CN102279289B - 一种基于(110)单晶硅的微悬臂梁探针制作方法 - Google Patents
一种基于(110)单晶硅的微悬臂梁探针制作方法 Download PDFInfo
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- CN102279289B CN102279289B CN 201110055371 CN201110055371A CN102279289B CN 102279289 B CN102279289 B CN 102279289B CN 201110055371 CN201110055371 CN 201110055371 CN 201110055371 A CN201110055371 A CN 201110055371A CN 102279289 B CN102279289 B CN 102279289B
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- 238000000034 method Methods 0.000 title claims abstract description 35
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- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 49
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 49
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- 239000010703 silicon Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 23
- 239000010408 film Substances 0.000 claims description 23
- 238000001259 photo etching Methods 0.000 claims description 15
- 239000000377 silicon dioxide Substances 0.000 claims description 15
- 238000001039 wet etching Methods 0.000 claims description 11
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 10
- 239000011651 chromium Substances 0.000 claims description 10
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- PBZHKWVYRQRZQC-UHFFFAOYSA-N [Si+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O Chemical compound [Si+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O PBZHKWVYRQRZQC-UHFFFAOYSA-N 0.000 claims description 7
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- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
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CN 201110055371 CN102279289B (zh) | 2011-03-09 | 2011-03-09 | 一种基于(110)单晶硅的微悬臂梁探针制作方法 |
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CN 201110055371 CN102279289B (zh) | 2011-03-09 | 2011-03-09 | 一种基于(110)单晶硅的微悬臂梁探针制作方法 |
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CN102279289A CN102279289A (zh) | 2011-12-14 |
CN102279289B true CN102279289B (zh) | 2012-12-26 |
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CN 201110055371 Expired - Fee Related CN102279289B (zh) | 2011-03-09 | 2011-03-09 | 一种基于(110)单晶硅的微悬臂梁探针制作方法 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103193192A (zh) * | 2012-01-06 | 2013-07-10 | 昆山光微电子有限公司 | 在体硅加工中用于功能结构Si和牺牲层的Si的隔离方法 |
CN102556954A (zh) * | 2012-02-24 | 2012-07-11 | 江苏大学 | 一种超高密度信息存储用纳机电探针的制备方法 |
US8756710B2 (en) * | 2012-08-31 | 2014-06-17 | Bruker-Nano, Inc. | Miniaturized cantilever probe for scanning probe microscopy and fabrication thereof |
DE102012218845A1 (de) * | 2012-10-16 | 2014-04-17 | Robert Bosch Gmbh | Herstellungsverfahren für ein mikromechanisches Bauteil und mikromechanisches Bauteil |
CN107796958B (zh) * | 2017-09-18 | 2019-10-01 | 上海理工大学 | 一种原子力显微镜用胶体探针的制备方法 |
DE102018216692B3 (de) | 2018-09-28 | 2019-12-12 | Kuka Deutschland Gmbh | Roboter-Handführgerät |
CN110441242A (zh) * | 2019-08-14 | 2019-11-12 | 郑州大学 | 基于金刚石微悬臂梁的气体检测系统和方法 |
CN112748648B (zh) * | 2020-12-22 | 2022-07-29 | 北京遥测技术研究所 | 一种用于提升石英微机械三维结构对准精度的方法 |
CN116106591B (zh) * | 2023-01-10 | 2023-09-19 | 佛山市蓝箭电子股份有限公司 | 一种微波探针的制作方法及微波探针 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5856672A (en) * | 1996-08-29 | 1999-01-05 | International Business Machines Corporation | Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system |
CN101281795A (zh) * | 2008-04-30 | 2008-10-08 | 大连理工大学 | 一种硅探针的制作方法 |
CN101580223A (zh) * | 2009-06-18 | 2009-11-18 | 大连理工大学 | 一种压电微悬臂梁探针的制作方法 |
CN101720438A (zh) * | 2007-07-03 | 2010-06-02 | 株式会社爱德万测试 | 探针、探针卡及探针的制造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001108604A (ja) * | 1999-10-14 | 2001-04-20 | Nikon Corp | 走査型プローブ顕微鏡用カンチレバー及び走査型プローブ顕微鏡 |
US8062535B2 (en) * | 2007-01-31 | 2011-11-22 | Chung Hoon Lee | Video rate-enabling probes for atomic force microscopy |
KR100766407B1 (ko) * | 2007-05-02 | 2007-10-12 | (주)엠투엔 | 주사 탐침 현미경에 사용되는 탐침 팁 및 탐침의 제조 방법 |
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2011
- 2011-03-09 CN CN 201110055371 patent/CN102279289B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5856672A (en) * | 1996-08-29 | 1999-01-05 | International Business Machines Corporation | Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system |
CN101720438A (zh) * | 2007-07-03 | 2010-06-02 | 株式会社爱德万测试 | 探针、探针卡及探针的制造方法 |
CN101281795A (zh) * | 2008-04-30 | 2008-10-08 | 大连理工大学 | 一种硅探针的制作方法 |
CN101580223A (zh) * | 2009-06-18 | 2009-11-18 | 大连理工大学 | 一种压电微悬臂梁探针的制作方法 |
Non-Patent Citations (2)
Title |
---|
压电微悬臂梁探针的制作工艺研究;崔岩 等;《西安交通大学学报》;20110131;第45卷(第1期);第79-82页 * |
崔岩 等.压电微悬臂梁探针的制作工艺研究.《西安交通大学学报》.2011,第45卷(第1期),第79-82页. |
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CN102279289A (zh) | 2011-12-14 |
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Inventor after: Cui Yan Inventor after: Zhao Lin Inventor after: Wang Fei Inventor after: Wang Liding Inventor before: Cui Yan Inventor before: Zhao Lin Inventor before: Wang Fei Inventor before: Cheng Zihong |
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