CN102387894A - 工件夹具、刷子用毛材、刷子以及工件夹具和刷子用毛材的制造方法 - Google Patents

工件夹具、刷子用毛材、刷子以及工件夹具和刷子用毛材的制造方法 Download PDF

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Publication number
CN102387894A
CN102387894A CN2010800160176A CN201080016017A CN102387894A CN 102387894 A CN102387894 A CN 102387894A CN 2010800160176 A CN2010800160176 A CN 2010800160176A CN 201080016017 A CN201080016017 A CN 201080016017A CN 102387894 A CN102387894 A CN 102387894A
Authority
CN
China
Prior art keywords
brush
aforementioned
rough lumber
resin
ether
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800160176A
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English (en)
Chinese (zh)
Inventor
小出俊彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YUKOSYOKAI CO Ltd
Original Assignee
YUKOSYOKAI CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YUKOSYOKAI CO Ltd filed Critical YUKOSYOKAI CO Ltd
Publication of CN102387894A publication Critical patent/CN102387894A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/28—Work carriers for double side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B13/00—Brushes with driven brush bodies or carriers
    • A46B13/001—Cylindrical or annular brush bodies
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B2200/00—Brushes characterized by their functions, uses or applications
    • A46B2200/30—Brushes for cleaning or polishing
    • A46B2200/3086—Brushes for polishing
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46D—MANUFACTURE OF BRUSHES
    • A46D1/00—Bristles; Selection of materials for bristles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CN2010800160176A 2009-04-13 2010-04-12 工件夹具、刷子用毛材、刷子以及工件夹具和刷子用毛材的制造方法 Pending CN102387894A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2009-097514 2009-04-13
JP2009097514 2009-04-13
JP2009-105201 2009-04-23
JP2009105201 2009-04-23
PCT/JP2010/056548 WO2010119847A1 (ja) 2009-04-13 2010-04-12 ワークキャリア、ブラシ用毛材及びブラシ並びにワークキャリア及びブラシ用毛材の製造方法

Publications (1)

Publication Number Publication Date
CN102387894A true CN102387894A (zh) 2012-03-21

Family

ID=42982509

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010800160176A Pending CN102387894A (zh) 2009-04-13 2010-04-12 工件夹具、刷子用毛材、刷子以及工件夹具和刷子用毛材的制造方法

Country Status (4)

Country Link
JP (1) JPWO2010119847A1 (ja)
KR (1) KR20120009489A (ja)
CN (1) CN102387894A (ja)
WO (1) WO2010119847A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020095883A1 (ja) * 2018-11-07 2020-05-14 信越ポリマー株式会社 半導体ウェーハ用の研磨補助シート及びその製造方法
CN113370362B (zh) * 2021-05-21 2023-06-16 北京北方华创微电子装备有限公司 陶瓷生坯的加工方法、陶瓷件制作方法及陶瓷件

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63300857A (ja) * 1987-05-29 1988-12-08 Hoya Corp 研摩装置
JPH0236076A (ja) * 1988-07-22 1990-02-06 Unitika Ltd 研磨ブラシ用モノフイラメント
JPH07133429A (ja) * 1993-11-12 1995-05-23 Mitsui Toatsu Chem Inc ポリイミド系延伸成形体
JPH1119866A (ja) * 1997-02-28 1999-01-26 Advanced Ceramics Res Inc 平坦な物体を研磨するための重合体キャリヤ
JPH11333707A (ja) * 1998-05-26 1999-12-07 Toshiba Ceramics Co Ltd キャリア
JP2000254859A (ja) * 1999-03-10 2000-09-19 Mitsubishi Rayon Co Ltd 繊維強化プラスチックス製研磨用薄板
JP2005059181A (ja) * 2003-08-19 2005-03-10 Unitika Ltd 被研磨物保持材
JP2005289056A (ja) * 2004-03-09 2005-10-20 Toray Ind Inc 耐衝撃性繊維強化プラスチック及び多層構造体
JP2007063710A (ja) * 2005-08-31 2007-03-15 Teijin Techno Products Ltd 薄葉織物、それを用いた積層体、プリプレグ、繊維強化樹脂組成物成形品及び防護具

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10329016A (ja) * 1997-05-23 1998-12-15 Katsurayama Technol:Kk 研磨用治具板およびその製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63300857A (ja) * 1987-05-29 1988-12-08 Hoya Corp 研摩装置
JPH0236076A (ja) * 1988-07-22 1990-02-06 Unitika Ltd 研磨ブラシ用モノフイラメント
JPH07133429A (ja) * 1993-11-12 1995-05-23 Mitsui Toatsu Chem Inc ポリイミド系延伸成形体
JPH1119866A (ja) * 1997-02-28 1999-01-26 Advanced Ceramics Res Inc 平坦な物体を研磨するための重合体キャリヤ
JPH11333707A (ja) * 1998-05-26 1999-12-07 Toshiba Ceramics Co Ltd キャリア
JP2000254859A (ja) * 1999-03-10 2000-09-19 Mitsubishi Rayon Co Ltd 繊維強化プラスチックス製研磨用薄板
JP2005059181A (ja) * 2003-08-19 2005-03-10 Unitika Ltd 被研磨物保持材
JP2005289056A (ja) * 2004-03-09 2005-10-20 Toray Ind Inc 耐衝撃性繊維強化プラスチック及び多層構造体
JP2007063710A (ja) * 2005-08-31 2007-03-15 Teijin Techno Products Ltd 薄葉織物、それを用いた積層体、プリプレグ、繊維強化樹脂組成物成形品及び防護具

Also Published As

Publication number Publication date
JPWO2010119847A1 (ja) 2012-10-22
KR20120009489A (ko) 2012-01-31
WO2010119847A1 (ja) 2010-10-21

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Application publication date: 20120321