CN102338917A - Space adjustment mechanism for aligning polarization-maintaining fiber collimators, device and alignment method thereof - Google Patents

Space adjustment mechanism for aligning polarization-maintaining fiber collimators, device and alignment method thereof Download PDF

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Publication number
CN102338917A
CN102338917A CN2011102399309A CN201110239930A CN102338917A CN 102338917 A CN102338917 A CN 102338917A CN 2011102399309 A CN2011102399309 A CN 2011102399309A CN 201110239930 A CN201110239930 A CN 201110239930A CN 102338917 A CN102338917 A CN 102338917A
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polarization maintaining
maintaining optical
optical fiber
axle
polarization
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CN102338917B (en
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梁志军
王宪东
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TIANJIN JUNFENG TECHNOLOGY CO LTD
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TIANJIN JUNFENG TECHNOLOGY CO LTD
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Abstract

The invention provides a space adjustment mechanism for aligning polarization-maintaining fiber collimators, which comprises a sliding substrate, two sets of mechanical adjusting parts which are the same in structure and a set of physical reference datum parts. The invention also provides an alignment device adopting the space adjustment mechanism and a method for aligning two polarization-maintaining fiber collimators by using the set of devices. The space adjustment mechanism for aligning the polarization-maintaining fiber collimators also comprises a linearly polarized light generator, a fiber connection network and an optical parameter measurement unit. The beneficial effects are achieved by adopting the content of the invention: a physical reference datum is provided, so that initial space position alignment is simple and easy to implement; the number of mechanical movement parts is reduced by adopting a fiber optical path; online measurement is realized on optical power and polarization extinction ratio; the displacement deviation caused by eccentric adjustment is avoided; the optical power fluctuations caused by the rotation movements of the polarization-maintaining fiber collimators are reduced; by the alignment method, the adjustment efficiency is improved, and the dependence on the skill of an operator is reduced; and the shaft running phenomenon when polarization alignment is carried out is avoided by adopting the polarization-maintaining fiber optical path through a method for measuring the polarization extinction ratio.

Description

Polarization maintaining optical fiber collimator is to mutatis mutandis space adjusting mechanism, device and alignment methods
Technical field
The invention belongs to optical-fibre communications and technical field of optical fiber sensing; Especially relate to and a kind of polarization maintaining optical fiber collimator is carried out the locus adjusting mechanism of punctual use and comprises the alignment device of this mechanism, and the alignment methods of using this alignment device to aim at.
Background technology
Polarization maintaining optical fiber collimator is basic components of forming fiber optic passive device, and the fiber optic passive device of being made up of polarization maintaining optical fiber collimator and micro-optic crystal has a very wide range of applications in optical-fibre communications and optical fiber sensing system.Its function is to change the light beam that is incident to the polarization maintaining optical fiber collimator tail optical fiber into directional light output via inner collimation lens, perhaps directional light is assembled to polarization maintaining optical fiber collimator tail optical fiber internal transmission.With respect to single mode fiber collimator, the optical polarization of polarization maintaining optical fiber collimator internal transmission is a linear polarization, and its electromagnetic field direction of vibration is positioned at the slow axis (or fast axle) of polarization maintaining optical fibre.Two polarization maintaining optical fiber collimators in the fiber optic passive device need to aim at; Reach one side and will make total luminous power insert the loss minimum, will make the requirement of the light wave polarization direction of in two polarization maintaining optical fiber collimators, transmitting identical (direction of vibration that is linearly polarized light is slow axis or fast axle) on the other hand.Therefore, general two parts of alignment device of two polarization maintaining optical fiber collimators being aimed at constitute: mechanical adjustment mechanism and optical detection apparatus.As shown in Figure 1, the at present domestic dimensional orientations that use mechanical adjustment frame and spatial light pick-up unit to carry out polarization maintaining optical fiber collimator are aimed at the measurement with optical parametric more.
