CN102384917A - Detection device - Google Patents

Detection device Download PDF

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Publication number
CN102384917A
CN102384917A CN2011102581392A CN201110258139A CN102384917A CN 102384917 A CN102384917 A CN 102384917A CN 2011102581392 A CN2011102581392 A CN 2011102581392A CN 201110258139 A CN201110258139 A CN 201110258139A CN 102384917 A CN102384917 A CN 102384917A
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CN
China
Prior art keywords
testing fixture
sightingpiston
light
transmission
platform
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Pending
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CN2011102581392A
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Chinese (zh)
Inventor
伊藤隆
小松健一郎
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Topcon Corp
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Topcon Corp
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Publication of CN102384917A publication Critical patent/CN102384917A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention provides a detection device which is capable of obtaining, by means of transparent illumination, right information of a transparent detected object which is adhered to a strip. The detection device (10) comprises an observation optical system (11) which sets a predetermined position on an observation optical axis (Oa) as an observation surface (Fp); a reflected illumination mechanism (12) which performs reflected illumination of the observation surface (Fp) from the observation optical system side; and a transparent illumination mechanism (14) which performs illumination of the observation surface (Fp) from a side opposite to the observation optical system side. The transparent illumination mechanism (14) comprises an emitting part (53) for emitting transmission lights that are guided from a light source (51); and a scattering part (35b) which scatters the transmission lights emitted from the emitting part (53). The scattering part is such configured to be at a set interval from the observation surface (Fp) when observation is performed in the direction of a transmission light axis (Pa) of the transparent illumination mechanism (14), so that the transmission lights of the observation surface (Fp) are scattered as prescribed.

Description

Testing fixture
Technical field
The present invention relates to semiconductor element as the testing fixture of checking that object is checked.
Background technology
Known have a semiconductor element such as pair led chip, and shine various illumination plain edges through the limit and observe this semiconductor element with viewing optical system, thus the testing fixture (for example, with reference to patent documentation 1) that this semiconductor element is checked as the inspection object.In this testing fixture,, use to observe from the transillumination of the transillumination mechanism that the opposition side of viewing optical system throws light on to this inspection object since the inspection object as one of various illumination light.
At this, common for semiconductor element cuts out from wafer keeping being pasted under the state of band (film), and handle with the state that this band remains in endless member.Therefore, in above-mentioned testing fixture, the light that uses the transmission band is as transillumination, and for the inspection object of the state that is pasted on the band that remains on endless member, the inspection that various illumination plain edges are checked object is shone on the limit.
The prior art document
Patent documentation
Patent documentation 1: TOHKEMY 2010-107254 communique.
But, in band, when observing by viewing optical system when having shone the state of transillumination, even do not paste the state of any parts, bright state uniformly, but have the position of the local darkness of wire, point-like.This think since with on adhered to dust etc. or produced the spot of sticker caused.Therefore; At the inspection object is under the transparent situation; Through in the observation of viewing optical system, the information (outline line etc.) of this inspection object that is difficult to carry out obtaining by transillumination be with in the differentiation at dark position, promptly; The dark position of band is as the noise contribution effect, and worry can cause the reduction of the inspection precision of this inspection object.
Summary of the invention
The present invention In view of the foregoing makes, and its purpose is to provide a kind of testing fixture, even it also can obtain correct information through transillumination for the transparent inspection object that is pasted on band.
Scheme one described invention is, a kind of testing fixture, and it possesses: viewing optical system, it is made as sightingpiston with the assigned position on the observation optical axis; Indirect illumination mechanism, it throws light on to said sightingpiston from this viewing optical system side; Transillumination mechanism, its opposition side from said viewing optical system throws light on to said sightingpiston, and said testing fixture is characterized in that, and said transillumination mechanism has: injection part, it penetrates the transmitted light from the light source leaded light; Scattering part; It makes the transmission light-scattering layer that is penetrated by this injection part; This scattering part is observed apart from said sightingpiston in the transmission optical axis direction of said transillumination mechanism and is separated the setting of predetermined distance ground, so that make the transmitted light of said sightingpiston become the scattering state of regulation.
Scheme two described inventions are; According to scheme one described testing fixture; It is characterized in that; The scattering state of said regulation is the band that is pasted with the inspection object to be positioned on the said sightingpiston and to observe with said viewing optical system when having shone from the said band on the said sightingpiston of the transmitted light of said transillumination mechanism, and making said band is the state of homogeneous and bright.
Scheme three described inventions are; According to scheme one or scheme two described testing fixtures; It is characterized in that; Said transillumination mechanism has: transmitting member, it allows the transmission optical transmission from said injection part, and between said scattering part and said sightingpiston, is provided with the tabular surface of regulation along the plane of this sightingpiston.
Scheme four described inventions are, according to scheme three described testing fixtures, it is characterized in that, said scattering part is being that the mode of scattering surface constitutes with said injection part forward surface in opposite directions in said transmitting member.
Scheme five described inventions are; According to scheme four described testing fixtures; It is characterized in that; Also possesses the maintenance platform of tubular that can keep being pasted with the said band of said inspection object from said transillumination mechanism side; Said transmitting member is with through remaining in tabular that mode that said maintenance platform imbeds the inboard of this maintenance platform extends, and said injection part has the light-gathering optics parts of the diffusion that reduces the transmitted light that penetrates, so that make transmitted light with the said scattering part incident to said transmitting member of the some zone of regulation.
Scheme six described inventions are; According to scheme five described testing fixtures; It is characterized in that said light-gathering optics parts are bar-shaped integrator (rod integrator) opticses that also have in the function of the light quantity distribution homogenising of observing with the section of transmission optical axis quadrature.
Scheme seven described inventions are, according to scheme four described testing fixtures, it is characterized in that, said transillumination mechanism has and links said injection part and said transmitting member and simultaneously it is remained in inboard tubular maintaining part.
Scheme eight described inventions are, according to scheme seven described testing fixtures, it is characterized in that, said injection part has the integrator optics in the light quantity distribution homogenising of observing with the section of transmission optical axis quadrature.
According to testing fixture of the present invention; The dispersion effect that causes through scattering part; In the observation that utilizes viewing optical system; Can remove the noise contribution that has shone from the band of the transmitted light of transillumination mechanism, therefore, can use transillumination mechanism correctly to obtain being pasted on the information of the inspection object of band.
In addition; In testing fixture, to observe in the transmission optical axis direction, scattering part separates predetermined distance ground apart from sightingpiston and is provided with; Therefore; Can obtain dispersion effect reliably, therefore, can in the observation that utilizes viewing optical system, remove the noise contribution that has shone from the band of the transmitted light of transillumination mechanism reliably.
On the basis of above-mentioned formation; If the scattering state of said regulation is when making the band that is pasted with the inspection object be positioned on the said sightingpiston and to utilize said viewing optical system to observe to have shone from the said band on the said sightingpiston of the transmitted light of said transillumination mechanism; Make said band become the state of homogeneous and bright; Then dispersion effect can be obtained more reliably, the noise contribution that has shone from the band of the transmitted light of transillumination mechanism can be removed more reliably.
On the basis of above-mentioned formation; If said transillumination mechanism has permission from the transmission optical transmission of said injection part and between said scattering part and said sightingpiston, be provided with the transmitting member of regulation along the tabular surface on the plane of this sightingpiston; Then can utilize the tabular surface of transmitting member to make the inspection object be positioned on the sightingpiston and be flat condition simultaneously; Therefore, can more suitably observe this inspection object through viewing optical system.
On the basis of above-mentioned formation; If said scattering part will be made as scattering surface with said injection part forward surface in opposite directions and constitutes in said transmitting member, then can be set in scattering part that the transmission optical axis direction observes easily and reliably with respect to as the position of the sightingpiston in observation place suitable in viewing optical system, promptly at the sightingpiston of transmission optical axis direction observation and the interval of scattering part with easy formation.
On the basis of above-mentioned formation; If also possess the maintenance platform of tubular that can keep being pasted with the said band of said inspection object from said transillumination mechanism side; Said transmitting member is with through remaining in tabular that mode that said maintenance platform imbeds the inboard of this maintenance platform extends; Said injection part has the light-gathering optics parts of the diffusion of the transmitted light that reduce to penetrate, so that make transmitted light with the said scattering part incident to said transmitting member of the some zone of regulation, then can shine the appropriate region with respect to viewing optical system on the sightingpiston; Therefore, can more effectively carry out the suitable observation of viewing optical system.
On the basis of above-mentioned formation,, then can carry out the more suitable observation of viewing optical system if said light-gathering optics parts are also to have the bar-shaped integrator optics that makes in the function of the light quantity distribution homogenising of observing with the section of transmission optical axis quadrature.
On the basis of above-mentioned formation; Link said injection part and said transmitting member and simultaneously it is remained in inboard tubular maintaining part if said transillumination mechanism has, then can constitute the information of using transillumination to come correctly to obtain to be pasted on the inspection object of band with more easy.
