CN102380872B - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- CN102380872B CN102380872B CN201110206392.3A CN201110206392A CN102380872B CN 102380872 B CN102380872 B CN 102380872B CN 201110206392 A CN201110206392 A CN 201110206392A CN 102380872 B CN102380872 B CN 102380872B
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- China
- Prior art keywords
- arm
- cylindrical component
- base station
- industrial robot
- relative
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
Abstract
Provided is an industrial robot, which, with a simple structure, is capable of suppressing the positional shift of a carried-in subject to be transferred and properly correcting the inclination of the subject, even though the industrial robot comprises a cylindrical member which such supports a support member supporting an arm that the support member is capable of moving in the up-down direction. The industrial robot (1) comprises a hand (3) for mounting a subject to be transferred; an arm (4) in connection with the hand (3); a support member (6) for supporting the arm (4); a cylindrical member (7) which supports the support member (6) in such a manner that the support member (6) is capable of moving in the up-down direction; a base (8); a rotating member (9) which supports the lower end of the cylindrical member (7) and is capable of rotating relative to the base (8); and a moving mechanism (10) which allows the cylindrical member (7) to move relative to the base (8) in a predetermined direction orthogonal to the up-down direction.
Description
Technical field
The present invention relates to a kind of industrial robot that the conveying object of regulation is carried.
Background technology
At present, as the industrial robot carried the glass substrate of liquid crystal display, there will be a known and a kind of there is two hands for glass substrate installing and so-called double arm robot (for example, referring to patent document 1) to two arms that each hand in two hands keeps.The robot recorded in patent document 1 comprises: the base end side of arm is supported to the supporting member that can rotate; And be supported to by supporting member can the post of movement in the vertical direction.In this robot, arm is made up of the first arm and the second arm.In addition, the lower end of post is supported on base station in the mode that can rotate, and this base station is supported on substructure member.Base station linearly can move in the horizontal direction relative to substructure member.This robot makes hand flexible with hand towards the mode of linearity movement under the state of prescribed direction, thus moving glass substrate.
To be tilted or position offsets by the glass substrate of the carrying such as robot recorded in patent document 1 direction that takes out of sometimes relative to glass substrate in the incorporating sections such as the box for the storage of this glass substrate.Therefore, propose a kind of for tilt or position skew state under be accommodated in the inclination of the glass substrate of incorporating section, position skew revises and by carrying glass sheet to the alignment method (for example, referring to patent document 2) of hand of the job position of regulation.If the alignment method recorded in this patent document 2 to be applied to the robot recorded in patent document 1, can to tilt or position skew state under be accommodated in the inclination of the glass substrate of incorporating section, position skew revises, and glass substrate moved into job position.
Such as, in the robot described in patent document 1, when the sensor that hand is located in the inclination of the glass substrate being accommodated in incorporating section detects, if make base station move in the prescribed direction relative to substructure member, taken out of from incorporating section with correction and be moved to the inclination of the glass substrate of job position, and make post rotate ormal weight relative to base station, in this condition, make arm flexible to take out of glass substrate from incorporating section, then, base station is moved in the opposite direction and post is rotated in the opposite direction, revise the inclination of glass substrate, then, glass substrate is moved into job position, then to revise the inclination of the glass substrate being accommodated in incorporating section with heeling condition and by carrying glass sheet to job position.In addition, if such moving glass substrate, then the position on the moving direction of base station relative to substructure member of the glass substrate being moved to job position can be suppressed to offset.Also after taking out of glass substrate from incorporating section, the inclination of glass substrate can be revised and glass substrate moved into job position.
But when the inclination using the alignment method recorded in patent document 2 to glass substrate, position skew are revised, because base station must be able to move relative to substructure member in the horizontal direction, therefore, robot becomes maximization.In addition, such as, when hand linearly moves with moving glass substrate along base station relative to the moving direction of substructure member, even if the inclination of glass substrate can be revised, be sometimes also difficult to suppress the position of glass substrate on the direction orthogonal relative to the moving direction of substructure member with base station to offset.Such as, under arbitrary situation in when taking out of glass substrate and when moving into glass substrate, when hand linearly moves on the direction orthogonal relative to the moving direction of substructure member with base station, on the moving direction of this hand, if estimate base station to carry out moving glass substrate relative to the position skew on the moving direction of substructure member, then can correction position offset, but owing to glass substrate skew ground being carried on hand, therefore, correction can not be guaranteed fully.In addition, when moving glass substrate and when moving into glass substrate under these two kinds of situations, when hand linearly moves along base station relative to the moving direction of substructure member, the position skew of glass substrate can not be revised.On the other hand, at present, also there will be a known a kind of robot (for example, referring to patent document 3) that can address these problems.