In Fig. 1, the spatial beam of light source 1 emission changes parallel beam into through collimation lens 2, plays making it change linearly polarized light into partially through 3 pairs of light beams of the polarizer, and condenser lens 4 is coupled to linearly polarized light in the inclined to one side tail optical fiber 5 of guarantor of polarization maintaining optical fiber collimator 6.The slow axis (or fast axle) of protecting inclined to one side tail optical fiber 5 for the linearly polarized light direction of vibration is positioned at; Temporarily mechanical adjustment frame 8, polarization maintaining optical fiber collimator 9, collimation lens 11 are removed, made polarization maintaining optical fiber collimator 5 emitted light beams directly into being incident upon analyzer 12 and being coupled to light power meter 14 through convergent lens 13.At first in 0-180 ° of scope, rotate analyzer 12 around optical axis then, with the variation of light power meter 14 recording optical power to a certain angle around optical axis (O-O ' axle among the figure) the direction deflection polarizer 3.Repeat above-mentioned steps; Change the deflection angle of the polarizer 3 successively and at 0-180 ° of scope rotation analyzer 12 according to certain rule (like deflection fixed angle successively clockwise or counterclockwise); The variation of recording optical power; Maximal value occurs and on its orthogonal directions, measure less than luminous power in some directions until the measured value of light power meter 14 record, this moment, the polarization direction of the polarizer 3 was aimed at the slow axis of protecting inclined to one side tail optical fiber 5 (or fast), and the output beam of polarization maintaining optical fiber collimator 6 is a linearly polarized light.At this moment; With also temporarily removing analyzer 12 in 8,9, the 11 insertion space optical paths; Regulate mechanical adjustment frame 7,8 along X, X ', Y, Y ', Z, Z ' direction of principal axis and do the linear displacement motion; Regulate along ω x, ω x ', ω y, ω y ' axle that a mechanical adjustment frame is done rolling (ω y and ω y '), pitching (ω x and ω x ') is moved, the luminous power that recording optical power 14 receives shows when maximal value occurring that polarization maintaining optical fiber collimator 6 aims at 9 optical axis directions.At this moment, analyzer 12 is inserted in the light path, regulate mechanical adjustment frame 8 and deflect to a certain angle, in 0-180 ° of scope, rotate analyzer 12, with the variation of light power meter 14 recording optical power around optical axis around optical axis.Repeat above-mentioned steps; Change the deflection angle of mechanical adjustment frame 8 successively and at 0-180 ° of scope rotation analyzer 12 according to certain rule (like deflection fixed angle successively clockwise or counterclockwise); The variation of recording optical power; Output valve until light power meter 14 obtains maximal value in some angles, and measures less than luminous power at its orthogonal directions, and the linearly polarized light of polarization maintaining optical fiber collimator 9 interior transmission this moment is positioned at the slow axis (or fast axle) of protecting inclined to one side tail optical fiber 10.When fast altogether axle of needs or slow axis transmission altogether; Need to adopt definite in advance slow axis (or the fast axle) direction of protecting inclined to one side tail optical fiber 7 and 10 of alternate manner (utilizing measuring microscope that fiber end face is carried out mark usually); Because slow axis (or fast axle) direction is foreseen; But the reference marker position is adjusted when regulating the polarization maintaining optical fiber collimator collimation, avoids protecting the slow axis and fast shaft staggered aligning of inclined to one side tail optical fiber 5 and 10.
Polarization maintaining optical fiber collimator 6 and 9 spacial alignment can be abstract be aimed at for the six degree of freedom of the space coordinates (XYZ) of mechanical adjustment frame 7 and the space coordinates of mechanical adjustment frame 8 (X ' Y ' Z '); But since do not have between two groups of coordinate systems can be for reference physical standard; Alignment procedures between them is a multiple degrees of freedom, exploratory, the process of approaching one by one, and the adjusting of each degree of freedom all needs repeatedly meticulous repeatedly adjusting.Particularly for the first time (initially) on time since two mechanical adjustment framves do not unify can be for reference physical standard, deviation of the alignment is unknown (and often bigger), this makes initial alignment need operating personnel to have abundant commissioning experience.In alignment procedures, analyzer 12 needs repeatedly repeated clamping, and the multiple clamping error makes space optical path need carry out secondary and regulate that alignment procedures is more loaded down with trivial details.When the mechanical rotation axle of the polarizer 3 and analyzer 12 during with the optical axis disalignment, the luminous power fluctuation that will cause light power meter 14 to receive has difficulties judgement luminous power maximal value and minimum value, causes the polarization alignment error.There is more mechanical moving element in the space optical path structure, and various mechanical motion errors (like the cross-couplings between turning axle and optical axis disalignment, the mechanical motion) cause the optical measurement error to increase, and are not suitable for doing quantitative measurment.Device itself can not be differentiated fast (slowly) axle of protecting inclined to one side tail optical fiber 5 and 10; Event needs dead axle (as adopting the method for microscope mark) in advance; Otherwise the wrong axle of light polarization direction possibly occur and aim at (light polarization direction like polarization maintaining optical fiber collimator 6 transmission is positioned at the slow axis of protecting inclined to one side tail optical fiber 5, and the light polarization direction of polarization maintaining optical fiber collimator 9 outputs is positioned at the fast axle of protecting inclined to one side tail optical fiber 10).
