CN102368469A - 一种新型icp刻蚀机预真空腔的盖子 - Google Patents
一种新型icp刻蚀机预真空腔的盖子 Download PDFInfo
- Publication number
- CN102368469A CN102368469A CN2011102795796A CN201110279579A CN102368469A CN 102368469 A CN102368469 A CN 102368469A CN 2011102795796 A CN2011102795796 A CN 2011102795796A CN 201110279579 A CN201110279579 A CN 201110279579A CN 102368469 A CN102368469 A CN 102368469A
- Authority
- CN
- China
- Prior art keywords
- forevacuum
- bearing plate
- cavity
- cap body
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110279579.6A CN102368469B (zh) | 2011-09-20 | 2011-09-20 | 一种新型icp刻蚀机预真空腔的盖子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110279579.6A CN102368469B (zh) | 2011-09-20 | 2011-09-20 | 一种新型icp刻蚀机预真空腔的盖子 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102368469A true CN102368469A (zh) | 2012-03-07 |
CN102368469B CN102368469B (zh) | 2014-01-01 |
Family
ID=45761028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110279579.6A Active CN102368469B (zh) | 2011-09-20 | 2011-09-20 | 一种新型icp刻蚀机预真空腔的盖子 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102368469B (zh) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1848385A (zh) * | 2005-04-15 | 2006-10-18 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种电感耦合等离子体装置 |
CN1851862A (zh) * | 2005-12-08 | 2006-10-25 | 北京圆合电子技术有限责任公司 | 平台开盖机构 |
JP2008157895A (ja) * | 2006-12-26 | 2008-07-10 | Horiba Ltd | 試料導入装置 |
CN101491797A (zh) * | 2008-01-25 | 2009-07-29 | 沈阳芯源微电子设备有限公司 | 涂胶装置 |
CN201354560Y (zh) * | 2009-02-27 | 2009-12-02 | 大连齐维科技发展有限公司 | 超高真空快速开关门 |
CN101392369B (zh) * | 2008-11-10 | 2010-11-10 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 门盖装置和具有该门盖装置的真空设备 |
CN202307789U (zh) * | 2011-09-20 | 2012-07-04 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种新型icp刻蚀机预真空腔的盖子 |
-
2011
- 2011-09-20 CN CN201110279579.6A patent/CN102368469B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1848385A (zh) * | 2005-04-15 | 2006-10-18 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种电感耦合等离子体装置 |
CN1851862A (zh) * | 2005-12-08 | 2006-10-25 | 北京圆合电子技术有限责任公司 | 平台开盖机构 |
JP2008157895A (ja) * | 2006-12-26 | 2008-07-10 | Horiba Ltd | 試料導入装置 |
CN101491797A (zh) * | 2008-01-25 | 2009-07-29 | 沈阳芯源微电子设备有限公司 | 涂胶装置 |
CN101392369B (zh) * | 2008-11-10 | 2010-11-10 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 门盖装置和具有该门盖装置的真空设备 |
CN201354560Y (zh) * | 2009-02-27 | 2009-12-02 | 大连齐维科技发展有限公司 | 超高真空快速开关门 |
CN202307789U (zh) * | 2011-09-20 | 2012-07-04 | 中国科学院嘉兴微电子仪器与设备工程中心 | 一种新型icp刻蚀机预真空腔的盖子 |
Also Published As
Publication number | Publication date |
---|---|
CN102368469B (zh) | 2014-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Abdullah et al. | Research and development efforts on texturization to reduce the optical losses at front surface of silicon solar cell | |
Zhou et al. | Application of patterned sapphire substrate for III-nitride light-emitting diodes | |
EP1798780A2 (en) | Method for fabricating a substrate with nano structures, light emitting device and manufacturing method thereof | |
CN102593285B (zh) | 一种回收图形化蓝宝石衬底的方法 | |
CN102064088B (zh) | 一种干法刻蚀与湿法腐蚀混合制备蓝宝石图形衬底的方法 | |
CN102473751B (zh) | 基板的面粗化方法、光电动势装置的制造方法、光电动势装置 | |
CN112768584B (zh) | 一种发光二极管芯片及其应用 | |
US9112103B1 (en) | Backside transparent substrate roughening for UV light emitting diode | |
US10483415B2 (en) | Methods to introduce sub-micrometer, symmetry-breaking surface corrugation to silicon substrates to increase light trapping | |
US20100270263A1 (en) | Method for preparing substrate with periodical structure | |
CN111341894A (zh) | 一种图形化蓝宝石复合衬底及其制备方法 | |
CN202307789U (zh) | 一种新型icp刻蚀机预真空腔的盖子 | |
JP2010287621A (ja) | 微細構造物の製造方法 | |
CN202307811U (zh) | 一种干法刻蚀坚硬无机材料基板icp刻蚀机的预真空腔 | |
CN204118111U (zh) | 一种LED芯片的Al2O3/SiON钝化层结构 | |
CN102368469B (zh) | 一种新型icp刻蚀机预真空腔的盖子 | |
CN107123705B (zh) | 一种发光二极管的制备方法 | |
Lo et al. | High efficiency light emitting diode with anisotropically etched GaN-sapphire interface | |
CN202307823U (zh) | 一种干法刻蚀坚硬无机材料基板等离子体刻蚀机的电极 | |
TWI722712B (zh) | 一種發光器件基板及製造方法 | |
CN202259195U (zh) | 一种干法刻蚀坚硬无机材料基板的装置 | |
CN104659165A (zh) | 一种GaN基发光二极管芯片的制备方法 | |
CN101937175B (zh) | 光刻方法 | |
CN102368465A (zh) | 一种干法刻蚀坚硬无机材料基板icp刻蚀机的刻蚀腔 | |
CN202259153U (zh) | 一种干法刻蚀坚硬无机材料基板icp刻蚀机的刻蚀腔 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: TIANTONG JICHENG MECHINE TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: JIAXING KEMIN ELECTRONIC EQUIPMENT TECHNOLOGY CO., LTD. Effective date: 20130510 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C53 | Correction of patent of invention or patent application | ||
CB03 | Change of inventor or designer information |
Inventor after: Ping Zhihan Inventor after: Su Jinghong Inventor after: Wang Mo Inventor after: Chen Bo Inventor after: Huang Chengqiang Inventor after: Li Chaobo Inventor after: Rao Zhipeng Inventor before: Chen Bo Inventor before: Huang Chengqiang Inventor before: Li Chaobo Inventor before: Rao Zhipeng |
|
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 314006 JIAXING, ZHEJIANG PROVINCE TO: 314400 JIAXING, ZHEJIANG PROVINCE Free format text: CORRECT: INVENTOR; FROM: CHEN BO HUANG CHENGQIANG LI CHAOBO RAO ZHIPENG TO: PING ZHIHAN SU JINGHONGWANG MO CHEN BO HUANG CHENGQIANG LI CHAOBO RAO ZHIPENG |
|
TA01 | Transfer of patent application right |
Effective date of registration: 20130510 Address after: 314400 No. 129, Shuang Lian Road, Haining Economic Development Zone, Zhejiang, China Applicant after: TDG Machinery Technology Co., Ltd. Address before: Jiaxing City, Zhejiang province 314006 Nanhu District Ling Gong Tang Road No. 3339 building JRC A213 Applicant before: Jiaxing Kemin Electronic Equipment Technology Co., Ltd. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant |