CN102331303B - Grating-based phase difference wavefront sensor - Google Patents
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Abstract
The invention discloses a grating-based phase difference wavefront sensor which comprises a grating, a lens, a spectroscope, a CCD (Charge Coupled Device) imaging detector, a computer and the like, wherein a parallel light beam containing wavefront distortion is directly irradiated onto the surface of the grating; and the light beam is divided into multiple beams of light with different intensities and same phase after being transmitted by the grating and is imaged on a CCD photosensitive surface by the lens. According to two or multiple grating diffraction spots, the light intensity distribution of the spots can be more accurately calculated by a corresponding algorithm. According to focal plane and defocusing surface light intensity distribution, the computer can restore to obtain wavefront distortion information to be detected. In the grating-based phase difference wavefront sensor, the CCD imaging detector can be used for collecting the high-frequency ingredient of the light intensity distribution which can not be measured in the common condition, the detection precision of the phase difference wavefront sensor is effectively improved, and the phase difference wavefront sensor has obvious advantages in the fields of optical detection, adaptive optics, high-resolution imaging and the like.
Description
Technical field
The present invention relates to a kind of Wavefront sensor, particularly a kind of phase differential Wavefront sensor based on grating based on phase differential.
Background technology
The phase differential Wavefront sensor is simple in structure because of it, light source is not had specific (special) requirements and measuring accuracy is higher, is applied to the adaptive optics field as a kind of Wavefront sensor.Gonsalves R A is at " Wavefront sensing by phase retrieval "; In Applications of Digital Image Processing III, Proc.SPIE, vol.207; 1979 with " Phase retrieval and diversity in adaptive optics " Opt Eng; Vol.21,829-832, the out of focus aberration of known dimensions is added in proposition in 1,982 two pieces of articles in wavefront to be measured; Accurately measure the focal plane light distribution and be positioned at the light distribution of different out of focus faces with several; Propose to adopt the GS iterative algorithm accurately to restore the distorted wavefront in the incident beam based on least-squares estimation, and phase differential wavefront detection method is applied to the phase-detection of expansion light source, can improve the blurred picture that causes because of aberration simultaneously.
Conventional phase difference Wavefront sensor adopts iterative algorithm to restore and obtains phase information to be measured according to focal plane and out of focus face light distribution image.When incident beam is when containing the monochromatic collimated beam bundle of wavefront distortion, the energy of focal plane hot spot disperses, the light intensity of high order diffraction component a little less than.Because there is certain noise in the output image of CCD imaging detector; There is a comparatively responsive range of light intensity in the CCD imaging detector simultaneously; Therefore when the light intensity of hot spot is more weak, receive the influence of output image signal to noise ratio (S/N ratio) and CCD imaging detector susceptibility, CCD can't obtain the higher diffraction spot light distribution information of progression; Restoring the high-frequency information of aberration will lose, and accuracy of detection will be under some influence.If distorted wavefront to be measured both included significantly, gradual low spatial frequency optical aberration; Also include the high spatial frequency aberration that causes because of optical element processing simultaneously; This distorted wavefront will cause the energy distribution of position of focal plane, out of focus face position hot spot comparatively to be disperseed; Senior diffraction components complex distribution and light intensity a little less than, the difficulty of light distribution image exact acquisition is bigger.The dynamic range that at present common CCD imaging detector is surveyed is less; When lens focal plane position hot spot light intensity is more weak; The light distribution information that detection obtains receives noise effect more serious, and when focal plane hot spot light intensity was strong, CCD imaging detector output image was very easily saturated; The light distribution error that detection obtains is bigger, thereby causes traditional phase differential wavefront detection method can't accurately restore wavefront distortion information to be measured.
At present, domestic and international research worker has carried out the research in 30 years to phase differential wavefront detection method, and research work mainly concentrates on and improves algorithm performance and the several aspects such as problem that solve practical application.The present invention proposes a kind of phase differential Wavefront sensor based on grating; Can expand the dynamic range of CCD imaging detector to a certain extent; Improve signal to noise ratio (S/N ratio); Thereby obtain to be difficult under normal conditions the light distribution information that collects, and these information are directly connected to the detectivity of phase differential Wavefront sensor.With respect to traditional P D Wavefront sensor; Grating type phase differential Wavefront sensor has improved the dynamic range of original CC D detector; Can obtain the diffraction information of relative higher-order in focal plane and the out of focus light distribution; Make the accuracy of detection of distorted wavefront to be measured be significantly improved, significant to the development of adaptive optics.
