CN102383188A - Seed crystal and seed crystal fixture - Google Patents
Seed crystal and seed crystal fixture Download PDFInfo
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- CN102383188A CN102383188A CN2010102752194A CN201010275219A CN102383188A CN 102383188 A CN102383188 A CN 102383188A CN 2010102752194 A CN2010102752194 A CN 2010102752194A CN 201010275219 A CN201010275219 A CN 201010275219A CN 102383188 A CN102383188 A CN 102383188A
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Abstract
On the one hand, the invention provides a seed crystal which has a staircase structure, wherein the staircase structure is provided with a first axis section and a second axis section, and the axis of the first axis section is coaxial with the axis of the second axis section. On the other hand, the invention provides a seed crystal fixture which is used for the seed crystal, wherein the seed crystal fixture has a shape of a sleeve; a thread is arranged at one end of a circumferential wall of the sleeve; a circular radial bulge which is used for supporting the first axis section of the seed crystal is arranged at the other end of the sleeve; the radial bulge is arranged on an inner side wall of the circumferential wall of the sleeve; a first diameter through hole which is matched with an axial hole of the second axis section of the seed crystal is formed by the radial bulge around the axis of the sleeve; and the axis of the first diameter through hole is coaxial with a thread axis of the thread. Due to the staircase structure of the seed crystal as well as the coaxial arrangement of the thread hole and the first diameter through hole of the seed crystal fixture, the connection between the seed crystal and the seed crystal fixture is firmer and the quality of the growth of the seed crystal is promoted.
Description
Technical field
The present invention relates to field of crystal growth, in particular to a kind of seed crystal, seed holder.
Background technology
In the prior art, an end of seed rod is seed holder fixedly, and the shape of seed crystal is generally square rod or pole shape, is fixed on the seed holder with binding mode or pin configuration, through lifting seed rod control crystal growth.
But the syndeton of this seed rod and seed crystal makes that the right alignment of seed rod and seed crystal and connectivity robustness are all relatively poor.Because; When connecting,, take the mode of gap on seed crystal to agree with mutually usually with the structure of anchor clamps in order to strengthen the soundness that is connected between seed crystal and the anchor clamps with binding mode or pin configuration; So, the breach on the seed crystal has a strong impact on the weight capacity and the tension level of seed crystal.The big or seed crystal access times of the crystal weight of on seed crystal, growing more for a long time, can occur inevitably the seed crystal fracture, with phenomenon such as anchor clamps disengagement, cause the crystal growth failure of one-period.In addition, connect with binding mode or pin configuration, be difficult to guarantee the right alignment of seed crystal and seed rod, therefore the crystalline growth quality also is affected.
Summary of the invention
To the problem that exists in the prior art, the object of the present invention is to provide a kind of seed crystal and seed holder, make on the one hand to be connected more firmly between seed crystal and the seed holder, improve the quality of crystal growth on the other hand.
For realizing above-mentioned purpose, the invention provides a kind of seed crystal seed crystal, seed crystal is the hierarchic structure with first shaft part and second shaft part, wherein, the axis coaxle of the axis of first shaft part and second shaft part.
Preferably, first shaft part and/or second shaft part are that xsect is the cylinder of circle or regular polygon, and the circumcircle diameter of first shaft part is greater than the circumcircle diameter of second shaft part.
Preferably, seed crystal is the integrative-structure spare that machining forms.
Preferably, the material of seed crystal is sapphire crystal " T " the shape pole of purity more than 99.99%, and the diameter of pole is 8mm～20mm.
Preferably, seed crystal is applicable to 3～30kg or the above sapphire crystal growth of 30kg.
On the other hand, the present invention also provides a kind of seed holder, is used for aforementioned any seed crystal; Seed holder is sleeve-like, and an end place of telescopic perisporium is provided with screw thread, and the other end place is provided with the annular radial protrusion of first shaft part that supports seed crystal; Wherein, Radial protrusion is located on the inner side-wall of perisporium, and forms first diameter through hole that cooperates with the second shaft part axis hole of seed crystal around the telescopic axis, and the axis of first diameter through hole is coaxial with the axis of thread of screw thread.
Preferably, the telescopic periphery is cylindrical, and screw thread is opened on the inner side-wall or outer side wall of telescopic perisporium.
Preferably, screw thread and radial protrusion are connected as a single entity through unthreaded hole, and the diameter of unthreaded hole equals the internal diameter of screw thread place perisporium, and the diameter of unthreaded hole is greater than the diameter of first diameter through hole.