The robot recorded in patent document 3 comprises: the firm banking portion being fixed on the upper surface of base station; Relative to the upper underarm of firm banking portion action in the vertical direction; The turning arm that can rotate freely relative to upper underarm; Be fixed on the first arm base portion of turning arm; Relative to first translation arms (Japanese: the 1st straight Move ア mono-system) of the first arm base portion linearly movement in the horizontal direction; Be fixed on the second arm base portion of the first translation arms; Second translation arms (Japanese: the 2nd straight Move ア mono-system) of linearly movement on the direction orthogonal with the first translation arms; And be fixed on the hand of the second translation arms.In this robot, owing to being configured with the first arm base portion and the first translation arms between turning arm and the second arm base portion, therefore, can solve the problem, thus the position of the conveying object being moved to job position can be suppressed to offset and the inclination of this conveying object can be revised.
Patent document 1: Japanese Patent Laid No. 3973048 publication
Patent document 2: Japanese Patent Laid-Open 2003-117862 publication
Patent document 3: Japanese Patent Laid-Open 2004-196438 publication
But, when the structure recorded in patent document 3 is applied directly to the robot as recorded in patent document 1, have the supporting member supported arm is supported to can in the robot of the post of movement in the vertical direction, following problem can be produced.Namely, when the structure recorded in patent document 3 is applied directly to the robot had the post that supporting member supports, the structure being equivalent to the first arm base portion and the first translation arms recorded in patent document 3 need be configured between arm and supporting member, but such as when robot is double arm robot, need two structures being equivalent to the first arm base portion and the first translation arms, thus make the structure of robot become complicated.In addition, between arm and supporting member, configuration is equivalent to the structure of the first arm base portion and the first translation arms, when need prevent the structure being equivalent to the first translation arms from linearly moving, the interference of arm and post, therefore, may limit the amount of movement of the structure being equivalent to the first translation arms.Therefore, when the structure recorded in patent document 3 is applied directly to the robot had the post that supporting member supports, according to the situation of the inclination of glass substrate, may be difficult to revise this inclination rightly.
Summary of the invention
Therefore, even if technical problem of the present invention be to provide a kind of when comprise the supporting member supported arm is supported to can the cylindrical component of movement in the vertical direction, also can the position of the conveying object moved into be suppressed to offset with better simply structure and the industrial robot of the inclination of this conveying object can be revised rightly.
For solving the problems of the technologies described above, the feature of industrial robot of the present invention comprises: hand, and this hand is for conveying object installing; Arm, this arm links for hand; Supporting member, this supporting member supports arm; Cylindrical component, supporting member is supported to and can moves in the vertical direction by this cylindrical component; Base station; Rotating member, this rotating member carries out supporting to the lower end of cylindrical component and can rotate relative to base station; And travel mechanism, this travel mechanism makes cylindrical component relative to base station relative movement in the prescribed direction orthogonal with above-below direction.
Industrial robot of the present invention comprises travel mechanism, and this travel mechanism makes cylindrical component relative to base station relative movement in the prescribed direction orthogonal with above-below direction.Therefore, if when the inclination detecting conveying object, make cylindrical component relative to base station relative movement and rotating member is rotated relative to base station, then the position of the conveying object moved into can be suppressed to offset and the inclination of this conveying object can be revised.That is, even if not comprising the mechanism for making base station movement in the horizontal direction, the position of the conveying object moved into also can be suppressed to offset and the inclination of this conveying object can be revised.
In addition, in the present invention, such as, because travel mechanism makes cylindrical component relative to base station relative movement, therefore, even if industrial robot is double arm robot, also without the need to configuring Liang Ge travel mechanism.Therefore, the structure of industrial robot can be simplified.In addition, in the present invention, be supported with arm on the support members, travel mechanism makes the cylindrical component supported supporting member relative to base station relative movement, and therefore, when cylindrical component is relative to base station relative movement, cylindrical component and arm can not be interfered.Therefore, can guarantee the amount of movement of cylindrical component, the inclination of the conveying object moved into if any is comparatively large, also can revise the inclination of conveying object rightly.
Like this, in the present invention, even if when industrial robot comprise the supporting member supported arm can be supported to can the cylindrical component of movement in the vertical direction, also can the position of the conveying object moved into be suppressed to offset with better simply structure and the inclination of this conveying object can be revised rightly.In addition, in the present invention, when conveying object does not tilt but causes position to offset, by utilize travel mechanism make cylindrical component relative to base station move revise this position skew.In addition, in invention, by utilizing travel mechanism to make cylindrical component move relative to base station, the step-up error of industrial robot, assembly error can be revised.
In the present invention, such as, rotating member is formed as the elongate block extended from base station towards cylindrical component, and comprises: be held in the first rotating part on base station in the mode that can rotate; And the second rotating part supplying the lower end of cylindrical component fixing, travel mechanism is configured between the first rotating part and the second rotating part, and the second rotating part can relative to the linearly relative movement of the first rotating part.
In this case, it is preferable that, supporting member comprises the arm support of the elongate block extended substantially in parallel with rotating member from cylindrical component, and the base end side of arm support is configured at cylindrical component side, and arm is supported on the front of arm support.If form like this, then travel mechanism can be configured at the downside of the center of gravity of the structure be made up of the second rotating part, cylindrical component, supporting member, arm and hand etc.So, can suppress to act on excessive external force to travel mechanism.
