CN102347380A - Electrode of solar battery and process for manufacturing electrode - Google Patents
Electrode of solar battery and process for manufacturing electrode Download PDFInfo
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- CN102347380A CN102347380A CN201010246741XA CN201010246741A CN102347380A CN 102347380 A CN102347380 A CN 102347380A CN 201010246741X A CN201010246741X A CN 201010246741XA CN 201010246741 A CN201010246741 A CN 201010246741A CN 102347380 A CN102347380 A CN 102347380A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention provides an electrode of a solar battery. The electrode is electrically connected to a conductive element by using a connection structure and comprises a dielectric structure which has at least one opening and is positioned on a contact electrode, wherein the connection structure is configured in the openings so as to be prevented from horizontally penetrating to the contact electrode.
Description
Technical field
The present invention relates to a kind of electrode of solar battery and processing procedure thereof.
Background technology
Use solar cell to obtain the energy, compared to other the energy, for example fossil energy, nuclear energy, water conservancy etc. are to think mode than environmental protection at present.Especially the price of crude oil continue hurricane high in, many advantages of the solar power generation that more seems.Moreover crude oil always has one day that uses up, and solar power generation is the inexhaustible energy for crude oil.Therefore present national governments, research unit and many individual enterprises all are dropped in many resourcess for research on the solar energy industry.
Solar cell be a kind of can be with the photoelectric cell of power conversion, its essential structure utilization P type engages with N type semiconductor and forms.The most basic material of semiconductor is " compound that silicon or germanium or two kinds of elements are above such as a GaAs etc. "; It is nonconducting; If but in semiconductor, mix different impurity; Just can make P type and N type semiconductor; Utilize the n-type to contact again, form p-n and connect face (junction) with the p-N-type semiconductor N.Connecing near the face, electronics can diffuse to the low p type district of concentration from the high n type district of concentration, and relatively, the hole can diffuse to the low n type district of concentration from the high p type district of concentration.Thus, near the zone that connects the face, its electric neutrality just can be broken.N-type district has that to execute the body cation exposed and produce the Pregionp near the face connecing, and to have the acceptor anion near the face exposed and produce negative charge region connecing in p type district.Pregionp, n type district and p-type district negative charge region just are generically and collectively referred to as space charge region (space charge region).Because executing body cation and acceptor anion all is to be fixed in the lattice, so Pregionp, n-type district and p type district negative charge region will form and build (built-in) electric field in one, and its direction of the internal electric field of this space charge region is to point to p type district from n-type district.If incident photon is absorbed the generation electron-hole pair in the space charge region, electronics can drift about (drift) to n type district because of the influence of internal electric field, and relatively, the hole can drift about to p-type district because of the influence of internal electric field.That is to say that incident photon is absorbed in the space charge region and produces electronics and hole, produces the drift current to p type district from n type district because of the influence of internal electric field, is exactly so-called photoelectric current (photocurrent).Photoelectric current in the solar cell, its flow direction be from n-type district to p-type district, this is as far as the p-n diode, this just is the sense of current of reverse biased (reverse bias).
In the solar cell, the function of internal electric field that p-n connects the space charge region in face district makes incident photon be absorbed exactly and produces electron-hole pair compound (recombination) preceding being separated, and produces photoelectric current.Photoelectric current transfers to load via the Metal Contact (metal contact) of p-n diode again, and this is the basic functional principle of solar cell just.
Summary of the invention
In view of in the above-mentioned background of invention, in order to meet the demand of industry interests, the present invention provides a kind of electrode of solar battery and processing procedure thereof, and its tin that can avoid being used to being electrically connected electrode of solar battery and conducting element infiltrates into the contact electrode of solar cell.
In view of the above; The present invention discloses a kind of electrode of solar battery; Be electrically connected to a conducting element by a syndeton; It comprises a barrier layer (barrier layer); Be positioned on the contact electrode (contact electrode), infiltrate in contact electrode and the semiconductor to avoid syndeton vertical (substantially vertically).