Summary of the invention
The technical matters that the present invention will solve is at first for the mechanical motion amount of parts that overcomes existing polarization maintaining optical fiber collimator alignment device existence is many, to lack with reference to physical standard; Need dead axle in advance, high to operator's experience degree of dependence, adjusting efficient is low; The shortcoming that the optical measurement error is big; The present invention provides a kind of polarization maintaining optical fiber collimator to aim at the space adjusting mechanism, by it auxiliary reference physical standard is provided, and need not dead axle in advance; In addition; The present invention realizes quantitative measurment luminous power and polarization extinction ratio in order to solve; Improve and regulate efficient; Reduction also provides a kind of alignment device that adopts this space adjusting mechanism to the problem of the degree of dependence of operator's experience, and the method for using this covering device that two polarization maintaining optical fiber collimators are aimed at.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is respectively:
A kind of polarization maintaining optical fiber collimator is to mutatis mutandis space adjusting mechanism; Comprise the identical mechanical adjustment part (38,40) of glide base 41, two nested structures and a cover with reference to physics reference part 39, with reference to physics reference part 39 be positioned at two cover mechanical adjustment partly between (38,40) and three parts all be slidingly connected on the glide base 41;
A said mechanical adjustment partly comprises three-shaft displacement platform and three-dimensional universal adjustment rack;
Said three-shaft displacement platform comprises, one on the glide base 41 and the Z axle translation slide block that is slidingly connected with it 43, one on the Z axle translation slide block 43 and the Y axle translation slide block that is slidingly connected with it 44, one on the Y axle translation slide block 44 and the X axle fixing base that is fixedly connected with it 46, at one of X axle fixing base 46 side and the X axle translation slide block that is slidingly connected with it 48, one on X axle translation slide block 48 and the X axle web joint 49 that is fixedly connected with it;
The universal adjustment rack of said three-dimensional comprises; One is fixedly connected on the universal adjustment rack pedestal 50 on the X axle web joint 49; One is being provided with the secondary X axle turret 51 that can rotate around the X axle of the turbine and worm that comprises X axle adjusting knob 63 on the universal adjustment rack pedestal 50 and with it; One is provided with between among the X axle turret 51 and with it and comprises that the Y axle rotates the secondary Y axle turret 54 that can rotate around the Y axle of the turbine and worm of adjusting knob 52; One between on the Y axle turret 54 and with it, be provided with the turbine and worm that comprises Z axle adjusting knob 53 secondary can be around the Z axle turret 55 of Z axle rotation; Be symmetrically installed with on the Z axle turret 55 and be used for clamping and fixing three claws 56 of polarization maintaining optical fiber collimator 17, be provided with screw thread pair between claw 56 and the Z axle turret 55;
Saidly comprise with reference to physics reference part 39; One on glide base 41 and the optical regulation lens frame pedestal 58 that is slidingly connected with it; One is installed on adjustable length on the optical regulation lens frame pedestal 58 and can be around the flexible swingle 59 of self rotating shaft rotation, and the top of flexible swingle 59 is equipped with a two-sided light reflection mirror 60.
A kind of polarization maintaining optical fiber collimator alignment device comprises above-mentioned space adjusting mechanism, comprises that also linearly polarized light generator 15, optical fiber connect network 17 and optical parameter measurement unit 18;
Linearly polarized light generator 15 produces along the linearly polarized light of the slow-axis direction vibration of polarization maintaining optical fibre 19; Be sent to optical fiber through polarization maintaining optical fibre 19 and connect total terminal that first of network is protected polarisation SS 23; Two branch terminals (A, B) of first guarantor's polarisation SS 23 respectively connect the signal input part (a, a ') of guarantor's polarisation circulator (24,25) respectively through polarization maintaining optical fibre; Each multiplexing end of transmitting-receiving (b, b ') of protecting polarisation circulator (24,25) respectively is held fixing polarization maintaining optical fiber collimator through one of polarization maintaining optical fibre (20,21) connection space adjusting mechanism; Each output terminal (c, c ') of protecting polarisation circulator (24,25) respectively through polarization maintaining optical fibre connect one second protect polarisation SS 26 one of branch terminal (A ', B '), second protect polarisation SS 26 total terminal connect optical parameter measurement unit 18 through polarization maintaining optical fibre 22.
Further, said linearly polarized light generator comprises an amplified spontaneous emission light source 23 and the light wave that this light source produces is worked the polarization maintaining optical fibre polarizer 24 that is biased into linearly polarized light and transmits along said polarization maintaining optical fibre 19 slow axis.
Further; Said optical parameter measurement unit comprises that the incident light wave that polarization maintaining optical fibre is sent is decomposed into the polarization beam apparatus 27 of two orthogonal polarization components; Two polarized components convert two photogenerated currents into through two photodetectors (28,29) respectively; Two photogenerated currents convert voltage signal into through two I-V transducers (30,31) respectively; Each gathers the voltage signal of each I-V transducer output after a linear amplifier (32,33) amplifies to 36 pairs of voltages summations of a totalizer, and also each gathers after a logarithm amplifier (34,35) amplification and carries out logarithm to a subtracter 37 and subtract each other the voltage signal of each I-V transducer output.