On the basis of above-mentioned formation; If said injection part has the integrator optics that makes in the light quantity distribution homogenising of observing with the section of transmission optical axis quadrature; Then can shine the appropriate region on the sightingpiston with respect to viewing optical system; Therefore, can carry out the suitable observation of viewing optical system more efficiently.
Description of drawings
Fig. 1 is the key diagram of formation that schematically shows the testing fixture 10 of the application's inventive embodiment 1.
Fig. 2 is the block diagram that the function of expression testing fixture 10 constitutes.
Fig. 3 is the stereographic map that schematically shows the maintenance platform 34 of testing fixture 10.
Fig. 4 is the key diagram that is used to explain the kind of checking object workpiece 40; (a) be illustrated in and keep each semiconductor element 44 to be pasted on the state that has been cut off by each boundary surface with under 42 the state, (b) expression will stretch and with each semiconductor element 44 each state that block with 42.
Fig. 5 schematically shows the maintaining body 13 of testing fixture 10 and the stereographic map of transillumination mechanism 14.
Fig. 6 representes along the key diagram at the position of I-I line shown in Figure 5 with the section of part.
Fig. 7 is the key diagram of expression as each semiconductor element 44 of an example of inspection object.
Fig. 8 is used for explaining the key diagram in the fault example of each semiconductor element 44 shown in Figure 7.
Fig. 9 is used for explaining through on sightingpiston Fp, obtain the key diagram of a plurality of fine shape Ms caused dash area of the view data from video camera 24 that obtains in producing with 42 through viewing optical system.
Figure 10 is used to explain the key diagram that out of order each semiconductor element 44 is judged as the situation of normal two semiconductor elements 44 owing to fine shape M.
Figure 11 be used for explaining prevent through obtain on sightingpiston Fp through viewing optical system obtain produce with 42 from the view data of video camera 24 in the key diagram of situation of the caused dash area of a plurality of fine shape M.
Figure 12 is the key diagram of formation that schematically shows the testing fixture 10A of embodiment 2.
Figure 13 is the key diagram of formation of maintaining body 13B that schematically shows the testing fixture 10B of embodiment 3.
Figure 14 is the key diagram of formation of maintaining body 13C and the 14C of transillumination mechanism that schematically shows the testing fixture 10C of embodiment 4.
Description of reference numerals
10,10A, 10B, 10C testing fixture
11 (as viewing optical system) observation element
12 indirect illumination mechanisms
14,14C transillumination mechanism
24 (as viewing optical system) video camera
34,34A, 34C keep platform
35 (as transmitting member) transmission platform
35a (as tabular surface) upper surface
35b (as scattering surface) lower surface
42 bands
44 (as the inspection object) semiconductor element
Light source is used in 51 transmissions
53,53C injection part
53Ca (as the tubular maintaining part) housing
53Cq (as transmitting member) second optical element
53Ct (as scattering surface) second forward surface
The Fp sightingpiston
The Oa observation optical axis
The Pa transmission optical axis.
Embodiment
Below, with reference to accompanying drawing one side each embodiment to the testing fixture of the application invention describe on one side.
[embodiment 1]
The summary formation of the testing fixture 10 of the application's inventive embodiment 1 at first, is described.Fig. 1 is the key diagram of formation that schematically shows the testing fixture 10 of one of testing fixture as the application invention example.Fig. 2 is the block diagram that the function of expression testing fixture 10 constitutes.In addition, among Fig. 5, for easy to understand, the wafer 41 in the curtailed inspection object workpiece 40 and be with 42 to represent.
Like Fig. 1 and shown in Figure 2, testing fixture 10 roughly is made up of observation element 11, indirect illumination mechanism 12, maintaining body 13, transillumination mechanism 14, control gear 15.As shown in Figure 1, this testing fixture 10 has main part 21.On this main part 21, be provided with and omit illustrated relay lens and circulating turntable portion, be provided with a plurality of lens barrels 22 in this turntable portion.On this each lens barrel 22, be provided with object lens 23.On the top of this main part 21 video camera 24 is installed.This video camera 24 can be obtained the view data of the assigned position on this optical axis (observation optical axis Oa) by the multiplying power by the object lens that set 23 decisions through these object lens 23 and main part 21 (relay lens).Therefore, video camera 24, main part 21, each lens barrel 22 and object lens 23 thereof are as the performance of the viewing optical system in the observation element 11 function, and its optical axis is observation optical axis Oa.In addition, comprising video camera 24 on the observation optical axis Oa can obtain the position of appropriate image, be the focal position in the viewing optical system and be sightingpiston Fp with this observation optical axis Oa plane orthogonal (imaging surface of object side).Below, the direction of observation optical axis Oa is made as Z-direction, will be made as X-Y plane with the face of its quadrature.The view data that obtains by this video camera 24 through after the image control part 61 stated suitably resolve, and can show (with reference to Fig. 2) at monitor 39.
In the inside of this main part 21, on observation optical axis Oa, be provided with the reflection part 25 that constitutes by half-mirror or prism.In main part 21, reflection part 25 cause from the reflection direction of observation optical axis Oa on via connector portion 26 optical fibers 27 is installed.This optical fibers 27 can with from the coaxial irradiates light that penetrates with light source 28 to reflection part 25 leaded lights.As shown in Figure 2, this is coaxial optionally to make Halogen lamp LED 28a and this two side of strobo 28b luminous with light source 28, and arbitrary side is luminous all can be penetrated to optical fibers 27.As shown in Figure 1, can advance at observation optical axis Oa through optical fibers 27 and reflection part 25 from this coaxial irradiates light that penetrates with light source 28, sightingpiston Fp is thrown light on observation optical axis Oa through the object lens 23 of each lens barrel 22.Therefore, coaxial with light source 28, optical fibers 27 and reflection part 25 as be used for through with the cooperation of the object lens 23 of each lens barrel 22 to viewing optical system generate from after on the coaxial direction of the inspection object (44) stated catoptrical indirect illumination mechanism 12, be the coaxial lighting mechanism 29 performance functions that fall to penetrating.
This main part 21 can through after the Z axle driving mechanism 66 (with reference to Fig. 2) stated go up in observation optical axis Oa direction (Z-direction) and move.Therefore, the viewing optical system in the observation element 11 and coaxially fall to penetrating lighting mechanism 29 and can be integratedly go up and move in observation optical axis Oa direction (Z-direction).
In addition, as shown in Figure 1, on main part 21, being provided with illumination light with the mode of the periphery of surrounding lens barrel 22 derives with annular disk 30.This illumination light derives with annular disk 30 and omits diagram, still, is provided with a plurality of illuminating parts to separate predetermined distance with observation optical axis Oa around the mode of this observation optical axis Oa, and each illuminating part can shine to sightingpiston Fp from the direction of relative observation optical axis Oa inclination.With annular disk 30 optical fibers 31 is installed in the illumination light derivation.This optical fibers 31 can be with deriving each illuminating part (not shown) leaded light with annular disk 30 with the irradiates light that light source 32 penetrates to illumination light from annulus.As shown in Figure 2, this annulus makes Halogen lamp LED 32a and strobo 32b both sides luminous with light source 32 alternatives, and arbitrary side is luminous all can be penetrated to optical fibers 31.As shown in Figure 1, can throw light on to sightingpiston Fp with the direction that relative observation optical axis Oa tilts from each illuminating part (not shown) that illumination light derives with annular disk 30 through optical fibers 31 with the irradiates light that light source 32 penetrates from this annulus.Therefore, annulus with light source 32, optical fibers 31 and illumination light derive with annular disk 30 (its each illuminating part) as be used for respect to viewing optical system generate from after the inspection object (44) stated with the catoptrical indirect illumination mechanism 12 of the direction of observation optical axis Oa inclination, be skew ray lighting mechanism 33 performance functions.This illumination light derive with annular disk 30 can through after the Z axle driving mechanism 66 (with reference to Fig. 2) stated go up mobile in observation optical axis Oa direction (Z-direction).To this observation optical axis Oa direction move can with main part 21 one, also can be separate.
, this main part 21 and illumination light be provided with maintaining body 13 below deriving with annular disk 30.This maintaining body 13 has the platform 34 of maintenance.As shown in Figure 3, this maintenance platform 34 is drum with the level, states the maintaining part of inspection object (44) after being made up of the leading section 34a of its ring-type.Be provided with circular endless groove 34b at this leading section 34a, and in this groove, be provided with the suction hole 34c that is used to vacuumize.Therefore, keep platform 34 can as after state carrying being with 42 (with reference to Fig. 4 etc.) being kept by leading section 34a absorption of putting.Side is provided with transmission platform 35 within it in this maintenance platform 34.