Preferably, sleeve is processed by tungsten, molybdenum, miramint.
Than prior art, beneficial effect of the present invention is:
(1) seed crystal of the present invention is set to hierarchic structure; First shaft part plays fixing and supporting role, and second shaft part plays adductive crystallization, and seed crystal of the present invention is when being connected with seed holder; Only need make fixture support play first shaft part gets final product; Need not other fixed sturctures such as gap type, thus, seed crystal of the present invention is easy fracture and can being connected more firmly with anchor clamps not;
(2) seed crystal of the present invention is mach integrative-structure spare, also can strengthen the weight capacity and the tension level of seed crystal;
(3) seed holder of the present invention; Because the axis coaxle of the axis of thread and first diameter through hole; This makes the seed crystal and the seed rod that are connected in seed holder keep good right alignment; Eliminate the ropy defective of the crystal growth that causes owing to coaxiality deviation, therefore can better improve crystal mass and yield rate;
(4) the sleeve-like seed holder that forms by tungsten, molybdenum, miramint materials processed, its heat-conducting area is bigger, and heat-conducting effect is remarkable, has eliminated the defective that influences crystal growth interface owing to the heat-conducting effect difference.
Description of drawings
Fig. 1 is the stereographic map of seed crystal of the present invention;
Fig. 2 is the front view of seed crystal of the present invention;
Fig. 3 is the axial sectional view of seed holder of the present invention.
Embodiment
Referring to Fig. 1 and Fig. 2, seed crystal of the present invention is described, seed crystal of the present invention is the hierarchic structure with first shaft part 1 and second shaft part 2, the axis coaxle of the axis of first shaft part 1 and second shaft part 2.
Particularly, first shaft part 1 and second shaft part 2 have been shown among Fig. 1 and Fig. 2 have been the situation of xsect for circular cylinder, wherein, the diameter of the xsect of first shaft part 1 is greater than the diameter of the xsect of second shaft part 2, that is, this moment, seed crystal was the T font.Than seed crystal of the prior art; Seed crystal of the present invention is when being connected with seed holder; Only need make fixture support play first shaft part and get final product, need not other fixed sturctures such as gap type, so; Seed crystal of the present invention is easy fracture and can being connected more firmly with anchor clamps not, in conjunction with below can be more readily understood the description of seed holder of the present invention.
Among this embodiment, seed crystal is the integrative-structure spare that machining forms, and this can guarantee the weight capacity and the tension level of seed crystal.For example, seed crystal can process through grinding machine, cutting machine etc., and wherein, the material of seed crystal is preferably sapphire crystal " T " the shape pole of purity more than 99.99%, and the diameter of pole is 8mm～20mm.Because seed crystal self load bearing of the present invention and resistance to tension are stronger, and can guarantee connectivity robustness and right alignment with the mode of connection of anchor clamps, therefore, seed crystal of the present invention is applicable to that 3～30kg or the above large size sapphire crystal of 30kg grow.In addition, when the weight capacity of seed crystal and tension level being required when not being very strict, first shaft part 1 and second shaft part 2 can not be integrative-structures also, but the structural part that welds together or detachably fit together.
Although first shaft part 1 shown in Fig. 1 and Fig. 2 and second shaft part 2 are the equal diameter right cylinder,, be appreciated that first shaft part 1 and/or second shaft part 2 can be that xsect is the cylinder of regular polygon.At this moment, the seed crystal of T font shows as, and the circumcircle diameter of first shaft part 1 is during greater than the circumcircle diameter of second shaft part 2.For aforesaid first shaft part 1 and second shaft part 2 is the cylindrical situation of equal diameter, is appreciated that to the cylindrical periphery of equal diameter is round to overlap with circumcircle.And seed crystal of the present invention is not limited to the hierarchic structure that only has a step, and according to the different situations of crystal growth, seed crystal also can be the hierarchic structure with a plurality of steps.
