CN102338635B - Gyro based on Archimedes spiral flow tube valveless piezoelectric pump - Google Patents
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Abstract
The invention relates to a gyro based on an Archimedes spiral flow tube valveless piezoelectric pump. The gyro comprises a pump body composed of an upper cover and a lower cover, a pump chamber arranged between the upper cover and the lower cover and a piezoelectric oscillator accommodated in the pump chamber, and further comprises a first Archimedes spiral flow tube and a first communication groove which are arranged between the upper cover and the lower cover; one end of the first Archimedes spiral flow tube is connected with a fluid inlet arranged on the pump body, and the other end is connected with the pump chamber; one end of the first communication groove is connected with pump chamber, and the other end is connected with a fluid outlet; the fluid inlet is connected with the outer through a first flow tube, and the fluid outlet is connected with the outer through a second flow tube; piezoelectric films are provided at the top of flow tubes and connected with sensors through leads. The gyro based on an Archimedes spiral flow tube valveless piezoelectric pump in the invention has the advantages of simple construction, widely available manufacturing materials, low cost, easy realization, low energy consumption, no electromagnetic interference, high sensitivity, etc., and can be extensively applied in attitude control of civil delivery vehicles.
Description
Technical field
The present invention relates to a kind of gyro, relate in particular to a kind of gyro based on Valveless piezoelectric pump.
Background technology
The gyro technology is for marine navigation the earliest, but along with science and technology development, it also is widely used in the aerospace cause.Gyroscopic instrument not only can be used as indicating instrument, and the more important thing is that it can be used as a sensitive element in the automatic control system, namely can be used as signal transducer.As required, gyroscopic instrument can provide signals such as orientation, level, position, speed and acceleration accurately, so that driver or control sail bodies such as aircraft, naval vessel or space shuttle by certain airline operation with preset device, and in the guidance of sail bodies such as guided missile, satellite vehicle or space exploration rocket, then directly utilize these signals to finish attitude control and the track control of sail body.As stabilizator, gyroscopic instrument can make train travel at single track, can reduce boats and ships waving in stormy waves, and the relative ground of the camera that is installed on aircraft or the satellite is stablized etc.As fine measuring instrument, gyroscopic instrument can provide azimuth reference accurately for surface facility, mining tunnel, subterranean railway, oil drilling and missile-site etc.This shows that the range of application of gyroscopic instrument is quite widely, it all accounts for consequence in modern national defense construction and the development of the national economy.
Since 1910 referred to northern gyrocompass for boat-carrying first, evolution roughly was divided into 4 stages: the phase one is the gyro of ball bearing supporting gyro motor and framework; Phase one is the floating and air-suspension gyroscope of liquid that grows up late 1940s to the beginning of the fifties; Subordinate phase is the rotor gyro of the dry type power flexible support that grows up after the sixties in 20th century; The development of moment gyroscope has entered four-stage, i.e. electrostatic gyroscope, laser gyro, optical fibre gyro and oscillation gyro.
Though the birth of gyro is the history in existing more than 100 year so far, but at present owing to be subjected to cost, the restriction of factors such as technology, gyroscope is applied to naval vessels mostly, guided missile, large-scale high performance Navigation And Guidance such as aircraft system, it but is not a lot of being used in civil applications, but in the last few years along with expanding economy, it is more and more that gyro is used in the civil area demand, such as controlling at vehicle side turning, the attitude perception of game machine etc. all needs a kind of cheap, the simple gyroscopic instrument of technology, therefore, a kind of technology of invention making is simple, with low cost, it is very necessary can widely applying the gyroscope on civilian carrier.
Summary of the invention
1. technical matters: the technical problem to be solved in the present invention provides a kind of novel gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump, and this novel gyro is simple in structure, is the Valveless piezoelectric pump of helical flow pipe based on critical piece, has wide range of applications.
