is supported on platform (can refer to following back of the body copper coin 300 or stationary platform); Range cells 11 is supported on supporter 10, and is oppositely arranged with the district to be measured 201 of target 200, and range cells 11 is for measuring the thickness of target 200.This compares with the range cells 11 of holding in background technology, the present invention can directly support range cells 11 by supporter 10, avoid occurring causing by holding range cells 11 rocking or tilting of range cells 11, improve the accuracy of measurement data, and operator, by range cells 11, measure after the thickness of target 200, operator can complete separately the record of data, and does not need two people's cooperation, simplify operating process, improved work efficiency.

As stated in the Background Art, in sputter (Sputter) technique, along with the increase of substrate (as glass substrate) upper film thickness, target is consumed gradually, and the thickness of target is attenuate thereupon.After completing sputtering technology, the surplus thickness of target is to affect the important parameter that apparatus and process is adjusted.Because target can form rough crest surface after sputter, so general surplus using the minimum thickness of remaining target as target, and the measurement of target surplus, being generally selected in the region falling on target carries out, during measurement, first measure the target thickness of the deepest point in a certain region on remaining target, then mobile range cells is measured the target thickness of the deepest point in next region, obtain like this after a plurality of measurement data, by relatively drawing the surplus of remaining target.

Those skilled in the art can know, before carrying out sputtering technology, target need to first be welded on back of the body copper coin 300, then puts into together vacuum chamber.Carried out after sputtering technology, for the range cells in the present invention is measured the surplus of remaining target, can be by the support body supports in the present invention on back of the body copper coin 300, therefore, the surplus of remaining target is that target as sputter deepest point is to the distance of back of the body copper coin.

It should be noted that, the target thickness measurement equipment 100 that the embodiment of the present invention provides not only can be measured the surplus of remaining target, but also can measure the thickness (not carrying out the target thickness before sputtering technology) of complete target, during measurement, first target is lain in a stationary platform, then supporter 10 is supported on platform, thickness by 11 pairs of complete target zoness of different of range cells is measured, obtain a plurality of measurement data, and draw on complete target the surperficial flatness for high-energy particle bombardment by more a plurality of measurement data, according to this flatness, can suitably adjust technical parameter etc., so that follow-up sputtering technology reaches better effect.

The surplus of measuring remaining target of take is example, and below in conjunction with foregoing and Fig. 1-Fig. 6, the target thickness measurement equipment 100 that the embodiment of the present invention is provided is specifically described.Target thickness measurement equipment 100 comprises supporter 10, range cells 11, wherein supporter 10 comprises base 102, is fixed on the back up pad 101 on base 102, range cells 11 is supported in back up pad 101, after base 102 is supported on back of the body copper coin 300, back up pad 101 is positioned at a side relative with the district to be measured 201 of target 200 (being the top shown in Fig. 4), and range cells 11 is relative with the district to be measured 201 of target 200.For convenience of explanation, it is example that target 200 and the orientation state of target thickness measurement equipment 100 be take the orientation state shown in Fig. 1, Fig. 2 or Fig. 4, but not according to this as limiting.

After base 102 is supported on back of the body copper coin 300, the integral body of back up pad 101 and target 200 is parallel to each other, make like this both there is the good depth of parallelism, guarantee range cells 11 can be all the time when detecting perpendicular to the district to be measured 201 of target 200, be conducive to reduce error, improve the accuracy of DATA REASONING.

Wherein, the quantity of base 102 is not done to concrete restriction, herein as optional embodiment, adopt two contour bases 102, and be arranged on the both sides that supporter 10 is relative (left and right sides shown in Fig. 1), at two bases 102, be supported on after platform, target 200 is between two supporters 10.

For supporter 10 generation types, can, by back up pad 101 and the one-body molded formation of base 102, can be also that back up pad 101 and base 102 are fixedly connected to form by web member.