According to an embodiment of the invention, more can comprise the bus between this barrier layer and this contact electrode.
According to an embodiment of the invention, also can comprise the bus between this syndeton and this barrier layer.
The present invention also provides a kind of solar cell; The electrode of solar battery that it comprised; Be electrically connected to a conducting element by a syndeton; It comprises a barrier layer (barrier layer); Be positioned on the contact electrode (contact electrode), wherein this conducting element comprises and refers to insert formula structure or bendable laminated structure.
The present invention discloses another kind of electrode of solar battery; Be electrically connected to a conducting element by a syndeton; It comprises dielectric (dielectric) structure with at least one hole (opening); Be positioned on the contact electrode; Wherein syndeton is disposed in these holes, infiltrates into contact electrode to avoid level (substantially horizontally).
According to an embodiment of the invention, more comprise a barrier layer, be positioned at described hole, and be disposed between this syndeton and this contact electrode.
According to an embodiment of the invention, more comprise the bus between this syndeton and this barrier layer.
According to an embodiment of the invention, more comprise the bus between this barrier layer and this contact electrode, wherein this bus is positioned on this contact electrode of described hole, or this barrier layer in this dielectric structure and the described hole all is positioned on this bus.
The present invention also provides a kind of solar cell; The electrode of solar battery that it comprised; Be electrically connected to a conducting element by a syndeton; It comprises dielectric (dielectric) structure with at least one hole (opening); Be positioned on the contact electrode; Wherein syndeton is disposed in these holes, and this conducting element wherein comprises and refers to insert formula structure or bendable laminated structure.
In addition, the present invention discloses a kind of processing procedure of electrode of solar battery, comprises the following step: form a dielectric structure on a contact electrode; And forming at least one hole in dielectric structure, a syndeton that wherein electrically connects an electrode of solar battery and a conducting element is disposed in these holes.
According to an embodiment of the invention, after described hole formed, more comprise the following step: form on a barrier layer this contact electrode in described hole, wherein this barrier layer comprised one of following group or its combination: titanium, copper, tungsten, molybdenum.
According to an embodiment of the invention, before forming this dielectric structure or before forming this barrier layer, more comprise the following step: form a bus on this contact electrode, wherein this bus comprises one of following group or its combination: gold, silver.
According to an embodiment of the invention; After forming this barrier layer; More comprise the following step: behind the formation position by this syndeton of described hole location, form this syndeton on this barrier layer, wherein this syndeton comprises one of following group or its combination: tin, aluminium; And, make this conducting element be electrically connected to this electrode of solar battery by this conducting element of surface adhering technology reflow and this syndeton.
According to an embodiment of the invention; Before forming this syndeton; More comprise the following step: form between a bus this syndeton and this barrier layer in described hole; This bus in the wherein said hole comprises one of following group or its combination: gold, silver; Wherein said hole forms by lithography; And after forming described hole, form this barrier layer after, form the bus on this barrier layer after or form this syndeton after, remove the photoresist of this micro-photographing process.
The present invention also provides a kind of solar cell, and the processing procedure of the electrode of solar battery that it comprised comprises the following step: form a dielectric structure on a contact electrode; And forming at least one hole in dielectric structure, a syndeton that wherein electrically connects an electrode of solar battery and a conducting element is disposed in these holes.Wherein this dielectric structure comprises one of following group or its combination: silicon dioxide, titanium dioxide, aluminium oxide, silicon nitride; This conducting element comprises and refers to insert formula structure or bendable laminated structure; This conducting element comprises one of following group or its combination: nickel, silver, aluminium, copper, palladium; And this contact electrode comprises one of following group or its combination: nickel, silver, aluminium, copper, palladium.
Pass through said structure; The invention has the advantages that: compared to ball form encapsulation (the Ball Grid Array of conventional solar cell electrode; BGA) structure, projection array (Bump) structure, refer to insert formula (clip) conductive structure; In the electrode of solar battery of the present invention; Hole in the dielectric structure can more effectively be located tin cream; Tin cream is more evenly distributed; And can be in hole by dielectric structure and blocking layer covers; Avoid infiltrating into the contact electrode or the semiconductor structure of solar cell, and then avoid reducing the usefulness of solar cell.
