CN102378831A - 用于产生高温的金属切割领域的镀膜切割工具 - Google Patents
用于产生高温的金属切割领域的镀膜切割工具 Download PDFInfo
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- CN102378831A CN102378831A CN2009801585310A CN200980158531A CN102378831A CN 102378831 A CN102378831 A CN 102378831A CN 2009801585310 A CN2009801585310 A CN 2009801585310A CN 200980158531 A CN200980158531 A CN 200980158531A CN 102378831 A CN102378831 A CN 102378831A
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- layer
- parting tool
- inlay
- coating
- preferred
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- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
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Abstract
本发明涉及一种切割工具嵌体，包括硬质合金、金属陶瓷、陶瓷、高速钢(HSS)、多晶金刚石(PCD)或多晶立方氮化硼(PCBN)基体，通过物理气相沉积(PVD)，例如阴极电弧蒸发或磁控溅射生长，实施硬质耐磨涂层。所述涂层包含至少一个(ZrxAl1-x)N层，其中0.45＜x＜0.85且0.90＜y＜1.30，厚度在0.5至10μm之间。所述层具有由单立方体相或六方与立方相的混合物组成的纳米晶微观结构。具有提高的耐坑蚀磨损的该嵌体在产生高温的金属切割领域中特别有效。
Description
本发明背景技术
本发明涉及一种用于通过去除缺口的加工切割工具嵌体，并且通过物理气相沉积(PVD)生长至少一层具有高Zr含量的(Zr，Al)N层的耐磨损涂层，，而且优选通过阴极电弧蒸发或者磁控溅射。该嵌体在产生高温的金属切割领域中尤其有效果，如钢、不锈钢和硬化钢的加工。
H.Hasegawa等，Surf.Coat.Tech.200(2005)已经通过阴极电弧蒸发采用合金和/或金属阴极合成了Zr1-xAlxN(0≤x≤1.0)层。Zr1-xAlxN(x＝0.37)的峰显示了在x＝0.50时NaCl结构转变为纤锌矿结构。
EP1785504公开了一种表面镀膜基材以及在所述基材表面或外部形成高硬度的涂层。所述高硬度涂层包括包含以铝为主要组分的氮化物的涂层，而且至少一种元素选自由Zr、Hf、Pd、Ir和稀土元素所组成的组。
JP04-017664公开了一种包含至少一种ZrxAl1-x(0.5≤x≤1.0)碳化物、氮化物和氮碳化物的梯度层，其中Al含量从基材界面至该层表面持续或分段变化。
EP1935999公开了一种具有耐磨涂层的硬质合金立铣工具。所述耐磨涂层包括PVD AlMe的氮化物或碳氮化物第一层，其中Me为Zr、V、Nb、Cr或Ti，Al与Me的原子比在1.20至1.50之间，和PVD AlMe的氮化物或碳氮化物第二层，其中Me为Zr、V、Nb、Cr或Ti，Al与Me的原子比为1.30至1.70。
朝向为了环境保护的干加工工艺的趋势，也就是不使用切割液(润滑剂)的金属切割操作和采用改进工艺加速的加工速度，由于增加了的工具切割边缘温度，对工具材料的特性提出了更高的要求。尤其是在高温下涂层的稳定性，例如抗氧化性和耐磨损性变得更至关重要。
本发明的一个目标是提供一种在提高温度下在金属切割领域具有改善性能的镀膜切割工具嵌体。
已经发现化学计量比(Zr，Al)N层中高Zr含量导致改善高温性能，而且尤其改善金属切割中的耐坑蚀磨损性。
附图简要说明
图1：剥离的(Al，Zr)N层的扫描电子显微镜(SEM)显微照片。
图2：X射线衍射图与热处理温度。
图3：硬度与热处理温度和(Zr1-xAlx)N中组成x。
图4：(Al，Zr)N层的高分辨率透射电子显微镜(TEM)横截面显微照片。
本发明详细描述
依据本发明，在此提供了一种用于通过去除缺口的加工切割工具，其包含硬质合金、金属陶瓷、陶瓷、高速钢(HSS)、多晶金刚石(PCD)或者多晶立方氮化硼(PCBN)硬质合金基体，优选硬质合金以及金属陶瓷，在其上沉积包含至少一个(ZrxAl1-x)Ny层的耐磨损涂层，其中0.45＜x＜0.85，优选0.50＜x＜0.75，而且0.90≤y＜1.30，优选1.00＜y＜1.25，更优选1.00＜y＜1.20，通过如EDS或WDS技术确定其包含有单一立方相或者单一六方相或者它们的混合物，优选通过X射线衍射确定六方相占多数的立方与六方相的混合物。元素组成x和y在测量精度内，优选在整个涂层内变化小于10％。组成的变化还可能由沉积中常规工艺变化，如沉积中嵌体夹具的旋转，引起。