2. technical scheme: in order to solve above-mentioned technical matters, gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump of the present invention comprises the pump housing be made up of lower cover and loam cake, is arranged on the pump chamber between lower cover and the loam cake, and be contained in piezoelectric vibrator in the pump chamber, also comprise first spiral of Archimedes stream pipe and first connectivity slot that are arranged between lower cover and the loam cake, described spiral of Archimedes stream Guan Yiduan is connected with fluid inlet on being arranged on the pump housing, the other end is connected with pump chamber, one end of first connectivity slot is connected with pump chamber, and the other end is connected with fluid egress point; Fluid inlet is connected with extraneous by first-class pipe, and fluid egress point is connected with extraneous by the second stream pipe, and described first-class pipe is provided with first piezoelectric membrane away from the top of fluid inlet, and first piezoelectric membrane is connected with first sensor by lead; The described second stream pipe is provided with second piezoelectric membrane away from the top of fluid inlet, and second piezoelectric membrane is connected with second sensor by lead.
Described spiral of Archimedes stream pipe is for being etched in down the spiral form conduit whole in the same plane that covers, the outline line of spiral of Archimedes stream pipe of the present invention is spiral of Archimedes, also claim archimedes curve or constant velocity spiral, in works " opinion helical ", provided definition by Archimedes at first.As shown in Figure 1, when 1 P along moving ray OP with etc. speed when moving, this ray again with constant angular velocity around an O rotation, the track of some P is called " spiral of Archimedes ".Its polar equation is: r=a θ, and the distance of every arm of this helical is equal to 2 π a forever, and wherein, r is radius in the formula, and a is constant, and θ is polar angle.
Described first piezoelectric membrane is fixed on the top of first-class pipe by the first piezoelectric membrane fixture; Second piezoelectric membrane is fixed on the top of the second stream pipe by the second piezoelectric membrane fixture.Piezoelectric membrane and piezoelectric membrane fixture have been formed piezoelectric thin-film structure jointly.
First spiral of Archimedes stream pipe is connected with pump chamber by second connectivity slot.
Among the present invention, can realize the uniflux of fluid in the pump housing based on adopting a spiral of Archimedes stream pipe in the spiral of Archimedes stream pipe Valveless piezoelectric pump, also can adopt two spiral of Archimedes stream pipes, namely first connectivity slot is connected with fluid egress point by second spiral of Archimedes stream pipe.The rotation direction of two spiral of Archimedes stream pipes among the present invention is opposite, described first spiral of Archimedes stream pipe flows pipe for the spiral of Archimedes that counterclockwise arranges with starting point centered by fluid inlet, described second spiral of Archimedes stream pipe is the spiral of Archimedes stream pipe that arranges with the starting point clockwise direction centered by fluid egress point.Described fluid inlet and fluid egress point are that axis of symmetry is symmetrical with the center line of pump chamber, and correspondingly, when two spiral of Archimedes stream pipes were arranged in the pump housing, these two spiral of Archimedes stream pipes also were symmetrical.
Usually, piezoelectric vibrator adopts circular configuration more, and described like this pump chamber cross section is also rounded.Described pump chamber is formed by being arranged on down first groove that covers and being arranged on second groove sealing that covers, and described piezoelectric vibrator is contained in second groove, and piezoelectric vibrator has enough spaces to produce displacement when vibration like this.Described pump chamber also can be arranged on down and cover, and opening is towards loam cake.Piezoelectric vibrator is bonded together by the different circular piezoelectric sheet of diameter and circular metal plate such as copper sheet to be formed, in order to make piezoelectric vibrator work the time reach best effect and to consider setting, the processing of other structures on the pump housing, second recess edge is designed to stepped, piezoelectric vibrator is bonded and fixed in second groove.
Described sensor can be measured the charge variation amount of the piezoelectric membrane of being made by the piezoelectric with direct piezo electric effect, and analyzes charge variation amount and the conversion that is subjected to surge pressure according to analytical equipment.Its principle is that piezoelectric membrane utilizes direct piezo electric effect to come the realizable force electricity to transform, and namely when piezoelectric is subjected to mechanical stress, will produce electric polarization, thereby produce electric charge, and the electric charge that produces is directly proportional with mechanical stress.Utilize signal analysis device that the electric signal that produces is carried out Measurement and analysis, just can obtain the size of the power that is subjected to.The pressure that is subjected to when piezoelectric membrane will make the generation electric charge difference of piezoelectric membrane not simultaneously, charge signal through charge amplifier amplify change into electric signal after, through analog to digital converter to computing machine accept to analyze, calculating and provide test result.In the present invention, use the output pressure of piezoelectric membrane force sensor measuring pump.
