CN201850330U - Seed crystal clamp - Google Patents
Seed crystal clamp Download PDFInfo
- Publication number
- CN201850330U CN201850330U CN2010205205787U CN201020520578U CN201850330U CN 201850330 U CN201850330 U CN 201850330U CN 2010205205787 U CN2010205205787 U CN 2010205205787U CN 201020520578 U CN201020520578 U CN 201020520578U CN 201850330 U CN201850330 U CN 201850330U
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- China
- Prior art keywords
- diameter
- seed
- hole
- seed crystal
- seed holder
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- Expired - Fee Related
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Abstract
The utility model provides a seed crystal clamp which is sleeve shaped. A thread (4) is arranged at one end of the circumferential wall of a sleeve; an annular radial bulge (2) is arranged at the other end of the sleeve as well as on the internal side wall of the circumferential wall of the sleeve and surrounds the axis line of the sleeve so as to form a first diameter through hole (21); and the axis line of the first diameter through hole (21) is coaxial to the thread axis line of the thread (4). The seed crystal clamp is sleeve-shaped, and the thread axis line of the thread in the seed crystal clamp is coaxial to the axis line of the first diameter through hole, therefore, the growth quality of crystal can be improved, and seed crystal is not easy to separate from the seed crystal clamp.
Description
Technical field
The utility model relates to a kind of seed holder.
Background technology
In the crystal growing process of prior art, an end of the seed holder that is connected with seed rod has the minor axis of stretching out, and seed crystal is fixedly connected on the minor axis of seed holder by the binding mode or by means of pin, to guarantee the right alignment of seed crystal and seed rod.
But the syndeton of this seed holder and seed crystal makes that the right alignment of seed rod and seed crystal is not very high, causes owing to coaxiality deviation influences the crystal growth quality; Moreover this mode of connection is insecure, makes seed crystal come off from seed rod easily.
The utility model content
At the problem that exists in the correlation technique, the purpose of this utility model is to provide a kind of seed holder, improves the quality of crystal growth on the one hand, makes that on the other hand seed crystal is difficult for breaking away from from seed holder.
For achieving the above object, the utility model provides a kind of seed holder, this seed holder is the cover tubular, one end place of telescopic perisporium is provided with screw thread, the other end place is provided with the annular radial protrusion, and wherein, radial protrusion is located on the inner side-wall of perisporium, and forming first diameter through hole around the telescopic axis, the axis of first diameter through hole is coaxial with the axis of thread of screw thread.
Preferably, the telescopic periphery is cylindrical, and screw thread is opened on the inner side-wall or outer side wall of telescopic perisporium.
Preferably, screw thread and radial protrusion are connected as a single entity by unthreaded hole, and the diameter of unthreaded hole equals the internal diameter of screw thread place perisporium, and the diameter of unthreaded hole is greater than the diameter of first diameter through hole.
Preferably, sleeve is made by tungsten, molybdenum, miramint.
Preferably, sleeve is a machined piece, and the telescopic blank is that diameter is that 25mm-30mm, length are the cylindrical rod of 100mm-250mm.
Than prior art, the beneficial effects of the utility model are:
(1) owing to the axis of thread of screw thread and the axis coaxle of first diameter through hole, this makes seed crystal and seed rod of being connected in seed holder keep good right alignment, has eliminated the ropy defective of the crystal growth that causes owing to coaxiality deviation;
(2) heat-conducting area of the cover tubular seed holder that is formed by tungsten, molybdenum, miramint materials processing is bigger, and heat-conducting effect is remarkable, has eliminated the defective that influences crystal growth interface owing to the heat-conducting effect difference;
(3) seed holder provides the annular radial protrusion that supports seed crystal, and first diameter through hole that supplies seed crystal one end to stretch out, thus, than the binding or the pin joint mode of prior art, this mode of connection of seed crystal and seed holder makes that seed crystal is not easy to come off from seed holder.
Description of drawings
Fig. 1 is the synoptic diagram that seed holder of the prior art is connected with seed crystal;
Fig. 2 is the axial sectional view of seed holder of the present utility model.