The present invention also combines above-mentioned alignment device to propose a whole set of polarization maintaining optical fiber collimator alignment methods, may further comprise the steps:
7) set with reference to physical standard
Two-sided light reflection mirror 60 is vertically inserted between the mechanical adjustment racks 38 and 39, and the OZ axle and O ' Z ' that make two polarization maintaining optical fiber collimators (64,65) are perpendicular to two-sided light reflection mirror 60;
8) set a polarization maintaining optical fiber collimator autocollimation
Substitute linearly polarized light generator 15 with a visible light source and be connected to polarization maintaining optical fibre 19; Protect polarisation SS 23 with first and switch to A channel; Make visible light be introduced into polarization maintaining optical fiber collimator 64; Visible light is by 60 reflections of two-sided light reflection mirror, regulates mechanical adjustment part 38 flare is fallen in the receiving aperture of polarization maintaining optical fiber collimator 64 self; Remove visible light source; Linearly polarized light generator 15 is connected to polarization maintaining optical fibre 19; Protect polarisation SS 26 with second and switch to A ' passage, this moment, the reflected light of two-sided light reflection mirror was sent to optical parameter measurement unit 18 via A ' passage, regulated mechanical adjustment part 38 and made luminous power obtain maximal value; This moment, the optical axis (OO ' axle) of polarization maintaining optical fiber collimator 64 was vertical with two-sided light reflection mirror 60, and reflected light is received by polarization maintaining optical fiber collimator 64 fully;
9) set the autocollimation of another polarization maintaining optical fiber collimator
Employing step 2) method is set the autocollimation of another polarization maintaining optical fiber collimator;
10) remove with reference to physical standard
Two-sided light reflection mirror 60 is removed, the light wave of first polarization maintaining optical fiber collimator, 64 emissions can be received by second polarization maintaining optical fiber collimator 65;
11) the mutual collimation of two polarization maintaining optical fiber collimators of setting
Protect the polarisation SS with two and switch to the state of light wave that make by the direction transmission connection of linearly polarized light generator, first polarization maintaining optical fiber collimator, second polarization maintaining optical fiber collimator, optical parameter measurement unit 18; Regulate two mechanical adjustment parts (38,40) respectively along XYZ and X ' Y ' Z ' direction, the light wave of first polarization maintaining optical fiber collimator, 64 emissions is received by 65 maximizations of second polarization maintaining optical fiber collimator;
12) polarization alignment
Rotation Z axle turret 55 in 0-180 ° of scope, s component and p component that two photodetectors this moment (28,29) receive can be expressed as:
Vs=ηPsin2θ
Vp=ηPcos2θ (0°≤θ≤180°)
Here, η considers Z axle turret 55 when doing revolution, because there are the drift angle in the optical axis and the revolving shaft of polarization maintaining optical fiber collimator; Cause the luminous power fluctuation that arrives polarization beam apparatus; And the error factor of introducing, θ is the angle of relative polarization maintaining optical fibre 22 slow axis of elliptical light polarization state main shaft
The output of two logarithmic amplifiers (34,35) is subtracted each other, then has:
ER=Log (Vs)-Log (Vp)=when Log (Vs/Vp)=Log (tan2 θ) (0 °≤θ≤180 °) regulates in 0-180 ° of scope, when θ=pi/2, ER obtains maximal value, i.e. the polarization extinction ratio maximal value.
Advantage and good effect that the present invention has are: 1) a physics reference data is provided, makes the initial space alignment of orientation simple; 2) adopt optic fibre light path that the mechanical motion amount of parts is reduced; 3) on-line measurement of realization luminous power and polarization extinction ratio; 4) propose the universal adjustment rack of a kind of three-dimensional, its three axiss of oscillation intersect, the offset deviation of avoiding eccentric adjustment to introduce; 5) propose a kind of self-centering clamper, the luminous power fluctuation that the polarization maintaining optical fiber collimator gyration is introduced reduces; 6) design a kind of alignment methods, adjustment efficient is improved, reduce dependence operator's technical ability.7) adopt polarization maintaining optical fibre light path and the generation of wrong axle phenomenon when avoiding polarization alignment through the method for measuring polarization extinction ratio.
Description of drawings
Fig. 1 is the structural representation that uses the polarization maintaining optical fiber collimator alignment device of mechanical adjustment frame and spatial light pick-up unit in the prior art
Fig. 2 is that polarization maintaining optical fiber collimator of the present invention is to mutatis mutandis space adjusting mechanism structural representation
Fig. 3 is the structural representation of three-dimensional universal adjustment rack
Fig. 4 is a coordinate system synoptic diagram of the present invention
Fig. 5 is an alignment device syndeton schematic diagram of the present invention
Fig. 6 is that optical fiber of the present invention connects the network structure schematic diagram
Fig. 7 is optical parameter measurement unit construction principle figure of the present invention
Fig. 8 be autocollimation when setting polarization maintaining optical fiber collimator with concern synoptic diagram with reference to physics reference space position
Fig. 9 is mutual collimation of polarization maintaining optical fiber collimator and polarization alignment device isoboles
Embodiment
As shown in Figure 2; A kind of polarization maintaining optical fiber collimator of the present invention is to mutatis mutandis space adjusting mechanism; Comprise the identical mechanical adjustment part (38,40) of glide base 41, two nested structures and a cover with reference to physics reference part 39, with reference to physics reference part 39 be positioned at two cover mechanical adjustment partly between (38,40) and three parts all be slidingly connected on the glide base 41 that has the V-type sliding tray;
A said mechanical adjustment partly comprises three-shaft displacement platform and three-dimensional universal adjustment rack;
Said three-shaft displacement platform is used for the translation adjustment of mechanical adjustment part (38,40) along orthogonal coordinate system; Comprise, one on the glide base 41 and the Z axle translation slide block that is slidingly connected with it 43, one on the Z axle translation slide block 43 and the Y axle translation slide block that is slidingly connected with it 44, one on the Y axle translation slide block 44 and the X axle fixing base that is fixedly connected with it 46, at one of X axle fixing base 46 side and the X axle translation slide block that is slidingly connected with it 48, one on X axle translation slide block 48 and the X axle web joint 49 that is fixedly connected with it; It is to rely on each the translation slide block (43,44,48) that is installed on the glide base 41 to regulate realization with adjusting knob (42,45,47) through the rack-and-pinion transmission that three of three-shaft displacement platform move axially.