The grating that adopted of the present invention combines with the phase differential Wavefront sensor; Effectively expanded the CCD imaging detector dynamic range, improved the signal to noise ratio (S/N ratio) of output image, make CCD imaging detector output image institute noisy reduce for wave front restoration result's influence.With respect to the accuracy of detection of traditional phase differential Wavefront sensor, grating type phase differential Wavefront sensor improves the recovery accuracy of wavefront to be measured greatly.
Summary of the invention
The technical scheme that the present invention adopts is: a kind of phase differential Wavefront sensor based on grating comprises: grating G, lens L, spectroscope BS, CCD imaging detector CCD1 and CCD2, computer system C; Before grating is positioned over lens; The vertical irradiation of parallel beam that contains wavefront distortion is in grating G surface, and light beam is modulated to the multi-beam that intensity does not wait, phase place is consistent after grating G transmission, and light beam is after lens L focusing and spectroscope BS beam split subsequently; Be divided into two parts; Behind the part process spectroscope BS, transmitted light beam continues to propagate forward along former direction, and finally images on the photosurface of the imaging detector CCD1 that is positioned at the lens focal plane position; Another part is through spectroscope BS beam reflected, image on the photosurface that is positioned at the imaging detector CCD2 of a certain specific out of focus position behind the lens L, and the size of establishing the out of focus distance of this out of focus position is d; Imaging detector CCD1 and CCD2 measure the light distribution on the plane that is positioned at the lens focal plane position and has certain out of focus distance respectively; The ratio of 0 order diffraction hot spot of diffraction grating and 1 order diffraction spot intensity is designated as η; Suppose that 0 order diffraction hot spot has higher splitting ratio, then η＞1; For 1 order diffraction hot spot; Since energy that it comprised a little less than; Choose the suitable imaging detector of performance parameter; Can make the light distribution of the core that peak value and the light spot energy of 1 order diffraction hot spot is stronger to be detected exactly by imager detector C CD1; Simultaneously, the light distribution of the core that 0 order diffraction light spot energy the is stronger state that in image, reached capacity, and the light distribution of the more weak peripheral part of 0 order diffraction light spot energy can be detected by imaging detector CCD1 exactly; The suitable size of adjustment light intensity is chosen the splitting ratio of grating, and imaging detector CCD1 can measure 0 grade and 1 order diffraction hot spot simultaneously, and the zone of accurately measurement has complementarity, thereby extrapolates real focal plane light distribution information through corresponding algorithm; Utilize imaging detector CCD1 to detect the light distribution in the strong zone of energy in the 1 order diffraction hot spot,, then can extrapolate the distribution of the actual light intensity in the saturated zone in the 0 order diffraction hot spot according to the splitting ratio of grating; The noise of imaging detector CCD1 is less to the influence of focal plane position light distribution information, can measure those far away and more weak high-frequency informations of light intensity energy from spot center that flooded by noise easily on the image planes more exactly; Simultaneously; Imaging detector CCD2 is positioned over out of focus face position with certain defocusing amount; Can measure 0 grade and 1 order diffraction hot spot of out of focus face simultaneously, and the zone of accurately measuring has complementarity, thereby can extrapolate real out of focus face light distribution information; Utilize imaging detector CCD2 can accurately detect the light distribution in the strong zone of energy in the 1 order diffraction hot spot; Splitting ratio according to grating; Then can calculate the light distribution information in spot center zone, out of focus face position; The light distribution that calculates is replaced the zone of saturation in the 0 order diffraction hot spot in the CCD2 image, the light distribution information of peripheral region in the comprehensive 0 order diffraction hot spot, thus can obtain the light distribution information of out of focus face position more exactly.
The focal plane light distribution that collect according to imaging detector CCD1 0 grade and 1 order diffraction hot spot calculate is designated as I; And the out of focus face light distribution that 0 grade of collecting according to imaging detector CCD2 and 1 order diffraction hot spot calculate is designated as I_def, is restored the information that obtains distorted wavefront by iterative algorithm.
According to a further aspect in the invention, the structural parameters of grating are depended in described diffraction grating beam split, and the structure of grating can be carried out beam split in a certain ratio, but do not change PHASE DISTRIBUTION; The structure of grating is sinusoidal amplitude grating or longitudinal cosine type amplitude grating.
According to a further aspect in the invention, described CCD imaging detector is used to survey 0 grade and 1 order diffraction hot spot, or the inferior diffraction pattern of arbitrary number of level, as long as satisfy the light distribution information that the ability perfect measurement is no less than two orders of diffraction time hot spot.
