CN102289080B - Method and device for generating radial polarization beam - Google Patents
Method and device for generating radial polarization beam Download PDFInfo
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- CN102289080B CN102289080B CN2011102284112A CN201110228411A CN102289080B CN 102289080 B CN102289080 B CN 102289080B CN 2011102284112 A CN2011102284112 A CN 2011102284112A CN 201110228411 A CN201110228411 A CN 201110228411A CN 102289080 B CN102289080 B CN 102289080B
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Abstract
The invention discloses a method and device for generating a radial polarization beam. The method is characterized by comprising the following steps: firstly carrying out polarizing beam splitting on a collimated beam to obtain a parallel line polarization beam and a perpendicular line polarization beam in an intensity ratio of 1:1, ensuring the parallel line polarization beam and the perpendicular line polarization beam to become circular polarization beams in opposite directions of rotation respectively, carrying out 0-2pi vortex phase encoding and reverse 0-2pi vortex phase encoding with the same starting point on the right-handed and left-handed circular polarization beams respectively and combining the two beams subjected to phase encoding and deflected by a light path to obtain the radial polarization beam. The device comprises a laser, a polarizing beam splitter, a first lambada/4 wave plate, a second lambada/4 wave plate, a 0-2pi vortex phase plate, a reverse 0-2pi vortex phase plate, light path deflection devices and a beam combination device, wherein the phase start lines of the 0-2pi vortex phase plate and the reverse 0-2pi vortex phase plate coincide. The method is easy to implement and the device has a simple structure, is easy to adjust, has low manufacturing cost and good stability and dispenses with other special optical elements.
Description
Technical field
The invention belongs to applied optics field, be specifically related to a kind of method and apparatus that produces radial polarized light beam, be mainly used in fields such as optical information storage, photoetching, super-resolution be micro-.
Background technology
Polarization had attracted the many concerns of People more and more in the last few years as the vectorial property of light wave, can be widely used in fields such as difference in polarisation imaging, super-resolution focus, laser lithography.In research process; It is found that; The polarization state of light beam does not include only traditional linearly polarized light, circularly polarized light and elliptically polarized light, also comprises radial polarisation light (radial polarization beam) and tangential polarization light column light beams such as (azimuthally polarized beam).Because the polarization state and the light intensity of column light beam are symmetrical distribution, especially by broad research.Publication number is that the Chinese invention patent application of CN101465512A discloses a kind of laser instrument that produces the post symmetrical polarized light; Realize radial polarisation light or tangential polarization light through designing special asymmetric cavity configuration; But owing to need to change the resonator cavity of existing laser instrument, thereby cost of manufacture is high.The patent No. is that the Chinese utility model patent of ZL 200820165973.0 discloses a kind of linearly polarized light of realizing and converts the device of radial polarized light beam into, but the adjustment trouble, and the adjustment accuracy requirement is very high.
Summary of the invention
The invention provides a kind of method and apparatus that produces radial polarized light beam, adjustment is simple and cost is low.
A kind of method that produces radial polarized light beam may further comprise the steps:
(1) collimated light beam that sends by laser instrument, obtaining beam intensity ratio through the polarizing beam splitter beam split is 1: 1 parallel lines polarized light and perpendicular linear polarization light;
(2) become right-circularly polarized light and described perpendicular linear polarization light after making described parallel lines polarized light through a λ/4 wave plates and become left circularly polarized light after through the 2nd λ/4 wave plates;
Perhaps, become left circularly polarized light and described perpendicular linear polarization light after making described parallel lines polarized light through a λ/4 wave plates and become right-circularly polarized light after through the 2nd λ/4 wave plates;
(3) described right-circularly polarized light is carried out 0～2 π vortex phase coding; Described left circularly polarized light is carried out reverse 0～2 π vortex phase coding; The starting point of described reverse 0～2 π vortex phase coding is identical with the starting point of described 0～2 π vortex phase coding; Incide after light path turnover through the two-beam line behind the phase coding and to carry out on the same light beam bundling device spare that light beam is relevant to close bundle, the light beam of described light beam bundling device spare outgoing is a radial polarized light beam.