In addition, in this case, it is preferable that, when observing from above-below direction, travel mechanism is configured between cylindrical component and the cardinal extremity of arm on the long side direction of arm support.If form like this, then travel mechanism can be configured at and easily become between the cylindrical component at dead angle and the cardinal extremity of arm.Therefore, even if when industrial robot comprises travel mechanism, industrial robot also can be made miniaturized.
In the present invention, travel mechanism is also between the configurable lower end in cylindrical component and rotating member.
In the present invention, travel mechanism such as comprises: motor; The screw member linked with the output shaft of motor; There is the nut member of the female threaded portion screwed togather with the outer screw section of screw member; And rectilinear guide.
In the present invention, industrial robot also can comprise horizontal mobile mechanism, and this horizontal mobile mechanism makes base station move in the prescribed direction orthogonal with above-below direction.
As mentioned above, in industrial robot of the present invention, even if when comprise the supporting member supported arm can be supported to can the cylindrical component of movement in the vertical direction, also can the position of the conveying object moved into be suppressed to offset with better simply structure and the inclination of this conveying object can be revised rightly.
Accompanying drawing explanation
Fig. 1 is the top view of the industrial robot of embodiment of the present invention.
Fig. 2 is the side view representing industrial robot from the E-E direction of Fig. 1.
Fig. 3 is the front view representing industrial robot from the F-F direction of Fig. 1.
Fig. 4 is the top view for being described the structure of the travel mechanism shown in Fig. 2 and periphery thereof.
Fig. 5 be for from the G-G direction of Fig. 4 to the figure that the structure of travel mechanism and periphery thereof is described.
Fig. 6 is the enlarged drawing in the H portion of Fig. 4.
Fig. 7 is the figure for being described from the J-J direction of Fig. 6 travel mechanism.
The top view that the action of industrial robot when Fig. 8 is for being accommodated with heeling condition the substrate shown in Fig. 1 is described.
Fig. 9 is the figure be described for the configuration of the travel mechanism to another embodiment of the present invention, and Fig. 9 (A) is top view, and Fig. 9 (B) is side view.
Figure 10 is the figure be described for the configuration of the travel mechanism to another embodiment of the present invention, and Figure 10 (A) is top view, and Figure 10 (B) is side view.
Figure 11 is the top view be described for the configuration of the travel mechanism to another embodiment of the present invention.
Figure 12 is the top view be described for the structure of the rotating member to another embodiment of the present invention.
Figure 13 is the top view of the industrial robot of another embodiment of the present invention.
Figure 14 is the side view of the industrial robot of another embodiment of the present invention.
(symbol description)
1 robot (industrial robot)
2 substrates (glass substrate, conveying object)
3 hands (hand)
4 arms
6 supporting members
7 cylindrical components
8 base stations
9 rotating members
10 travel mechanisms
16 arm supports
20 first rotating parts
21 second rotating parts
25 motor
26 ball screws (screw member)
27 nut members
28 rectilinear guide
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.
(schematic configuration of industrial robot)
Fig. 1 is the top view of the industrial robot 1 of embodiment of the present invention.Fig. 2 is the side view representing industrial robot 1 from the E-E direction of Fig. 1.Fig. 3 is the front view representing industrial robot 1 from the F-F direction of Fig. 1.In the following description, orthogonal three directions are set to X-direction, Y-direction and Z-direction respectively.In the present embodiment, Z-direction is consistent with above-below direction.In addition, in the following description, X-direction is set to fore-and-aft direction, Y-direction is set to left and right directions.
The industrial robot 1 of present embodiment is (hereinafter referred to as " robot 1 ".) be for the glass substrate 2 of conveying object and liquid crystal display (hereinafter referred to as " substrate 2 ".) carry out the carrying articulated robot carried.As shown in FIG. 1 to 3, robot 1 comprises: two hands 3 that substrate 2 is installed; Two arms 4 that each hand 3 in front and two hands 3 links; And to the main part 5 that two arms 4 support.Main part 5 comprises: supporting member 6, and the base end side of this supporting member 6 to two arms 4 supports; Cylindrical component 7, supporting member 6 is supported to and can moves in the vertical direction by this cylindrical component 7; Base station 8, this base station 8 forms the end portion of main part 5; Rotating member 9, the lower end of this rotating member 9 pairs of cylindrical components 7 is carried out supporting and can rotate relative to base station 8; And travel mechanism 10, this travel mechanism 10 makes cylindrical component 7 relative to base station 8 relative movement in the horizontal direction.
In the present embodiment, the position skew of substrate 2 refers to the state that substrate 2 offsets on fore-and-aft direction and/or left and right directions abreast relative to the substrate 2 when being configured at the reference position of regulation with correct posture.In addition, the inclination of substrate 2 refers to that the center zero of substrate 2 when tilting is consistent with the center zero (with reference to Fig. 1) when being configured at the reference position of regulation with correct posture, but the state of the predetermined angular that tilts centered by center zero.