Like Fig. 1, Fig. 3, Fig. 5 and shown in Figure 6, transmission platform 35 is circular plate shape, and the upper surface 35a of upside (viewing optical system side) is a tabular surface, and the lower surface 35b of downside (transillumination mechanism 14 after irradiation means portion 16 sides stated) is a scattering surface.In embodiment 1, this upper surface 35a is the tabular surface that has ground, lower surface 35b from after state that such viewpoint that obtains dispersion effect is suitable to be considered diffusivity etc. and set.This transmission platform 35 is formed by the transparent component (transmitting member) of the transmission optical transmission that the irradiation means portion 16 that allows at least after transillumination mechanism 14, to state (its injection part 53) penetrates, and in embodiment 1, is formed by glass.Support from the below via supporting frame 36 (with reference to Fig. 6) lower end of transmission platform 35 its circumferences.
As shown in Figure 6; This supporting frame 36 is circular; Screw togather parts 37 (in Fig. 6, only illustrating) through a plurality of Z axles and support, and screw togather parts 38 (in Fig. 6, only illustrating) restriction moving to Z-direction upside (viewing optical system side) through a plurality of orthogonal axes from the below.Each Z axle screws togather parts 37 and connect to keep platform 34 and be provided with in Z-direction, can carry out the location of Z-direction through nut 37a.This Z axle screws togather parts 37 and is provided with more than at least three according to the mode that when the sense of rotation that with the Z axle is the center is observed, separates predetermined distance.The front end that each orthogonal axes screws togather parts 38 is a cone shape, can engage with the dip plane of the upper end position of supporting frame 36.Therefore; In keeping platform 34, bearing position and the scalable that screws togather parts 37 through suitable each Z axle of change in Z-direction be the transmission platform 35 observed of observation optical axis Oa direction position (height and position) and the transmission platform 35 (upper surface 35a) of relative this observation optical axis Oa the inclination both sides this transmission platform 35 is set.Therefore, each Z axle screws togather parts 37 and screws togather parts 38 as adjusting the position adjusting mechanism performance function that ground keeps transmission platform 35 with respect to keeping platform 34 can carry out the position relevant with observation optical axis Oa with each orthogonal axes.
The gauge of this transmission platform 35 is that optical characteristics and the hardness property limit that transmission platform 35 is considered through the limit in the interval of upper surface 35a and lower surface 35b considers that set at following 3.In embodiment 1, the gauge of transmission platform 35 is the scope of 5cm～15cm, and it is whole impartial size.
First does, in the irradiation means portion that after transillumination mechanism 14, states 16 ejaculations and to lower surface 35b incident and from the transmitted light that upper surface 35a penetrates, can guarantee the light quantity of stipulating.This is because, observe the inspection object of stating after needing suitably to throw light on (44) at transmission platform 35 with the image of being obtained by video camera 24 through viewing optical system.This point mainly influences the higher limit of the gauge of transmission platform 35.
Second does, because support from the below lower end of circumference, therefore, at middle position, the deflection of low-lying this deflection deformation is in the scope of regulation.This be because; As after state, at transmission platform 35, be the function on the sightingpiston Fp because upper surface 35a has the appropriate location that the inspection object of stating after making (44) is arranged in viewing optical system; Therefore, need upper surface 35a be spread all over whole ground along sightingpiston Fp.Therefore, the specialized range in the above-mentioned deflection is the depth of field in the viewing optical system to the maximum.This point mainly influences the lower limit of the gauge of transmission platform 35.
Thirdly be the dispersion effect that causes at the lower surface 35b that from the transmitted light that upper surface 35a penetrates, fully obtains becoming scattering surface.To this, the back describes in detail.
As shown in Figure 1, the maintenance platform 34 that keeps this transmission platform 35 through after the XY driving mechanism 64 (with reference to Fig. 2) stated relative to observation optical axis Oa (viewing optical system) can with the X-Y plane of its quadrature on move.In addition, keep platform 34 through after the rotary drive mechanism 65 (with reference to Fig. 2) stated can rotate around the Z axle.Keep platform 34 absorption to keep inspection object workpiece 40 at this.
As shown in Figure 4, band (film) 42 that will paste wafer 41 (also comprising glass substrate etc.) keeps and formation inspection object workpiece 40 in the inboard of endless member 43.In this inspection object workpiece 40, have under keeping being pasted in each boundary surface just like a plurality of semiconductor elements 44 that form by wafer 41 shown in (a) and to cut off the state of (cutting) and be pasted on 42 and cut off after stretching band 42 and each blocks the state of (expansion) as (b) being shown in 42 state.At this, endless member 43 is no matter the difference of state (kind of inspection object workpiece 40) all is made as than the big footpath size of leading section 34a (with reference to Fig. 1) that keeps platform 34.In testing fixture 10, under these arbitrary states, all can be used for inspection and whether suitably form each semiconductor element 44.Therefore, each semiconductor element 44 as the inspection object, can be carried out the inspection of this inspection object under the state of the state that keeps keeping inspection object workpiece 40.
Like Fig. 1, Fig. 5 and shown in Figure 6; In this inspection object workpiece 40; Keep platform 34 to be positioned at the inboard of endless member 43, will utilize the effect of endless groove 34b and suction hole 34c will be with 42 absorption to remain in leading section 34a with the state that placed its leading section 34a in 42 years.At this moment; In keeping platform 34; When the upper surface of transmission platform 35 35a is positioned at when leaning on top (viewing optical system side) than leading section 34a (absorption holding position); The zone in the inner part, position that keeps than absorption with being positioned in 42 since the upper surface 35a through transmission platform 35 be stretched, therefore with the mode that is pasted on this upper surface 35a be flattened (with reference to Fig. 1).Therefore, through transmission platform 35 is carried out position adjustment about observation optical axis Oa, thereby the inspection object (each semiconductor element 44) that is pasted on 42 is positioned on the sightingpiston Fp with suitable state.Below this maintenance platform 34, be provided with irradiation means portion 16 (with reference to Fig. 1) as transillumination mechanism 14.
As shown in Figure 1, the opposition side irradiation transmitted light of the inspection object (each semiconductor element 44) of maintenance from viewing optical system (observation element 11) adsorbed in 14 pairs in transillumination mechanism by maintenance platform 34.This transillumination mechanism 14 has irradiation means portion 16.This irradiation means portion 16 can with through after injection part 53 leaded lights stated backward of the transmitted light that penetrates with light source 51 from transmission of the light guide section 52 stated.As shown in Figure 2, this transmission optionally makes Halogen lamp LED 51a and strobo 51b both sides luminous with light source 51, and arbitrary side is luminous all can be penetrated to light guide section 52.
Like Fig. 5 and shown in Figure 6, this irradiation means portion 16 also has light guide section 52, injection part 53 and support 54 on the basis of above-mentioned transmission with light source 51 (with reference to Fig. 2).Light guide section 52 omits diagram; But be provided with in opposite directions respectively from the mode of transmission with incident but be located at a distolateral plane of incidence with the luminous light (transmitted light) of the Halogen lamp LED 51a of light source 51 (with reference to Fig. 2) and strobo 51b, will from this plane of incidence incident from transmission with the transmitted light of light source 51 (with reference to Fig. 2) to being located at another distolateral outgoing plane 52a (with reference to Fig. 6) leaded light.This light guide section 52 is formed by optical fiber in embodiment 1.Be connected with injection part 53 (with reference to Fig. 6) at the outgoing plane 52a of light guide section 52.
Take at least more than one optical element 53b and constitute this injection part 53 at the housing 53a of tubular.This optical element 53b constitutes the outgoing plane 52a plane of incidence 53c in opposite directions and the outgoing plane 53d that penetrates the transmitted light of incident thus with light guide section 52.Optical element 53b is so that the mode that penetrates from outgoing plane 53d as the state of expectation from the transmitted light of plane of incidence 53c incident has the optical characteristics of regulation.The rotation axes of symmetry that will become the central shaft position of this optical element 53b is made as the transmission optical axis Pa (with reference to Fig. 1) of irradiation means portion 16 (transillumination mechanism 14 (transmission illumination system)).In this irradiation means portion 16, when from light guide section 52 during to injection part 53 incident transmitted lights, the transmitted light that penetrates along transmission optical axis Pa from injection part 53.The optical characteristics of the regulation of optical element 53b is meant with the observed light quantity distribution homogenising of the section of the transmission optical axis Pa quadrature that becomes direct of travel with suppress the expansion (diffusion) of irradiation area.This optical element 53b is made up of the optical element with afore mentioned rules optical characteristics (integrator function and non-proliferation (optically focused) function), and in embodiment 1, optical element 53b is made up of the bar-shaped integrator optics.
In addition, in embodiment 1, will be positioned at than the plane of incidence 53c of the optical element 53b bottom 53e below more at housing 53a and form tubular, can the other end (being provided with the end of the side of outgoing plane 52a) of light guide section 52 be embedded in the inboard.Therefore, injection part 53 is embedded in the bottom 53e of injection part 53 and the outgoing plane 52a of light guide section 52 and the plane of incidence 53c butt joint of injection part 53 is linked (connection) through the other end with light guide section 52 with light guide section 52.Under this state, light guide section 52 and injection part 53 are by support 54 fixed bearings.