Like Fig. 2, Fig. 3 and shown in Figure 4; The universal adjustment rack of said three-dimensional is used for the rotary oscillation adjustment of mechanical adjustment part (38,40) around the axis of orthogonal coordinate system; Comprise; One is fixedly connected on the universal adjustment rack pedestal 50 on the X axle web joint 49; One is being provided with the secondary X axle turret 51 that can rotate around the X axle of the turbine and worm that comprises X axle adjusting knob 63 on the universal adjustment rack pedestal 50 and with it; One is provided with between among the X axle turret 51 and with it and comprises that the Y axle rotates the secondary Y axle turret 54 that can rotate around the Y axle of the turbine and worm of adjusting knob 52; One between on the Y axle turret 54 and with it, be provided with the turbine and worm that comprises Z axle adjusting knob 53 secondary can be around the Z axle turret 55 of Z axle rotation, be symmetrically installed with on the Z axle turret 55 and be used for clamping and fixing three claws 56 of polarization maintaining optical fiber collimator 17, be provided with screw thread pair between claw 56 and the Z axle turret 55; Z axle turret 55 (being self-centering clamper pedestal) is installed in clamping and the dead axle that is used for polarization maintaining optical fiber collimator (64,65) on the three-dimensional universal adjustment rack with the claw 56 of self-centering clamper.
As shown in Figure 2; Saidly comprise with reference to physics reference part 39; One on glide base 41 and the optical regulation lens frame pedestal 58 that is slidingly connected with it; One is installed on adjustable length on the optical regulation lens frame pedestal 58 and can be around the flexible swingle 59 of self rotating shaft rotation, and the top of flexible swingle 59 is equipped with a two-sided light reflection mirror 60.Two-sided light reflection mirror 60 is in 60 marker locations among the figure in the autocollimation adjustment process, in mutual collimation adjustment process, two-sided light reflection mirror 60 connects rotating shafts place around expansion link 59 and turns to 61 marker locations among the figure.
Polarization maintaining optical fiber collimator alignment device as shown in Figure 5, that the present invention proposes comprises above-mentioned space adjusting mechanism, comprises that also linearly polarized light generator 15, optical fiber connect network 17 and optical parameter measurement unit 18; Optical fiber connects network 17 and is connected with 21 through polarization maintaining optical fibre 20 with space adjustment structure 16, and light wave is sent to space adjusting mechanism 16 or receives the light wave from space adjusting mechanism 16.
As shown in Figure 6, optical fiber connects network 17 and is formed by connecting through polarization maintaining optical fibre 2 guarantor's polarisation SSes (23,26), 2 guarantor's polarisation circulators (24,25).Specific as follows:
Linearly polarized light generator 15 produces along the linearly polarized light of the slow-axis direction vibration of polarization maintaining optical fibre 19; This light wave is sent to optical fiber through polarization maintaining optical fibre 19 and connects total terminal that first of network 17 is protected polarisation SS 23; Two branch terminals (A, B) of first guarantor's polarisation SS 23 respectively connect the signal input part (a, a ') of guarantor's polarisation circulator (24,25) respectively through polarization maintaining optical fibre; Each multiplexing end of transmitting-receiving (b, b ') of protecting polarisation circulator (24,25) respectively is held fixing polarization maintaining optical fiber collimator through one of polarization maintaining optical fibre (20,21) connection space adjusting mechanism; Each output terminal (c, c ') of protecting polarisation circulator (24,25) respectively through polarization maintaining optical fibre connect one second protect polarisation SS 26 one of branch terminal (A ', B '), second protect polarisation SS 26 total terminal connect optical parameter measurement unit 18 through polarization maintaining optical fibre 22.
Protect the polarisation SS and can select one road optical fiber to be communicated with through the impressed voltage control signal, therefore the gate logic of control guarantor's polarisation SS (23,26) is that the may command light wave connects the transmission path in the polarization maintaining optical fibre (19,20,21,22) in the network at optical fiber.
Linearly polarized light generator (as shown in Figure 5) described in the present embodiment comprises an amplified spontaneous emission light source 23 (ASE light source) and the light wave that this light source produces is worked the polarization maintaining optical fibre polarizer 24 that is biased into linearly polarized light and transmits along said polarization maintaining optical fibre 19 slow axis.The light wave that the ASE light source sends has the characteristic of similar fluorescence, and has extremely low degree of polarization, can be similar to and think a kind of white light source
Further; Said optical parameter measurement unit comprises that the incident light wave that polarization maintaining optical fibre is sent is decomposed into the polarization beam apparatus 27 of two orthogonal polarization components (s component and p component); Two polarized components convert two photogenerated currents into through two photodetectors (28,29) respectively; Two photogenerated currents convert voltage signal into through two I-V (current-voltage) transducers (30,31) respectively; Each gathers the voltage signal of each I-V transducer output after a linear amplifier (32,33) amplifies to 36 pairs of voltage summations of a totalizer, and this magnitude of voltage is proportional to the luminous power that polarization maintaining optical fibre 22 receives;
Simultaneously; Also each gathers after a logarithm amplifier (34,35) amplification and carries out logarithm to a subtracter 37 and subtract each other the voltage signal of each I-V transducer output; Be equal to linear division arithmetic, output voltage values is proportional to the polarization extinction ratio that polarization maintaining optical fibre 22 receives light wave.