所述层厚度为0.5μm至10μm，优选0.5至5μm，并且通过层中间区域高分辨率横截面透射电子显微镜确定具有平均晶粒尺寸＜100nm的纳米晶微观结构，优选＜50nm，最优选＜25nm，例如，在生长方向30％-70％厚度内的区域。所述平均晶粒尺寸为测量至少10个临近晶粒尺寸的平均值。
所述具有纳米晶结构的(Zr，Al)N沉积层硬度＞23GPa，并且优选＜35GPa。
基体可进一步镀覆内部单层和/或多层涂层，优选TiN，TiC，Ti(C，N)或(Ti，Al)N，最优选TiN或(Ti，Al)N，和/或外部单层或多层涂层，优选TiN，TiC，Ti(C，N)，(Ti，Al)N或氧化物，最优选TiN或(Ti，Al)N，对于整个涂层厚度，包括0.7至20μm的(Zr，Al)N层，优选1-10μm，最优选2至7μm。
在一个实施例中，通过阴极电弧蒸发从阴极沉积(Zr，Al)N层，形成所需的层组成，优选通过蒸发合金阴极，在如下条件下：蒸发电流在50至200A之间，偏向电压在0至-300V之间，优选在-10至-150V之间，并且温度在200至800℃之间，优选在300至600℃之间，在混合Ar+N2气氛下，优选在纯N2下，而且总压力在1.0至7.0Pa之间，优选在1.5至4.0Pa之间。
在第二实施例中，通过磁控溅射从靶材沉积(Zr，Al)N，获得所需的层组成，优选通过溅射合金或组合物靶材，在如下条件下：应用到溅射阴极的能量密度在0.5至15W/cm2之间，优选在1至5W/cm2之间，偏压在0至-300V之间，优选在-10至-150V之间，温度在200至800℃之间，优选在300至600℃之间，在混合Ar+N2或纯N2气氛下并且总压力在0.1至7.0Pa之间，优选在0.1至2.5Pa之间。
本发明还涉及上述切割工具嵌体在钢、不锈钢和硬质钢的加工上的应用，切割速度为50-500m/min，优选75-400m/min，根据切割速度和嵌体的外形，在车铣情况下每齿平均进给量为0.08-0.5mm，优选0.1-0.4mm。
实施例1
采用具有组成94wt％WC-6wt％Co(细晶粒)的硬质合金嵌体。
在沉积之前，根据常规工艺清洗嵌体。系统抽真空至压力小于0.08Pa，然后嵌体采用氩离子溅射清洗。采用阴极电弧蒸发使用合金(Zr，Al)阴极生成单(ZrxAl1-x)Ny层。该层生长温度为400℃，在纯N2气氛下，总压力为2.5Pa，采用-100V偏压，并且蒸发电流在100A至200A之间，总厚度为3μm，获得的层组成如表1。
图1显示了根据本发明在剥离横截面中典型层的SEM显微照片，其具有纳米晶结构共有的玻璃态形貌。
(ZrxAl1-x)Ny的金属组成x采用具有Thermo Noran EDS的LEOUltra 55扫描电子显微镜，通过能谱仪(EDS)分析表面获得。用工业标准以及ZAF校正定量分析，以及采用Noran System Six(NSS version 2)软件计算(见表1)。
有些(ZrxAl1-x)Ny层的氮含量y采用入射40MeV碘离子束通过飞行时间弹性反冲探测分析(ERDA)获得。从元素深度剖面获得的y值，通过层中300nm以下深度的数据计算(见表1)。
表1
为了模拟时效硬化，也就是随时间增加的该层的硬化效果，采用加速测试条件，通过在惰性氩气环境下实施控制等温热处理嵌体达1200℃120分钟。而且，这是接近于在金属加工时嵌体的切割边缘温度的典型温度。
所述沉积层和热处理层的XRD图谱使用CuKα射线以及θ-2θ构造获得。该层的峰，典型地，为相当宽的纳米晶结构特性。此外，立方相比例随着热处理温度的增加而增加，而且通过更精细的衍射峰观察到。作为一个例子，图2显示了热处理温度与(Zr0.67Al0.33)N层的XRD结果的函数关系，其中立方相由(111)和(200)标定，嵌体由(S)标定以及六方相由虚线标定。从图中明显地，所述沉积涂层(标定为25℃)显示了纳米晶六方和立方结构(Zr，Al)N的混合。
该层的硬度数据通过纳米压痕技术计算，采用具有Berkovich金刚石头的UMIS纳米压痕系统，并且最大头负荷25mN。在经过打磨的表面进行压痕。图3显示热处理和组成x，x＞0.50与(ZrxAl1-x)Ny层的硬度(H)的函数关系，获得了预料不到的时效硬化提高。特别是当x＝0.67时硬度的增加超过25％，也就是数值为25至33GPa.。
横截面形貌高分辨率透射电子显微镜(TEM)用来研究该层的微观结构，采用FEI Technai G2 TF 20UT，操作电压200kV。样品的准备包含常规机械研磨/抛光以及离子束溅射。图4显示涂层表现出平均晶粒尺寸＜25nm的纳米晶粒微观结构。
实施例2
实施例1中的嵌体根据如下测试：