On the other hand, the present invention also provides a kind of seed holder, is used for seed crystal of the present invention.Particularly, referring to Fig. 3, seed holder 3 of the present invention is sleeve-like (or half-headed round barrel shape is asked in statement); Sleeve is being provided with screw thread 34 along centering on perisporium on the end of its axis direction; Sleeve is provided with annular radial protrusion 32 at the other end along its axis direction, and radial protrusion 32 is located on the inner side-wall of telescopic perisporium, and forms first diameter through hole 30 around the telescopic axis; The axis of this first diameter through hole 30 is coaxial with the axis of thread of screw thread 34; Wherein, the so-called axis of thread is the axis of middle footpath cylinder or middle footpath circular cone, in other words; Telescopic one end is made as the form of threaded hole, the axis coaxle of the axis of thread of this threaded hole and first diameter through hole 30.Seed crystal of the present invention passes first diameter through hole 30 and is suspended on the seed holder; Particularly, radial protrusion 32 is arranged to cooperate with the ring surface of first shaft part 1 of seed crystal, promptly; First shaft part 1 is supported on the annular perimembranous of radial protrusion 32 formation; First diameter through hole 30 is set to cooperate with second shaft part, 2 axis holes of seed crystal, that is, second shaft part 2 stretches out from seed holder 3 through first diameter through hole 30.
By this; When the seed rod (not shown) is threaded with seed holder 3 through screw thread 34; And seed crystal of the present invention is when being clipped in the seed holder 3 through first diameter through hole 30; Seed holder 3 makes seed rod and seed crystal keep good right alignment, and this has eliminated the ropy defective of the crystal growth that causes owing to above-mentioned coaxiality deviation.
Continuation is referring to Fig. 3; Screw thread 34 is the IT that is opened in the inner side-wall of sleeve perisporium, and the telescopic periphery is cylindrical (abbreviating cylindrical sleeve as); Screw thread 34 is connected as a single entity through unthreaded hole 36 with radial protrusion 32; The diameter of unthreaded hole 36 equals the internal diameter (diameter) of screw thread 34 place perisporiums, and the diameter of unthreaded hole 36 is greater than the diameter of first diameter through hole 30, and unthreaded hole is appreciated that to there not being the equal diameter through hole of screw thread or step here.Thus, can be from an end that is provided with screw thread 34 be packed this seed holder 3 into seed crystal.Although IT has been shown among Fig. 3,, guaranteeing that screw thread 34 also can be made as the outside screw on the outer side wall that is opened in the telescopic perisporium under the axis of thread and the co-axial prerequisite of first diameter through hole as long as be appreciated that and realize being threaded with seed rod.
Further, from heat is transferred to the purpose of seed rod from seed crystal, seed holder 3 of the present invention is processed by tungsten, molybdenum, miramint; Concrete, employings diameter is that 25mm-30mm, length are that the cylindrical rod of 100mm-250mm is a blank, passes through accurate machining and forms; Promptly; The single piece that seed holder 3 forms for machining, said machining are to show for welding, punching press etc., can utilize apparatus processing such as cutting machine, grinding machine.
In crystal growing process, lift and during rotary seed crystal rod, the crystal that is created on the seed crystal produces lower pulling force (being equivalent to tens kilograms the lower pulling force that crystal produced) to seed crystal, seed crystal just is clamped in the seed holder 3 thus.So; Seed holder 3 provides the annular radial protrusion 32 that supports seed crystal; And first diameter through hole 30 that supplies seed crystal one end to stretch out, than the binding or the pin joint mode of prior art, this mode of connection of seed crystal of the present invention and seed holder makes that seed crystal is not easy to come off from seed holder.
In addition; In crystal growing process; Seed crystal sends heat to seed rod via seed holder 3, and than prior art, the telescoping structure of seed holder 3 has bigger heat-conducting area; Good heat conduction effect thus, this has eliminated the defective that influences crystal growth interface owing to the heat-conducting effect difference.Especially, for the process of growth of the higher relatively oxide crystal of thermal conductivity (for example, sapphire crystal), the heat-conducting effect of the sleeve-like seed holder 3 that is formed by tungsten, molybdenum, miramint materials processed is more remarkable.It may be noted that seed rod is the water-cooled seed rod in the present embodiment, promptly seed rod has the cavity that holds frozen water.
Obviously, according to real needs, except being the cylindrical sleeve tubular, seed holder also can be that periphery is that the sleeve or the periphery of circular cone is polygonal sleeve.
The above is merely the preferred embodiments of the present invention, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.All within spirit of the present invention and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a seed crystal is characterized in that, said seed crystal is for to have the hierarchic structure of first shaft part (1) and second shaft part (2), wherein, and the axis coaxle of the axis of said first shaft part (1) and said second shaft part (2).
2. seed crystal according to claim 1; It is characterized in that; Said first shaft part (1) and/or second shaft part (2) are the cylinder of circle or regular polygon for xsect, and the circumcircle diameter of said first shaft part (1) is greater than the circumcircle diameter of said second shaft part (2).
3. seed crystal according to claim 2 is characterized in that, said seed crystal is the integrative-structure spare that machining forms.