Embodiment
Fig. 1 shows being connected of seed holder of the prior art and seed crystal, and particularly, an end of seed holder is extended with minor axis 3, and seed crystal 7 bindings are fixed on the minor axis 3 of seed holder.
As shown in Figure 2, seed holder 1 of the present utility model is the cover tubular, sleeve is being provided with screw thread 4 along centering on perisporium on the end of its axis direction, sleeve is provided with annular radial protrusion 2 at the other end along its axis direction, radial protrusion 2 is located on the inner side-wall of telescopic perisporium, and form first diameter through hole 21 around the telescopic axis, the axis of this first diameter through hole 21 is coaxial with the axis of thread of screw thread, wherein, the so-called axis of thread is the axis of middle footpath cylinder or middle footpath circular cone, in other words, telescopic one end is made as the form of threaded hole, the axis coaxle of the axis of thread of this threaded hole and first diameter through hole 21.By this, when seed rod is threaded with seed holder 1 by screw thread 4, and seed crystal is when being clipped in the seed holder 1 by first diameter through hole 21, seed holder 1 makes seed rod and seed crystal keep good right alignment, and this has eliminated the ropy defective of the crystal growth that causes owing to above-mentioned coaxiality deviation.
Continuation is referring to Fig. 2, screw thread 4 is the internal thread that is opened in the inner side-wall of sleeve perisporium, the telescopic periphery is cylindrical (abbreviating as, cylindrical sleeve), screw thread 4 is connected as a single entity by unthreaded hole 6 with radial protrusion 2, the diameter of unthreaded hole 6 equals the internal diameter (diameter) of screw thread 4 place perisporiums, and the diameter of unthreaded hole 6 is greater than the diameter of first diameter through hole 21, and unthreaded hole can be understood as does not herein have the equal diameter of screw thread or step through hole.Thus, can be from an end that is provided with screw thread 4 be packed this seed holder 1 into seed crystal.Although internal thread has been shown among Fig. 2,, guaranteeing that screw thread 4 also can be made as the outside screw on the outer side wall that is opened in the telescopic perisporium under the axis of thread and the co-axial prerequisite of first diameter through hole as long as be appreciated that and realize being threaded with seed rod.
Further, for the purpose that heat is transferred to seed rod from seed crystal, seed holder 1 of the present utility model is made by tungsten, molybdenum, miramint, concrete, the employing diameter is that 25mm-30mm, length are that the cylindrical rod of 100mm-250mm is a blank, forms through accurate machining, promptly, the single piece that seed holder 1 forms for machining, described machining are to show for welding, punching press etc.
During concrete the use, this seed holder cooperates with T font seed crystal, and an end of T font seed crystal is supported on the radial protrusion 2 of seed holder 1, and the other end stretches out from first diameter through hole 21 of seed holder 1; Seed rod is threaded with seed holder 1.In crystal growing process, lift and during rotary seed crystal rod, the crystal that is created on the seed crystal produces lower pulling force (being equivalent to tens kilograms the lower pulling force that crystal produced) to seed crystal, seed crystal just is clamped in the seed holder thus.So, seed holder 1 provides the annular radial protrusion 2 that supports seed crystal, and first diameter through hole 21 that supplies seed crystal one end to stretch out, thus, than the binding or the pin joint mode of prior art, this mode of connection of seed crystal and seed holder makes that seed crystal is not easy to come off from seed holder.
In addition, in crystal growing process, seed crystal sends heat to seed rod via seed holder 1, for the higher relatively oxide crystal of thermal conductivity (for example, sapphire crystal) process of growth, the heat-conducting effect of the cover tubular seed holder 1 that is formed by tungsten, molybdenum, miramint materials processing is more remarkable.Above-mentioned seed rod is the water-cooled seed rod, and promptly seed rod has the cavity that holds frozen water.
Obviously, according to real needs, except being the cylindrical sleeve tubular, seed holder also can be that periphery is that the sleeve or the periphery of circular cone is polygonal sleeve.
