CN220685320U - Seed rod centering fixing device for silicon carbide crystal growth - Google Patents
Seed rod centering fixing device for silicon carbide crystal growth Download PDFInfo
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- CN220685320U CN220685320U CN202321193138.9U CN202321193138U CN220685320U CN 220685320 U CN220685320 U CN 220685320U CN 202321193138 U CN202321193138 U CN 202321193138U CN 220685320 U CN220685320 U CN 220685320U
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- 239000013078 crystal Substances 0.000 title claims abstract description 49
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 28
- 239000002184 metal Substances 0.000 claims abstract description 74
- 229910052751 metal Inorganic materials 0.000 claims abstract description 74
- 238000005299 abrasion Methods 0.000 abstract description 8
- 238000009434 installation Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 229910000619 316 stainless steel Inorganic materials 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 241000271510 Agkistrodon contortrix Species 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000006184 cosolvent Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a seed rod centering and fixing device for silicon carbide crystal growth, which comprises a metal rod and a clamping mechanism, wherein one end of the metal rod is detachably connected with the clamping mechanism, the clamping mechanism comprises a first clamping part and a second clamping part which are mutually matched, a seed rod is clamped between the first clamping part and the second clamping part, and an anti-rotation part is arranged between the seed rod and the first clamping part and/or the second clamping part and used for preventing deflection caused by rotation of the seed rod. The clamping mechanism adopts a split two-half structure, so that the clamping mechanism and the seed rod are convenient to install and disassemble; according to the utility model, the fixed assembly of the seed rod is realized through the clamping mechanism and the anti-rotation part, and then the clamping mechanism is detachably arranged on the metal rod, so that the positioning and mounting precision of the seed rod is improved, the coaxiality is ensured, and the abrasion to the seed rod is reduced.
Description
Technical Field
The utility model belongs to the technical field of equipment for silicon carbide crystal growth, and particularly relates to a seed rod centering and fixing device for silicon carbide crystal growth.
Background
The physical meteorological transmission method is the most mature and widely applied method for preparing silicon carbide single crystals at the present stage, and the industrialization of 6-inch single crystal substrates is realized at present, but the method has the limitations of higher defect density, low yield, difficult diameter expansion, high cost, difficult preparation of P-type substrates and the like. However, in the liquid phase method, the silicon carbide crystal growth is that carbon is dissolved in high-temperature liquid consisting of silicon and a cosolvent, and the carbon is separated out at a silicon carbide seed crystal with lower temperature due to supersaturation, so that the growth of the silicon carbide crystal is realized. The method has the advantages of low growth temperature, high crystallization quality, high growth speed, convenience in expanding diameter, easiness in obtaining a P-type low-resistance substrate and the like, and is a preparation method of silicon carbide single crystals with great potential. When the silicon carbide crystal is grown by the liquid phase method, the position of the seed crystal and the rotation of the seed crystal are required to be precisely controlled, and the coaxiality requirement of the rotation of the seed crystal is high by the mode.
At present, a metal rod is fixedly connected with a seed rod through a metal nut. However, the prior art has the following problems:
(1) poor coaxiality: the metal rod and the seed rod are simply connected and fixed through the metal nut, the coaxiality of the seed rod and the metal rod after being connected and fixed is poor, deflection is serious during high-speed rotation, and the influence on crystal growth is great.
(2) The consistency of repeated use is poor: the seed rod is made of graphite, and the screw is worn out to a certain extent when being installed and removed.
In summary, both installation consistency and reuse of seed rods present a significant challenge in preparing silicon carbide crystals.
Disclosure of Invention
The utility model aims to provide a seed rod centering and fixing device for silicon carbide crystal growth, which is used for realizing the fixed assembly of a seed rod through a clamping mechanism and an anti-rotation part, and then the clamping mechanism is detachably arranged on a metal rod, so that the positioning and mounting precision of the seed rod is improved, the coaxiality is ensured, and the abrasion to the seed rod is reduced.