In conjunction with above-mentioned alignment device, the present invention proposes a whole set of polarization maintaining optical fiber collimator alignment methods, and concrete steps are following:
1) sets with reference to physical standard
Two-sided light reflection mirror 60 is vertically inserted between the mechanical adjustment racks 38 and 39, and as shown in Figure 8, the OZ axle and O ' Z ' that make two polarization maintaining optical fiber collimators (64,65) are perpendicular to two-sided light reflection mirror 60;
2) set a polarization maintaining optical fiber collimator autocollimation
Substitute linearly polarized light generator 15 with a visible light source (such as the ruddiness pen) and be connected to polarization maintaining optical fibre 19; As shown in Figure 6; Protect polarisation SS 23 with first and switch to A channel; Make visible light be introduced into polarization maintaining optical fiber collimator 64, visible light is by 60 reflections of two-sided light reflection mirror, regulates mechanical adjustment part 38 flare is fallen in the receiving aperture of polarization maintaining optical fiber collimator 64 self; Remove visible light source; Linearly polarized light generator 15 is connected to polarization maintaining optical fibre 19; Protect polarisation SS 26 with second and switch to A ' passage, this moment, the reflected light of two-sided light reflection mirror was sent to optical parameter measurement unit 18 via A ' passage, regulated mechanical adjustment part 38 and made luminous power obtain maximal value; This moment, the optical axis (OO ' axle) of polarization maintaining optical fiber collimator 64 was vertical with two-sided light reflection mirror 60, and reflected light is received by polarization maintaining optical fiber collimator 64 fully;
3) set the autocollimation of another polarization maintaining optical fiber collimator
Employing step 2) method is set the autocollimation of another polarization maintaining optical fiber collimator; Protect polarisation SS 23 and 26 and should switch to B and B ' passage this moment); The optical axis (OO ' axle) that makes polarization maintaining optical fiber collimator 65 is vertical with two-sided light reflection mirror 60, and reflected light is received by polarization maintaining optical fiber collimator 65 fully;
4) remove with reference to physical standard
Two-sided light reflection mirror 60 is removed, as shown in Figure 2, rotate flexible swingle 59, two-sided light reflection mirror 60 is positioned over mutual collimating optics adjustment mirror holder position 61, the light wave of first polarization maintaining optical fiber collimator, 64 emissions can be received by second polarization maintaining optical fiber collimator 65;
5) the mutual collimation of two polarization maintaining optical fiber collimators of setting
Protect the polarisation SS with two and switch to the state of light wave that make by the direction transmission connection of linearly polarized light generator, first polarization maintaining optical fiber collimator, second polarization maintaining optical fiber collimator, optical parameter measurement unit 18; Be about to protect polarisation SS 23 and switch to A channel; Protect polarisation SS 26 and switch to B ' passage; This moment, device can equivalence be shown in Figure 9; Regulate two mechanical adjustment parts (38,40) respectively along XYZ and X ' Y ' Z ' direction; The light wave of first polarization maintaining optical fiber collimator 64 emission is received by 65 maximizations of second polarization maintaining optical fiber collimator, and promptly the luminous power that receives of optical parameter measurement unit 18 obtains maximal value, this moment polarization maintaining optical fiber collimator 64 with 65 common optical axis (OO ' spool);
6) polarization alignment
Rotation Z axle turret 55 in 0-180 ° of scope, s component and p component that two photodetectors this moment (28,29) receive can be expressed as:
Vs=ηPsin2θ
Vp=ηPcos2θ (0°≤θ≤180°)
Here, η considers Z axle turret 55 when doing revolution, because there are the drift angle in the optical axis and the revolving shaft of polarization maintaining optical fiber collimator; Cause the luminous power fluctuation that arrives polarization beam apparatus; And the error factor of introducing, θ is the angle of relative polarization maintaining optical fibre 22 slow axis of elliptical light polarization state main shaft
The output of two logarithmic amplifiers (34,35) is subtracted each other, then has:
ER=Log(Vs)-Log(Vp)=Log(Vs/Vp)=Log(tan2θ)(0°≤θ≤180°)
When in 0-180 ° of scope, regulating, when θ=pi/2, ER obtains maximal value, i.e. the polarization extinction ratio maximal value.At this moment, the light that polarization beam apparatus receives is linearly polarized light, and its direction of vibration is along the polarization maintaining optical fibre slow axis.So far, the linearly polarized light of two polarization maintaining optical fiber collimators (64,65) transmission is along the slow axis transmission, realizes the polarization collimation.