Description of drawings
Fig. 1 and Fig. 2 are the structural representation of the electrode of solar battery of the present invention's proposition;
Fig. 3 and Fig. 4 are the making flow chart of the electrode of solar battery of the present invention's proposition; And
The electrode of solar battery that Fig. 5 proposes for the present invention is electrically connected to the making flow chart of a conducting element.
Embodiment
The present invention is a kind of electrode of solar battery and processing procedure thereof in this direction of inquiring into.In order to understand the present invention up hill and dale, detailed step and composition thereof will be proposed in following description.Apparently, execution of the present invention is not defined in the specific details that the art of electrode of solar battery and processing procedure thereof is had the knack of.On the other hand, well-known composition or step are not described in the details, with the restriction of avoiding causing the present invention unnecessary.Preferred embodiment meeting of the present invention is described in detail as follows, yet except these detailed descriptions, the present invention can also be implemented among other the embodiment widely, and scope of the present invention constrained not, and it is as the criterion with claim.
The present invention provides a kind of processing procedure of electrode of solar battery.At first, form a dielectric (dielectric) structure on a contact electrode (contact electrode).Subsequently, form at least one hole (opening) in dielectric structure.After these holes form, form on the contact electrode of a barrier layer (barrier layer) in these holes.Before forming dielectric structure; Can form a bus (busbar) earlier on contact electrode; Wherein the barrier layer in dielectric structure and these holes all is positioned on the bus; Or before forming barrier layer; Form earlier on the contact electrode of bus in these holes, wherein the barrier layer in these holes is positioned on the bus.After forming barrier layer, can form again on the barrier layer of another bus in these holes, to constitute a kind of electrode structure of solar cell.
Above-mentioned contact electrode comprises one of following group or its combination: nickel (Ni), silver (Ag), aluminium (Al), copper (Cu), palladium (Pd), and barrier layer comprises one of following group or its combination: titanium (Ti), copper (Cu), tungsten (W), molybdenum (Mo).Above-mentioned bus comprises one of following group or its combination: gold (Au), silver (Ag), and two above-mentioned buses can be identical or different material and form.Above-mentioned dielectric structure comprises one of following group or its combination: silicon dioxide (SiO
2), titanium dioxide (TiO
2), aluminium oxide (Al
2O
3), silicon nitride (SiN
X).
After the bus on forming barrier layer, can locate the formation position of a syndeton by these holes, to form syndeton on the bus on the barrier layer, wherein syndeton can comprise one of following group or its combination: tin (Sn), aluminium (Al).Subsequently, by surface adhering technology (SMT, Surface Mount Technology) reflow (reflow) conducting element and syndeton, make conducting element be electrically connected to electrode of solar battery again.Conducting element comprises and refers to insert formula (clip) structure or bendable (flexible) laminated structure, and conducting element comprises one of following group or its combination: nickel (Ni), silver (Ag), aluminium (Al), copper (Cu), palladium (Pd).
According to above-mentioned processing procedure, the present invention provides the embodiment of another kind of electrode of solar battery processing procedure.At first, form a dielectric structure on a contact electrode.Subsequently, form at least one hole in dielectric structure.After these holes form, form on the contact electrode of a bus in these holes.Then, in hole, form a barrier layer again on above-mentioned bus, to constitute the another kind of electrode structure of solar cell.Form barrier layer on bus after, can locate the formation position of a syndeton by these holes, to form syndeton on barrier layer.Subsequently, by surface adhering technology reflow conducting element and syndeton, make conducting element be electrically connected to electrode of solar battery again.