Therefore; In irradiation means portion 16; Can make from transmission and advance to injection part 53 through light guide section 52 with the transmitted light that light source 51 penetrates; And the almost parallel light of the uniform light quantity distribution of conduct penetrates the lower surface 35b of irradiation transmission platform 35 towards transmission optical axis Pa (with reference to Fig. 1) direction from injection part 53.This transmitted light becomes scattered light through the lower surface 35b that becomes scattering surface, from rear side irradiation sightingpiston Fp.This transmitted light at least transmission absorption remain in the inspection object workpiece 40 that keeps platform 34 be with 42, can pass through viewing optical system (video camera 24) observation (with reference to Fig. 1).Therefore; The irradiation means portion 16 (transmission is with light source 51, light guide section 52 and injection part 53) and the lower surface 35b of the transmission platform 35 that becomes scattering surface cooperate, as generating the transillumination mechanism 14 performance functions of shining the transmitted light of sightingpiston Fp (inspection object (semiconductor element 44)) from the opposition side of viewing optical system.In embodiment 1, transmission optical axis Pa and Z-direction are set abreast, set the position of irradiation means portion 16 with respect to viewing optical system with the transmission optical axis Pa mode consistent with observation optical axis Oa.In addition, the optical element 53b of transillumination mechanism 14 through the irradiation means portion 16 that is made up of the bar-shaped integrator optics can satisfy by the mode of the observable viewing area of viewing optical system (video camera 24) with the irradiation area of the transmitted light on sightingpiston Fp, observed and set.
In this testing fixture 10, unified control as above constitutes under the control of control gear 15 (with reference to Fig. 2) observation element 11, indirect illumination mechanism 12, maintaining body 13 and transillumination mechanism 14.As shown in Figure 2, this control gear 15 has image control part 61, lighting control section 62 and drive control part 63.
The image control part 61 suitable view data that obtain by video camera 24 of resolving.This parsing can be enumerated out identification and be pasted on the outline line with a plurality of inspection objects (semiconductor element 44) of 42, the focus state of judging observation point, identification and check that respectively defective, identification in the object is located at shortcoming and the identification of the electrode of respectively checking object or wiring etc. and checks that respectively object (semiconductor element 44) is bad etc. from cutting out of wafer 41.In addition, image control part 61 makes the image based on the view data that is obtained by video camera 24 be shown in monitor 39.
62 pairs of coaxial lighting aptly with light source 51 with light source 32 and transmission with light source 28, annulus of lighting control section are extinguished control.Promptly; Coaxial with light source 28, annulus with light source 32 and transmission with light source 51 in; Lighting control section 62 optionally makes Halogen lamp LED (28a, 32a, 51a) or strobo (28b, 32b, 51b) light aptly to extinguish, and make coaxial with light source 28, annulus with light source 51 simultaneously or individually light and extinguish with light source 32 and transmission.This Halogen lamp LED (28a, 32a, 51a) uses as observing with illumination, and strobo (28b, 32b, 51b) uses with illumination as inspection.In addition, lighting control section 62 can be carried out in each light source (28,32,51) as the brightness adjustment of inspection with the strobo (28b, 32b, 51b) of illumination.This brightness adjustment for example can realize through suitable any that select a plurality of ND filtrators.
Drive control part 63 suitable XY driving mechanism 64, rotary drive mechanism 65 and the Z axle driving mechanisms 66 of driving.Promptly; Drive control part 63 can make the viewing optical system in the observation element 11 and coaxially fall to penetrating lighting mechanism 29 and move along observation optical axis Oa direction (Z-direction) is suitable through drive controlling Z axle driving mechanism 66, and skew ray lighting mechanism 33 is moved along observation optical axis Oa direction (Z-direction) is suitable.Thus, can under appropriate illumination, suitably observe the inspection object (each semiconductor element 44) that absorption remains in the inspection object workpiece 40 that keeps platform 34.In addition; Drive control part 63 is through drive controlling XY driving mechanism 64 and rotary drive mechanism 65; Can make the inspection object workpiece 40 that keeps platform 34 promptly adsorb remaining in this with respect to observation optical axis Oa (viewing optical system) and transmission optical axis Pa (irradiation means portion 16) with the X-Y plane of its quadrature on suitable mobile; And, can make it around the suitable rotation of observation optical axis Oa (transmission optical axis Pa (Z-direction)).Thus, can check that absorption remains in the inspection object (semiconductor element 44) of the optional position in the inspection object workpiece 40 that keeps platform 34.
In control gear 15, in addition also can carry out the control of the absorption action in the above-mentioned maintenance platform 34 etc., and relatively the waiting of the view data that can be used to check.
In this testing fixture 10, at first carry out position adjustment about the observation optical axis Oa of transmission platform 35 according to the inspection object workpiece 40 of having pasted the inspection object that becomes the inspection object.This is because following reason.In testing fixture 10, keep in the leading section 34a absorption that keeps platform 34 endless member 43 inner side be with 42, therefore, the circumference with 42 is supported from the below, thus, sometimes with the low-lying mode deflection deformation of middle position.So, because this deflection deformation, thereby worry to depart from sightingpiston Fp with each semiconductor element 44 on 42, can not carry out suitable observation through viewing optical system (video camera 24).According to different with the position of each semiconductor element 44 of 42 material or stickup and number etc., therefore, it is according to the kind of inspection object workpiece 40 and difference with the amount of 42 deflection deformation and state for this.Therefore; Under state by the inspection object workpiece 40 that keeps platform 34 absorption maintenances becoming object; So that be positioned at the mode on the sightingpiston Fp, according to being the position (height and position) observed of observation optical axis Oa direction and transmission platform 35 (upper surface 35a) these both sides of inclination at the Z of transmission platform 35 axle with respect to this observation optical axis Oa with the amount of 42 deflection deformation and status adjustment with each semiconductor element 44 on 42.
At this moment, the deflection deformation with 42 is big more, and the upper surface 35a of transmission platform 35 is positioned at than the leading section 34a (sorption holding position) that keeps platform 34 more by top (viewing optical system side).This is because following reason.In the time of above the leading section 34a that the upper surface 35a that makes transmission platform 35 is positioned at than keeps platform 34 more leans on; With the upper surface 35a of the position that is positioned at than the is adsorbed maintenance zone passage transmission platform 35 more in the inner part in 42 and stretch to the top; Therefore, so that 35a pastes with 42 mode its planarization in this upper surface.Therefore, according to 42 deflection deformation, be positioned at the top through the upper surface 35a that makes transmission platform 35, thereby the inspection object (each semiconductor element 44) that is pasted on 42 is positioned on the sightingpiston Fp with more suitable state.At this moment, much less, 35a makes the irradiation means portion 16 of observation element 11, indirect illumination mechanism 12 and transillumination mechanism 14 move along Z-direction is suitable according to height and position in the upper surface of transmission platform 35.This amount and state with 42 deflection deformation can for example be obtained through the view data of resolving from video camera 24 at image control part 61.
Then, in testing fixture 10, keeping platform 34 absorption to keep inspection object workpiece 40 to carry out chip scanning.In this chip scanning; Keep the inner side of the leading section 34a of platform 34 promptly to check the mode of the position more in the inner part, position that keeps than absorption in the object workpiece 40 (with 42) to spread all over whole ground scanning, make through drive control part 63 to keep platform 34 to move relative to observation optical axis Oa.In this scanning, the limit irradiation obtains the image that video camera 24 obtains from the transmission plain edge of transillumination mechanism 14.
Then, carry out the making of chip figure.This chip figure representes to check the position of respectively checking object (semiconductor element 44) in the object workpiece 40 (with 42), and posture.In control gear 15; Through chip scanning contour identification line; Be pasted on a plurality of inspection objects (semiconductor element 44) thereby differentiate with 42, and, thereby position and the posture of respectively checking object (semiconductor element 44) obtained through the mobile location information of subsidiary drive control part 63.
Then, check the judgement of object (semiconductor element 44).In this is judged, determine the observation place of viewing optical system based on the chip figure that makes, according to this decision and utilize drive control part 63 to make to keep platform 34 to move.Whether good afterwards, the inspection object (semiconductor element 44) that will be in this observation place compares with the data of the specification product of this inspection object, carry out this inspection object (semiconductor element 44) judgement.Whether good judgement is carried out through being resolved by image control part 61 from the view data of video camera 24 for this.
Through all inspection objects (semiconductor element 44) on inspection object workpiece 40 (with 42) being carried out the judgement of this inspection object (semiconductor element 44) successively, finish inspection to this inspection object workpiece 40 based on the chip figure that makes.In addition, this inspection also can be carried out through the visual image based on the view data that is obtained by video camera 24 that under the control of image control part 61, is shown in monitor 39.