As the preferred scheme of the embodiment of the present invention, above-mentioned back up pad 101 can adopt with the connected mode of range cells 11 mode being slidably connected, particularly, as shown in Figure 1 or 2, in back up pad 101, be provided with chute 103, chute 103 slidably connects sliding part 12, range cells 11 is installed on sliding part 12, and 11 pairs of required points of the range cells of can directly sliding like this detect, and do not need constantly to move range cells 11, do not detect, be conducive to simplify the operation course, increase work efficiency.

Because the district to be measured 201 of remaining target 200 is uneven, therefore for fear of placing or making range cells 11 collide the district to be measured 201 of remaining target 200 during mobile target thickness measurement equipment 100, can make sliding part 12 in back up pad 101, form a rotational structure, by rotary slide 12, sliding part 12 is packed up.Particularly, as shown in Figure 3, this sliding part 12 comprises slide unit 121 and slide block 120, and slide unit 121 is contained in chute 103, slide unit 121 and the rotatable connection of slide block 120, by rotary slider 120 make range cells 11 near or away from the district to be measured 201 of remaining target 200.When rotary slider 120 makes range cells 11 near district 201 to be measured, the slide block shown in Fig. 1 120 is mutually vertical with back up pad 101, and range cells 11 starts to measure; When rotary slider 120, range cells 11 is away from district 201 to be measured, the slide block shown in Fig. 2 120 is parallel to each other with back up pad 101, can facilitate the placement of target thickness measurement equipment 100 and carry.

Continue to see figures.1.and.2, between above-mentioned slide block 120 and slide unit 121, can also be provided with turning knob 13, by operation turning knob 13, can make slide block 120 rotate with respect to back up pad 101.During measurement, can keep by the positioning bead 130 on turning knob 13 plumbness with back up pad 101.After measurement completes, by rotary slider 120, range cells 11 is packed up, now slide block 120 and back up pad 101 are the state of being parallel to each other.

For range cells 11, can be electronic cursor slide calliper rule, also can be electronic induction range cells 11, no matter be which kind of form, range cells 11 all can be arranged in the mounting hole of slide block 120, wherein at slide block 120 during perpendicular to back up pad 101, the district to be measured 201 that is axially perpendicular to target 200 of mounting hole.

When range cells 11 is electronic induction range cells 11, as shown in Figure 1 and Figure 5, this electronic induction range cells 11 comprises sounding rod 110, spring 111, ball 112, electronic induction rule 113, controller and display module, sounding rod 110 and spring 111 are arranged in mounting hole, and one end of sounding rod 110 is compressed in spring 111 in mounting hole, the other end of sounding rod 110 stretches out mounting hole, and roll and be connected with ball 112, the district to be measured 201 of ball 112 contact targets 200, electronic induction rule 113 is arranged on sounding rod 110, and electronic induction rule 113 is arranged on electrical connection controller, controller is electrically connected to display module.

Further, with reference to Fig. 6, display module comprises and shows main body 114 and be embedded in the display screen 115 showing in main body 114, shows that main body 114 is arranged on slide block 120, and show that main body 114 is provided with switch key, the button that makes zero, maximal value button, minimum value button and mean value button.

Before measurement, first target thickness measurement equipment 100 is supported on back of the body copper coin 300, target 200 is between two bases 102, the top of target 200 is back up pad 101, and slide block 120 is mutual plumbness with back up pad 101, the district to be measured 201 of the ball 112 contact targets 200 of sounding rod 110 lower ends, press the switch key that shows main body 114, make display screen 115 in open mode, and press the button that makes zero, realize the initialization of data.During measurement, by moving left and right slide block 120, electronic induction range cells 11 is moved left and right, rolling is rolled in the district to be measured 201 of target 200, when ball 112 moves salient point from the concave point in target 200 district 201 to be measured, sounding rod 110 can move up and while Compress Spring 111, when ball 112 moves concave point from the salient point in target 200 district 201 to be measured, sounding rod 110 moves downward in the effect of spring 111, like this to guarantee that ball 112 contacts with the district to be measured 201 of target 200 all the time.Electronic induction rule 113 also can record the one-tenth-value thickness 1/10 (comprising the minimum thickness at concave point place, the maximum ga(u)ge at salient point place) in the district to be measured 201 contacting with ball 112 simultaneously, finally by display module, shows, convenient operation person observes.