In the step (2); Become right-circularly polarized light and described perpendicular linear polarization light after making described parallel lines polarized light through a λ/4 wave plates and become left circularly polarized light after through the 2nd λ/4 wave plates; Position through a λ/4 wave plates and the 2nd λ/4 wave plates are set can be realized; Promptly; The polarization direction that the fast axle of the one λ/4 wave plates is arranged on described parallel lines polarized light is along the position that is rotated counterclockwise 45 °, and the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along turning clockwise 45 ° position.
Equally; Become left circularly polarized light and described perpendicular linear polarization light after making described parallel lines polarized light through a λ/4 wave plates and become right-circularly polarized light after through the 2nd λ/4 wave plates; Also can realize through the position that a λ/4 wave plates and the 2nd λ/4 wave plates are set; Promptly; The polarization direction that the fast axle of the one λ/4 wave plates is arranged on described parallel lines polarized light is along turning clockwise 45 ° position, and the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along the position that is rotated counterclockwise 45 °.
In the step (3), will after light path turnover, incide through the two-beam line behind the phase coding and carry out on the same light beam bundling device spare that light beam is relevant to close bundle, obtain radial polarized light beam.The setting that light path is wherein turned back is as the criterion so that the two-beam line can incide on the same light beam bundling device spare.Below will with the collimated light beam that sends by the radial polarized light beam of described light beam bundling device spare outgoing and laser instrument parallel or vertical be that example describes its implementation:
Feasible parallel with the collimated light beam that laser instrument sends by the radial polarized light beam of described light beam bundling device spare outgoing, can take following two kinds of implementations respectively:
(a) when the right-circularly polarized light in the step (2) and left circularly polarized light are converted by described parallel lines polarized light and perpendicular linear polarization light respectively: after described right-circularly polarized light carried out 0～2 π vortex phase coding, incide on the light beam bundling device spare; Described left circularly polarized light is carried out reverse 0～2 π vortex phase coding, carry out the light path turnover through light path turnover device again after, incide on the described light beam bundling device spare, be radial polarized light beam by the light beam of described light beam bundling device spare outgoing is relevant.
(b) when the right-circularly polarized light in the step (2) and left circularly polarized light are converted by described perpendicular linear polarization light and parallel lines polarized light respectively: after described left circularly polarized light carried out reverse 0～2 π vortex phase coding, incide on the light beam bundling device spare; Described right-circularly polarized light is carried out 0～2 π vortex phase coding, carry out the light path turnover through light path turnover device again after, incide on the described light beam bundling device spare, be radial polarized light beam by the light beam of described light beam bundling device spare outgoing is relevant.
In like manner, feasible vertical with the collimated light beam that laser instrument sends by the radial polarized light beam of described light beam bundling device spare outgoing, also can take dual mode to realize respectively.That is: be the right-circularly polarized light through 0～2 π vortex phase coding to be carried out reentering after light path is turned back be mapped to light beam bundling device spare in (a), and be directly incident on light beam bundling device spare through the left circularly polarized light of reverse 0～2 π vortex phase coding.(b) be the left circularly polarized light through reverse 0～2 π vortex phase coding to be carried out reentering after light path is turned back be mapped to light beam bundling device spare in, and incide light beam bundling device spare through the right-circularly polarized light of 0～2 π vortex phase coding.
The method of above-mentioned generation radial polarized light beam also can be taked following scheme, that is: may further comprise the steps:
(1) collimated light beam that sends by laser instrument, obtaining beam intensity ratio through the polarizing beam splitter beam split is 1: 1 parallel lines polarized light and perpendicular linear polarization light;
0～2 π vortex phase coding is carried out to described parallel lines polarized light in (2 '); Described perpendicular linear polarization light is carried out reverse 0～2 π vortex phase coding; The starting point of described reverse 0～2 π vortex phase coding is identical with the starting point of described 0～2 π vortex phase coding, incides after the light path turnover through the two-beam line behind the phase coding and carries out the relevant bundle that closes of light beam on the same light beam bundling device spare;
(3 ') convert radial polarized light beam by the light beam of described light beam bundling device spare outgoing into behind λ/4 wave plates, the polarization direction that the fast axle of described λ/4 wave plates is arranged on described parallel lines polarized light is along the position that is rotated counterclockwise 45 °.
Similar in the principle that light path is turned back in the step (2 ') and the aforesaid step (3).