The base end side of hand 3 links with the front of the mode that can rotate and arm 4.Identical with the industrial robot recorded in above-mentioned patent document 2, this hand 3 is provided with sensor (not shown), this sensor is used for detecting the inclination (specifically, being the inclination taking out of direction of substrate 2 relative to the substrates such as fore-and-aft direction 2) of the substrate 2 of the reception position being accommodated in regulation.Identical with the industrial robot recorded in above-mentioned patent document 2, supporting member 6 is provided with the edge sensor for detecting the end face of substrate 2.In addition, for the sensor that detects the inclination of substrate 2 except being installed on robot 1, the reception position of substrate 2 can be sometimes also installed on.
Arm 4 comprises the first arm 13 and these two arms of the second arm 14.The base end side of the first arm 13 is supported on the front of supporting member 6 in the mode that can rotate.The base end side of the second arm 14 is supported on the front of the first arm 13 in the mode that can rotate.In the front of the second arm 14, be supported with the base end side of hand 3 in the mode that can rotate.The robot 1 of present embodiment has the drive motor (not shown) for making arm 4 flexible relative to main part 5, and when this drive motor starts, arm 4 can stretch, and is linearly moving under the state of prescribed direction to make hand 3.
Supporting member 6 comprises: the lifting unit 15 forming the base end side part of supporting member 6; And to two arm supports 16 that two arms 4 support respectively.Lifting unit 15 is held in cylindrical component 7 in the mode that can move up and down.Arm support 16 is formed as the bulk of the direction orthogonal with the moving direction of hand 3 as the elongated flat of long side direction.The cardinal extremity of two arm supports 16 is fixed on lifting unit 15.Maintain the base end side of the second arm 14 in the mode that can rotate in the front of arm support 16.In the present embodiment, two hands, 3, two arms 4 and two arm supports 16 are configured to overlapping in the vertical direction.That is, the robot 1 of present embodiment is double arm robot.
Cylindrical component 7 comprises: the first post portion 17 being fixed on rotating member 9; And be held in by lifting unit 15 can the second post portion 18 of movement in the vertical direction.Second post portion 18 can move in the vertical direction relative to the first post portion 17.
Rotating member 9 is formed as the bulk of the elongated flat extended from base station 8 towards cylindrical component 7.As shown in Figure 1, this rotating member 9 is configured to arm support 16 almost parallel.That is, rotating member 9 and arm support 16 extend substantially in parallel.In the present embodiment, the long side direction of rotating member 9 tilts slightly relative to the long side direction of arm support 16.Specifically, the long side direction of rotating member 9 tilts slightly relative to the long side direction of arm support 16, diminishes along with from cylindrical component 7 to make the distance between arm support 16 and rotating member 9 towards base station 8.Therefore, in the present embodiment, the radius of turn of the robot 1 rotated under the state of arm 4 contraction can be made to diminish.
In addition, rotating member 9 comprises: be held in the first rotating part 20 on base station 8 in the mode that can rotate; And supply the fixing front of the second rotating part 21, first rotating part 20, the lower end of cylindrical component 7 and the base end side of the second rotating part 21 to link.In addition, base end side and the base station 8 of the first rotating part 20 link, and are fixed with the lower end in the first post portion 17 in the front of the second rotating part 21.Second rotating part 21 can relative to the linearly relative movement on the direction (that is, with the moving direction of hand 3 orthogonal direction) parallel with the long side direction of arm support 16 of the first rotating part 20.First rotating part 20 and the second rotating part 21 are formed as hollow form.
As shown in Figure 2, travel mechanism 10 is configured between the first rotating part 20 and the second rotating part 21.That is, travel mechanism 10 is configured at the linking part of the first rotating part 20 and the second rotating part 21.Below, the structure of travel mechanism 10 and periphery thereof is described.
As mentioned above, the second post portion 18 can move in the vertical direction relative to the first post portion 17, and in addition, lifting unit 15 can move in the vertical direction relative to the second post portion 18.That is, robot 1 comprises the elevating mechanism (not shown) that the second post portion 18 and lifting unit 15 are elevated.In addition, rotating member 9 can rotate relative to base station 8.That is, robot 1 comprises the rotating mechanism (not shown) that rotating member 9 is rotated.
(structure of travel mechanism and periphery thereof)
Fig. 4 is the top view for being described the structure of the travel mechanism 10 shown in Fig. 2 and periphery thereof.Fig. 5 be for from the G-G direction of Fig. 4 to the figure that the structure of travel mechanism 10 and periphery thereof is described.Fig. 6 is the enlarged drawing in the H portion of Fig. 4.Fig. 7 is the figure for being described from the J-J direction of Fig. 6 travel mechanism 10.