According to a further aspect in the invention; Described CCD imaging detector is measured the inferior diffraction pattern light distribution of a plurality of orders of diffraction; These orders of diffraction time have different splitting ratios, and final light distribution according to a plurality of diffraction patterns that measure is calculated with corresponding algorithm and obtained required focal plane and the light distribution of out of focus face.
According to a further aspect in the invention; In the described phase differential Wavefront sensor based on grating; Adopt spectroscope that incident light is divided into two bundles; And adopt two CCD imaging detectors, promptly CCD1 and CCD2 respectively measurement of Lens focal plane position and have the light distribution on the out of focus planimetric position of certain defocusing amount; Perhaps adopt a CCD imaging detector respectively the focal plane of lens and the light distribution on corresponding out of focus plane to be measured.
The present invention has with respect to prior art, has following advantage:
(1) with respect to the light channel structure of conventional phase difference Wavefront sensor, the present invention has increased an amplitude grating in conventional light path, under the prerequisite of not obvious increase system complexity, has improved the detectability of phase difference method to distorted wavefront.
(2) adopt light channel structure of the present invention, only need in light path, to increase a grating.The structural parameters of grating can design according to actual needs, and can come according to the variation of actual conditions to change flexibly, in the use comparatively flexibly, conveniently.Simultaneously, each monotechnics of this method is all comparatively ripe, and is therefore also comparatively reliable on using.
(3) with respect to the light channel structure of conventional phase difference Wavefront sensor, light channel structure of the present invention can collect the light distribution information of position of focal plane and out of focus face position hot spot exactly.Because the phase differential Wavefront sensor is a kind of according to detection method before the indirect wave of light intensity image restoration Wave-front phase distribution to be measured; Therefore light path of the present invention can be measured the wavefront distortion of higher-spatial frequencies more accurately; In some special application field; Like the static distorted wavefront of optical system, the diagnosis of laser beam wavefront, human eye aberration measurement, astronomical sight etc., has bigger potential using value.
(4) in the ICF device, the static distorted wavefront of system had both included significantly low spatial frequency aberration, contained the high spatial frequency aberration again, and the light spot energy of position of focal plane and out of focus face position distributes and comparatively disperses, and the detection difficulty of distorted wavefront is bigger.Adopt light channel structure of the present invention; Owing to strengthened greatly to surveying the details resolution characteristic of hot spot; Thereby can detect exactly, thereby effective means and method reliably are provided for the static distorted wavefront of detection optical system more accurately by the caused disperse light distribution of the higher distorted wavefront of spatial frequency.This point is in the application of conventional phase difference Wavefront sensor, because its shortcoming on the details resolution characteristic can't be accomplished.
In a word, the present invention has increased an amplitude type diffraction grating that plays the branch light action on the basis of conventional phase difference Wavefront sensor, has guaranteed under the prerequisite of not obvious increase system complexity, improves the detectivity of phase difference method to distorted wavefront.This method structurally with use all comparatively flexibly, each monotechnics is comparatively ripe, it is comparatively convenient to use.In some particular application; The light channel structure that the present invention proposes; Owing to have higher details resolution characteristic, therefore can accomplish measurement to the wavefront distortion of high spatial frequency and great dynamic range, have bigger using value in fields such as the static distorted wavefront detections of optical system.
Description of drawings:
Fig. 1 is the principle schematic of grating type phase differential Wave-front Measuring Technique.
Fig. 2 restores the process flow diagram of algorithm for phase differential.
Fig. 3 is the light distribution pattern of the ideal beam of grating type phase differential Wavefront sensor collection.Wherein, Fig. 3 (a) is the light distribution at place, position of focal plane, and Fig. 3 (b) is the light distribution of out of focus face position.
Fig. 4 is the light distribution pattern that contains astigmatic bundle of grating type phase differential Wavefront sensor collection.Wherein, Fig. 4 (a) is the light distribution at place, position of focal plane, and Fig. 4 (b) is the light distribution of out of focus face position.