Step (3 ') by the light beam of described light beam bundling device spare outgoing converts radial polarized light beam into behind λ/4 wave plates principle is:
Parallel lines polarized light through 0～2 π vortex phase coding in the described light beam bundling device spare outgoing beam converts right-circularly polarized light into through λ/4 wave plates; Perpendicular linear polarization light through reverse 0～2 π vortex phase coding in the described light beam bundling device spare outgoing beam converts left circularly polarized light into through λ/4 wave plates, and the relevant bundle that closes of right-circularly polarized light and left circularly polarized light two light beams obtains radial polarized light beam.
A kind of device that is used to realize the method for described generation radial polarized light beam comprises:
Laser instrument is used to send collimated light beam;
Polarizing beam splitter, being used for described collimated light beam beam split is that beam intensity ratio is 1: 1 parallel lines polarized light and a perpendicular linear polarization light;
The one λ/4 wave plates and the 2nd λ/4 wave plates; Be used for converting described parallel lines polarized light and perpendicular linear polarization light into right-circularly polarized light and left circularly polarized light respectively; At this moment; The fast axle of the one λ/4 wave plates is arranged on the polarization direction of described parallel lines polarized light along the position that is rotated counterclockwise 45 °, and the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along turning clockwise 45 ° position; Perhaps be used for converting described parallel lines polarized light and perpendicular linear polarization light into left circularly polarized light and right-circularly polarized light respectively; At this moment; The polarization direction that the fast axle of the one λ/4 wave plates is arranged on described parallel lines polarized light is along turning clockwise 45 ° position, and the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along the position that is rotated counterclockwise 45 °;
0～2 π vortex phase board is used for described right-circularly polarized light is carried out 0～2 π vortex phase coding;
Reverse 0～2 π vortex phase board is used for described left circularly polarized light is carried out reverse 0～2 π vortex phase coding; The phase place start line of described reverse 0～2 π vortex phase board overlaps with the phase place start line of described 0～2 π vortex phase board;
Light path turnover device is used for carrying out the light path turnover through the left circularly polarized light of reverse 0～2 π vortex phase coding or the right-circularly polarized light of warp 0～2 π vortex phase coding;
And light beam bundling device spare, be used for the two-beam line after described phase coding and light path turnover is carried out the relevant bundle that closes of light beam.
The above-mentioned device that is used to realize the method for described generation radial polarized light beam also can be following scheme, that is, comprising:
Laser instrument is used to send collimated light beam;
Polarizing beam splitter, being used for described collimated light beam beam split is that beam intensity ratio is 1: 1 parallel lines polarized light and a perpendicular linear polarization light;
0～2 π vortex phase board is used for described parallel lines polarized light is carried out 0～2 π vortex phase coding;
Reverse 0～2 π vortex phase board is used for described perpendicular linear polarization light is carried out reverse 0～2 π vortex phase coding; The phase place start line of described reverse 0～2 π vortex phase board overlaps with the phase place start line of described 0～2 π vortex phase board;
Light path turnover device is used for carrying out the light path turnover through the perpendicular linear polarization light of reverse 0～2 π vortex phase coding or the parallel lines polarized light of warp 0～2 π vortex phase coding;
Light beam bundling device spare is used for the two-beam line after described phase coding and light path turnover is carried out the relevant bundle that closes of light beam;
And λ/4 wave plates; Be used for converting described light beam bundling device spare outgoing beam into right-circularly polarized light through the parallel lines polarized light of 0～2 π vortex phase coding; Perpendicular linear polarization light through reverse 0～2 π vortex phase coding in the described light beam bundling device spare outgoing beam converts left circularly polarized light into; The relevant bundle that closes of right-circularly polarized light and left circularly polarized light two light beams obtains radial polarized light beam, and the polarization direction that the fast axle of described λ/4 wave plates is arranged on described parallel lines polarized light is along the position that is rotated counterclockwise 45 °.
Described light path turnover device is the high precision plane catoptron, and the root-mean-square value of its surface figure accuracy (RMS) is 0.011 λ, and PV value (highest point of presentation surface and the difference of lowest part) is 0.071 λ; Can place a plurality of plane mirrors as required, be preferably the metal film catoptron.