As shown in Figure 5, shape during the observing from the side of the second rotating part 21 is the step-like of twice warpage, comprises the fixed part 21a that the lower end for the first post portion 17 is fixed and the linking part 21b linked with the first rotating part 20.Fixed part 21a and linking part 21b configures each other substantially in parallel, and linking part 21b is configured at the upside of fixed part 21a.In addition, linking part 21b is overlapping in the vertical direction with the front of the first rotating part 20.Specifically, linking part 21b is configured at the upside of the front of the first rotating part 20.In addition, fixed part 21 is configured in the height roughly the same with the height of the first rotating part 20.
As shown in Figure 4, when observing from above-below direction, travel mechanism 10 is configured between the front of the arm support 16 that the base end side of arm 4 supports and cylindrical component 7 on the long side direction of arm support 16.That is, when observing from above-below direction, travel mechanism 10 is configured between the cardinal extremity of arm 4 and cylindrical component 7 on the long side direction of arm support 16.In addition, travel mechanism 10 comprises: as the rotary-type motor 25 of drive source; The ball screw 26 as screw member linked with the output shaft of motor 25; There is the nut member 27 of the female threaded portion screwed togather with the outer screw section of ball screw 26; And rectilinear guide 28.
As shown in Figure 5, motor 25 is configured at the inside of the linking part 21b of the second rotating part 21.In addition, motor 25 is fixed on the inside of linking part 21b.The output shaft of motor 25 is provided with reductor 29.The output shaft of reductor 29 is provided with ball screw 26 by connector 30.That is, ball screw 26 is linked with the output shaft of motor 25 by reductor 29 and connector 30.In addition, the bearing 31 that ball screw 26 is fixed in the second rotating part 21 is supported to and can rotates.As shown in Figure 5, nut member 27 is fixed on support 32, and is configured at the inside of linking part 21b.Support 32 is fixed on the upper surface of the front of the first rotating part 20.
Rectilinear guide 28 comprises guide rail 33 and engages with guide rail 33 and the guide body 34 of sliding along guide rail 33.As shown in Figure 7, guide rail 33 is fixed on the upper surface of the front of the first rotating part 20.Guide body 34 is fixed on the lower surface of the linking part 21b of the second rotating part 21.As shown in Figure 6, when observing from above-below direction, rectilinear guide 28 is configured at the both sides of motor 25, ball screw 26 and nut member 27 etc.
In travel mechanism 10, when motor 25 starts, ball screw 26 rotates, and as shown in the double dot dash line of Fig. 4, the second rotating part 21 moves on the long side direction of arm support 16 relative to the first rotating part 20.
(the outline action of industrial robot)
The top view that the action of the industrial robot 1 when Fig. 8 is for being accommodated with heeling condition the substrate 2 shown in Fig. 1 is described.
In robot 1 as constructed as above, the second post portion 18 moves up and down relative to the first post portion 17, and supporting member 16 moves up and down together with hand 3 and arm 4 etc. relative to the second post portion 18.In addition, arm 4 stretches relative to main part 5.Specifically, arm 4 is flexible to make hand 3 linearly move under the state of prescribed direction.In addition, rotating member 9 rotates relative to base station 8.By the combination of these actions, the reception position that substrate 2 is received from substrate 2 is carried towards job position substrate 2 being carried out to regulation operation by robot 1.
Herein, in the present embodiment, robot 1, when taking out of the substrate 2 being accommodated in reception position, first, makes hand 3 stretch, and utilizes the sensor being located at hand 3 to detect the inclination taking out of direction of substrate 2 relative to substrate 2.If do not detected the inclination (or substrate 2 be tilted in below setting) of substrate 2 by the tilt detection action of this substrate 2, then robot 1 makes hand 3 stretch, to be taken out of from reception position by substrate 2 and the substrate 2 taken out of to be moved into the job position of regulation again.Now, the state of the robot 1 when reception position installing substrate 2 is in the state as shown in the double dot dash line of Fig. 8.That is, now, hand 3 and substrate 2 to take out of direction almost parallel.
On the other hand, when the tilt detection motion detection by substrate 2 goes out the inclination of substrate 2 while being tilted beyond setting (or the substrate 2 detected), offseting with the position taken out of on roughly orthogonal direction, direction of substrate 2 to suppress substrate 2, and the inclination of substrate 2 is revised, robot 1 makes rotating member 9 rotate ormal weight relative to base station 8, and motor 25 is started, move on the long side direction of arm support 16 relative to the first rotating part 20 to make the second rotating part 21.That is, cylindrical component 7 is made to move on the long side direction of arm support 16 relative to base station 8.Then, robot 1 makes hand 3 flexible to be taken out of from reception position by substrate 2.Now, the state of the robot 1 when reception position installing substrate 2 is in the state as shown in the solid line of Fig. 8.That is, now, hand 3 to same extent tilts relative to the inclination taking out of direction and substrate 2 of substrate 2.In addition, robot 1, after taking out of substrate 2, makes motor 25 start, and to make the second rotating part 21 move towards the direction contrary with moving direction just now, and makes rotating member 9 rotate ormal weight towards the direction contrary with rotation direction just now.Then, robot 1 makes hand 3 flexible so that substrate 2 is moved into job position.