According to above-mentioned processing procedure, the present invention provides the embodiment of another electrode of solar battery processing procedure.At first, form a bus on a contact electrode.Subsequently, form a dielectric structure on bus, on dielectric structure, form at least one hole again.Then, form again on the bus of a barrier layer in these holes, to constitute another electrode structure of solar cell.Form barrier layer on bus after, can locate the formation position of a syndeton by these holes, to form syndeton on barrier layer.Subsequently, by surface adhering technology reflow conducting element and syndeton, make conducting element be electrically connected to electrode of solar battery again.
According to above-mentioned processing procedure, the present invention provides the processing procedure of another electrode of solar battery.At first, form a dielectric structure on a contact electrode.Subsequently, form at least one hole in dielectric structure.After these holes formation, form on the contact electrode of a barrier layer in these holes.After forming barrier layer, form again on the barrier layer of a bus in these holes, to constitute another electrode structure of solar cell.After the bus on forming barrier layer, can locate the formation position of a syndeton, to form syndeton on the bus on the barrier layer by these holes.Subsequently, by surface adhering technology reflow conducting element and syndeton, make conducting element be electrically connected to electrode of solar battery again.
Above-mentioned hole can form by lithography (photolithography/etching); And after forming these holes, form after the barrier layer, form after the bus on the barrier layer or form after the syndeton, remove the photoresist (photoresist) of (strip) micro-photographing process.Above-mentioned syndeton is positioned at the hole of dielectric structure, avoiding horizontal permeation to contact electrode, and by the obstruct of barrier layer, to avoid vertically infiltrating into contact electrode.
In view of the above; The electrode of solar battery that the present invention discloses; Can complete according to above-mentioned various processing procedures with the solar cell that comprises this electrode; And known correlation technique person all can know by inference easily; Above-mentioned solar cell more can comprise two or the electrode of solar battery that discloses of a plurality of the present invention, not only exceeds with one.
According to above-mentioned processing procedure, the present invention provides a kind of electrode of solar battery, and it is electrically connected to a conducting element by a syndeton.This electrode of solar battery comprises a barrier layer, is positioned on the contact electrode, avoids syndeton vertically to infiltrate into contact electrode.Above-mentioned electrode of solar battery more comprises a bus between barrier layer and contact electrode, or between syndeton and barrier layer.Certainly, this electrode of solar battery also can comprise two buses and lay respectively between barrier layer and the contact electrode, and between syndeton and the barrier layer.
The present invention also provides another kind of electrode of solar battery; Be electrically connected to a conducting element by a syndeton, it comprises a dielectric structure with at least one hole, is positioned on the contact electrode; Wherein syndeton is disposed in these holes, to avoid horizontal permeation to contact electrode.Above-mentioned electrode of solar battery more comprises a barrier layer, is positioned at these holes, and is disposed between syndeton and the contact electrode, avoids syndeton vertically to infiltrate into contact electrode.With the above, electrode of solar battery more comprises a bus between barrier layer and contact electrode, or between syndeton and barrier layer.If above-mentioned bus is between barrier layer and contact electrode, it can be positioned on the contact electrode of these holes, or the barrier layer in dielectric structure and these holes all is positioned on this bus.Above-mentioned electrode of solar battery also can comprise two buses and lay respectively between barrier layer and the contact electrode, and between syndeton and the barrier layer.Above-mentioned two kinds of solar energy electrodes all can be applicable among the solar cell, avoid syndeton to infiltrate into the semiconductor structure of contact electrode and solar cell, and above-mentioned conducting element can comprise and refers to insert formula structure or bendable laminated structure.
Next, see also graphic detailed explanation content of the present invention, technical characterictic is with various execution modes.
Fig. 1 shows a preferred embodiment of the present invention, and it shows a kind of electrode of solar battery.This electrode of solar battery is disposed on the photovoltaic cell 100, and comprises a contact electrode 110, a dielectric structure 120, a barrier layer 130, and two buses 140,142, and wherein dielectric structure 120 has at least one hole 122.Contact electrode 110 is between bus 140 and photovoltaic cell 100, and dielectric structure 120 is positioned on the bus 140.In above-mentioned hole 122, barrier layer 130 is at two buses 140, between 142.Moreover above-mentioned electrode of solar battery is electrically connected to a conducting element by a syndeton 150.This conducting element can be bendable laminated structure 160 shown in Figure 1, also can be finger shown in Figure 2 and inserts formula structure 162.