The technical program based on the novel gyro work of spiral of Archimedes stream pipe Valveless piezoelectric pump the time, earlier piezoelectric vibrator is applied alternating voltage, piezoelectric vibrator produces axial vibration under inverse piezoelectric effect, cause that pump chamber changes; Generally a work period of piezoelectric pump can be divided into two stages: arrive upper dead center (maximum displacement of piezoelectric vibrator away from equilibrium location outside pump chamber) through the equilibrium position from bottom dead centre (maximum displacement of piezoelectric vibrator away from equilibrium location in pump chamber) and be the suction journey stage of pump; Arriving bottom dead centre from upper dead center through the equilibrium position is the scheduling stage of pump.When piezoelectric vibrator moves to upper dead center from bottom dead centre, be pump chamber from minimum to maximum conversion process, fluid on one side directly enters pump chamber by first connectivity slot, the fluid of another side enters pump chamber or enters pump chamber by second connectivity slot through the first helical flow pipe, in this process, fluid is at the flow direction of helical flow pipe, is the direction that the curvature of helical flow pipe reduces gradually; When piezoelectric vibrator moves to bottom dead centre from upper dead center, namely to minimum conversion process, fluid discharges from the connectivity slot of pump chamber by both sides pump chamber from maximum, and fluid is at the flow direction of helical flow pipe, is the direction that the curvature of helical flow pipe increases gradually.Because the variation difference of curvature, curvature increases gradually, be subjected to the influence of earth coriolis force and spin coriolis force, the resistance that fluid is subjected to increases gradually, curvature reduces gradually, be subjected to the influence of earth coriolis force and the effect of spin coriolis force, resistance reduces gradually, the fluid resistance difference that flows and be subjected in the travel directions by the helical flow pipe so, its flow that flows into to pump chamber from one side helical flow pipe of fluid so, with the flow that flows out from pump chamber to another side will be different, make that having a net flow in the whole cycle flows to outlet slot from the inlet channel direction, when piezoelectric vibrator continuous shaking, fluid will be cashed out uniflux on macroscopic view, realizes the function of pump.
When whole gyro structure is installed on the carrying platform, if carrying platform is subjected to the influence of rotational angular velocity, such as being installed on the carrier, carrier is turned when rotating, and whole rotation meeting exerts an influence to the stream of the spiral of Archimedes in gyro structure pipe Valveless piezoelectric pump performance.
If the angular velocity of earth rotation at the component of Z axle is
Angular velocity when fluid flows along spiral of Archimedes shape stream pipe is ω
2, when platform was subjected to external disturbance, the angular velocity of generation was ω at the component of Z axle
zThe output pressure P of pump be by
ω
2, ω
zDetermine, therefore can be expressed as
If platform is not subjected to external disturbance ω
zInterference the time pump output performance by
And ω
2Determine, when certain to the voltage of piezoelectric vibrator input and frequency the time, pump performance is certain, liquid in the import and export stream pipe also is roughly certain for the impact of piezoelectric membrane, the registration that is reacted to sensor also is certain substantially, and the sensor registration that the sensor registration of outlet deducts import is assumed to Δ x
0, the output pressure that also is pump is P
0, corresponding relation is arranged between them so.If platform is subjected to external disturbance ω
zInterference the time, ω
z≠ 0, establish
Can flow the influence that the fluid in the pipe flows and reinforcement arranged or weaken this moment to spiral of Archimedes, and the influence to pump performance this moment shows on the registration of the sensor that the stream pipe of import and export connects, is x if sensor exports the registration of a side
1, the registration of import one side is x
2, establish Δ x so
1=x
1-x
2, Δ P=P-P
0=Δ x
0-Δ x
1, Δ P can be on the occasion of, also can be negative value and zero.Exist corresponding relation between Δ P (or P) and the ω, namely for each Δ P (or P) value, a ω is arranged
zCorresponding, and Δ P and Δ x
1Between corresponding relation is arranged.That is to say by the percussive action Δ x of the liquid in the sensor measurement helical flow pipe Valveless piezoelectric pump for piezoelectric membrane
1, the angle component ω on the Z axle that produces in the time of just can obtaining platform and be disturbed
zLike this, just can draw the rotation attitude by the pressure reduction of pump and the relation of rotation, thereby reach the effect of gyro.