(technical task)
Below, use Fig. 7 to Figure 10 that the technical task in the existing testing fixture is described.In addition; For this technical task, because when the lower surface 35b of transmission platform 35 not being formed scattering surface, in the testing fixture 10 of the application's invention, also produce identical problem; So, use testing fixture 10 to describe for easy to understand in the explanation below.In addition, in Fig. 7 to Figure 10, for easy to understand, stress each semiconductor element 44 of expression situation or after the fine shape M (with reference to Fig. 9) that states, still, not necessarily consistent with the inspection object or the observation state of reality.
As stated, in testing fixture 10,, at first carry out chip scanning, make chip figure through parsing from the view data of video camera 24 when when keeping platform 34 absorption to keep inspection object workpiece 40.At this moment, in testing fixture 10, in from the view data of video camera 24, need the outline line of each semiconductor element 44 of identification.For this identification, the limit is with transillumination mechanism 14 (its irradiation means portion 16) irradiation transmitted light in testing fixture 10, and the obtaining of view data of video camera 24 carried out on the limit.
As shown in Figure 7, being with on 42 of inspection object workpiece 40, with the object of each semiconductor element 44 align of rectangle as the inspection object.Each semiconductor element 44 of this example (Fig. 7 to Figure 11) schematically shows the led chip that is provided with the electrode 44b that is made up of electric conductor in the central authorities of rectangle and transparent glass substrate 44a; Though omitted diagram; But, on glass substrate 44a, also be provided with various wirings.Therefore, in this inspection object workpiece 40, the glass substrate 44a of each semiconductor element 44 and be with 42 to allow the transmission optical transmissions, in the view data that obtains by video camera 24, the glass substrate 44a of each semiconductor element 44 and become clear with 42.
At this; In above-mentioned image analysis; Need the outline line of each semiconductor element 44 of the illuminated transmitted light from transillumination mechanism 14 (its irradiation means portion 16) of identification, still, do not allow under the situation of transmission optical transmission at each semiconductor element 44; Its outline line is clear and definite, therefore can not become problem.But; As each semiconductor element 44 that constitutes by transparent glass substrate 44a of this example; To form under the situation of inspection object as the inspection object of the parts that constitute outer shape by the material that allows the transmission optical transmission; Because show brightly be with 42 with glass substrate 44a and just outline line be thin shade, so, need be based on fine light and shade (contrast) contour identification line.
In this inspection object workpiece 40; Because through forming each semiconductor element 44 from blocking of wafer 41 (with reference to Fig. 4); So; As shown in Figure 8, exist the transversal of two semiconductor elements 44 that adjoin each other inappropriate on 42 situation of (with reference to upper left) or the situation of not blocking two semiconductor elements 44 (with reference to the bottom right) that adjoin each other.Under the situation that has such semiconductor element 44 (inspection object), need accurately detect is these states, and upper left two semiconductor elements 44 and two semiconductor elements 44 of bottom right that promptly detect among Fig. 8 are substandard product.
But each semiconductor element 44 of this example is made up of transparent glass substrate 44a, and be pasted on allow the transmission optical transmission be with 42.At this; Be with 42; When observing the state of transillumination irradiation from the view data of viewing optical system (video camera 24); Even for not paste under the state of any parts, there is the local dark position (with reference to the symbol M of Fig. 9) of wire, point-like in state that neither homogeneous and bright.Below, the position that this part is dark is called with the fine shape M in 42.The spot that this fine shape M thinks to be attached with dust etc. on 42 or produced sticker causes.
Therefore; As each semiconductor element 44 that the glass substrate 44a by transparent of this example constitutes; When with the object that forms the parts that constitute outer shape by the material that allows the transmission optical transmission when checking object; As shown in Figure 9, in view data, between the dash area of each electrode 44b, mix the dash area of the outline line that has each glass substrate 44a and the dash area of a plurality of fine shape M from video camera 24.
Therefore; Shown in figure 10; Even the transversal inappropriate (with reference to upper left) of two semiconductor elements 44 worrying to adjoin each other or do not block two semiconductor elements 44 (with reference to a left side down) that adjoin each other also can be with being present in the outline line (transversal) that therebetween fine shape M is judged as two semiconductor elements 44.Therefore, two semiconductor elements 44 or two continuous semiconductor elements 44 that worry can will become unsuitable transversal are judged as normal two semiconductor elements 44 in abutting connection with (with reference to the right side), can not accurately detect these substandard products.That is, worry that each the fine shape M with 42 causes the reduction of the inspection precision of this inspection object 44 as the noise contribution effect on view data.Therefore, expectation is removed this noise contribution through some countermeasure.
(effect of scattering surface)
In testing fixture 10, for remove through obtain on sightingpiston Fp through viewing optical system obtain from the view data of video camera 24 with 42 fine shape M, the lower surface 35b of transmission platform 35 is formed scattering surface.Therefore, the transmitted light that penetrates from the irradiation means portion of transillumination mechanism 14 16 from the lower surface 35b that forms scattering surface to transmission platform 35 in incident and from the upper surface 35a penetrates, shine from rear side to be pasted on each semiconductor element 44 with 42.Therefore, this transmitted light is scattered through lower surface 35b, arrives with 42 and is pasted on this each semiconductor element 44.Like this, when shining when being made as the scattering state of regulation, in the view data that obtains by video camera 24 through viewing optical system, can almost can not identify fine shape M with 42 with 42 transmitted light.This thinks the fine shape M with 42 is caused with various angle direction irradiation transmitted lights.
Therefore, as implied above, at transmission platform 35, gauge is that the dispersion effect that the lower surface 35b of interval consideration the becoming scattering surface of upper surface 35a and lower surface 35b causes decides.That is, with can be with being made as the mode of the scattering state of regulation with 42 transmitted light (transmitted light that 35a penetrates from the upper surface) on the irradiation sightingpiston Fp, the degree (roughness) of the scattering surface among the 35b of lower surface be set the gauge of transmission platform 35 as one feels fit.At this; The scattering state of regulation be meant remove from the view data of video camera 24 with 42 fine shape M; I.e. being with 42 o'clock on the sightingpiston Fp that has been obtained illuminated transmitted light from transillumination mechanism 14 through viewing optical system by video camera 24 is the state of homogeneous and bright with 42 in this view data.
In the testing fixture 10 that constitutes like this; When limit irradiation transillumination limit when observing each semiconductor element 44 (with reference to Fig. 7) that constitutes by above-mentioned transparent glass substrate 44a from the view data of viewing optical system (video camera 24); Shown in figure 11; The part of the shade that causes with a plurality of fine shape M in 42 can be prevented to produce, therefore, the noise contribution on the view data can be removed.Therefore, can correctly judge the outline line of each semiconductor element 44.For example shown in Figure 10; The transversal of two semiconductor elements 44 that adjoin each other inappropriate (with reference to upper left) can pass through its unsuitable state recognition; Not blocking two semiconductor elements 44 (with reference to a left side down) that adjoin each other can be through its continuum of states identification; Therefore, can accurately detect these substandard products.
Like this; In testing fixture 10 of the present invention; Utilize the dispersion effect of the lower surface 35b that becomes scattering surface of transmission platform 35, in view data, can prevent to produce the part of the shade that a plurality of fine shape M with in 42 of illuminated transmitted light from transillumination mechanism 14 cause from viewing optical system (video camera 24); Therefore, use transillumination mechanism 14 can correctly obtain being pasted on the information of inspection object (each semiconductor element 44 in embodiment 1) with 42.
In addition; In testing fixture 10; Observe in transmission optical axis Pa direction, the lower surface 35b that becomes scattering surface separates predetermined distance and is provided with along the upper surface 35a of the transmission platform 35 on the plane of sightingpiston Fp at a distance of regulation, therefore; The dispersion effect that can obtain reliably becoming scattering surface and produce; Therefore, in view data, can prevent to produce the part of the shade that a plurality of fine shape M with in 42 of illuminated transmitted light from transillumination mechanism 14 cause reliably from viewing optical system (video camera 24).
And then; In testing fixture 10; Being with 42 o'clock on the sightingpiston Fp that obtains the transmitted light (transmitted light that penetrates through scattering surface from irradiation means portion 16) that has shone from transillumination mechanism 14 through viewing optical system by video camera 24; Being that the state of homogeneous and bright is a benchmark with 42 in this view data; Cooperate the degree (roughness) of the scattering surface among the 35b of lower surface to be set in the upper surface 35a of transmission optical axis Pa direction observation and the interval of scattering surface (lower surface 35b), therefore, can obtain becoming the dispersion effect that scattering surface produces more reliably.In addition, the upper surface 35a of the transmission platform 35 that will be formed by glass is made as sightingpiston Fp, and lower surface 35b is made as the result that scattering surface makes an experiment is, is made as more than the 3cm through the interval with sightingpiston Fp and scattering surface, thereby can accesses the dispersion effect of expectation.
In testing fixture 10; The upper surface 35a of transmission platform 35 has makes inspection object (being each semiconductor element 44 among the embodiment 1) limit be positioned at the function that sightingpiston Fp top becomes flat condition; Therefore, can pass through viewing optical system (observation element 11) and suitably observe this inspection object.