Fig. 3 and Fig. 4 show another preferred embodiment of the present invention, and it is a kind of making flow chart of electrode of solar battery.At first, like step 210, form a bus 140 on a contact electrode 110, wherein contact electrode 110 is positioned on the photovoltaic cell 100.Subsequently, like step 220, form a dielectric structure 120 on bus 140.Then, like step 230, form a photoresist 170 on dielectric structure 120 after, form at least one hole 122 in dielectric structure 120 by lithography again.Afterwards, like step 240, in hole 122, form a barrier layer 130 on bus 140.Then, like step 250, in hole 122, form another bus 142 on barrier layer 130.At last, like step 260, remove photoresist 170 after, can form above-mentioned electrode of solar battery.
See also Fig. 5, it is electrically connected to the making flow chart of a conducting element for above-mentioned electrode of solar battery.Like step 270, by the formation position of hole 122 location one syndeton 150, so that syndeton 150 is formed on the bus 142 of hole 122.Like step 280; By surface adhering technology reflow conducting element and syndeton 150, constituting a loop with outer member, and then the generating production capacity; Wherein this conducting element can be bendable laminated structure 160 shown in Figure 5, also can be finger shown in Figure 2 and inserts formula structure 162.In the above-described embodiment, bus 140,142 is a silver, and syndeton 150 is tin cream (solder paste).
Ball form encapsulation (Ball Grid Array compared to the conventional solar cell electrode; BGA) structure, projection array (Bump) structure, refer to insert formula (clip) conductive structure; Hole provided by the invention more can effectively be located tin cream; Tin cream is more evenly distributed; And can be in hole by dielectric structure and blocking layer covers; Avoid infiltrating into the contact electrode or the semiconductor structure of solar cell, and then avoid reducing the usefulness of solar cell.
The present invention can be above-mentioned various diagrams and possible collocation and the combination of various embodiment, and any collocation should be considered as various embodiment of the present invention with combination.Do not answer superfluous words at this and introduce various combinations one by one.
Apparently, according to the description among the top embodiment, the present invention has many corrections and difference.Therefore need in the scope of its additional claim item, understand, except above-mentioned detailed description, the present invention can also implement in other embodiment widely.Above-mentioned is preferred embodiment of the present invention only, is not in order to limit claim of the present invention; All other do not break away from the equivalence of being accomplished under the disclosed spirit and changes or modification, all should be included in the following claim.
Claims (15)
1. an electrode of solar battery is electrically connected to a conducting element by a syndeton, it is characterized in that, it comprises a barrier layer, and said barrier layer is positioned on the contact electrode.
2. electrode of solar battery according to claim 1 is characterized in that, more comprises a bus, between this barrier layer and this contact electrode.
3. electrode of solar battery according to claim 1 is characterized in that, more comprises a bus, between this syndeton and this barrier layer.
4. a solar cell comprises electrode of solar battery as claimed in claim 1, it is characterized in that, this conducting element comprises and refers to insert formula structure or bendable laminated structure.
5. an electrode of solar battery is electrically connected to a conducting element by a syndeton, and it comprises a dielectric structure with at least one hole, is positioned on the contact electrode, and wherein this syndeton is disposed in the described hole.
6. electrode of solar battery according to claim 5 is characterized in that, more comprises a barrier layer, is positioned at described hole, and is disposed between this syndeton and this contact electrode.
7. electrode of solar battery according to claim 6 is characterized in that, more comprises a bus, between this syndeton and this barrier layer.
8. electrode of solar battery according to claim 6; It is characterized in that; More comprise a bus; Between this barrier layer and this contact electrode; Wherein this bus is positioned on this contact electrode of described hole, or this barrier layer in this dielectric structure and the described hole all is positioned on this bus.