More than one embodiment of the present of invention are specified, but said content is merely preferred embodiment of the present invention, can not be considered to be used to limit practical range of the present invention.All equalizations of doing according to application range of the present invention change and improve etc., all should still belong within the patent covering scope of the present invention.

Claims (5)

1. a polarization maintaining optical fiber collimator is to mutatis mutandis space adjusting mechanism; It is characterized in that: comprise the identical mechanical adjustment part (38,40) of glide base (41), two nested structures and a cover with reference to physics reference part (39), with reference to physics reference part (39) be positioned at two cover mechanical adjustment partly between (38,40) and three parts all be slidingly connected on the glide base (41);
A said mechanical adjustment partly comprises three-shaft displacement platform and three-dimensional universal adjustment rack;
Said three-shaft displacement platform comprises, one on the glide base (41) and the Z axle translation slide block (43) that is slidingly connected with it, one on the Z axle translation slide block (43) and the Y axle translation slide block (44) that is slidingly connected with it, one on the Y axle translation slide block (44) and the X axle fixing base (46) that is fixedly connected with it, at one of X axle fixing base (46) side and the X axle translation slide block (48), that is slidingly connected with it on X axle translation slide block (48) and the X axle web joint (49) that is fixedly connected with it;
The universal adjustment rack of said three-dimensional comprises; One is fixedly connected on the universal adjustment rack pedestal (50) on the X axle web joint (49); One is positioned on the universal adjustment rack pedestal (50) and is provided with the secondary X axle turret (51) that can rotate around the X axle of the turbine and worm that comprises X axle adjusting knob (63) with it; One be positioned among the X axle turret (51) and with it between be provided with and comprise that the Y axle rotates the secondary Y axle turret (54) that can rotate around the Y axle of the turbine and worm of adjusting knob (52); One be positioned on the Y axle turret (54) and with it between be provided with the turbine and worm that comprises Z axle adjusting knob (53) secondary can be around the Z axle turret (55) of Z axle rotation; Be symmetrically installed with on the Z axle turret (55) and be used for clamping and fixing three claws (56) of polarization maintaining optical fiber collimator, be provided with screw thread pair between claw (56) and the Z axle turret (55);
Saidly comprise with reference to physics reference part (39); One on glide base (41) and the optical regulation lens frame pedestal (58) that is slidingly connected with it; One is installed on adjustable length on the optical regulation lens frame pedestal (58) and can be around the flexible swingle (59) of self rotating shaft rotation, and the top of flexible swingle (59) is equipped with a two-sided light reflection mirror (60).
2. a polarization maintaining optical fiber collimator alignment device is characterized in that: comprise the described space of claim 1 adjusting mechanism, comprise that also linearly polarized light generator (15), optical fiber connect network (17) and optical parameter measurement unit (18);
Linearly polarized light generator (15) produces along the linearly polarized light of the slow-axis direction vibration of polarization maintaining optical fibre (19); Be sent to optical fiber through polarization maintaining optical fibre (19) and connect total terminal that first of network is protected polarisation SS (23); Two branch terminals (A, B) of first guarantor's polarisation SS (23) respectively connect the signal input part (a, a ') of guarantor's polarisation circulator (24,25) respectively through polarization maintaining optical fibre; Each multiplexing end of transmitting-receiving (b, b ') of protecting polarisation circulator (24,25) respectively is held fixing polarization maintaining optical fiber collimator through one of polarization maintaining optical fibre (20,21) connection space adjusting mechanism; Each output terminal (c, c ') of protecting polarisation circulator (24,25) respectively through polarization maintaining optical fibre connect one second protect polarisation SS 26 one of branch terminal (A ', B '), second protect polarisation SS (26) total terminal connect optical parameter measurement unit (18) through polarization maintaining optical fibre (22).
3. polarization maintaining optical fiber collimator alignment device according to claim 2 is characterized in that: said linearly polarized light generator comprises an amplified spontaneous emission light source (23) and the light wave that this light source produces is worked the polarization maintaining optical fibre polarizer (24) that is biased into linearly polarized light and transmits along said polarization maintaining optical fibre (19) slow axis.
4. polarization maintaining optical fiber collimator alignment device according to claim 2; It is characterized in that: said optical parameter measurement unit comprises that the incident light wave that polarization maintaining optical fibre is sent is decomposed into the polarization beam apparatus of two orthogonal polarization components (27); Two polarized components convert two photogenerated currents into through two photodetectors (28,29) respectively; Two photogenerated currents convert voltage signal into through two I-V transducers (30,31) respectively; The voltage signal of each I-V transducer output each after a linear amplifier (32,33) amplifies, gather to a totalizer (36) to the voltage summation, also each gathers after a logarithm amplifier (34,35) amplification and carries out logarithm to a subtracter (37) and subtract each other the voltage signal of each I-V transducer output.