In order to improve the accuracy of data, carried out after the DATA REASONING of the left and right directions shown in drawing, can also carry out DATA REASONING along the fore-and-aft direction shown in drawing, be about to repeat above-mentioned measurement action after target thickness measurement equipment 100 half-twists, repeat no more herein.

More than record transmission of data and be stored in the storer in controller, and can process the data that record by the arithmetical unit in controller, can calculate minimum value and minimum value, mean value etc. by analysis meter.When operator need to extract minimum value, minimum value or mean value, press respectively minimum value button, maximal value button and mean value button, in display screen 115, will demonstrate required data.

Electronic induction range cells 11 is except above-mentioned form, it can also be the shape of sensor, for example can comprise distance measuring sensor, controller and display module, the district to be measured 201 of distance measuring sensor and target 200 is relative and be arranged on slide block 120, distance measuring sensor is electrically connected to controller, and controller is electrically connected to display module.Before measurement, first target thickness measurement equipment 100 is supported on back of the body copper coin 300, target 200 is between two bases 102, the top of target 200 is back up pad 101, slide block 120 is mutual plumbness with back up pad 101, presses the switch key that shows main body 114, makes display screen 115 in open mode, and press the button that makes zero, realize the initialization of data.During measurement, by moving left and right slide block 120, electronic induction range cells 11 is moved left and right, the one-tenth-value thickness 1/10 (comprising the minimum thickness at concave point place, the maximum ga(u)ge at salient point place) that detects target 200 district 201 to be measured by distance measuring sensor, finally shows by display module.

In addition, when range cells 11 is electronic cursor slide calliper rule, electronic cursor slide calliper rule directly can be stuck in the mounting hole of slide block 120.During measurement, first measure target 200 thickness of the deepest point in a certain region on remaining target 200, then by moving slider 120, make range cells 11 measure the deepest point in next region, and obtain the target thickness of deepest point, obtain like this after a plurality of measurement data, by relatively drawing the surplus of remaining target.

In like manner, for the thickness of measuring complete target, also can take above-mentioned measuring process, repeat no more herein.

Above; be only the specific embodiment of the present invention, but protection scope of the present invention is not limited to this, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; can expect easily changing or replacing, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claim.

Claims (13)