3. beneficial effect: of the present invention simple in structure, cheap based on spiral of Archimedes stream pipe Valveless piezoelectric pump, be easy to realize and scale of mass production; Have good susceptibility for the security of rotating, can be used in a large number in the attitude control of carrier; Have the advantage of pump structure, be easy to microminaturization, it is low to consume energy, and response is fast, no electromagnetic interference (EMI).
Description of drawings
Fig. 1 is the spiral of Archimedes synoptic diagram;
Fig. 2 is the assembling synoptic diagram based on spiral of Archimedes stream pipe Valveless piezoelectric pump in one embodiment of the present of invention;
Fig. 3 is the lower cover structural representation of one embodiment of the invention;
Fig. 4 is the loam cake synoptic diagram of one embodiment of the present of invention;
Fig. 5 is the loam cake sectional view among the present invention
Fig. 6 is the structural representation of one embodiment of the invention;
Fig. 7 is the piezoelectric thin-film structure synoptic diagram;
Fig. 8 is the lower cover structural representation of another enforcement of the present invention.
Embodiment
Embodiment one: as Fig. 2, Fig. 3, Fig. 4, Fig. 5, shown in Figure 7, the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump 21 of present embodiment, comprise the pump housing of being formed by loam cake 3 and lower cover 5, be arranged on the pump chamber 11 between loam cake 3 and the lower cover 5, and be contained in piezoelectric vibrator 4 in the pump chamber 11, also comprise first spiral of Archimedes stream pipe 8A and first connectivity slot 12 that are arranged between loam cake 3 and the lower cover 5, described first spiral of Archimedes stream pipe 8A one end is connected with fluid inlet 9 on being arranged on the pump housing, the other end is connected with pump chamber 11, the spiral of Archimedes stream pipe of first spiral of Archimedes stream pipe 8A for counterclockwise arranging with starting point centered by fluid inlet 9.One end of first connectivity slot 12 is connected with pump chamber 11, and the other end is connected with fluid egress point 13; Fluid inlet 9 is connected with extraneous by first-class pipe 1A, fluid egress point 13 is connected with extraneous by the second stream pipe 1B, described first-class pipe 1A is provided with the first piezoelectric membrane 23A away from the top of fluid inlet, the first piezoelectric membrane 23A is connected with sensor 20A by lead, is used for the conduct charges signal; The described second stream pipe 1B is provided with the second piezoelectric membrane 23B away from the top of fluid inlet, and the second piezoelectric membrane 23B is connected with the second sensor 20B by lead, is used for the conduct charges signal.In the present embodiment, lower cover 5 is rectangular aluminum sheet, goes out the spiral of Archimedes chute at its surface etching, and loam cake 3 is the rectangle resin plate, and following bolt hole 7, upper bolt hole 14, bolt 6 and nut 2 match, and loam cake 3 and lower cover 5 are fixed together.
As Fig. 5, shown in Figure 6, the described first piezoelectric membrane 23A is fixed on the top of first-class pipe 1A by the first piezoelectric membrane fixture 22A; The second piezoelectric membrane 23B is fixed on the top of the second stream pipe 1B by the second piezoelectric membrane fixture 22B.
As shown in Figure 3, first spiral of Archimedes stream pipe 8A is connected with pump chamber 11 by second connectivity slot 10.
As shown in Figure 4, fluid inlet 9 and fluid egress point 13 are positioned at the both sides of pump chamber 11, can be that axis of symmetry is symmetrical with the center line of pump chamber also.Pump chamber 11 cross sections are rounded.
As Fig. 3, Fig. 4, shown in Figure 5, the pump chamber 11 of present embodiment is made up of second groove, 112 sealings that are arranged on first groove 111 on the lower cover 5 and be arranged on the loam cake 3, and described piezoelectric vibrator 4 is contained in second groove 112.