In testing fixture 10; Constitute scattering surface by being provided with the lower surface 35b that makes the inspection object be positioned at the transmission platform 35 of the upper surface 35a on the sightingpiston Fp as transillumination mechanism 14; Therefore; The scattering surface (lower surface 35b) of can be easily and being set in the observation of transmission optical axis Pa direction reliably is with respect to the position as the sightingpiston Fp (upper surface 35a) in suitable observation place in viewing optical system (observation element 11), promptly at the sightingpiston Fp of transmission optical axis Pa direction observation and the interval of scattering surface.
In testing fixture 10; Lower surface 35b by the transmission platform 35 that is provided with upper surface 35a constitutes the scattering surface as transillumination mechanism 14; Therefore; Can realize making the function of checking that object is positioned at the function on the sightingpiston Fp and removes the noise contribution on the view data through transmission platform 35 only is set, therefore can become easy formation.
In testing fixture 10; Also consider after irradiation means portion 16 penetrates, to be set in the upper surface 35a of transmission optical axis Pa direction observation and the interval (gauge of transmission platform 35) of lower surface 35b through the light quantity the transmitted light of transmission platform 35; Therefore; Can shine transmitted light to the inspection object on the sightingpiston Fp with the light quantity of regulation, therefore, can use transillumination mechanism 14 more correctly to obtain checking the information of object (in embodiment 1, being each semiconductor element 44).
In testing fixture 10; The deflection that the deflection deformation that makes transmission platform 35 is set at upper surface 35a that also will observe in transmission optical axis Pa direction and the interval (gauge of transmission platform 35) of lower surface 35b for is that specialized range is with interior this point; Therefore, can suitably observe through viewing optical system (video camera 24).
In testing fixture 10; When keeping inspection object workpiece 40 (they are with 42) by 34 absorption of maintenance platform; The upper surface 35a of transmission platform 35 is positioned at than the leading section 34a (absorption holding position) that keeps platform 34 more by top (viewing optical system side); Therefore, the inspection object (each semiconductor element 44) that is pasted on 42 is positioned on the sightingpiston Fp.
In testing fixture 10; Transmission platform 35 can carry out the position adjustment about observation optical axis Oa to keeping platform 34 through position adjusting mechanism; Therefore; According to 42 deflection deformation amount and state, the inspection object (each semiconductor element 44) that is pasted on 42 is positioned on the sightingpiston Fp.
In testing fixture 10; The irradiation means portion 16 of transillumination mechanism 14 (its injection part 53) has the optical property (integrator function) of the expansion (diffusion) that suppresses irradiation area; Therefore; The appropriate region on the sightingpiston Fp can be shone, therefore, the suitable observation of viewing optical system (video camera 24) can be more effectively carried out with respect to viewing optical system (video camera 24).
In testing fixture 10; The irradiation means portion 16 of transillumination mechanism 14 (its injection part 53) has the optical property (non-proliferation (optically focused) function) in the light quantity distribution homogenising of observing with the section of the transmission optical axis Pa quadrature that becomes direct of travel; Therefore, can carry out more suitable observation according to viewing optical system (video camera 24).
In testing fixture 10; The irradiation means portion 16 of transillumination mechanism 14 (its injection part 53) is for adsorbing the formation of the inspection object (being each semiconductor element 44 embodiment 1) that remains in this maintenance platform 34 from leaving the position irradiation that keeps platform 34; Therefore; Can prevent reliably to follow along moving of the X-Y plane that keeps platform 34 and should interfere with irradiation means portion 16 (its injection part 53) by maintenances platform 34, therefore, can shine transmitted light to the Zone Full of the inboard of the leading section 34a that is keeping adsorbing in the platform 34 retainer belt 42; Thereby, can guarantee that effective inspection area is a maximum limit.This is owing to following reason; Promptly; Be positioned under the situation of inboard of this maintenance platform 34 to observe in Z-direction in irradiation means portion 16 (its injection part 53) with keeping platform 34 overlapping modes; Because the interference of the housing 53a of injection part 53 and the internal perisporium face that keeps platform 34, thereby the zone of the shone transmitted light of the inboard of maintenance platform 34 (effectively inspection area) is narrow.Therefore, can use the efficient suitably inspection of transillumination mechanism 14 be pasted on keep that platform 34 absorption keep with 42 inspection object.
Therefore, in testing fixture 10 of the present invention, even, also can obtain correct information through transillumination to being pasted on transparent inspection object (each semiconductor element 44) with 42.
[embodiment 2]
Below, use Figure 12 that the testing fixture 10A of embodiments of the invention 2 is described.The testing fixture 10 of these embodiment 2 relative embodiment 1 is for keeping the different example of formation of the position adjusting mechanism among the platform 34A (maintaining body 13A).The basic comprising of the testing fixture 10A of this embodiment 2 is identical with the testing fixture 10 of the foregoing description 1, therefore, to the identical identical Reference numeral of formation place mark, and omits its detailed description.
Shown in figure 12, in testing fixture 10A,, replace each Z axle to screw togather parts 37 and be provided with a plurality of Z axial adjustment mechanism 71 as the position adjusting mechanism among the maintenance platform 34A of maintaining body 13A.It is identical that this Z axial adjustment mechanism 71 and Z axle screw togather parts 37, is provided with at least (only diagram has two in Figure 12) more than three.Each Z axial adjustment mechanism 71 has driving motor 72, is installed on the cam part 73 of its turning axle 72a, passes through the Z axle support 74 that this cam part 73 changes.Driving motor 72 is the drive source in the Z axial adjustment mechanism 71, and it is through turning axle 72a output rotary driving force.72a is connected with cam part 73 at this turning axle.This cam part 73 is discoideus, is connected in turning axle 72a in the position from eccentric axis.Cam part 73 can be connected to Z axle support 74 at lateral surface.This Z axle support 74 is bar-shaped, observes in Z-direction, and its upside at cam part 73 (transmission platform 35 sides) connects along Z-direction and keeps platform 34A and be provided with, and in the Z-direction freedom of movement.One end of the upside of Z axle support 74 (viewing optical system side) is by the supporting supporting frame 36 from the below, and the other end of its downside is connected to the lateral surface of cam part 73.
In this Z axial adjustment mechanism 71,, thereby Z axle support 74 is moved along Z-direction through suitable drive controlling driving motor 72.Therefore; Keeping platform 34A by this transmission platform 35 is set as follows; Promptly; Through the suitable bearing position that drives each Z axial adjustment mechanism 71, suitable each Z axle support 74 of change, thereby scalable is position (height and position) and the transmission platform 35 (upper surface 35a) of the transmission platform 35 observed of observation optical axis Oa direction these both sides of inclination with respect to this observation optical axis Oa in Z-direction.Thus, each Z axle screws togather parts 37 as the position adjusting mechanism performance function that can carry out keeping about the adjustment ground, position of observation optical axis Oa transmission platform 35 with respect to maintenance platform 34A.In testing fixture 10A, the drive control part 63 of control gear 15 each the Z axial adjustment mechanism 71 of drive controlling that can suit is its driving motor 72.
In this testing fixture 10A; In the state of the inspection object workpiece 40 that becomes object by maintenance platform 34A absorption maintenance; Through will resolving at the image control part 61 of control gear 15, thereby obtain amount and state with 42 deflection deformation from the view data of video camera 24.Then; According to this amount and state with 42 deflection deformation; The drive control part 63 of control gear 15 is so that be positioned at the driving motor 72 of suitable each the Z axial adjustment mechanism 71 of drive controlling of mode on the sightingpiston Fp with each semiconductor element 44 on 42, thereby is adjusted in position (height and position) that Z-direction is the transmission platform 35 observed of observation optical axis Oa direction and transmission platform 35 (upper surface 35a) these both sides of inclination with respect to this observation optical axis Oa.Then; So that adjustment is positioned at the mode on the sightingpiston Fp about the inspection object (each semiconductor element 44) that is pasted on 42 on the upper surface 35a of the transmission platform 35 of the position of this observation optical axis Oa, the drive control part 63 of control gear 15 makes observation element 11, indirect illumination mechanism 12 and transillumination mechanism 14 (its irradiation means portion 16) move along Z-direction is suitable.Thus, the inspection object (each semiconductor element 44) that is pasted on 42 is positioned on the sightingpiston Fp with suitable state.Therefore, identical with the testing fixture 10 of embodiment 1 in testing fixture 10A, can check this inspection object (each semiconductor element 44).
In the testing fixture 10A of embodiment 2, basically be the formation identical, so can access the effect identical basically with embodiment 1 with the testing fixture of embodiment 1 10.
In addition; In the testing fixture 10A of embodiment 2; The inspection object (in embodiment 2, being each semiconductor element 44) with on 42 that becomes the inspection of object object workpiece 40 is positioned on the sightingpiston Fp automatically; Therefore, can be rapidly and inspection inspection object (being each semiconductor element 44 among the embodiment 2) suitably.