The utility model is realized mainly by the following technical scheme:
the utility model provides a seed crystal pole centering fixing device for silicon carbide crystal growth, includes metal pole, fixture, the one end detachable of metal pole is connected with fixture, fixture is including first clamping part and the second clamping part that mutually agrees, the centre gripping has the seed crystal pole between first clamping part and the second clamping part, be provided with anti-rotation portion between seed crystal pole and first clamping part and/or the second clamping part for prevent to produce the skew because of the seed crystal pole is rotatory.
In order to better realize the utility model, further, the top of the seed rod is provided with an anti-rotation end face, and the inner sides of the first clamping part and/or the second clamping part are correspondingly provided with anti-rotation bearing end faces.
In order to better realize the utility model, further, one side of the top of the seed rod is of an arc structure, and the other side of the top of the seed rod is of a positioning plane; the first clamping part and the second clamping part are symmetrically arranged, and the inner sides of the first clamping part and the second clamping part are respectively provided with an arc-shaped end face and a positioning rotation-preventing end face which are connected.
In order to better realize the utility model, further, the top of the seed rod is provided with a plurality of polygonal planes along the peripheral side, and the inner sides of the first clamping part and the second clamping part are respectively and correspondingly provided with a plurality of anti-rotation positioning end surfaces.
In order to better realize the utility model, further, a plurality of anti-rotation protrusions are vertically arranged at the top of the seed rod in a staggered manner from top to bottom, and staggered anti-rotation grooves are correspondingly arranged at the first clamping part and/or the second clamping part in a staggered manner from top to bottom.
In order to better realize the utility model, further, the upper end and the lower end of the top of the seed rod are respectively provided with two rotation preventing bulges in a cross shape, the adjacent rotation preventing bulges are in a vertical relation in space, the inner sides of the first clamping part and the second clamping part are symmetrically arranged, and the upper side and the lower side are respectively provided with two rotation preventing grooves in a cross shape correspondingly.
In order to better realize the utility model, the clamping mechanism further comprises a mounting nut, wherein one end of the mounting nut is in sliding connection with the metal rod, the other end of the mounting nut is in threaded connection with the clamping mechanism, a limiting protrusion is arranged at the end part of the metal rod corresponding to the mounting nut, and an external thread is correspondingly arranged at the outer side of the clamping mechanism.
In order to better realize the utility model, further, one end of the metal rod is provided with external threads, the clamping mechanism is of a through tubular structure, and the inside of the clamping mechanism is correspondingly provided with internal threads.
In the using process, after the furnace is charged, the lower part of the seed rod is provided with seed crystals and placed into a graphite crucible. The operator breaks apart the clamping mechanism in half, clamps the top of the seed rod with the clamping mechanism in half, folds the first clamping part and the second clamping part through the positioning protrusions and the positioning holes, and places the first clamping part and the second clamping part on the seed rod. After closing the furnace cover, opening a quick-release opening on the furnace cover, lifting the clamping mechanism from the quick-release opening, and installing a nut under a metal rod on the rotary furnace cover for screw fixation, wherein after screwing down the screw, the connection between the seed rod and the metal rod is completed, and the rotary coaxiality of the seed rod after the rotary seed rod is inspected and installed. When the furnace is to be discharged, the furnace cover quick-release opening is opened, the mounting nut on the metal rod is screwed off from the clamping mechanism from the quick-release opening, the clamping mechanism and the connected seed rod are put down, the furnace cover is opened, the clamping mechanism is detached from the furnace chamber, and the separation of the clamping mechanism and the seed rod is completed.
In order to better realize the utility model, further, the top of the seed rod is provided with a conical structure, and the bottom of the conical structure is provided with a plurality of clamping tables along the circumference; the inner side of one end of the metal rod is provided with a conical groove corresponding to the conical structure, and the top of the conical groove is provided with a vent hole; the bottoms of the first clamping part and the second clamping part are respectively and correspondingly provided with a bearing end, and the bearing ends are fixedly connected with the clamping table; and the first clamping part and/or the second clamping part are/is provided with anti-slip fixing holes corresponding to the external threads of the metal rod, and the anti-slip fixing holes are used for installing anti-slip bolts so as to prevent loosening of the threads during high-speed rotation.