The gyro course of work of present embodiment is as follows: piezoelectric vibrator 4 is applied alternating voltage, and piezoelectric vibrator produces axial vibration in the both sides, equilibrium position under inverse piezoelectric effect, and the axial vibration displacement causes that pump chamber changes.A work period of pump is divided into two stages: arrive upper dead center (piezoelectric vibrator 4 makes progress from the maximum displacement of equilibrium position) through the equilibrium position from bottom dead centre (maximum displacements of piezoelectric vibrator 4 downward away from equilibrium location) and be the suction journey stage of pump; Arriving bottom dead centre from upper dead center through the equilibrium position is the scheduling stage of pump.When pump is in the suction journey, it is big that pump chamber becomes, pressure diminishes, fluid under suction function in first connectivity slot 12 and second connectivity slot 10 flows in pump chamber, the fluid that flows to from fluid inlet 9 is during through first spiral of Archimedes stream pipe 8A, owing to be subjected to the influence of earth coriolis force and spin coriolis force, the helical curvature change direction of helical flow pipe reduces gradually, the process relative and helical curvature increases gradually, the mobile obstacle of convection cell is little, the flow that enters pump chamber so is big relatively, when pump enters scheduling, pump chamber diminishes, fluid under pressure in the pump chamber flows out to the both sides connectivity slot, when stream is managed the mobile fluid of 8A through the helical flow pipe from pump chamber to first spiral of Archimedes, owing to be subjected to the influence of earth coriolis force and spin coriolis force effect and be the process that the curvature of helical increases gradually, helical curvature reduces gradually relatively, the obstruction degree of first spiral of Archimedes stream pipe 8A convection cell is big this moment, the flow that stream pipe 8A flows out from pump chamber to first spiral of Archimedes will be less relatively so, will produce a difference in flow in the process that comes and goes, because pump chamber suction journey is equal substantially with the scheduling volume change, will make the flow that is flowed out to first connectivity slot 12 by pump chamber greater than the flow that is flowed into to pump chamber 11 by second connectivity slot 10 so, the whole cycle can produce the net flow of an one-way movement, when piezoelectric vibrator 4 continuous shakings, fluid just shows uniflux on macroscopic view, thereby forms the function of pump.When we give the fixing initial conditions of piezoelectric vibrator 4, fluid level height among the inlet flow tube 1A will be certain so, percussive action for piezoelectric membrane also is much the same, be reflected in that numerical value also is a constant that amplitude of variation is smaller in the charge sensor, if carrying platform is subjected to the influence of rotational angular velocity, whole rotation meeting exerts an influence to the stream of the spiral of Archimedes in gyro structure pipe Valveless piezoelectric pump 21 performances, if the clockwise flow direction of convection cell produces booster action and produces abated effect to flowing counterclockwise, will improve the output performance of this pump so, make the liquid levels among the outlet stream pipe 1B rise, liquid level also can promote for the piezoelectric membrane impact that is installed in the stream pipe, if the counterclockwise flow direction of convection cell produces booster action and produces abated effect to flowing clockwise, will reduce the output performance of this pump so, make the liquid levels of outlet descend, liquid level also can weaken for the piezoelectric membrane impact that is installed in wherein, rotational angular velocity fluid flow direction generation effect on the whole, will the output performance of pump be exerted an influence so, make stream manage 1A, liquid levels among the 1B changes, liquid level also can change for the piezoelectric membrane impact that is installed in wherein, according to charge sensor for piezoelectric membrane because the charge variation that piezoelectric effect produces is measured numerical value, the pressure reduction variation that the data of measuring according to both sides just can draw pump, the pressure reduction of the pump of measuring according to preliminary examination and the relation of rotation just can draw the rotation attitude, thereby reach the effect of gyro.