Embodiment:
As shown in Figure 1, grating type phase differential Wavefront sensor comprises: grating G, lens L, spectroscope BS, CCD imaging detector CCD1 and CCD2 and computing machine C.Wherein grating G is used for incident beam is divided into the multi-beam that intensity does not wait, phase place is consistent; Lens L is mainly used in the light beam of convergence after grating G modulation; Spectroscope BS makes convergent beam image in the different detecting areas of CCD1 and CCD2 photosurface respectively; And use imaging detector CCD1 and CCD2 to gather focal plane and the light distribution of out of focus face respectively; At last; Computer system C is mainly used in the view data of gathering CCD imaging detector CCD1 and CCD2 output; The diffraction pattern light distribution information reckoning that is positioned at focal plane position and place, corresponding out of focus planimetric position according to detecting obtains the actual focal plane and the light distribution of out of focus face; The hot spot that is about to imaging and zones of different is according to the synthetic new hot spot of the splitting ratio of grating, according to synthetic new focal plane light distribution I and the out of focus face light distribution I_def that obtains; And utilize corresponding Wave-front phase to restore algorithm, obtain the static distorted wavefront information of optical system.
Distorted wavefront gets into grating type phase differential Wavefront sensor, and the vertical irradiation of light beam is in grating G surface, and laser beam with aberration is modulated to the multi-beam that intensity does not wait, PHASE DISTRIBUTION is identical after grating G transmission.Ultimate principle according to grating can know that the CCD imaging detector can observe a plurality of diffraction patterns in theory, is designated as respectively: ...;-1 grade, 0 grade, 1 grade; ...; Wherein the light beam along the incident direction of propagation is 0 order diffraction light beam, and these diffraction patterns of not at the same level time have identical Wave-front phase and distribute, but light distribution separately receives the modulation of grating.Diffracted beams at different levels image in the CCD photosurface through lens L, will form one group in focal plane position place and out of focus face position shape is identical but spot array that light intensity magnitude is different.The multi-beam that the optical grating diffraction effect produces is divided into two parts after spectroscope BS beam split; Behind the part process spectroscope BS; Transmitted light beam continues to propagate forward along former direction, and finally images on the photosurface of the imaging detector CCD1 that is positioned at the lens focal plane position; Another part is through spectroscope BS beam reflected, image on the photosurface that is positioned at the imaging detector CCD2 of a certain specific out of focus position behind the lens L, and the size of establishing the out of focus distance of this out of focus position is d.According to the splitting ratio of diffraction grating G to different diffraction level time light beam; Regulate the attenuation amplitude of light source intensity; Make the inferior light distribution of different diffraction level change step by step from state of saturation to undersaturated condition; Make the inferior hot spot of different diffraction level that different accurate search coverages arranged, the final realization carried out perfect measurement to the details of hot spot light distribution.If grating G is η to the splitting ratio of 0 order diffraction hot spot and 1 order diffraction hot spot, this value size is relevant with grating structural parameter, can design according to the demand of reality.In real system; Can be according to the splitting ratio η of grating pair different diffraction level time hot spot; Use corresponding algorithm; The hot spot of the different diffraction level that imaging detector CCD1 or CCD2 are collected time carries out image mosaic according to splitting ratio η, thereby obtains the light distribution of focal plane and the single imaging facula of out of focus face.Specific practice is: in the focal plane light distribution image that imaging detector CCD1 is taken ± the light distribution addition of 1 order diffraction hot spot; Multiply by coefficient η/2 again and obtain new light distribution information; Be designated as I1; And with the saturated part of the light distribution I0 of 0 order diffraction hot spot light distribution information substitution, the focal plane light distribution I that obtains synthesizing with the I1 relevant position.Originally the light distribution information that surpasses imaging detector CCD1 investigative range; Just can from the diffraction pattern behind raster beam-splitting, calculate; Thereby expanded the dynamic range of imaging detector CCD1 effectively to luminous intensity distribution measurement, also greatly reduce simultaneously since the factors such as noise profile of imaging detector CCD1 light intensity susceptibility, output image to the influence of phase differential Wavefront sensor accuracy of detection.Same method can obtain synthetic out of focus face light distribution I_def according to the light distribution image of CCD2.
If the distribution of amplitudes of laser beam with aberration to be measured is p (r); The Wave-front phase that contains distortion is designated as
can be known according to the Fourier optical principle imaging formula, and the mathematical relation between phase place to be measured
and focal plane light distribution I, the out of focus face light distribution I_def is following:
is the PHASE DISTRIBUTION of the out of focus aberration at place, imaging detector CCD2 position (being d apart from lens L position of focal plane distance) in the formula (1);
representes Fourier transform; I is an imaginary unit; P (r) is a pupil plane distribution of amplitudes function, and I and I_def represent place, focal plane and place, out of focus plane intensity distribution function respectively.Grating type phase differential Wavefront sensor according to imaging formula (1) and synthetic focal plane light distribution I and out of focus face light distribution I_def, can restore the information that obtains wavefront to be measured by iterative algorithm.The specific algorithm process flow diagram is as shown in Figure 2.