To sum up, because in the utility model, seed holder is the cover tubular, and the axis of thread of screw thread and the axis coaxle of first diameter through hole in the seed holder, thereby improved the quality of crystal growth on the one hand, made on the other hand that seed crystal is difficult to break away from from seed holder.
The above is a preferred embodiment of the present utility model only, is not limited to the utility model, and for a person skilled in the art, the utility model can have various changes and variation.All within spirit of the present utility model and principle, any modification of being done, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (4)
1. a seed holder is characterized in that, described seed holder is the cover tubular, and an end place of described telescopic perisporium is provided with screw thread (4), and the other end place is provided with annular radial protrusion (2),
Wherein, described radial protrusion (2) is located on the inner side-wall of described perisporium, and forms first diameter through hole (21) around described telescopic axis, and the axis of described first diameter through hole (21) is coaxial with the axis of thread of described screw thread (4).
2. seed holder according to claim 1 is characterized in that, described telescopic periphery is cylindrical, and described screw thread (4) is opened on the inner side-wall or outer side wall of described telescopic perisporium.
3. seed holder according to claim 2, it is characterized in that, described screw thread (4) is connected as a single entity by unthreaded hole (6) with described radial protrusion (2), the diameter of described unthreaded hole (6) equals the internal diameter of described screw thread (4) place perisporium, and the diameter of described unthreaded hole (6) is greater than the diameter of described first diameter through hole (21).
4. according to each described seed holder among the claim 1-3, it is characterized in that described sleeve is a machined piece, described telescopic blank is that diameter is that 25mm-30mm, length are the cylindrical rod of 100mm-250mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205205787U CN201850330U (en) | 2010-09-06 | 2010-09-06 | Seed crystal clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205205787U CN201850330U (en) | 2010-09-06 | 2010-09-06 | Seed crystal clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201850330U true CN201850330U (en) | 2011-06-01 |
Family
ID=44092730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010205205787U Expired - Fee Related CN201850330U (en) | 2010-09-06 | 2010-09-06 | Seed crystal clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201850330U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102383188A (en) * | 2010-09-06 | 2012-03-21 | 江西同人电子材料有限公司 | Seed crystal and seed crystal fixture |
| CN102581577A (en) * | 2012-03-26 | 2012-07-18 | 苏州先端稀有金属有限公司 | Method for manufacturing seed crystal chuck |
| CN102660767A (en) * | 2012-05-28 | 2012-09-12 | 哈尔滨工业大学 | Cooling transitional joint for directional solidification equipment of electromagnetic cold crucible |
| CN107794565A (en) * | 2016-09-06 | 2018-03-13 | 上海新昇半导体科技有限公司 | Seedholder and czochralski crystal growing furnace |
-
2010
- 2010-09-06 CN CN2010205205787U patent/CN201850330U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102383188A (en) * | 2010-09-06 | 2012-03-21 | 江西同人电子材料有限公司 | Seed crystal and seed crystal fixture |
| CN102581577A (en) * | 2012-03-26 | 2012-07-18 | 苏州先端稀有金属有限公司 | Method for manufacturing seed crystal chuck |
| CN102581577B (en) * | 2012-03-26 | 2014-01-01 | 苏州先端稀有金属有限公司 | Method for manufacturing seed crystal chuck |
| CN102660767A (en) * | 2012-05-28 | 2012-09-12 | 哈尔滨工业大学 | Cooling transitional joint for directional solidification equipment of electromagnetic cold crucible |
| CN102660767B (en) * | 2012-05-28 | 2015-06-10 | 哈尔滨工业大学 | Cooling transitional joint for directional solidification equipment of electromagnetic cold crucible |
| CN107794565A (en) * | 2016-09-06 | 2018-03-13 | 上海新昇半导体科技有限公司 | Seedholder and czochralski crystal growing furnace |
| CN107794565B (en) * | 2016-09-06 | 2020-11-13 | 上海新昇半导体科技有限公司 | Seed crystal chuck and vertical pulling single crystal furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110601 Termination date: 20130906 |