The principle of the invention is following:
For radial polarisation light; In beam cross-section perpendicular to optical axis, its polarimeter is shown
wherein θ be the azimuthal coordinate under the polar coordinate system.At any time, in the xsect of light beam, the polarization direction of any point position confirms, all along the radial direction of this point.And for left circularly polarized light or right-circularly polarized light, in the time of the one-period of beam propagation, phase change takes place in the wavefront of whole light wave simultaneously, and phase change is increased to 2 π from 0 always.For left circularly polarized light or right-circularly polarized light, in a time cycle, in arbitrary moment, light beam is linearly polarized light, and along with the increase of time, the electric field polarization direction changes along radial direction.For left circularly polarized light or right-circularly polarized light, for for the observer of beam propagation, the direction that the end of light vector changes is left-handed or dextrorotation.Therefore, utilize the computing rule of Jones matrix, left-handed rotatory polarization is carried out bit phase delay e
-i θWith right-circularly polarized light is carried out bit phase delay e
I θAfterwards, carry out after light beam closes bundle, the polarization state of finding to close the light beam behind the bundle satisfies the polarisation distribution of radial polarized light beam.
With respect to prior art, the present invention has following beneficial technical effects:
(1) directly utilize circularly polarized light to realize radial polarized light beam, principle is simple, is easy to realize;
(2) simple in structure, be easy to adjustment, low cost of manufacture;
(3) device stability is good, does not need other special optical element.
Description of drawings
Fig. 1 be apparatus of the present invention first kind of embodiment structural representation.
Fig. 2 is the structural representation of second kind of embodiment of apparatus of the present invention.
Fig. 3 is in second kind of embodiment of apparatus of the present invention, the polarization direction of the quick shaft direction of λ/4 wave plates and perpendicular linear polarization light (s light) and parallel lines polarized light (p light) concern synoptic diagram.
Fig. 4 is that right-circularly polarized light is at the polarization synoptic diagram of one-period in the time.
Fig. 5 is 0～2 π phase coding synoptic diagram.
Fig. 6 is reverse 0～2 π phase coding synoptic diagram.
Fig. 7 is a radial polarisation polarisation of light synoptic diagram.
Embodiment
Specify the present invention below in conjunction with embodiment and accompanying drawing, but the present invention is not limited to this.
As shown in Figure 1; A kind of device that produces radial polarisation light comprises: laser instrument 1, polarizing beam splitter 2, a λ/4 wave plate 3, the 2nd λ/4 wave plate 4,0～2 π vortex phase board 5, reverse 0～2 π vortex phase board 6, the first high precision plane catoptron 7, the second high precision plane catoptron 8 and depolarization optical splitter 9.
Employing is following as the method that 1 shown device produces radial polarisation light:
(1) collimated light beam that sends of laser instrument 1, after polarizing beam splitter 2 beam split, transmitted light beam is the parallel lines polarized light, and folded light beam is a perpendicular linear polarization light, and the ratio of the light intensity of transmitted light beam and folded light beam is 1: 1.
(2) the parallel lines polarized light converts right-circularly polarized light into after through a λ/4 wave plates 3, wherein the fast axle of a λ/4 wave plates 3 be arranged on the parallel lines polarized light the polarization direction along the position that is rotated counterclockwise 45 °; Right-circularly polarized light is as shown in Figure 4 at the polarization synoptic diagram of one-period in the time, and in the beam cross-section perpendicular to optical axis, the polarization direction of right-circularly polarized light can be represented by following unit matrix:
Wherein, Px, Py, i are respectively X-direction polarized component, Y direction polarized component and imaginary unit.
Perpendicular linear polarization light converts left circularly polarized light into after through the 2nd λ/4 wave plates 4, and wherein the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along turning clockwise 45 ° position; In the beam cross-section perpendicular to optical axis, the unit matrix of the polarization direction of left circularly polarized light is expressed as:
(3) right-circularly polarized light carries out 0～2 π vortex phase coding through 0～2 π vortex phase board 5.0～2 π vortex phase board 5 has a phase place start line, is the straight line along radial direction, can be through 0～2 π vortex phase board 5 be placed on the appropriate location, make that arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot, and realize phase delay.Phase place start line L1 with 0～2 π vortex phase board 5 shown in Fig. 5 in the present embodiment is that example describes along x axle positive dirction.
The swirl direction of 0～2 π vortex phase board 5 (phase of ascending the throne coding staff to) is opposite with the rotation direction of right-circularly polarized light, and the available following formula of its phase coding effect is expressed:
Wherein,
and
is respectively incident light (right-circularly polarized light) and carries out the electric field intensity of the emergent light behind 0～2 π vortex phase coding through 0～2 π vortex phase board 5.I is an imaginary unit, and θ is coordinate axis initial point put in place the line and the X axle positive dirction angulation of phase encoded point.