FT and I-FT represent Fourier transform and inverse Fourier transform respectively among Fig. 2, I and I
dRepresent the light distribution of focal plane and out of focus face respectively;
Locate the PHASE DISTRIBUTION of the out of focus aberration of (is d apart from lens L position of focal plane distance) for imaging detector CCD2 position.Algorithm iteration is from the upper left side; When k=1, PHASE DISTRIBUTION selects for use initial value
can be made as zero or stochastic distribution value usually.Process flow diagram is described the k time iterative process of algorithm in detail, wherein
Be the PHASE DISTRIBUTION of the k time iteration, | U
k| and Φ
kRepresent light field distribution of amplitudes and PHASE DISTRIBUTION respectively through Fourier transform back focal plane position,
With
Light field distribution of amplitudes and the PHASE DISTRIBUTION of representing out of focus face position respectively, q
k,
With
Represent to carry out the distribution of amplitudes and the PHASE DISTRIBUTION of the pupil plane that inverse Fourier transform obtains respectively based on focal plane and out of focus face intensity distribution function.What the basis for estimation that iterative algorithm is jumped out was the image planes distribution of amplitudes that obtains of Fourier transform with the actual measurement distribution of amplitudes is poor; If both difference E are less than pre-set threshold M; Iteration stopping then,
is distorted wavefront to be measured.
Among the present invention, at first, grating G is divided into the multi-beam that intensity does not wait, the Wave-front phase distribution is identical with incident beam.Then; Lens L and spectroscope BS will image in focal plane position and the out of focus planimetric position with certain out of focus distance through the light beam after the grating G beam split respectively, and the light distribution information of using imaging detector CCD1 and CCD2 to gather the diffraction pattern on these two planes respectively.At last; Computer system C calculates according to the diffraction pattern light distribution information that is positioned at focal plane position and place, corresponding out of focus planimetric position that detects and obtains the actual focal plane and the light distribution of out of focus face, and utilizes corresponding Wave-front phase to restore the phase information that algorithm obtains distorted wavefront to be measured.In the phase differential algorithm, the accurate measurement of focal plane light distribution and the light distribution of corresponding out of focus face is that Wave-front phase can be by the key point of accurate inverting.Employing is based on the phase differential light channel structure of grating; Not only can measure the light distribution of spot center exactly; High frequency light distribution to traditional camera is difficult to measure also can accurately be surveyed, thereby has greatly improved restorability and the accuracy of detection of phase differential Wavefront sensor to the spatial high-frequency information of wavefront to be measured.
Fig. 3 (a) and Fig. 3 (b) are before the undistorted wave time; The focal plane hot spot that CCD imaging detector CCD1 and CCD2 collect distributes and out of focus face hot spot distributes; When Fig. 4 (a) and Fig. 4 (b) were the astigmatism of 0.15 wavelength size for incident beam contains the RMS value, the focal plane hot spot that CCD imaging detector CCD1 and CCD2 collect distributed and out of focus face hot spot distributes.Fig. 3; Three hot spots in Fig. 4 image are respectively 0 grade and ± 1 order diffraction light distribution behind optical grating diffraction; Wherein the center diffraction pattern of CCD imaging detector output image is 0 order diffraction light distribution, and the diffraction pattern of the left and right sides is ± 1 order diffraction light distribution.