9. a solar cell comprises like claim 5 a described electrode of solar battery, and wherein this conducting element comprises and refers to insert formula structure or bendable laminated structure.
10. the processing procedure of an electrode of solar battery is characterized in that, comprises the following step:
Form a dielectric structure on a contact electrode; And
Form at least one hole in this dielectric structure, a syndeton that wherein electrically connects this electrode of solar battery and a conducting element is disposed in the described hole.
11. the processing procedure of electrode of solar battery according to claim 10 is characterized in that, described hole more comprises the following step after forming:
Form on a barrier layer this contact electrode in described hole, wherein this barrier layer comprises one of following group or its combination: titanium, copper, tungsten, molybdenum.
12. the processing procedure of electrode of solar battery according to claim 11 is characterized in that, before forming this dielectric structure or before forming this barrier layer, more comprises the following step:
Form a bus on this contact electrode, wherein this bus comprises one of following group or its combination: gold, silver.
13. the processing procedure of electrode of solar battery according to claim 11 is characterized in that, after forming this barrier layer, more comprises the following step:
Behind the formation position by this syndeton of described hole location, form this syndeton on this barrier layer, wherein this syndeton comprises one of following group or its combination: tin, aluminium; And
By this conducting element of surface adhering technology reflow and this syndeton, make this conducting element be electrically connected to this electrode of solar battery.
14. the processing procedure of electrode of solar battery according to claim 13 is characterized in that, before forming this syndeton, more comprises the following step:
Form between a bus this syndeton and this barrier layer in described hole; This bus in the wherein said hole comprises one of following group or its combination: gold, silver; Wherein said hole forms by lithography; And after forming described hole, form this barrier layer after, form the bus on this barrier layer after or form this syndeton after, remove the photoresist of this micro-photographing process.
15. a solar cell comprises the electrode like claim 10 made, wherein this dielectric structure comprises one of following group or its combination: silicon dioxide, titanium dioxide, aluminium oxide, silicon nitride; This conducting element comprises and refers to insert formula structure or bendable laminated structure; This conducting element comprises one of following group or its combination: nickel, silver, aluminium, copper, palladium; And this contact electrode comprises one of following group or its combination: nickel, silver, aluminium, copper, palladium.
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| CN201010246741XA CN102347380A (en) | 2010-08-06 | 2010-08-06 | Electrode of solar battery and process for manufacturing electrode |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010246741XA CN102347380A (en) | 2010-08-06 | 2010-08-06 | Electrode of solar battery and process for manufacturing electrode |
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| CN102347380A true CN102347380A (en) | 2012-02-08 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103681921A (en) * | 2012-09-04 | 2014-03-26 | 东洋铝株式会社 | Strip-shaped line of solar cell and solar cell assembly having same |
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| CN101521175A (en) * | 2008-02-29 | 2009-09-02 | 台湾积体电路制造股份有限公司 | Semiconductor device and a manufacturing method therefor |
| CN102222710A (en) * | 2010-04-13 | 2011-10-19 | 太聚能源股份有限公司 | Packaging structure of photovoltaic cell and process thereof |
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| JPH0786632A (en) * | 1993-09-17 | 1995-03-31 | Fuji Xerox Co Ltd | Thin film element and manufacture thereof |
| CN1365141A (en) * | 2001-01-12 | 2002-08-21 | 华治科技股份有限公司 | Method for producing lug |
| CN1622322A (en) * | 2003-11-14 | 2005-06-01 | 国际商业机器公司 | Stabilizing copper overlayer for enhanced C4 interconnect reliability |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103681921A (en) * | 2012-09-04 | 2014-03-26 | 东洋铝株式会社 | Strip-shaped line of solar cell and solar cell assembly having same |
| CN103681921B (en) * | 2012-09-04 | 2017-04-12 | 东洋铝株式会社 | Strip-shaped line of solar cell and solar cell assembly having same |
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Application publication date: 20120208 |