After right-circularly polarized light carried out 0～2 π vortex phase coding through 0～2 π vortex phase board 5, the electric field intensity of its light beam was expressed as:
Right-circularly polarized light through behind 0～2 π vortex phase coding is directly incident on the depolarization optical splitter 9.
Left circularly polarized light carries out reverse 0～2 π vortex phase coding through reverse 0～2 π vortex phase board 6.Reverse 0～2 π vortex phase board 6 has a phase place start line, is the straight line along radial direction, can be through reverse 0～2 π vortex phase board 6 be placed on the appropriate location, make that arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot, and realize phase delay.
Corresponding along x axle positive dirction with the phase place start line L1 of 0～2 π vortex phase board 5 among Fig. 5, the phase place start line L2 of reverse 0～2 π vortex phase board 6 also is along x axle positive dirction in the present embodiment, and is as shown in Figure 6.At this moment, the starting point of reverse 0～2 π vortex phase coding is identical with the starting point of 0～2 π vortex phase coding.
The swirl direction of reverse 0～2 π vortex phase board 6 (phase of ascending the throne coding staff to) is opposite with the rotation direction of left circularly polarized light, and the available following formula of its phase coding effect is expressed:
Wherein,
and
is respectively incident light (left circularly polarized light) and carries out the electric field intensity of the emergent light behind reverse 0～2 π vortex phase coding through reverse 0～2 π vortex phase board 6.
After Left-hand circular polarization carried out reverse 0～2 π vortex phase coding through reverse 0～2 π vortex phase board 6, the electric field intensity of its light beam was expressed as:
Carry out inciding on the depolarization optical splitter 9 after light path transfers through the first high precision plane catoptron 7 and the second high precision plane catoptron 8 through the left circularly polarized light of reverse 0～2 π vortex phase coding.The two light beams of 9 pairs of incidents of depolarization optical splitter is concerned with and closes bundle.
The light beam of outgoing is the coaxial collimated light beam that closes bundle from the depolarization optical splitter 9, and this closes the light beam behind the bundle, and its polarization state can be expressed as:
Polarization state expression formula through closing the light beam behind the bundle is just in time represented for the radial polarisation polarisation of light, thereby has been realized directly converting light beam into radial polarisation light.Radial polarisation polarisation of light synoptic diagram is as shown in Figure 7.
In the present embodiment, the first high precision plane catoptron 7 and the second high precision plane catoptron 8 are the metal film catoptron, and the root-mean-square value of its surface figure accuracy is 0.011 λ, and the PV value is 0.071 λ.
Embodiment 2:
As shown in Figure 2; A kind of device that produces radial polarized light beam; Comprise: laser instrument 1, polarizing beam splitter 2,0～2 π vortex phase board 5, reverse 0～2 π vortex phase board 6, the first high precision plane catoptron 7, the second high precision plane catoptron 8, depolarization optical splitter 9 and the 3rd λ/4 wave plates 10.
Different with embodiment 1 is; Present embodiment carries out phase coding to parallel lines polarized light and perpendicular linear polarization light respectively earlier; Closing bundle for after the coaxial collimated light beam through parallel lines polarized light behind the phase coding and perpendicular linear polarization light process depolarization optical splitter 9; Convert right-circularly polarized light and left circularly polarized light respectively into through the 3rd λ/4 wave plates 10 again, close bundle and be radial polarized light beam through phase coding.Employing is following as the detailed process that 2 shown devices produce radial polarisation light:
(1) collimated light beam that sends of laser instrument 1, after polarizing beam splitter 2 beam split, transmitted light beam is the parallel lines polarized light, and folded light beam is a perpendicular linear polarization light, and the ratio of the light intensity of transmitted light beam and folded light beam is 1: 1.