In order to better realize the utility model, a plurality of positioning protrusions and positioning holes are arranged between the first clamping part and the second clamping part.
In the use process, the bottom of the metal rod is processed into a conical groove with a certain taper, the bottom of the metal rod is provided with external threads, and the upper part of the conical groove is provided with a vent hole. The top of the seed rod is provided with a conical surface matched with the conical groove of the metal rod, and the coaxiality of the metal rod and the seed rod is kept better after the conical groove is connected with the conical surface. On the other hand, a clamping table is arranged below the conical surface at the top of the seed rod and is used for being fixed with the bearing end at the bottom of the clamping mechanism, so that the seed rod is fixed and does not fall off. The internal thread of the clamping mechanism is screwed with the external thread of the metal rod, the detachable bearing end at the lower part of the clamping mechanism is used for installing the seed rod and fixing the seed rod clamping table, and the anti-slip fixing hole on the clamping mechanism is used for fixing the thread by the copper head thread after the thread is screwed, so that the loosening of the thread during high-speed rotation is prevented.
The beneficial effects of the utility model are as follows:
(1) The clamping mechanism adopts a split two-half structure, so that the clamping mechanism and the seed rod are convenient to install and disassemble; according to the utility model, the fixed assembly of the seed rod is realized through the clamping mechanism and the anti-rotation part, so that the abrasion of the seed rod is reduced; the first clamping part and the second clamping part are positioned through the positioning protrusions and the positioning holes, so that the quick alignment and installation are convenient, and the practicability is good;
(2) The clamping mechanism and the metal rod are fixed through the mounting nut, and the mounting and the dismounting can be completed without using other tools. The clamping mechanism, the metal rod and the mounting nut can be made of the same material, and have the same thermal expansion coefficient and are convenient to detach; the top surface of the clamping mechanism and the bottom surface of the metal rod can be both set as positioning surfaces, and the 316 stainless steel metal processing precision, the wear resistance and the high temperature resistance are good, so that the coaxiality positioning requirement can be met;
(3) The inside of the clamping mechanism is positioned and anti-falling through the upper and lower large anti-rotation grooves which are connected in a cross shape, so that the abrasion of installation and disassembly on the seed rod is reduced, the repeated use of the seed rod is facilitated, meanwhile, the seed rod falling phenomenon caused by the breakage of the seed rod can be effectively reduced due to the fixation of the two layers of anti-rotation grooves, the coaxiality of the seed rod is promoted, and the clamping mechanism has good practicability;
(4) The utility model realizes convenient operation and more convenient integral assembly through the direct threaded connection of the metal rod and the clamping mechanism; on the other hand, through the conical structure cooperation of the conical groove on the metal rod and the seed rod and the fixed connection of the bearing end of the clamping mechanism and the clamping table, the installation stability of the seed rod is ensured while the installation coaxiality of the seed rod is realized, the abrasion to the seed rod is reduced, and the practicability is better.
Drawings
Fig. 1 is a schematic structural view of a fixing device in embodiment 2;
fig. 2 is a schematic diagram of a split structure of the clamping mechanism in embodiment 2;
FIG. 3 is a top view of the clamping mechanism of embodiment 2;
FIG. 4 is a top view of the clamping mechanism in embodiment 3;
FIG. 5 is a top view of a clamping mechanism with a rectangular clamping end of a seed rod;
FIG. 6 is a schematic structural view of the fixing device in embodiment 4;
FIG. 7 is a schematic view showing the structure of a metal rod in example 4;
FIG. 8 is a schematic view of the structure of a seed rod in example 4;
fig. 9 is a schematic structural diagram of a clamping mechanism in embodiment 4.