Like this, in the present embodiment, rotating member 9 is made to rotate ormal weight relative to base station 8 according to the inclination of substrate 2, and under the state making the second rotating part 21 relative to the first rotating part 20 movement, substrate 2 is taken out of from reception position, then, ormal weight is rotated in the opposite direction making rotating member 9, and after making the second rotating part 21 mobile in the opposite direction, substrate 2 is moved into job position, therefore, when substrate 2 being moved into job position under offseting repressed state with the position taken out of on orthogonal direction, direction of substrate 2, the inclination being accommodated in the substrate 2 of reception position has been corrected.When the tilt detection motion detection by substrate 2 goes out the inclination of substrate 2, rotating member 9 is rotated relative to base station 8, in addition, the second rotating part 21 also can be made to rotate relative to the first rotating part 20 and arm 4 is stretched.
(main efficacy results of present embodiment)
As mentioned above, the robot 1 of present embodiment comprises travel mechanism 10, and this travel mechanism 10 makes cylindrical component 7 relative to base station 8 relative movement on the direction orthogonal with the moving direction of hand 3.Therefore, when detecting the inclination of substrate 2, if make cylindrical component 7 relative to base station 8 relative movement and make rotating member 9 rotate relative to base station 8, then the position of the substrate 2 moved into can be suppressed to offset and the inclination of this substrate 2 can be revised.That is, even if not comprising the mechanism for making base station 8 movement in the horizontal direction, the position of the substrate 2 moved into also can be suppressed to offset and the inclination of this substrate 2 can be revised.
In addition, in the present embodiment, because travel mechanism 10 makes cylindrical component 7 relative to base station 8 relative movement, therefore, even if robot 1 is double arm robot, also without the need to configuring Liang Ge travel mechanism 10.Therefore, the structure of robot 1 can be simplified.In addition, in the present embodiment, supporting member 6 is supported with arm 4, travel mechanism 10 makes the cylindrical component 7 supported supporting member 6 relative to base station 8 relative movement, therefore, when cylindrical component 7 is relative to base station 8 relative movement, cylindrical component 7 and arm 4 can not be interfered.Therefore, in the present embodiment, the amount of movement of cylindrical component 7 can be guaranteed, and the inclination of the substrate 2 moved into if any is comparatively large, also can revise the inclination of substrate 2 rightly.
Like this, in the present embodiment, even if when robot 1 comprise the supporting member 6 supported arm 4 can be supported to can in the vertical direction movement cylindrical component 7, also can the position of the substrate 2 that will move into be suppressed to offset with better simply structure and the inclination of this substrate 2 can be revised rightly.In addition, in the present embodiment, when substrate 2 do not tilt but with substrate 2 take out of orthogonal direction, direction causes position to offset, by make cylindrical component 7 relative to base station 8 move revise this position skew.In addition, in the present embodiment, by utilizing travel mechanism 10 to make cylindrical component 7 move relative to base station 8, the step-up error of robot 1, assembly error can be revised.Therefore, setting, the assembling of robot 1 can easily be carried out.
In the present embodiment, travel mechanism 10 is configured between the first rotating part 20 and the second rotating part 21.In addition, the base end side of the arm support 16 extended substantially in parallel with rotating member 9 from cylindrical component 7 is configured at cylindrical component 7 side, and arm 4 is supported on the front of arm support 16.Therefore, travel mechanism 10 can be configured at the downside of the center of gravity of the structure be made up of the second rotating part 21, cylindrical component 7, supporting member 6, arm 4 and hand 3 etc.So, can suppress to act on excessive external force to rectilinear guide 28.
In the present embodiment, when observing from above-below direction, travel mechanism 10 is configured between the cardinal extremity of cylindrical component 7 and arm 4 on the long side direction of arm support 16.Therefore, can easily become the linking part 21b of base end side and the second rotating part 21 configuring the first rotating part 20 between the cylindrical component 7 at dead angle and the cardinal extremity of arm 4 along the vertical direction overlappingly, and travel mechanism 10 can configured.Therefore, the base end side of the first rotating part 20 and the linking part 21b of the second rotating part 21 are configured to overlapping in the vertical direction, in addition, even if it is miniaturized to be configured with robot of travel mechanism 10, Ye Nengshi 1 between the first rotating part 20 and the second rotating part 21.
(other embodiments)
Above-mentioned embodiment is an example of the preferred embodiment of the present invention, but is not limited thereto, and can carry out various distortion not changing in the scope of the inventive concept.
In the above-described embodiment, motor 25 is fixed on the inside of the linking part 21b of the second rotating part 21, and nut member 27 is fixed on the first rotating part 20 by support 32.In addition, such as, shown in Fig. 9, also can be fixed with motor 25 in the inside of the front of the first rotating part 20, be fixed with nut member 27 in the inside of the second rotating part 21.