(2 ') parallel lines polarized light carries out 0～2 π vortex phase coding through 0～2 π vortex phase board 5.0～2 π vortex phase board 5 has a phase place start line, is the straight line along radial direction, can be through 0～2 π vortex phase board 5 be placed on the appropriate location, make that arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot, and realize phase delay.Phase place start line L1 with 0～2 π vortex phase board 5 shown in Fig. 5 in the present embodiment is that example describes along x axle positive dirction, and the available following formula of its phase coding effect is expressed:
Wherein,
and
is respectively incident light (parallel lines polarized light) and carries out the electric field intensity of the emergent light behind 0～2 π vortex phase coding through 0～2 π vortex phase board 5.I is an imaginary unit, and θ is coordinate axis initial point put in place the line and the X axle positive dirction angulation of phase encoded point.
Parallel lines polarized light through behind 0～2 π vortex phase coding is directly incident on the depolarization optical splitter 9.
Perpendicular linear polarization light carries out reverse 0～2 π vortex phase coding through reverse 0～2 π vortex phase board 6.Reverse 0～2 π vortex phase board 6 has a phase place start line, is the straight line along radial direction, can be through reverse 0～2 π vortex phase board 6 be placed on the appropriate location, make that arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot, and realize phase delay.
Corresponding with the phase place start line L1 of 0～2 π vortex phase board 5 among Fig. 5 along x axle positive dirction; The phase place start line L2 of reverse 0～2 π vortex phase board 6 also is along x axle positive dirction in the present embodiment; As shown in Figure 6; At this moment, the starting point of reverse 0～2 π vortex phase coding is identical with the starting point of 0～2 π vortex phase coding, and the available following formula of the phase coding effect of reverse 0～2 π vortex phase board 6 is expressed:
Wherein,
and
is respectively incident light (perpendicular linear polarization light) and carries out the electric field intensity of the emergent light behind reverse 0～2 π vortex phase coding through reverse 0～2 π vortex phase board 6.
Carry out inciding on the depolarization optical splitter 9 after light path transfers through the first high precision plane catoptron 7 and the second high precision plane catoptron 8 through the perpendicular linear polarization light of reverse 0～2 π vortex phase coding.The two light beams of 9 pairs of incidents of depolarization optical splitter is concerned with and closes bundle.
(3 ') light beam of outgoing from the depolarization optical splitter 9 is coaxial collimated light beam.The parallel lines polarized light of the process phase coding of coaxial collimation and perpendicular linear polarization light are through the 3rd λ/4 wave plates 10; The polarization direction that the fast axle of the 3rd λ/4 wave plates 10 is arranged on the parallel lines polarized light is along the position (that is to say that perpendicular linear polarization polarisation of light direction is along turning clockwise 45 ° position) that is rotated counterclockwise 45 °; As shown in Figure 3, be converted to right-circularly polarized light and the left circularly polarized light that close bundle through phase coding.
Be expressed as through the right-circularly polarized light behind 0～2 π vortex phase coding with through the light polarization behind the photosynthetic bundle of Left-hand circular polarization of reverse 0～2 π vortex phase coding:
Be radial polarisation light.Radial polarisation polarisation of light synoptic diagram is as shown in Figure 7.
Claims (8)
1. a method that produces radial polarized light beam is characterized in that, may further comprise the steps:
(1) collimated light beam that sends by laser instrument, obtaining beam intensity ratio through the polarizing beam splitter beam split is 1: 1 parallel lines polarized light and perpendicular linear polarization light;
(2) become right-circularly polarized light and described perpendicular linear polarization light after making described parallel lines polarized light through a λ/4 wave plates and become left circularly polarized light after through the 2nd λ/4 wave plates; Perhaps, become left circularly polarized light and described perpendicular linear polarization light after making described parallel lines polarized light through a λ/4 wave plates and become right-circularly polarized light after through the 2nd λ/4 wave plates;
(3) described right-circularly polarized light is carried out 0～2 π vortex phase coding through 0～2 π vortex phase board, 0～2 π vortex phase board has a phase place start line, is the straight line along its radial direction, and arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot; Described left circularly polarized light is carried out reverse 0～2 π vortex phase coding through reverse 0～2 π vortex phase board; Described reverse 0～2 π vortex phase board has a phase place start line; Be the straight line along its radial direction, arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot; The starting point of described reverse 0～2 π vortex phase coding is identical with the starting point of described 0～2 π vortex phase coding; Incide after light path turnover through the two-beam line behind the phase coding and to carry out on the same light beam bundling device spare that light beam is relevant to close bundle, the light beam of described light beam bundling device spare outgoing is a radial polarized light beam.