Wherein: the device comprises a 1-metal rod, a 2-mounting nut, a 3-seed rod, a 4-rotation-preventing protrusion, a 5-clamping mechanism, a 6-positioning hole, a 7-positioning protrusion, an 8-conical groove, a 9-vent hole, a 10-fixing bolt, an 11-sliding-preventing fixing hole, a 12-conical structure, a 13-clamping table, a 14-receiving card and a 15-positioning plane.
Detailed Description
Example 1:
the utility model provides a seed crystal pole centering fixing device for silicon carbide crystal growth, includes metal pole 1, fixture 5, the one end detachable of metal pole 1 is connected with fixture 5, fixture 5 is including first clamping part and the second clamping part that agree with each other, it holds seed crystal pole 3 to press from both sides between first clamping part and the second clamping part, be provided with between seed crystal pole 3 and first clamping part and/or the second clamping part and prevent changeing the portion for prevent producing the skew because of seed crystal pole 3 is rotatory.
Preferably, the scheme of the anti-rotation part can be as follows: the top of the seed rod 3 is provided with an anti-rotation end face, and the inner sides of the first clamping part and/or the second clamping part are correspondingly provided with anti-rotation bearing end faces.
Preferably, as shown in fig. 4, one side of the top of the seed rod 3 is in an arc structure, and the other side is in a positioning plane 15; the first clamping part and the second clamping part are symmetrically arranged, and the inner sides of the first clamping part and the second clamping part are respectively provided with an arc-shaped end face and a positioning rotation-preventing end face which are connected.
Preferably, as shown in fig. 5, a plurality of polygonal planes are arranged on the top of the seed rod 3 along the circumferential side, and a plurality of anti-rotation positioning end surfaces are correspondingly arranged on the inner sides of the first clamping part and the second clamping part respectively.
Preferably, the scheme of the anti-rotation part can be as follows: the seed rod 3 top is provided with a plurality of perpendicular protruding 4 of preventing changeing from top to bottom crisscross in proper order, first clamping part and/or second clamping part are provided with crisscross recess of preventing changeing from top to bottom in proper order.
Preferably, as shown in fig. 2 and fig. 3, two rotation preventing protrusions 4 are respectively disposed at the upper and lower ends of the top of the seed rod 3 in a cross shape, and adjacent rotation preventing protrusions 4 are in a vertical relationship in space, the inner sides of the first clamping portion and the second clamping portion are symmetrically disposed, and two rotation preventing grooves are respectively disposed at the upper and lower sides in a cross shape correspondingly.
Preferably, as shown in fig. 1, the device further comprises a mounting nut 2, one end of the mounting nut 2 is slidably connected with the metal rod 1, the other end of the mounting nut is in threaded connection with the clamping mechanism 5, a limiting protrusion is arranged at the end part of the metal rod 1 corresponding to the mounting nut 2, and external threads are correspondingly arranged at the outer side of the clamping mechanism 5.
In the using process of the utility model, after furnace loading, seed crystals are arranged at the lower part of the seed rod 3 and are put into a graphite crucible. The operator breaks the clamping mechanism 5 into two halves, clamps the top of the seed rod 3 by the two halves of the clamping mechanism 5, folds the first clamping part and the second clamping part with the positioning hole 6 through the positioning protrusion 7, and places the first clamping part and the second clamping part on the seed rod 3. After closing the furnace cover, opening a quick-release opening on the furnace cover, lifting the clamping mechanism 5 from the quick-release opening, installing a nut 2 under the metal rod 1 on the rotary furnace cover for screw fixation, and after screwing down the screw, completing the connection between the seed rod 3 and the metal rod 1, and checking the rotation coaxiality of the installed seed rod 3 by rotating the seed rod 3. When the furnace is to be discharged, a furnace cover quick-release opening is opened firstly, a mounting nut 2 on the metal rod 1 is screwed off from the clamping mechanism 5 from the quick-release opening, the clamping mechanism 5 and the connected seed rod 3 are put down, then the furnace cover is opened, the clamping mechanism 5 is detached from the furnace chamber, and the separation of the clamping mechanism 5 and the seed rod 3 is completed. The clamping mechanism 5 adopts a split two-half structure, so that the clamping mechanism 5 and the seed rod 3 are convenient to install and disassemble; according to the utility model, the fixed assembly of the seed rod 3 is realized through the clamping mechanism 5 and the anti-rotation part, so that the abrasion of the seed rod 3 is reduced; the first clamping part and the second clamping part are positioned through the positioning protrusion 7 and the positioning hole 6, so that the quick alignment and installation are convenient, and the practicability is good.