Embodiment two:
The primary structure of present embodiment and embodiment one are basic identical, different is in the present embodiment, as shown in Figure 8, in piezoelectric pump 21 parts, there are two to be symmetrical first spiral of Archimedes stream pipe 8A of axis of symmetry, second spiral of Archimedes stream pipe 8B with circular pump chamber 11 center lines, the spiral of Archimedes stream pipe of described first spiral of Archimedes stream pipe 8A for counterclockwise arranging with starting point centered by fluid inlet 9, second spiral of Archimedes stream pipe 8B is the spiral of Archimedes stream pipe that arranges with the starting point clockwise direction centered by fluid egress point 13.When the gyro of present embodiment is worked, piezoelectric ceramic piece and sheet metal as the two poles of the earth, during to piezoelectric vibrator 4 indirect currents, the piezoelectric ceramics sector-meeting produces along its dilatation radially, because piezoelectric ceramic piece and sheet metal are bonded to one, and the radial expansion of piezoelectric ceramic piece and sheet metal is different, so when piezoelectric ceramic piece produces radially dilatation, sheet metal also can produce dilatation, and flexible direction is opposite with piezoelectric ceramic piece, then piezoelectric vibrator 4 will inevitably produce vertically the reciprocal deformation vibration of (normal orientation of piezoelectric ceramic piece), the power source of piezoelectric vibrator 4 as piezoelectric pump, along with the axially back and forth deformation vibration of piezoelectric vibrator, thereby cause the volume cyclical variation of pump chamber 4.Because the motion of fluid is subjected to the influence of earth rotation, and fluid self also can produce coriolis force when spiral of Archimedes stream pipe moves, to producing not same-action along counterclockwise and right handed fluid, make from fluid inlet inflow and inequality from the suffered resistance of the fluid of fluid egress point outflow, and the volume size of inflow or effluent fluid is inversely proportional to the flow resistance size that flows pipe, so when pump chamber 11 volumes increase, fluid flows into pump chamber 11 from first spiral of Archimedes stream pipe 8A and second spiral of Archimedes stream pipe 8B, piezoelectric pump was in and inhaled the journey stage this moment, but inequality from the fluid volume of two stream pipe inflow pump chambers; When pump chamber 11 volumes reduced, fluid was managed 8B outflow pump chamber 11 from first spiral of Archimedes stream pipe 8A and second spiral of Archimedes stream, and this moment, piezoelectric pump was in the discharge stage, but inequality from the fluid volume of two stream pipe outflow pump chambers; Analysis is at piezoelectric pump from two stream pipes and sucks and during the stage of discharge, flow into and how much may be summarized to be of the fluid volume that flows out: be in sucting stage at piezoelectric pump, the incoming fluid volume is many, then piezoelectric pump be in discharge during the stage volume of effluent fluid few; Being in sucting stage at piezoelectric pump is that the incoming fluid volume is few, then piezoelectric pump be in discharge during the stage volume of effluent fluid many; On macroscopic view, piezoelectric pump always makes fluid flow pipe from one and flows into, and manages outflow from another stream, thereby has realized the uniflux of fluid, has realized the function of pump.When giving the fixing initial conditions of piezoelectric vibrator 4, the fluid level height that flows so in the pipe will be certain, percussive action for piezoelectric membrane also is much the same, be reflected in first, the second charge sensor 20A, numerical value also is a constant that amplitude of variation is smaller among the 20B, if carrying platform is subjected to the influence of rotational angular velocity, whole rotation meeting exerts an influence to the stream of the spiral of Archimedes in gyro structure pipe Valveless piezoelectric pump 21 performances, if the clockwise flow direction of convection cell produces booster action and produces abated effect to flowing counterclockwise, will improve the output performance of this pump so, make the liquid levels among the outlet stream pipe 1B rise, liquid level also can promote for the piezoelectric membrane impact that is installed in the stream pipe, if the counterclockwise flow direction of convection cell produces booster action and produces abated effect to flowing clockwise, will reduce the output performance of this pump so, make the liquid levels of outlet descend, liquid level also can weaken for the piezoelectric membrane impact that is installed in wherein, rotational angular velocity fluid flow direction generation effect on the whole, will the output performance of pump be exerted an influence so, make stream manage 1A, liquid levels among the 1B changes, liquid level also can change for the piezoelectric membrane impact that is installed in wherein, according to charge sensor for piezoelectric membrane 23A, 23B is because the charge variation that piezoelectric effect produces is measured numerical value, the pressure reduction variation that the data of measuring according to both sides just can draw pump, the pressure reduction of the pump of measuring according to preliminary examination and the relation of rotation just can draw the rotation attitude, thereby reach the effect of gyro.