2. a method that produces radial polarized light beam is characterized in that, may further comprise the steps:
(1) collimated light beam that sends by laser instrument, obtaining beam intensity ratio through the polarizing beam splitter beam split is 1: 1 parallel lines polarized light and perpendicular linear polarization light;
0～2 π vortex phase coding is carried out to described parallel lines polarized light in (2 '); Described perpendicular linear polarization light is carried out reverse 0～2 π vortex phase coding; The start line of described reverse 0～2 π vortex phase coding overlaps with the start line of described 0～2 π vortex phase coding; Article two, the start line of vortex phase coding is respectively along the straight line of vortex phase board radial direction separately, and arbitrary radius overlaps in the start line of described two vortex phase codings and the entrance pupil hot spot simultaneously; The starting point of described reverse 0～2 π vortex phase coding is identical with the starting point of described 0～2 π vortex phase coding, incides after the light path turnover through the two-beam line behind the phase coding and carries out the relevant bundle that closes of light beam on the same light beam bundling device spare;
(3 ') convert radial polarized light beam by the light beam of described light beam bundling device spare outgoing into behind λ/4 wave plates, the polarization direction that the fast axle of described λ/4 wave plates is arranged on described parallel lines polarized light is along the position that is rotated counterclockwise 45 °.
3. a device that is used to realize the method for generation radial polarized light beam as claimed in claim 1 is characterized in that, comprising:
Laser instrument is used to send collimated light beam;
Polarizing beam splitter, being used for described collimated light beam beam split is that beam intensity ratio is 1: 1 parallel lines polarized light and a perpendicular linear polarization light;
The one λ/4 wave plates and the 2nd λ/4 wave plates; Be used for converting described parallel lines polarized light and perpendicular linear polarization light into right-circularly polarized light and left circularly polarized light respectively; At this moment; The fast axle of the one λ/4 wave plates is arranged on the polarization direction of described parallel lines polarized light along the position that is rotated counterclockwise 45 °, and the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along turning clockwise 45 ° position; Perhaps be used for converting described parallel lines polarized light and perpendicular linear polarization light into left circularly polarized light and right-circularly polarized light respectively; At this moment; The polarization direction that the fast axle of the one λ/4 wave plates is arranged on described parallel lines polarized light is along turning clockwise 45 ° position, and the fast axle of the 2nd λ/4 wave plates is arranged on described perpendicular linear polarization polarisation of light direction along the position that is rotated counterclockwise 45 °;
0～2 π vortex phase board; Be used for described right-circularly polarized light is carried out 0～2 π vortex phase coding; Described 0～2 π vortex phase board has a phase place start line, is the straight line along its radial direction, and arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot;
Reverse 0～2 π vortex phase board; Be used for described left circularly polarized light is carried out reverse 0～2 π vortex phase coding; Described reverse 0～2 π vortex phase board has a phase place start line; Be the straight line along its radial direction, arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot, and the phase place start line of described reverse 0～2 π vortex phase board overlaps with the phase place start line of described 0～2 π vortex phase board; Light path turnover device is used for carrying out the light path turnover through the left circularly polarized light of reverse 0～2 π vortex phase coding or the right-circularly polarized light of warp 0～2 π vortex phase coding;
And light beam bundling device spare, be used for the two-beam line after described phase coding and light path turnover is carried out the relevant bundle that closes of light beam.
4. device as claimed in claim 3 is characterized in that, described light path turnover device is one or more high precision plane catoptrons, and the root-mean-square value of its surface figure accuracy is 0.011 λ, and the PV value is 0.071 λ.
5. device as claimed in claim 4 is characterized in that, described high precision plane catoptron is the metal film catoptron.