Example 2:
the seed rod centering and fixing device for silicon carbide crystal growth comprises a metal rod 1, a mounting nut 2 and a clamping mechanism 5, as shown in figures 1-3. The end part of the metal rod 1 is slidably provided with a mounting nut 2, and one end corresponding to the mounting nut 2 is provided with a limiting mechanism. The other end of the mounting nut 2 is in threaded connection with a clamping mechanism 5, the clamping mechanism 5 comprises a first clamping part and a second clamping part which are mutually matched, and a seed rod 3 is clamped between the first clamping part and the second clamping part. The metal rod 1 and the movable mounting nut 2 on the metal rod 1 are upper locking ends, the clamping mechanism 5 is a connecting end, and the top of the seed rod 3 is a to-be-fixed end. The to-be-fixed end of the seed rod 3 is fixed at the locking end of the metal rod 1 through a clamping mechanism 5 and a mounting nut 2. Preferably, the metal rod 1, the mounting nut 2 and the clamping mechanism 5 are all made of 316 stainless steel.
Preferably, as shown in fig. 1, the bottom surface of the metal rod 1 and the top surface of the clamping mechanism 5 are plane positioning surfaces, and are fixedly connected with the clamping mechanism 5 by using the mounting nut 2. The inside of the mounting nut 2 is provided with internal threads, and the outer side of the clamping mechanism 5 is correspondingly provided with external threads.
Preferably, the upper side and the lower side of the clamping end of the seed rod 3 are respectively provided with anti-rotation protrusions 4 in a cross shape, the adjacent anti-rotation protrusions 4 are in a vertical relation in space, two anti-rotation grooves which are communicated in a cross shape are respectively correspondingly arranged on the inner sides of the first clamping part and the second clamping part, and the adjacent anti-rotation grooves are in a vertical relation in space.
Preferably, the clamping mechanism 5 is internally provided with a groove for fixing the seed rod 3, and the large upper and lower grooves on the same plane between the first clamping part and the second clamping part form a cross shape, so that the seed rod 3 is fixed more firmly and safely. Wherein, fixture 5 is halving structure, but follow the direct split of central axis and be first clamping part and second clamping part, easy to assemble and dismantlement have also avoided the potential safety hazard that needs to use metal wrench and screw fixation that can drop to bring in the furnace chamber.
Preferably, the clamping mechanism 5 is split into two semi-cylindrical first clamping parts and second clamping parts symmetrically. The first clamping part and the second clamping part are respectively provided with an upper positioning hole 6 and a lower positioning hole 6 so as to match with positioning columns on the seed rod 3 and realize positioning. The grooves formed in the center after the first clamping part and the second clamping part are combined can be just embedded into the upper part of the seed rod 3, and two large rectangular grooves which form vertical cross-shaped cross are formed in the upper part and the lower part of the inner sides of the first clamping part and the second clamping part respectively and are used for fixing the seed rod 3 during rotation, and the two grooves are stressed, so that the installation consistency of the seed rod 3 during repeated use is improved, and the fracture probability of the seed rod 3 in the grooves is reduced.