5. a polarization maintaining optical fiber collimator alignment methods is characterized in that, may further comprise the steps:
1) sets with reference to physical standard
Two-sided light reflection mirror (60) is stood between two mechanical adjustment parts (38,39), and the OZ axle and the O ' Z ' axle that make two polarization maintaining optical fiber collimators (64,65) are perpendicular to two-sided light reflection mirror (60);
2) set a polarization maintaining optical fiber collimator autocollimation
Substitute linearly polarized light generator (15) with a visible light source and be connected to polarization maintaining optical fibre (19); Protect polarisation SS (23) with first and switch to A channel; Make visible light be introduced into polarization maintaining optical fiber collimator (64); Visible light is regulated mechanical adjustment part (38) flare is fallen in the receiving aperture of polarization maintaining optical fiber collimator (64) self by two-sided light reflection mirror (60) reflection; Remove visible light source; Linearly polarized light generator (15) is connected to polarization maintaining optical fibre (19); Protect polarisation SS (26) with second and switch to A ' passage, this moment, the reflected light of two-sided light reflection mirror was sent to optical parameter measurement unit (18) via A ' passage, regulated mechanical adjustment part (38) and made luminous power obtain maximal value; The optical axis of polarization maintaining optical fiber collimator this moment (64) (OO ' axle) vertical with two-sided light reflection mirror (60), reflected light is received by polarization maintaining optical fiber collimator (64) fully;
3) set the autocollimation of another polarization maintaining optical fiber collimator
Employing step 2) method is set the autocollimation of another polarization maintaining optical fiber collimator;
4) remove with reference to physical standard
Two-sided light reflection mirror (60) is removed, the light wave of first polarization maintaining optical fiber collimator (64) emission can be received by second polarization maintaining optical fiber collimator (65);
5) the mutual collimation of two polarization maintaining optical fiber collimators of setting
Protect the polarisation SS with two and switch to the state of light wave that make by the direction transmission connection of linearly polarized light generator, first polarization maintaining optical fiber collimator, second polarization maintaining optical fiber collimator, optical parameter measurement unit (18); Regulate two mechanical adjustment parts (38,40) respectively along XYZ and X ' Y ' Z ' direction, the light wave of first polarization maintaining optical fiber collimator (64) emission is received by second polarization maintaining optical fiber collimator (65) maximization;
6) polarization alignment
Rotation Z axle turret (55) in 0-180 ° of scope, s component and p component that two photodetectors this moment (28,29) receive can be expressed as:
Vs=ηPsin2θ
Vp=ηPcos2θ (0°≤θ≤180°)
Here, η considers Z axle turret (55) when doing revolution, because there are the drift angle in the optical axis and the revolving shaft of polarization maintaining optical fiber collimator; Cause the luminous power fluctuation that arrives polarization beam apparatus; And the error factor of introducing, θ is the angle of the relative polarization maintaining optical fibre of elliptical light polarization state main shaft (22) slow axis
The output of two logarithmic amplifiers (34,35) is subtracted each other, then has:
ER=Log(Vs)-Log(Vp)=Log(Vs/Vp)=Log(tan2θ)(0°≤θ≤180°)
When in 0-180 ° of scope, regulating, when θ=pi/2, ER obtains maximal value, i.e. the polarization extinction ratio maximal value.
CN201110239930.9A 2011-08-19 2011-08-19 Space adjustment mechanism for aligning polarization-maintaining fiber collimators, device and alignment method thereof Expired - Fee Related CN102338917B (en)

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* Cited by examiner, † Cited by third party
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CN103576244A (en) * 2013-09-25 2014-02-12 广西安捷讯电子科技有限公司 Collimator refractor adjusting frame
CN104897368A (en) * 2015-05-05 2015-09-09 上海大学 Real-time polarization maintaining fiber extinction ratio testing device
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002258172A (en) * 2001-02-28 2002-09-11 Nippon Sheet Glass Co Ltd Scanning method and apparatus therefor, inspecting method of light intensity and apparatus therefor, aligning method and apparatus therefor
CN1383005A (en) * 2002-06-13 2002-12-04 武汉光迅科技有限责任公司 Automatic alligning method for optical waveguide device and optical fibre array
CN2656941Y (en) * 2003-11-12 2004-11-17 浙江大学 Hexa dimensional optical fiber collimating apparatus array aligning regulating device
US20040264830A1 (en) * 2003-06-30 2004-12-30 Haisheng Rong Fiber optic polarization beam combiner and splitter
CN202159173U (en) * 2011-08-19 2012-03-07 天津峻烽科技有限公司 Space adjusting mechanism and apparatus for alignment of polarization maintaining fiber collimator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002258172A (en) * 2001-02-28 2002-09-11 Nippon Sheet Glass Co Ltd Scanning method and apparatus therefor, inspecting method of light intensity and apparatus therefor, aligning method and apparatus therefor
CN1383005A (en) * 2002-06-13 2002-12-04 武汉光迅科技有限责任公司 Automatic alligning method for optical waveguide device and optical fibre array
US20040264830A1 (en) * 2003-06-30 2004-12-30 Haisheng Rong Fiber optic polarization beam combiner and splitter
CN2656941Y (en) * 2003-11-12 2004-11-17 浙江大学 Hexa dimensional optical fiber collimating apparatus array aligning regulating device
CN202159173U (en) * 2011-08-19 2012-03-07 天津峻烽科技有限公司 Space adjusting mechanism and apparatus for alignment of polarization maintaining fiber collimator

Cited By (24)

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