6. a device that is used to realize the method for generation radial polarized light beam as claimed in claim 2 is characterized in that, comprising:
Laser instrument is used to send collimated light beam;
Polarizing beam splitter, being used for described collimated light beam beam split is that beam intensity ratio is 1: 1 parallel lines polarized light and a perpendicular linear polarization light;
0～2 π vortex phase board; Be used for described parallel lines polarized light is carried out 0～2 π vortex phase coding; Described 0～2 π vortex phase board has a phase place start line, is the straight line along its radial direction, and arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot;
Reverse 0～2 π vortex phase board; Be used for described perpendicular linear polarization light is carried out reverse 0～2 π vortex phase coding; Described reverse 0～2 π vortex phase board has a phase place start line; Be the straight line along its radial direction, arbitrary radius overlaps in its phase place start line and the entrance pupil hot spot, and the phase place start line of described reverse 0～2 π vortex phase board overlaps with the phase place start line of described 0～2 π vortex phase board;
Light path turnover device is used for carrying out the light path turnover through the perpendicular linear polarization light of reverse 0～2 π vortex phase coding or the parallel lines polarized light of warp 0～2 π vortex phase coding;
Light beam bundling device spare is used for the two-beam line after described phase coding and light path turnover is carried out the relevant bundle that closes of light beam;
And λ/4 wave plates; Be used for converting described light beam bundling device spare outgoing beam into right-circularly polarized light through the parallel lines polarized light of 0～2 π vortex phase coding; Perpendicular linear polarization light through reverse 0～2 π vortex phase coding in the described light beam bundling device spare outgoing beam converts left circularly polarized light into; The relevant bundle that closes of right-circularly polarized light and left circularly polarized light two light beams obtains radial polarized light beam, and the polarization direction that the fast axle of described λ/4 wave plates is arranged on described parallel lines polarized light is along the position that is rotated counterclockwise 45 °.
7. device as claimed in claim 6 is characterized in that, described light path turnover device is one or more high precision plane catoptrons, and the root-mean-square value of its surface figure accuracy is 0.011 λ, and the PV value is 0.071 λ.
8. device as claimed in claim 7 is characterized in that, described high precision plane catoptron is the metal film catoptron.
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| CN103576332B (en) * | 2013-11-15 | 2015-12-09 | 大族激光科技产业集团股份有限公司 | Chamber outer radial polarization laser conversion optical system and converter |
| CN103941402B (en) * | 2014-03-22 | 2016-03-16 | 中南大学 | Produce and there is the vortex light of rotational momentum and the method for vortex light array |
| CN104949630B (en) * | 2014-03-25 | 2017-06-20 | 南京理工大学 | A kind of adjustable point-diffraction interference device of large-numerical aperture fringe contrast |
| CN104485575A (en) * | 2015-01-07 | 2015-04-01 | 中国工程物理研究院激光聚变研究中心 | Single beam circular polarization smoothing system |
| CN107065213A (en) * | 2017-03-30 | 2017-08-18 | 西北工业大学 | A kind of method and device that non-uniform polarisation light beam is produced based on single Amici prism |
| CN107976821B (en) * | 2018-01-04 | 2024-05-14 | 中国人民解放军国防科技大学 | Optical converter for linearly polarized light to radially polarized light |
| CN108333789B (en) * | 2018-02-28 | 2020-10-30 | 中国人民解放军战略支援部队航天工程大学 | Vortex light preparation device based on matrix spiral phase plate multi-pass |
| CN108680511B (en) * | 2018-05-18 | 2023-08-25 | 南京信息工程大学 | Reflection enhancement type polarimeter based on circularly polarized light |
| CN109489835B (en) * | 2018-12-06 | 2020-10-16 | 深圳大学 | System and method for detecting phase and polarization of odd point light based on GS iterative algorithm |
| CN109709683B (en) * | 2019-02-22 | 2021-01-19 | 济南大学 | Device and method for generating space diffraction invariant square array vector light beam by using two-dimensional grating |
| CN111239882B (en) * | 2020-01-15 | 2021-09-28 | 南京大学 | Terahertz Bessel beam generator, preparation method and generation system |
| CN112034626B (en) * | 2020-08-25 | 2022-04-08 | 之江实验室 | High-flux 3D dark spot generating device |
| CN114217452B (en) * | 2021-12-21 | 2024-02-13 | 鑫海合星科技（大连）有限公司 | Nanoscale optical clamp imaging device and method based on vector light field regulation and control |
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| US20070115551A1 (en) * | 2005-04-01 | 2007-05-24 | Alexis Spilman | Space-variant waveplate for polarization conversion, methods and applications |
| CN101465512B (en) * | 2007-12-19 | 2012-08-29 | 中国科学院福建物质结构研究所 | Symmetrical polarized light laser for novel pole |
| CN201307189Y (en) * | 2008-10-23 | 2009-09-09 | 中国计量学院 | Device for realizing conversion from linearly polarized light into radially polarized light |
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