4. according to each described seed crystal among the claim 1-3, it is characterized in that the material of said seed crystal is sapphire crystal " T " the shape pole of purity more than 99.99%, the diameter of said pole is 8mm～20mm.
5. seed crystal according to claim 4 is characterized in that, said seed crystal is applicable to 3～30kg or the above sapphire crystal growth of 30kg.
6. a seed holder (3) is used for the described seed crystal of aforementioned each claim, it is characterized in that; Said seed holder (3) is sleeve-like; One end place of said telescopic perisporium is provided with screw thread (34), and the other end place is provided with the annular radial protrusion (32) of first shaft part (1) that supports said seed crystal
Wherein, Said radial protrusion (32) is located on the inner side-wall of said perisporium; And centering on first diameter through hole (30) that said telescopic axis formation cooperates with second shaft part (2) axis hole of said seed crystal, the axis of said first diameter through hole (30) is coaxial with the axis of thread of said screw thread (34).
7. seed holder according to claim 6 is characterized in that, said telescopic periphery is cylindrical, and said screw thread (34) is opened on the inner side-wall or outer side wall of said telescopic perisporium.
8. seed holder according to claim 7; It is characterized in that; Said screw thread (34) is connected as a single entity through unthreaded hole (36) with said radial protrusion (32); The diameter of said unthreaded hole (36) equals the internal diameter of said screw thread (34) place perisporium, and the diameter of said unthreaded hole (36) is greater than the diameter of said first diameter through hole (30).
9. seed holder according to claim 8 is characterized in that said sleeve is processed by tungsten, molybdenum, miramint.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102752194A CN102383188A (en) | 2010-09-06 | 2010-09-06 | Seed crystal and seed crystal fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102752194A CN102383188A (en) | 2010-09-06 | 2010-09-06 | Seed crystal and seed crystal fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102383188A true CN102383188A (en) | 2012-03-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102752194A Pending CN102383188A (en) | 2010-09-06 | 2010-09-06 | Seed crystal and seed crystal fixture |
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| Country | Link |
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| CN (1) | CN102383188A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102581577A (en) * | 2012-03-26 | 2012-07-18 | 苏州先端稀有金属有限公司 | Method for manufacturing seed crystal chuck |
| CN112720887A (en) * | 2020-12-18 | 2021-04-30 | 扬州申威光电器材有限公司 | Production process of seed crystal |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001080990A (en) * | 1999-09-09 | 2001-03-27 | Mitsubishi Materials Silicon Corp | Holding device for seed crystal |
| CN2518874Y (en) * | 2001-09-21 | 2002-10-30 | 上海莹雪光电科技发展有限公司 | Seed holder |
| CN101736397A (en) * | 2009-12-23 | 2010-06-16 | 常州亿晶光电科技有限公司 | Matted crystal for pulling silicon rod |
| CN101781792A (en) * | 2009-12-23 | 2010-07-21 | 常州亿晶光电科技有限公司 | Crystal clamp part for broaching silicon rod |
| CN201850330U (en) * | 2010-09-06 | 2011-06-01 | 江西同人电子材料有限公司 | Seed crystal clamp |
-
2010
- 2010-09-06 CN CN2010102752194A patent/CN102383188A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001080990A (en) * | 1999-09-09 | 2001-03-27 | Mitsubishi Materials Silicon Corp | Holding device for seed crystal |
| CN2518874Y (en) * | 2001-09-21 | 2002-10-30 | 上海莹雪光电科技发展有限公司 | Seed holder |
| CN101736397A (en) * | 2009-12-23 | 2010-06-16 | 常州亿晶光电科技有限公司 | Matted crystal for pulling silicon rod |
| CN101781792A (en) * | 2009-12-23 | 2010-07-21 | 常州亿晶光电科技有限公司 | Crystal clamp part for broaching silicon rod |
| CN201850330U (en) * | 2010-09-06 | 2011-06-01 | 江西同人电子材料有限公司 | Seed crystal clamp |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102581577A (en) * | 2012-03-26 | 2012-07-18 | 苏州先端稀有金属有限公司 | Method for manufacturing seed crystal chuck |
| CN102581577B (en) * | 2012-03-26 | 2014-01-01 | 苏州先端稀有金属有限公司 | Method for manufacturing seed crystal chuck |
| CN112720887A (en) * | 2020-12-18 | 2021-04-30 | 扬州申威光电器材有限公司 | Production process of seed crystal |
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Application publication date: 20120321 |