The specific application of the utility model is as follows: after charging, the lower part of the seed rod 3 is provided with seed crystals and placed into a graphite crucible. The operator breaks the clamping mechanism 5 into two halves, clamps the two halves of the clamping mechanism 5 to the top of the seed rod 3, folds the first clamping part and the second clamping part with the positioning holes 6 through the four positioning protrusions 7, and places the first clamping part and the second clamping part on the seed rod 3. After closing the furnace cover, opening a quick-release opening on the furnace cover, lifting the clamping mechanism 5 from the quick-release opening, installing a nut 2 under the metal rod 1 on the rotary furnace cover for screw fixation, and after screwing down the screw, completing the connection between the seed rod 3 and the metal rod 1, and checking the rotation coaxiality of the installed seed rod 3 by rotating the seed rod 3. When the furnace is to be discharged, a furnace cover quick-release opening is opened firstly, a mounting nut 2 on the metal rod 1 is screwed off from the clamping mechanism 5 from the quick-release opening, the clamping mechanism 5 and the connected seed rod 3 are put down, then the furnace cover is opened, the clamping mechanism 5 is detached from the furnace chamber, and the separation of the clamping mechanism 5 and the seed rod 3 is completed. The clamping mechanism 5 adopts a split two-half structure, so that the clamping mechanism 5 and the seed rod 3 are convenient to install and disassemble; according to the utility model, the fixed assembly of the seed rod 3 is realized through the clamping mechanism 5 and the anti-rotation part, so that the abrasion of the seed rod 3 is reduced; the first clamping part and the second clamping part are positioned through the positioning protrusion 7 and the positioning hole 6, so that the quick alignment and installation are convenient, and the practicability is good.
Example 3:
the utility model provides a seed crystal pole centering fixing device for silicon carbide crystal growth, includes metal pole 1, installation nut 2, fixture 5, the one end and the metal pole 1 sliding connection of installation nut 2, and the other end and fixture 5 threaded connection. One end of the metal rod 1 is provided with a limiting end corresponding to the mounting nut 2, and the outer side of the clamping mechanism 5 is provided with external threads correspondingly. The clamping mechanism 5 comprises a first clamping part and a second clamping part which are symmetrically arranged, and edge end surfaces of the first clamping part and the second clamping part are respectively aligned and connected with the positioning holes 6 through a plurality of positioning protrusions 7. The seed rod 3 is clamped between the first clamping part and the second clamping part. Preferably, the metal rod 1, the mounting nut 2 and the clamping mechanism 5 are all made of 316 stainless steel.
Preferably, one side of the top of the seed rod 3 is of an arc structure, and the other side is of a positioning plane 15; as shown in fig. 4, the inner sides of the first clamping part and the second clamping part are respectively provided with an arc-shaped end face and a plane rotation-preventing end face which are connected with each other.
Preferably, a plurality of polygonal planes are arranged on the top of the seed rod 3 along the circumferential side, and a plurality of engaging end surfaces are correspondingly arranged on the inner sides of the first clamping part and the second clamping part respectively. As shown in fig. 5, the top of the seed rod 3 has a cuboid structure, and 4 quadrilateral planes are arranged along the peripheral side.
In the use process, the seed rod 3 is clamped and assembled through the first clamping part and the second clamping part, the position of the seed rod 3 is fixed through the rotation preventing part, the seed rod 3 is prevented from being deviated when rotating, and the centering arrangement of the seed rod 3 is kept. Then the clamping mechanism 5 is wholly screwed at one end of the mounting nut 2, and the final fixed mounting is realized by abutting the clamping mechanism 5 with the positioning plane 15 of the metal rod 1. At this time, one end of the mounting nut 2 is abutted against the limit end of the metal rod 1.