Claims (10)
1. gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump, comprise the pump housing of being formed by loam cake (3) and lower cover (5), be arranged on the pump chamber (11) between loam cake (3) and the lower cover (5), and be contained in piezoelectric vibrator (4) in the pump chamber (11), it is characterized in that, also comprise first plane spiral of Archimedes stream pipe (8A) and first connectivity slot (12) that is arranged between loam cake (3) and the lower cover (5), described first plane spiral of Archimedes stream pipe (8A) end is connected with fluid inlet (9) on being arranged on the pump housing, the other end is connected with pump chamber (11), one end of first connectivity slot (12) is connected with pump chamber (11), and the other end is connected with fluid egress point (13); Fluid inlet (9) is connected with extraneous by first-class pipe (1A), fluid egress point (13) is connected with extraneous by the second stream pipe (1B), described first-class pipe (1A) is provided with first piezoelectric membrane (23A) away from the top of fluid inlet (9), and first piezoelectric membrane (23A) is connected with first sensor (20 A) by lead; The described second stream pipe (1B) is provided with second piezoelectric membrane (23B) away from the top of fluid egress point (13), and second piezoelectric membrane (23B) is connected with second sensor (20 B) by lead.
2. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1 is characterized in that described first piezoelectric membrane (23A) is fixed on the top of first-class pipe (1A) by the first piezoelectric membrane fixture (22A); Second piezoelectric membrane (23B) is fixed on the top of the second stream pipe (1B) by the second piezoelectric membrane fixture (22B).
3. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1 is characterized in that, the described first plane spiral of Archimedes stream pipe (8A) is connected with pump chamber (11) by second connectivity slot (10).
4. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1 is characterized in that first connectivity slot (12) is connected with fluid egress point (13) by the second plane spiral of Archimedes stream pipe (8B).
5. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1, it is characterized in that the spiral of Archimedes stream pipe of the described first plane spiral of Archimedes stream pipe (8A) for centered by fluid inlet (9), counterclockwise arranging with starting point.
6. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 4, it is characterized in that the described second plane spiral of Archimedes stream pipe (8B) is centered by fluid egress point (13) and the spiral of Archimedes stream pipe of starting point clockwise direction setting.
7. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1 is characterized in that described fluid inlet (9) and fluid egress point (13) are that axis of symmetry is symmetrical with the center line of pump chamber (11).
8. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1, it is characterized in that, described pump chamber (11) is made up of second groove (112) sealing that is arranged on first groove (111) on the lower cover (5) and be arranged on the loam cake (3), and described piezoelectric vibrator (4) is contained in second groove (112).
9. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1 is characterized in that, described pump chamber (11) be arranged on that lower cover (5) is gone up and opening towards loam cake (3).
10. the gyro based on spiral of Archimedes stream pipe Valveless piezoelectric pump as claimed in claim 1 is characterized in that described pump chamber (11) cross section is rounded.
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| CN112683255A (en) * | 2020-12-28 | 2021-04-20 | 贵州航天计量测试技术研究所 | MEMS fluid gyroscope based on Archimedes spiral microchannel valveless piezoelectric pump |
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| JP2005062160A (en) * | 2003-07-25 | 2005-03-10 | Seiko Epson Corp | Piezoelectric vibrating reed, support structure thereof, piezoelectric vibrator, and vibration type piezoelectric gyroscope |
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| CN101846059A (en) * | 2010-05-24 | 2010-09-29 | 南京航空航天大学 | Self-adaptive piezoelectric pump with active valve |
| CN202149776U (en) * | 2011-06-21 | 2012-02-22 | 无锡长辉机电科技有限公司 | Gyroscope based on Archimedean spiral flow pipe valveless piezoelectric pump |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005062160A (en) * | 2003-07-25 | 2005-03-10 | Seiko Epson Corp | Piezoelectric vibrating reed, support structure thereof, piezoelectric vibrator, and vibration type piezoelectric gyroscope |
| CN200955485Y (en) * | 2006-07-14 | 2007-10-03 | 北京工业大学 | Single-chip-type flow-pipe valve-free piezoelectric pump |
| CN101846059A (en) * | 2010-05-24 | 2010-09-29 | 南京航空航天大学 | Self-adaptive piezoelectric pump with active valve |
| CN202149776U (en) * | 2011-06-21 | 2012-02-22 | 无锡长辉机电科技有限公司 | Gyroscope based on Archimedean spiral flow pipe valveless piezoelectric pump |
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| CN102338635A (en) | 2012-02-01 |
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