Therefore, in testing fixture 10A of the present invention, even also can utilize transillumination to obtain correct information for the transparent inspection object (each semiconductor element 44) that is pasted on 42.
In addition; In embodiment 2; Each Z axial adjustment mechanism 71 is made up of driving motor 72 (turning axle 72a), cam part 73, Z axle support 74; But so long as the drive controlling of the drive control part 63 through control gear 15 and can to keep platform 34A adjustment about the position of the transmission platform 35 of observation optical axis Oa just can, be not limited to the formation of embodiment 2.
[embodiment 3]
Below, use Figure 13 that the testing fixture 10B of the embodiment of the invention 3 is described.This embodiment 3 is the testing fixture 10A of relative embodiment 2, the example that the formation of maintaining body 13B is different.The basic comprising of the testing fixture 10B of this embodiment 3 is identical with the testing fixture 10A of the foregoing description 2, therefore, to identical formation place mark same reference numerals, and omits its detailed description.
Shown in figure 13, in testing fixture 10B, in maintaining body 13B, be provided with pressing mechanism 81.This pressing mechanism 81 can keep carrying the inspection object workpiece 40 that places on the transmission platform 35 (upper surface 35a) that keeps platform 34A.In detail; The leading section 34a (absorption holding position) that pressing mechanism 81 is positioned at than keeps platform 34A at the upper surface 35a with transmission platform 35 is the mode of top (viewing optical system side) more; Adjustment transmission platform 35 is with respect to keeping platform 34A when the position of Z-direction; Through with the cooperation of this transmission platform 35 (its upper surface 35a), but the limit suitably is positioned on the sightingpiston Fp inspection object (each semiconductor element 44) that is pasted on 42, the limit keeps should inspection object workpiece 40.
In embodiment 3, this pressing mechanism 81 has to be observed the sliding supporting part 82 of being located at the outer fix that keeps platform 34A and is pushing arm 83 through what this sliding supporting part 82 kept on Z-direction freedom of movement ground with the direction of Z axle quadrature.This pressing mechanism 81 is provided with (diagram has two among Figure 13) more than two at least.Respectively push arm 83 and extend to the inside from sliding supporting part 82, and can endless member 43 that the periphery that keeps platform 34A will be checked object workpiece 40 from above (viewing optical system side) push.In other words, fore-end is provided with the endless member 43 overlapping modes of checking object workpiece 40 to observe at least in Z-direction respectively to push arm 83.
In testing fixture 10B, be with 42 what the leading section 34a absorption that keeps platform 34A kept inspection object workpiece 40 basically.At this; The leading section 34a (absorption holding position) that is positioned at than keeps platform 34A at the upper surface 35a with transmission platform 35 is the mode of top (viewing optical system side) more; Keep platform 34A adjustment transmission platform 35 relatively when the position of Z-direction, sometimes can not be with carrying keeping in the leading section 34a absorption that keeps platform 34A of end face 35a placed on it with 42.This is because limited with 42 deflection deformation, and the difference change of position through the upper surface 35a that observes in Z-direction and the position of leading section 34a produces greatly.At this moment; In testing fixture 10B; In each pressing mechanism 81; The arm 83 of pushing of being located at each sliding supporting part 82 is pressed (it is moved to irradiation means portion 16 sides (with reference to Figure 12 etc.)), respectively pushes endless member 43 that arm 83 will check object workpiece 40 from the top (viewing optical system side (with reference to Figure 12 etc.) with it) push downwards.So inspection object workpiece 40 is because it is boosted by the upper surface 35a of transmission platform 35 with 42 central authorities, therefore, end face 35a is to fix with the state of 42 mode planarization by stickup above that.Therefore, respectively push the inclination individual settings of the pressing position (height and position) of arm 83 according to the relative observation optical axis Oa of transmission platform 35 (its upper surface 35a).In addition, the pressing position of respectively pushing arm 83 also can be equal height position (position of the relative transmission platform of observing in Z-direction 35).Therefore, inspection object (each semiconductor element 44) suitably is arranged on the sightingpiston Fp as the suitable position of viewing optical system.Carry out moving under the control of control gear 15 (its drive control part 63) of the position of pushing arm 83 on this each sliding supporting part 82.In addition, moving of the position of pushing arm 83 on each sliding supporting part 82 also can be through manually carrying out.In this each pressing mechanism 81; Under the scene of the endless member 43 of not pushing inspection object workpiece 40; Push arm 83 and keep out of the way the top position not become inspection object workpiece 40 to the mode of carrying the obstruction of putting that keeps on the platform 34A (transmission platform 35), to utilize sliding supporting part 82 to make.In addition, push arm 83 and keep out of the way for this, can make and prolong the retractile formation of outgoing direction, also can make can be around the formation of sliding supporting part 82 rotations.
In the testing fixture 10B of embodiment 3, because be essentially the formation identical with the testing fixture 10A of embodiment 2, so, can access basically the effect identical with embodiment 2.
In addition; In the testing fixture 10B of embodiment 3; Keep platform 34A transmission platform 35 to be carried out the position adjustment relatively so that be pasted on the mode that inspection object (each semiconductor element 44) with 42 suitably is positioned on the sightingpiston Fp in Z-direction; Therefore; Even the inspection object workpiece 40 that can not keep in the leading section 34a absorption that keeps platform 34A also can be with 42 planarization limits to be fixed through making according to the upper surface 35a of this transmission platform 35 by flanging of pressing mechanism 81, thereby can suitably check and be pasted on this with 42 inspection object (each semiconductor element 44).
In addition; In testing fixture 10B; Pressing mechanism 81 is pushed the endless member 43 of inspection object workpiece 40; Therefore, can suppress to this inspection object workpiece 40 with 42 or be pasted on this load of inspection object (each semiconductor element 44) in, this is pushed into the upper surface 35a of transmission platform 35 with 42 (checking objects (each semiconductor element 44)).
Therefore, in testing fixture 10B of the present invention, also can obtain correct information through transillumination for the transparent inspection object (each semiconductor element 44) that is pasted on 42.
In addition, represented that in embodiment 3 the testing fixture 10A at embodiment 2 is provided with the testing fixture 10B of pressing mechanism 81, but also can this pressing mechanism 81 be applicable to the testing fixture 10 of embodiment 1, and be not limited to the formation of the foregoing description 3.
In addition; Though in embodiment 3; Pressing mechanism 81 is made the formation that has sliding supporting part 82 and push arm 83; But, and be not limited to the formation of the foregoing description 3 so long as but inspection object workpiece 40 limits that place on the transmission platform 35 (upper surface 35a) that keeps platform (34A) keep are carried on the limit makes and be pasted on its inspection object (each semiconductor element 44) with 42 and suitably be positioned at sightingpiston Fp and go up just passablely.For example; Pressing mechanism also can be realized through following formation; Promptly; In keeping platform (34A), seal between the inner side of leading section (34a) and transmitting member (35) and the supporting frame (36), and can the ring-type slot part that formed by the inner side of leading section (34a) and transmitting member (35) and supporting frame (36) be vacuumized.Under the situation of such formation, can be with the inspection object workpiece 40 that carries the upper surface (35a) that places transmitting member (35) spread all over full Zhou Jinhang absorption in the position that surrounds its upper surface (35a) with 42.Therefore; No matter whether can be through keeping the leading section 34a absorption retainer belt 42 of platform 34A; Can both therefore, the inspection object (each semiconductor element 44) that is pasted on 42 suitably be positioned on the sightingpiston Fp slot part of introducing ring-type with the redundance of the deflection deformation in 42.
And then though in embodiment 3, the arm 83 of pushing of pressing mechanism 81 is made endless member 43 formation that (viewing optical system side) pushes from the top with inspection object workpiece 40, also can be by pressure zone 42, and be not limited to the formation of the above embodiments 3.
[embodiment 4]
Below, use Figure 14 that the testing fixture 10C of the embodiment of the invention 4 is described.The testing fixture 10 that this embodiment 4 is relative embodiment 1, the different example of formation of the maintenance platform 34C of maintaining body 13C and the 14C of transillumination mechanism.The basic comprising of the testing fixture 10C of this embodiment 4 is identical with the testing fixture 10 of the foregoing description 1, therefore, to the identical identical Reference numeral of formation place mark, and omits its detailed description.
Shown in figure 14, in testing fixture 10C, transmission platform 35 and position adjusting mechanism thereof are not set at the maintenance platform 34C of maintaining body 13C.That is, keep platform 34C make can its leading section 34a absorption keep endless member 43 inner side with 42 cylinder part with the level.