Example 4:
the seed rod centering and fixing device for silicon carbide crystal growth comprises a metal rod 1 and a clamping mechanism 5, wherein the clamping mechanism 5 comprises a first clamping part and a second clamping part which are symmetrically arranged, as shown in fig. 6-9. The clamping end of the seed rod 3 is a conical structure 12, and a plurality of clamping tables 13 are arranged at the bottom of the conical structure 12 along the periphery. One end of the metal rod 1 is a stud, and a conical groove 8 is formed in the stud corresponding to the seed rod 3. The clamping mechanism 5 is of a sleeve-shaped structure, the conical structure 12 of the seed rod 3 can be accommodated in the hollow inside of the clamping mechanism 5, and a plurality of receiving ends are arranged at the bottom along the periphery corresponding to the clamping tables 13. The first clamping part and the second clamping part are respectively provided with an internal thread section and a bearing end, and the side wall corresponding to the conical structure 12 is provided with an anti-slip fixing hole 11 for installing an anti-slip bolt so as to prevent loosening of threads during high-speed rotation. Preferably, the anti-slip bolt is abutted with the external thread of the metal rod 1, or the external thread of the metal rod 1 is correspondingly provided with a plug hole. Preferably, the bottoms of the first clamping part and the second clamping part are detachably provided with receiving ends respectively through fixing bolts 10, and the receiving ends are fixedly connected with the clamping table 13. The receiving end can be fixedly connected with the clamping table 13 in a plugging manner (preferably, the manner) or can be locked by installing a screw at the bottom of the receiving end.
Preferably, as shown in fig. 8 and 9, a circular clamping table 13 is provided at the bottom of the clamping end of the seed rod 3 along the circumferential side, and a circular receiving end is correspondingly provided in the clamping mechanism 5, and the receiving end is fixedly connected with the circular clamping table 13. The bottom of the clamping mechanism 5 is detachably provided with a receiving card 14 through a fixed fixing bolt 10, and the receiving card 14 is a receiving end.
In the use process of the utility model, the bottom of the metal rod 1 at the locking end is processed with a conical groove 8 with a certain taper, the bottom of the metal rod 1 is provided with external threads, and the upper part of the conical groove 8 is provided with a vent hole 9. The top of the seed rod 3 is provided with a conical surface matched with the conical groove 8 of the metal rod 1, and the coaxiality of the metal rod 1 and the seed rod 3 is kept better after the conical groove 8 is connected with the conical surface. On the other hand, a circular clamping table 13 is arranged below the conical surface at the top of the seed rod 3 and is used for being fixed with a receiving card 14 at the bottom of the clamping mechanism 5, so that the seed rod 3 is fixed and does not fall off. The internal thread of the clamping mechanism 5 is screwed with the external thread of the metal rod 1, the detachable bearing card 14 at the lower part of the clamping mechanism 5 is used for installing the seed rod 3 and fixing the clamping table 13 of the seed rod 3, and the anti-slip fixing hole 11 on the clamping mechanism 5 is used for fixing the thread by the copper head thread after the thread is screwed, so that the loosening of the thread during high-speed rotation is prevented. According to the utility model, the metal rod 1 is directly connected with the clamping mechanism 5 through threads, so that the use of accessories is reduced, and the whole assembly is more convenient; on the other hand, through the conical groove 8 on the metal rod 1 and the conical structure 12 of the seed rod 3, and the fixed connection of the bearing end of the clamping mechanism 5 and the clamping table 13, the installation coaxiality of the seed rod 3 is realized, the installation stability of the seed rod 3 is ensured, the abrasion to the seed rod 3 is reduced, and the practicability is better.
The foregoing description is only a preferred embodiment of the present utility model, and is not intended to limit the present utility model in any way, and any simple modification, equivalent variation, etc. of the above embodiment according to the technical matter of the present utility model fall within the scope of the present utility model.
Claims (10)
1. The utility model provides a seed crystal pole centering fixing device for silicon carbide crystal growth, its characterized in that includes metal pole (1), fixture (5), the one end detachable of metal pole (1) is connected with fixture (5), fixture (5) are including first clamping part and the second clamping part that agree with each other, the centre gripping has seed crystal pole (3) between first clamping part and the second clamping part, be provided with between seed crystal pole (3) and first clamping part and/or the second clamping part and prevent changeing the portion for prevent producing the skew because of seed crystal pole (3) are rotatory.