1. a target thickness measurement equipment, it is characterized in that, comprise supporter, range cells, described supporter is for being arranged on a side relative with the district to be measured of target, range cells described in described supporter upper support, described range cells and described district to be measured are oppositely arranged, and described range cells is for measuring the thickness of described target.
2. target thickness measurement equipment according to claim 1, it is characterized in that, described supporter comprises base and back up pad, and described back up pad is fixed on described base, range cells described in described back up pad upper support, described back up pad is arranged on a side relative with the district to be measured of described target.
3. target thickness measurement equipment according to claim 2, is characterized in that, described base is used for being supported on a platform, and described platform is used for supporting described target, and after described target is supported on described platform, described back up pad and described target are parallel to each other.
4. target thickness measurement equipment according to claim 2, it is characterized in that, the quantity of described base is two, and is arranged on the both sides that described supporter is relative, at two described bases, be supported on after described platform, described target is between two described supporters.
5. according to the target thickness measurement equipment described in claim 2-4 any one, it is characterized in that, described back up pad and described base are one-body molded.
6. target thickness measurement equipment according to claim 2, is characterized in that, described back up pad is provided with chute, and described chute slidably connects sliding part, and described range cells is installed on described sliding part.
7. target thickness measurement equipment according to claim 6, it is characterized in that, described sliding part comprises slide unit and slide block, described slide unit is contained in described chute, described slide unit and the rotatable connection of described slide block, by rotate described slide block make described range cells near or away from the district to be measured of described target.
8. target thickness measurement equipment according to claim 7, is characterized in that, described slide block is provided with turning knob, by described turning knob, described slide block is rotated.
9. target thickness measurement equipment according to claim 7, it is characterized in that, described slide block is provided with mounting hole, and described range cells is installed in described mounting hole, at described slide block during perpendicular to described back up pad, the district to be measured that is axially perpendicular to described target of described mounting hole.
10. target thickness measurement equipment according to claim 9, is characterized in that, described range cells is electronic induction range cells.
11. target thickness measurement equipments according to claim 10, it is characterized in that, described electronic induction range cells comprises sounding rod, spring, ball, electronic induction rule, controller and display module, described sounding rod and described spring fitting are in described mounting hole, and one end of described sounding rod by described spring-compressed in described mounting hole, the other end of described sounding rod stretches out described mounting hole, and roll and be connected with described ball, described ball contacts the district to be measured of described target, described electronic induction rule is arranged on described sounding rod, and described electronic induction rule is arranged on the described controller of described electrical connection, described controller is electrically connected to described display module.
12. target thickness measurement equipments according to claim 10, it is characterized in that, described electronic induction range cells comprises distance measuring sensor, controller and display module, the district to be measured of described distance measuring sensor and described target is relative and be arranged on described slide block, described distance measuring sensor is electrically connected to described controller, and described controller is electrically connected to described display module.
13. according to the target thickness measurement equipment described in claim 11 or 12, it is characterized in that, described display module comprises and shows main body and be embedded in the display screen in described demonstration main body, described demonstration main body is arranged on described slide block, and described demonstration main body is provided with switch key, the button that makes zero, maximal value button, minimum value button and mean value button.
CN201310645952.4A 2013-12-04 2013-12-04 Target-material thickness measuring instrument CN103644836A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104613844A (en) * 2015-02-05 2015-05-13 合肥鑫晟光电科技有限公司 Target material thickness measurement device
CN107218906A (en) * 2017-05-23 2017-09-29 天府认证有限公司 A kind of integrated measurement equipment of workpiece flatness

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Publication number Priority date Publication date Assignee Title
CN101398286A (en) * 2008-11-10 2009-04-01 王洋 Instrument for measuring thickness of non-ferromagnetic material and surface coating of ironwork
KR20090070749A (en) * 2007-12-27 2009-07-01 주식회사 포스코 Apparatus for measuring thickness of steel plate
CN101566453A (en) * 2009-05-31 2009-10-28 广州广电运通金融电子股份有限公司 Thickness detecting device
WO2013099870A1 (en) * 2011-12-27 2013-07-04 株式会社 東芝 Thickness measurement system and thickness measurement method

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Publication number Priority date Publication date Assignee Title
KR20090070749A (en) * 2007-12-27 2009-07-01 주식회사 포스코 Apparatus for measuring thickness of steel plate
CN101398286A (en) * 2008-11-10 2009-04-01 王洋 Instrument for measuring thickness of non-ferromagnetic material and surface coating of ironwork
CN101566453A (en) * 2009-05-31 2009-10-28 广州广电运通金融电子股份有限公司 Thickness detecting device
WO2013099870A1 (en) * 2011-12-27 2013-07-04 株式会社 東芝 Thickness measurement system and thickness measurement method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104613844A (en) * 2015-02-05 2015-05-13 合肥鑫晟光电科技有限公司 Target material thickness measurement device
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CN107218906A (en) * 2017-05-23 2017-09-29 天府认证有限公司 A kind of integrated measurement equipment of workpiece flatness

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Application publication date: 20140319