CN102331241A - 表面形状的评价方法和表面形状的评价装置 - Google Patents

表面形状的评价方法和表面形状的评价装置 Download PDF

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Publication number
CN102331241A
CN102331241A CN201110196297XA CN201110196297A CN102331241A CN 102331241 A CN102331241 A CN 102331241A CN 201110196297X A CN201110196297X A CN 201110196297XA CN 201110196297 A CN201110196297 A CN 201110196297A CN 102331241 A CN102331241 A CN 102331241A
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CN
China
Prior art keywords
mentioned
reflection
surface configuration
light
estimated
Prior art date
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Pending
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CN201110196297XA
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English (en)
Chinese (zh)
Inventor
尊田嘉之
大音仁昭
加藤宗寿
城山厚
有田祐介
木村友纪
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AGC Inc
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Asahi Glass Co Ltd
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Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN102331241A publication Critical patent/CN102331241A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2504—Calibration devices

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  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201110196297XA 2010-07-12 2011-07-12 表面形状的评价方法和表面形状的评价装置 Pending CN102331241A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010-157449 2010-07-12
JP2010157449A JP2012021781A (ja) 2010-07-12 2010-07-12 表面形状の評価方法および評価装置

Publications (1)

Publication Number Publication Date
CN102331241A true CN102331241A (zh) 2012-01-25

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CN201110196297XA Pending CN102331241A (zh) 2010-07-12 2011-07-12 表面形状的评价方法和表面形状的评价装置

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JP (1) JP2012021781A (ko)
KR (1) KR20120006452A (ko)
CN (1) CN102331241A (ko)
TW (1) TW201221901A (ko)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103344651A (zh) * 2013-05-08 2013-10-09 中北大学 基于相位图像处理的玻璃缺陷检测方法
CN103837096A (zh) * 2014-03-19 2014-06-04 中国科学院光电技术研究所 一种用于检测平板光学元件面形误差的装置及方法
CN105229413A (zh) * 2013-05-14 2016-01-06 新日铁住金株式会社 板材的平面度测定方法、板材的平面度测定装置以及钢板的制造方法
CN106168503A (zh) * 2015-05-20 2016-11-30 空中客车营运有限公司 测量液体的表面
CN106662431A (zh) * 2014-08-07 2017-05-10 Ntn株式会社 形状测定装置、涂敷装置及形状测定方法
CN107490579A (zh) * 2016-06-09 2017-12-19 本田技研工业株式会社 缺陷检查方法及其设备
CN111912343A (zh) * 2019-05-10 2020-11-10 胜美达集团株式会社 电子部件评价方法、电子部件评价装置、以及电子部件评价程序

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016085034A (ja) 2013-02-19 2016-05-19 旭硝子株式会社 透明板状体表面検査用撮像システム
JP6642223B2 (ja) * 2016-04-13 2020-02-05 Ａｇｃ株式会社 透明板表面検査装置、透明板表面検査方法、およびガラス板の製造方法
US20210042909A1 (en) * 2019-08-07 2021-02-11 Kimball Electronics Indiana, Inc. Imaging system for surface inspection

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103344651A (zh) * 2013-05-08 2013-10-09 中北大学 基于相位图像处理的玻璃缺陷检测方法
CN105229413A (zh) * 2013-05-14 2016-01-06 新日铁住金株式会社 板材的平面度测定方法、板材的平面度测定装置以及钢板的制造方法
CN105229413B (zh) * 2013-05-14 2017-12-01 新日铁住金株式会社 板材的平面度测定方法、板材的平面度测定装置以及钢板的制造方法
CN103837096A (zh) * 2014-03-19 2014-06-04 中国科学院光电技术研究所 一种用于检测平板光学元件面形误差的装置及方法
CN106662431A (zh) * 2014-08-07 2017-05-10 Ntn株式会社 形状测定装置、涂敷装置及形状测定方法
CN106662431B (zh) * 2014-08-07 2019-10-25 Ntn株式会社 形状测定装置、涂敷装置及形状测定方法
CN106168503A (zh) * 2015-05-20 2016-11-30 空中客车营运有限公司 测量液体的表面
CN106168503B (zh) * 2015-05-20 2021-03-12 空中客车营运有限公司 测量液体的表面
CN107490579A (zh) * 2016-06-09 2017-12-19 本田技研工业株式会社 缺陷检查方法及其设备
CN107490579B (zh) * 2016-06-09 2021-09-07 本田技研工业株式会社 缺陷检查方法及其设备
CN111912343A (zh) * 2019-05-10 2020-11-10 胜美达集团株式会社 电子部件评价方法、电子部件评价装置、以及电子部件评价程序
US11723183B2 (en) 2019-05-10 2023-08-08 Sumida Corporation Electronic component evaluation method, electronic component evaluation device, and electronic component evaluation program

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Publication number Publication date
JP2012021781A (ja) 2012-02-02
KR20120006452A (ko) 2012-01-18
TW201221901A (en) 2012-06-01

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Application publication date: 20120125