2. The centering and fixing device for the seed rod for silicon carbide crystal growth according to claim 1, wherein an anti-rotation end face is arranged at the top of the seed rod (3), and anti-rotation bearing end faces are correspondingly arranged on the inner sides of the first clamping part and/or the second clamping part.
3. A seed rod centering and fixing device for silicon carbide crystal growth according to claim 2, wherein the top of the seed rod (3) has an arc structure on one side and a positioning plane (15) on the other side; the first clamping part and the second clamping part are symmetrically arranged, and the inner sides of the first clamping part and the second clamping part are respectively provided with an arc-shaped end face and a positioning rotation-preventing end face which are connected.
4. The centering and fixing device for the seed rod for silicon carbide crystal growth according to claim 2, wherein a plurality of polygonal planes are arranged on the top of the seed rod (3) along the circumferential side, and a plurality of anti-rotation positioning end faces are correspondingly arranged on the inner sides of the first clamping part and the second clamping part respectively.
5. The centering and fixing device for the seed rod for silicon carbide crystal growth according to claim 1, wherein a plurality of rotation preventing protrusions (4) are vertically arranged on the top of the seed rod (3) in a staggered manner sequentially from top to bottom, and staggered rotation preventing grooves are correspondingly arranged in the first clamping portion and/or the second clamping portion sequentially from top to bottom.
6. The centering and fixing device for a seed rod for silicon carbide crystal growth according to claim 5, wherein two rotation preventing protrusions (4) are respectively arranged at the upper end and the lower end of the top of the seed rod (3) in a cross shape, adjacent rotation preventing protrusions (4) are in a vertical relation in space, the inner sides of the first clamping part and the second clamping part are symmetrically arranged, and two rotation preventing grooves are respectively arranged at the upper side and the lower side in a cross shape correspondingly.
7. The seed rod centering and fixing device for silicon carbide crystal growth according to any one of claims 1 to 6, further comprising a mounting nut (2), wherein one end of the mounting nut (2) is slidably connected with the metal rod (1), and the other end of the mounting nut is in threaded connection with the clamping mechanism (5), a limiting protrusion is arranged at the end of the metal rod (1) corresponding to the mounting nut (2), and an external thread is correspondingly arranged at the outer side of the clamping mechanism (5).
8. The centering and fixing device for the seed rod for silicon carbide crystal growth according to claim 1, wherein one end of the metal rod (1) is provided with external threads, the clamping mechanism (5) is of a through tubular structure, and internal threads are correspondingly arranged inside the clamping mechanism (5).
9. The centering and fixing device for the seed rod for silicon carbide crystal growth according to claim 8, wherein a conical structure (12) is arranged at the top of the seed rod (3), and a plurality of clamping tables (13) are arranged at the bottom of the conical structure (12) along the periphery; the inner side of one end of the metal rod (1) is provided with a conical groove (8) corresponding to the conical structure (12), and the top of the conical groove (8) is provided with a vent hole (9); the bottoms of the first clamping part and the second clamping part are respectively and correspondingly provided with a bearing end, and the bearing ends are fixedly connected with the clamping table (13); the first clamping part and/or the second clamping part are/is provided with anti-slip fixing holes (11) corresponding to the external threads of the metal rod (1) and used for installing anti-slip bolts so as to prevent loosening of the threads during high-speed rotation.
10. The centering and fixing device for the seed rod for silicon carbide crystal growth according to claim 1, wherein a plurality of positioning protrusions (7) and positioning holes (6) are arranged between the first clamping part and the second clamping part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321193138.9U CN220685320U (en) | 2023-05-17 | 2023-05-17 | Seed rod centering fixing device for silicon carbide crystal growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321193138.9U CN220685320U (en) | 2023-05-17 | 2023-05-17 | Seed rod centering fixing device for silicon carbide crystal growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220685320U true CN220685320U (en) | 2024-03-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321193138.9U Active CN220685320U (en) | 2023-05-17 | 2023-05-17 | Seed rod centering fixing device for silicon carbide crystal growth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220685320U (en) |
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