In the above-described embodiment, travel mechanism 10 is configured between the first rotating part 20 and the second rotating part 21.In addition, such as, shown in Figure 10, travel mechanism 10 is also between the configurable lower end in cylindrical component 7 (i.e. the lower end in the first post portion 17) and rotating member 9.That is, travel mechanism 10 is also configurable in linking part with rotating member 9 of cylindrical component 7.In this case, without the need to forming rotating member 9 by the first rotating part 20 and these two components of the second rotating part 21, rotating member 9 is made up of a component as shown in Figure 10.In addition, in this case, such as, motor 25 is fixed on the inside of rotating member 9, and nut member 27 is fixed on the lower end in the first post portion 17.In addition, such as, guide rail 33 is fixed on the front upper surface of rotating member 9, and guide body 34 is fixed on the lower end in the first post portion 17.
In the above-described embodiment, the long side direction of rotating member 9 tilts slightly relative to the long side direction of arm support 16, and the second rotating part 21 is relative to the linearly relative movement on the long side direction of arm support 16 of the first rotating part 20.In addition, such as shown in Figure 11, also travel mechanism 10 can be configured to long side direction (direction of the arrow V) relative movement of the rotating member 9 that the second rotating part 21 is tilted towards the long side direction with arm support 16 slightly relative to the first rotating part 20.In addition, also travel mechanism 10 can be configured to make the second rotating part 21 relative to the first rotating part 20 towards the direction beyond the long side direction of rotating member 9 and the direction inconsistent with the moving direction of hand 3 (such as, relative to the direction of the moving direction inclination predetermined angular of hand 3) relative movement.
In the above-described embodiment, the long side direction of rotating member 9 tilts slightly relative to the long side direction of arm support 16.In addition, such as, shown in Figure 12, when observing from above-below direction, the first rotating part 20 of rotating member 9 is formed as the roughly rectangle of the direction parallel with the long side direction of arm support 16 as long side direction.In this case, shape during the observing from above-below direction of the second rotating part 21 is such as the step-like of twice warpage, and linking part 21b is configured at the upside of the front of the first rotating part 20.Also the long side direction of the rotating member 9 entirety mode parallel with the long side direction of arm support 16 rotating member 9 can be formed.
In the above-described embodiment, main part 5 can not move in the horizontal direction, but main part 5 also can be formed as moving in the horizontal direction.That is, as shown in Figure 13, Figure 14, robot 1 also can comprise: be supported to by base station 8 and (such as left and right directions) can go up the substructure member 40 of movement in the horizontal direction; And make base station 8 relative to the horizontal mobile mechanism of substructure member 40 movement in the horizontal direction.
In the above-described embodiment, supporting member 6 comprises arm support 16, and the base end side of arm 4 is supported on the front of arm support 16.In addition, such as, supporting member 6 also can be made to be made up of lifting unit 15, to make the base end side of arm 4 be supported on lifting unit 15.In addition, in the above-described embodiment, travel mechanism 10 comprises rotary-type motor 25, ball screw 26 and nut member 27, but travel mechanism 10 also can be linear motor.
In the above-described embodiment, the second post portion 18 can move in the vertical direction relative to the first post portion 17.In addition, such as, also the second post portion 18 can be fixed in the assigned position in the first post portion 17.In this case, the lifting unit 15 being only held in the second post portion 18 moves in the vertical direction.In addition, in the above-described embodiment, cylindrical component 7 comprises the first post portion 17 and the second post portion 18, but cylindrical component 7 also can be made up of a post portion.In this case, lifting unit 15 is the mode of movement in the vertical direction can be held in this post portion.
In the above-described embodiment, arm 4 is made up of the first arm 13 and these two arms of the second arm 14, but arm 4 also can be made up of the arm of more than three.In addition, in the above-described embodiment, robot 1 is the so-called double arm robot comprising two hands 3 and two arms 4 etc., but robot 1 also can be the single armed humanoid robot comprising a hand 3 and an arm 4 etc.In addition, in the above-described embodiment, be substrate 2 by the conveying object that robot 1 is carried, but also can be the wafer etc. beyond substrate 2 by the conveying object that robot 1 is carried.
Claims (7)
1. an industrial robot, comprising: hand, and this hand is for conveying object installing; Arm, this arm links for described hand; Supporting member, this supporting member supports described arm; Cylindrical component, described supporting member is supported to and can moves in the vertical direction by this cylindrical component; Base station; Rotating member, this rotating member carries out supporting to the lower end of described cylindrical component and can rotate relative to described base station; And travel mechanism, this travel mechanism makes described cylindrical component relative to the relative movement in the prescribed direction orthogonal with above-below direction of described base station, and described rotating member is formed as the elongate block extended towards described cylindrical component from described base station, it is characterized in that,
Described rotating member comprises: be held in the first rotating part on described base station in the mode that can rotate; And the second rotating part supplying the lower end of described cylindrical component fixing,
Described travel mechanism is configured between described first rotating part and described second rotating part,
Described second rotating part can relative to the linearly relative movement of described first rotating part.