In addition, in testing fixture 10C, take in the first optical element 53Cp and the second optical element 53Cq at the housing 53Ca of tubular and constitute the 16C of irradiation means portion as the 14C of transillumination mechanism.This first optical element 53Cp constitute with the outgoing plane 52a of light guide section 52 in opposite directions plane of incidence 53Cr and with the second optical element 53Cq, the first forward surface 53Cs in opposite directions.This second optical element 53Cq constitutes the first forward surface 53Cs, the second forward surface 53Ct in opposite directions and the outgoing plane 53Cu that penetrates the transmitted light of incident thus with the first optical element 53Cp.The second forward surface 53Ct of the second optical element 53Cq is the identical scattering surface of lower surface 35b with the transmission platform 35 of embodiment 1.In addition, the outgoing plane 53Cu of the second optical element 53Cq is a tabular surface, the tabular surface for having ground in embodiment 4.And then in embodiment 4, the first forward surface 53Cs of the first optical element 53Cp is the tabular surface that has ground.
The optical element 53b with embodiment 1 is identical basically with the second optical element 53Cq for this first optical element 53Cp, has in the optical property (non-proliferation (optically focused) function) of the light quantity distribution homogenising of observing with the section of the transmission optical axis Pa quadrature that becomes direct of travel and the optical property (integrator function) of the expansion (diffusion) of inhibition irradiation area.The first optical element 53Cp and the second optical element 53Cq are made up of the bar-shaped integrator optics in embodiment 4.
In the 16C of this irradiation means portion; Make the transmitted light that penetrates with light source 51 from transmission through the outgoing plane 52a of light guide section 52 from advancing to the first optical element 53Cp with its plane of incidence 53Cr in opposite directions, as the almost parallel light of uniform light quantity distribution through the first forward surface 53Cs of the first optical element 53Cp from advancing to the second optical element 53Cq with its second forward surface 53Ct in opposite directions.At this moment, transmitted light is advanced to the second optical element 53Cq so become scattered light because the second forward surface 53Ct is a scattering surface, shines sightingpiston Fp through the outgoing plane 53Cu of this second optical element 53Cq from rear side.This transmitted light at least transmission absorption remain in the inspection object workpiece 40 that keeps platform 34C be with 42, can observe (with reference to Fig. 1) through viewing optical system (video camera 24).Therefore; In the 16C of irradiation means portion; Transmission is cooperated with light source 51, light guide section 52 and the first optical element 53Cp and the second forward surface 53Ct of the second optical element 53Cq that becomes scattering surface; As generating the 14C of the transillumination mechanism performance function of shining the transmitted light of sightingpiston Fp (inspection object (semiconductor element 44)) from the opposition side of viewing optical system, its transmission is with light source 51, light guide section 52 and the first optical element 53Cp injection part 53c performance function as the 14C of transillumination mechanism.In addition, the second optical element 53Cq is as the scattering part (becoming the second forward surface 53Ct of scattering surface) make the transmission light-scattering layer that penetrates from injection part 53C and the transmitting member performance function that allows the transmission optical transmission are set in the 14C of transillumination mechanism.And then in the 16C of irradiation means portion, housing 53Ca is as while linking it being remained in inboard tubular maintaining part performance function with injection part 53C with as the second optical element 53Cq of transmitting member.
In testing fixture 10C; Being with 42 o'clock of inner side that keeps endless member 43 in the leading section 34a absorption that keeps platform 34C; Shift the back side (face of the 16C of irradiation means portion side) onto through outgoing plane 53Cu and go up and lift its butt position, thereby the suitable position that makes the inspection object be arranged in viewing optical system (video camera 24 (with reference to Fig. 1)) is on the sightingpiston Fp with 42 with the 16C of irradiation means portion.Like this, in testing fixture 10C, it is the function on the sightingpiston Fp that the outgoing plane 53Cu of the 16C of irradiation means portion has the suitable position that makes the inspection object be arranged in viewing optical system (video camera 24).
In the testing fixture 10C of embodiment 4, be identical with the testing fixture of embodiment 1 10 basically formation, therefore, can access the effect identical basically with embodiment 1.
In addition; In the testing fixture 10C of embodiment 4; Can be just in the 16C of irradiation means portion, take in the first optical element 53Cp and the second optical element 53Cq and constitute at the housing 53Ca of tubular; Need transmission platform 35 and position adjusting mechanism thereof be set, therefore, can use the transillumination 14C of mechanism correctly to obtain being pasted on the information of inspection object (being each semiconductor element 44) with more easy formation at embodiment 4 with 42 at the maintenance platform 34C of maintaining body 13C.
Therefore, in testing fixture 10C of the present invention, even also can obtain correct information through transillumination for the transparent inspection object (each semiconductor element 44) that is pasted on 42.
In addition, though each example of testing fixture of the present invention has been described in above-mentioned each embodiment; Be not limited to above-mentioned each embodiment, as long as be that following testing fixture is just passable, promptly; A kind of testing fixture, it possesses: viewing optical system, it is made as sightingpiston with the assigned position on the observation optical axis; Indirect illumination mechanism, it throws light on to above-mentioned sightingpiston from this viewing optical system side; Transillumination mechanism, its opposition side from above-mentioned viewing optical system throws light on to above-mentioned sightingpiston, and said testing fixture is characterized in that, and above-mentioned transillumination mechanism has: injection part, it penetrates the transmitted light from the light source leaded light; Scattering part; It makes the transmission light-scattering layer that is penetrated by this injection part; This scattering part is observed apart from said sightingpiston in the transmission optical axis direction of said transillumination mechanism and is separated the setting of predetermined distance ground, so that make the transmitted light of said sightingpiston become the scattering state of regulation.
In addition; Though in each above-mentioned embodiment; To be made as scattering surface and constitute scattering part as the lower surface 35b of the transmission platform of transmitting member or as the second forward surface 53Ct of the second optical element 53Cq of transmitting member; But so long as separate the setting of predetermined distance ground apart from this sightingpiston Fp in transmission optical axis Pa direction so that the transmitted light of sightingpiston Fp becomes the mode of the scattering state of regulation; Then for example also can be by constituting with the parts of regulation on sightingpiston Fp inspection object, the optics that the injection part of transillumination mechanism 14 is provided with separately with scattering process, and be not limited to each above-mentioned embodiment.
And then; Though in each above-mentioned embodiment; Keep platform (34 etc.) to make formation at leading section 34a absorption retainer belt 42; But so long as so that this inspection object workpiece 40 of maintenance is just passable down at the state of the state that keeps keeping inspection object workpiece 40 as the mode of inspection object with each semiconductor element 44, and be not limited to each above-mentioned embodiment.
More than, based on each embodiment testing fixture of the present invention has been described, but for concrete formation, be not limited to these each example and each embodiment, only otherwise break away from main points of the present invention, the change that just allows to design, append etc.

Claims (8)

1. testing fixture, it possesses: viewing optical system, it is made as sightingpiston with the assigned position on the observation optical axis; Indirect illumination mechanism, it throws light on to said sightingpiston from this viewing optical system side; And transillumination mechanism, its opposition side from said viewing optical system throws light on to said sightingpiston, and said testing fixture is characterized in that,
Said transillumination mechanism has: injection part, and it penetrates the transmitted light from the light source leaded light; And scattering part, it makes the transmission light-scattering layer that is penetrated by this injection part,
This scattering part is observed apart from said sightingpiston in the transmission optical axis direction of said transillumination mechanism and is separated the setting of predetermined distance ground, so that make the transmitted light of said sightingpiston become the scattering state of regulation.
2. testing fixture according to claim 1 is characterized in that,
The scattering state of said regulation is the band that is pasted with the inspection object to be positioned on the said sightingpiston and to observe with said viewing optical system when having shone from the said band on the said sightingpiston of the transmitted light of said transillumination mechanism, and making said band is the state of homogeneous and bright.
3. testing fixture according to claim 1 and 2 is characterized in that,
Said transillumination mechanism has: transmitting member, it allows the transmission optical transmission from said injection part, and between said scattering part and said sightingpiston, is provided with the tabular surface of regulation along the plane of this sightingpiston.
4. testing fixture according to claim 3 is characterized in that,
Said scattering part is being that the mode of scattering surface constitutes with said injection part forward surface in opposite directions in said transmitting member.
5. testing fixture according to claim 4 is characterized in that,
Also possess the maintenance platform of tubular that can keep being pasted with the said band of said inspection object from said transillumination mechanism side,
Said transmitting member is with through remaining in tabular that mode that said maintenance platform imbeds the inboard of this maintenance platform extends,
Said injection part has the light-gathering optics parts of the diffusion of the transmitted light that reduce to penetrate, so that make transmitted light with the said scattering part incident to said transmitting member of the some zone of regulation.
6. testing fixture according to claim 5 is characterized in that,
Said light-gathering optics parts are the bar-shaped integrator opticses that also have in the function of the light quantity distribution homogenising of observing with the section of transmission optical axis quadrature.
7. testing fixture according to claim 4 is characterized in that,
Said transillumination mechanism has and links said injection part and said transmitting member and simultaneously it is remained in inboard tubular maintaining part.
8. testing fixture according to claim 7 is characterized in that,
Said injection part has the integrator optics in the light quantity distribution homogenising of observing with the section of transmission optical axis quadrature.
CN2011102581392A 2010-09-03 2011-09-02 Detection device Pending CN102384917A (en)

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Application publication date: 20120321