表面形状CNMA 120408-KR
应用：轴向旋转
工件材料：SS1672
切割速度：240m/min
进给量：0,2mm/rev
切割深度：2mm
以转动5分钟后每mm2内的坑蚀面积测量坑蚀磨损()，结果如下。
表2
所选择的切割数据中坑蚀磨损＜0.1是满意的。
Claims (10)
1.切割工具嵌体，包括硬质合金、金属陶瓷、陶瓷、高速钢(HSS)、多晶金刚石(PCD)或多晶立方氮化硼(PCBN)基体，实施硬质耐磨涂层，所述涂层包括至少一个层，其特征在于：所述涂层由(ZrxAl1-x)Ny和单立方相或六方与立方相的混合物组成的纳米晶微观结构组成，其中0.45＜x＜0.85且0.90≤y＜1.30，厚度为0.5至10μm，优选在0.5至5μm之间。
2.根据权利要求1所述的切割工具嵌体，其特征在于所述晶粒尺寸＜100nm，优选＜50nm。
3.根据上述任一权利要求所述的切割工具嵌体，其特征在于0.50＜x＜0.75且1.00＜y＜1.25。
4.根据上述任一权利要求所述的切割工具嵌体，其特征在于1.00＜y＜1.20。
5.依据上述任一权利要求所述的切割工具嵌体，其特征在于元素组成x和y，在测量精度内，优选在整个涂层内变化小于10％。
6.依据上述任一权利要求所述的切割工具嵌体，其特征在于所述涂层硬度＞23GPa。
7.依据上述任一权利要求所述的切割工具嵌体，其特征在于所述基体具有内部单层和/或多层涂层，优选TiN，TiC，Ti(C，N)或(Ti，Al)N，最优选TiN或(Ti，Al)N，和/或外部单层或多层涂层，优选TiN，TiC，Ti(C，N)，(Ti，Al)N或氧化物，最优选TiN或(Ti，Al)N，对于整个涂层厚度，包括0.7至20μm的(Zr，Al)N层，优选1-10μm，最优选2至7μm。
8.依据权利要求1-7所述的切割工具嵌体，其特征在于通过阴极电弧蒸发从阴极沉积所述(Zr，Al)N层，获得所需的层组成，优选通过蒸发合金阴极，在如下条件下：蒸发电流在50至200A之间，偏向电压在0至-300V之间，优选在-10至-150V之间，并且温度在200至800℃之间，优选在300至600℃之间，在混合Ar+N2气氛下，优选在纯N2下，而且总压力在1.0至7.0Pa之间，优选在1.5至4.0Pa之间。
9.依据权利要求1-7所述的切割工具嵌体，其特征在于通过磁控溅射从靶材沉积所述(Zr，Al)N层，获得所需的层组成，优选通过溅射合金或组合物靶材，在如下条件下：应用到溅射阴极的能量密度在0.5至15W/cm2之间，优选在1至5W/cm2之间，偏压在0至-300V之间，优选在-10至-150V之间，温度在200至800℃之间，优选在300至600℃之间，在混合Ar+N2或纯N2气氛下并且总压力在0.1至7.0Pa之间，优选在0.1至2.5Pa之间。
10.权利要求1-7任一所述的切割工具嵌体在钢、不锈钢和硬质钢的金属切割领域中的应用，切割速度50-500m/min，优选75-400m/min，根据切割速度和嵌体的外形，在车铣情况下每齿平均进给量为0.08-0.5mm，优选0.1-0.4mm。
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| KR920701506A (ko) * | 1989-09-29 | 1992-08-11 | 원본미기재 | 절삭공구 또는 내마모성공구용 표면피복 경질부재 |
| JP2648634B2 (ja) | 1990-05-10 | 1997-09-03 | ハイウンチンシュー グーフウンユーシェンコンシー | 磁石の製造方法 |
| JP2926882B2 (ja) | 1990-05-15 | 1999-07-28 | 住友電気工業株式会社 | 耐摩耗性に優れた表面被覆硬質部材 |
| DE4243915A1 (de) * | 1992-12-23 | 1994-06-30 | Hauzer Techno Coating Europ B | Verfahren zur mehrstufigen Beschichtung von Substraten |
| US5879823A (en) * | 1995-12-12 | 1999-03-09 | Kennametal Inc. | Coated cutting tool |
| DE19756588A1 (de) * | 1997-12-18 | 1999-07-01 | Hartec Ges Fuer Hartstoffe Und | Schichtsystem, Verfahren zu seiner Herstellung sowie seine Verwendung |
| JP4017644B2 (ja) | 2005-10-24 | 2007-12-05 | 株式会社ハイレックスコ−ポレ−ション | ケーブル駆動装置 |