2. industrial robot as claimed in claim 1, is characterized in that,
Described supporting member comprises the arm support of the elongate block extended from described cylindrical component, and when observing from above-below direction, described arm support and described rotating member extend substantially in parallel,
The base end side of described arm support is configured at described cylindrical component side,
Described arm is supported on the front of described arm support.
3. industrial robot as claimed in claim 2, is characterized in that,
When observing from above-below direction, described travel mechanism is configured between the cardinal extremity of described cylindrical component and described arm on the long side direction of described arm support.
4. industrial robot as claimed in claim 1, is characterized in that,
Described travel mechanism is configured between the lower end of described cylindrical component and described rotating member.
5. the industrial robot according to any one of Claims 1-4, is characterized in that,
Described travel mechanism comprises: motor; The screw member linked with the output shaft of described motor; There is the nut member of the female threaded portion screwed togather with the outer screw section of described screw member; And rectilinear guide.
6. the industrial robot according to any one of Claims 1-4, is characterized in that,
Described industrial robot comprises horizontal mobile mechanism, and this horizontal mobile mechanism makes described base station move in the prescribed direction orthogonal with above-below direction.
7. industrial robot as claimed in claim 5, is characterized in that,
Described industrial robot comprises horizontal mobile mechanism, and this horizontal mobile mechanism makes described base station move in the prescribed direction orthogonal with above-below direction.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010161235A JP5578973B2 (en) | 2010-07-16 | 2010-07-16 | Industrial robot |
| JP2010-161235 | 2010-07-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102380872A CN102380872A (en) | 2012-03-21 |
| CN102380872B true CN102380872B (en) | 2015-07-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110206392.3A Expired - Fee Related CN102380872B (en) | 2010-07-16 | 2011-07-13 | Industrial robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5578973B2 (en) |
| KR (1) | KR101606223B1 (en) |
| CN (1) | CN102380872B (en) |
| TW (1) | TWI546172B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5990359B2 (en) * | 2012-10-04 | 2016-09-14 | 平田機工株式会社 | Loading / unloading robot |
| TW201507829A (en) * | 2013-08-23 | 2015-03-01 | Chiuan Yan Technology Co Ltd | Elevation pick and delivery device |
| JP2015178161A (en) * | 2014-03-19 | 2015-10-08 | 株式会社安川電機 | Transfer robot and transfer system |
| JP2018089765A (en) * | 2016-12-07 | 2018-06-14 | 日本電産サンキョー株式会社 | Industrial robot |
| JP6782180B2 (en) * | 2017-01-31 | 2020-11-11 | 川崎重工業株式会社 | Board gripping hand and board transfer device |
| JP6873881B2 (en) * | 2017-10-13 | 2021-05-19 | 日本電産サンキョー株式会社 | Industrial robot |
| JP7149119B2 (en) * | 2018-07-03 | 2022-10-06 | 日本電産サンキョー株式会社 | industrial robot |
| JP2022019251A (en) * | 2020-07-17 | 2022-01-27 | 日本電産サンキョー株式会社 | Industrial robot |
| JP2022083199A (en) * | 2020-11-24 | 2022-06-03 | 日本電産サンキョー株式会社 | Industrial robot |
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| JPH03284534A (en) * | 1990-03-30 | 1991-12-16 | Matsushita Electric Works Ltd | Transfer device |
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| JPH0413595A (en) * | 1990-05-01 | 1992-01-17 | Mitsubishi Electric Corp | Clean robot |
| JP3514323B2 (en) * | 1993-10-20 | 2004-03-31 | ヤンマー農機株式会社 | Vacuum harvester |
| JP3486947B2 (en) * | 1994-03-17 | 2004-01-13 | 株式会社タツノ・メカトロニクス | Refueling device |
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- 2011-07-05 TW TW100123731A patent/TWI546172B/en not_active IP Right Cessation
- 2011-07-13 CN CN201110206392.3A patent/CN102380872B/en not_active Expired - Fee Related
- 2011-07-15 KR KR1020110070355A patent/KR101606223B1/en active IP Right Grant
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| CN2341778Y (en) * | 1998-12-02 | 1999-10-06 | 和椿事业股份有限公司 | Mechanical arm |
| CN1401461A (en) * | 2001-08-07 | 2003-03-12 | 株式会社三协精机制作所 | Machine hand location method and device |
| CN1895974A (en) * | 2005-07-15 | 2007-01-17 | 日本电产三协株式会社 | Substrate move-out move-in method and system |
| CN101456182A (en) * | 2007-12-12 | 2009-06-17 | 中国科学院自动化研究所 | Intelligent robot welding device using large-scale workpiece |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI546172B (en) | 2016-08-21 |
| JP2012020382A (en) | 2012-02-02 |
| TW201208835A (en) | 2012-03-01 |
| CN102380872A (en) | 2012-03-21 |
| KR101606223B1 (en) | 2016-03-24 |
| KR20120008466A (en) | 2012-01-30 |
| JP5578973B2 (en) | 2014-08-27 |
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