Claims (5)
1. the phase differential Wavefront sensor based on grating is characterized in that comprising: grating G, lens L, spectroscope BS, CCD imaging detector CCD1 and CCD2, computer system C; Before grating G is positioned over lens; The vertical irradiation of parallel beam that contains wavefront distortion is in grating G surface, and light beam is modulated to the multi-beam that intensity does not wait, phase place is consistent after grating G transmission, and light beam is after lens L focusing and spectroscope BS beam split subsequently; Be divided into two parts; Behind the part process spectroscope BS, transmitted light beam continues to propagate forward along former direction, and finally images on the photosurface of the imaging detector CCD 1 that is positioned at lens L focal plane position place; Another part is through spectroscope BS beam reflected, image on the photosurface that is positioned at the imaging detector CCD2 of a certain specific out of focus position behind the lens L, and the size of establishing the out of focus distance of this out of focus position is d; Imaging detector CCD1 and CCD2 measure the light distribution on the plane that is positioned at lens L focal plane position and has certain out of focus distance respectively; The ratio of the 0 order diffraction hot spot of grating G and 1 order diffraction spot intensity is designated as η; Suppose that 0 order diffraction hot spot has higher splitting ratio, then η>1; For 1 order diffraction hot spot; Since energy that it comprised a little less than; Choose the suitable imaging detector of performance parameter; Promptly can make the light distribution of the core that peak value and the light spot energy of 1 order diffraction hot spot is stronger to be detected exactly by imaging detector CCD1; Simultaneously, the light distribution of the core that 0 order diffraction light spot energy the is stronger state that in image, reached capacity, and the light distribution of the more weak peripheral part of 0 order diffraction light spot energy can be detected by imaging detector CCD1 exactly; The suitable size of adjustment light intensity is chosen the splitting ratio of grating G, and imaging detector CCD1 can measure 0 grade and 1 order diffraction hot spot simultaneously, and the zone of accurately measurement has complementarity, thereby extrapolates real focal plane light distribution information through corresponding algorithm; Utilize imaging detector CCD 1 to detect the light distribution in the strong zone of energy in the 1 order diffraction hot spot,, then can extrapolate the distribution of the actual light intensity in the saturated zone in the 0 order diffraction hot spot according to the splitting ratio of grating G; The noise of imaging detector CCD1 is less to the influence of focal plane position light distribution information, can measure those far away and more weak high-frequency informations of light intensity energy from spot center that flooded by noise easily on the image planes more exactly; Simultaneously; Imaging detector CCD2 is positioned over out of focus face position with certain defocusing amount; Can measure 0 grade and 1 order diffraction hot spot of out of focus face simultaneously, and the zone of accurately measuring has complementarity, thereby can extrapolate real out of focus face light distribution information; Utilize imaging detector CCD2 can accurately detect the light distribution in the strong zone of energy in the 1 order diffraction hot spot; Splitting ratio according to grating G; Then can calculate the light distribution information in spot center zone, out of focus face position; The light distribution that calculates is replaced to the zone of saturation in the 0 order diffraction hot spot in the picture detector C CD2 image, the light distribution information of peripheral region in the comprehensive 0 order diffraction hot spot, thus obtain the light distribution information of out of focus face position more accurately;
The focal plane light distribution that collect according to imaging detector CCD1 0 grade and 1 order diffraction hot spot calculate is designated as I; And the out of focus face light distribution that 0 grade of collecting according to imaging detector CCD2 and 1 order diffraction hot spot calculate is designated as I_def, is restored the information that obtains distorted wavefront by iterative algorithm.
2. the phase differential Wavefront sensor based on grating according to claim 1 is characterized in that: the structural parameters of grating are depended in described grating G beam split, and the structure of grating can be carried out beam split in a certain ratio, but do not change PHASE DISTRIBUTION; The structure of grating is sinusoidal amplitude grating or longitudinal cosine type amplitude grating.
3. the phase differential Wavefront sensor based on grating according to claim 1; It is characterized in that: described CCD imaging detector is used to survey the inferior diffraction pattern of arbitrary number of level, as long as satisfy the light distribution information that the ability perfect measurement is no less than two orders of diffraction time hot spot.
4. the phase differential Wavefront sensor based on grating according to claim 1; It is characterized in that: described CCD imaging detector is measured the inferior diffraction pattern light distribution of a plurality of orders of diffraction; These orders of diffraction time have different splitting ratios, and final light distribution according to a plurality of diffraction patterns that measure is calculated with corresponding algorithm and obtained required focal plane and the light distribution of out of focus face.
5. the phase differential Wavefront sensor based on grating according to claim 1; It is characterized in that: in the described phase differential Wavefront sensor based on grating; Adopt spectroscope that incident light is divided into two bundles; And adopt two CCD imaging detectors, promptly CCD1 and CCD2 respectively measurement of Lens focal plane position and have the light distribution on the out of focus planimetric position of certain defocusing amount.
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| CN100573064C (en) * | 2006-01-16 | 2009-12-23 | 中国科学院光电技术研究所 | Visual field offset Hartmann wave front sensor based on Amici prism |
| US8118429B2 (en) * | 2007-10-29 | 2012-02-21 | Amo Wavefront Sciences, Llc. | Systems and methods of phase diversity wavefront sensing |
| CN101701847B (en) * | 2009-11-27 | 2011-08-24 | 中国科学院光电技术研究所 | Imaging system for wide dynamic range based on optical grating and CCD imaging detector |
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