| JP5192642B2 (ja) * | 2005-11-11 | 2013-05-08 | 三菱重工業株式会社 | 表面被覆部材及びその製造方法ならびに工具及び工作装置 |
| WO2007111301A1 (ja) * | 2006-03-28 | 2007-10-04 | Kyocera Corporation | 表面被覆工具 |
| EP1914331B1 (en) * | 2006-10-18 | 2019-07-24 | Sandvik Intellectual Property AB | Coated cutting tool |
| SE0700800L (sv) | 2006-12-15 | 2008-06-16 | Sandvik Intellectual Property | Belagt skärverktyg |
| SE530861C2 (sv) | 2006-12-15 | 2008-09-30 | Sandvik Intellectual Property | Belagd hårdmetallpinnfräs för medel- och finbearbetning av härdade stål och förfarande för dess framställning |
| CN102066616A (zh) * | 2008-06-13 | 2011-05-18 | 山高刀具公司 | 用于产生高温的金属切削应用的涂层切削工具 |
-
2009
- 2009-06-09 KR KR1020117023130A patent/KR101614979B1/ko not_active IP Right Cessation
- 2009-06-09 US US13/259,935 patent/US8741011B2/en not_active Expired - Fee Related
- 2009-06-09 WO PCT/SE2009/050697 patent/WO2010114448A1/en active Application Filing
- 2009-06-09 CN CN200980158531.0A patent/CN102378831B/zh not_active Expired - Fee Related
- 2009-06-09 JP JP2012503362A patent/JP5654562B2/ja not_active Expired - Fee Related
- 2009-06-09 EP EP09842783.4A patent/EP2427592A4/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105593397A (zh) * | 2013-09-05 | 2016-05-18 | 山高刀具公司 | 一种涂覆的切削工具和涂覆切削工具的方法 |
| CN113874540A (zh) * | 2018-11-09 | 2021-12-31 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 从陶瓷靶沉积的立方富铝AlTiN涂层 |
| CN113874540B (zh) * | 2018-11-09 | 2024-05-03 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 从陶瓷靶沉积的立方富铝AlTiN涂层 |
| US12006564B2 (en) | 2019-11-11 | 2024-06-11 | Oerlikon Surface Solutions Ag, Pfäffikon | Cubic Al-rich AlTiN coatings deposited from ceramic targets |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102378831B (zh) | 2014-03-05 |
| EP2427592A1 (en) | 2012-03-14 |
| JP5654562B2 (ja) | 2015-01-14 |
| KR101614979B1 (ko) | 2016-04-22 |
| WO2010114448A1 (en) | 2010-10-07 |
| KR20120014120A (ko) | 2012-02-16 |
| EP2427592A4 (en) | 2016-08-10 |
| US8741011B2 (en) | 2014-06-03 |
| US20120114442A1 (en) | 2012-05-10 |
| JP2012522653A (ja) | 2012-09-27 |
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