CN102275863B - 微机电器件的晶圆级真空封装方法 - Google Patents
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CN102275863B true CN102275863B (zh) | 2013-11-06 |
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Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102633228A (zh) * | 2012-04-09 | 2012-08-15 | 武汉高德红外股份有限公司 | 新型cmos-mems兼容的非制冷红外传感器晶圆级封装方法 |
CN102786026B (zh) * | 2012-08-23 | 2015-04-22 | 江苏物联网研究发展中心 | 一种用于mems光学器件的薄膜封帽封装结构及其制造方法 |
CN103663356A (zh) * | 2012-09-05 | 2014-03-26 | 中国科学院微电子研究所 | 透明衬底探测器芯片的封装方法及其封装结构 |
CN103224218B (zh) * | 2013-04-12 | 2016-01-20 | 华中科技大学 | 一种mems器件的封装方法 |
NO2944700T3 (zh) * | 2013-07-11 | 2018-03-17 | ||
CN104340952A (zh) * | 2013-08-09 | 2015-02-11 | 比亚迪股份有限公司 | Mems圆片级真空封装方法及结构 |
CN103910325B (zh) * | 2014-02-27 | 2015-06-17 | 厦门大学 | 一种可实现键合间隙精确可控的高可靠性的mems封装结构及封装方法 |
CN104003352B (zh) * | 2014-06-13 | 2018-07-06 | 中国科学院上海微系统与信息技术研究所 | 基于吸气剂薄膜的混合晶圆级真空封装方法及结构 |
CN105304505B (zh) * | 2014-06-17 | 2018-07-06 | 中国科学院上海微系统与信息技术研究所 | 混合晶圆级真空封装方法及结构 |
CN106206624A (zh) * | 2015-04-29 | 2016-12-07 | 中国科学院微电子研究所 | 一种晶圆级封装盖帽及其制作方法 |
KR102588790B1 (ko) * | 2016-02-04 | 2023-10-13 | 삼성전기주식회사 | 음향파 필터 장치, 음향파 필터 장치 제조용 패키지 |
CN106517082B (zh) * | 2016-11-14 | 2017-11-03 | 北方电子研究院安徽有限公司 | 一种mems吸气剂图形化制备方法 |
CN107055456A (zh) * | 2017-04-14 | 2017-08-18 | 上海华虹宏力半导体制造有限公司 | 微机电系统器件的封装结构及方法 |
CN109346533A (zh) * | 2018-08-24 | 2019-02-15 | 西安赛恒电子科技有限公司 | 芯片的晶圆级封装结构及其制备方法 |
CN109665487B (zh) * | 2018-12-26 | 2020-11-10 | 中芯集成电路(宁波)有限公司 | 一种mems器件晶圆级系统封装方法以及封装结构 |
CN111115559B (zh) * | 2019-11-21 | 2023-06-23 | 青岛歌尔智能传感器有限公司 | 微机电系统传感器封装方法及封装结构 |
CN113526453B (zh) * | 2021-07-16 | 2024-04-19 | 芯知微(上海)电子科技有限公司 | 一种mems封装结构及其制作方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US6812558B2 (en) * | 2003-03-26 | 2004-11-02 | Northrop Grumman Corporation | Wafer scale package and method of assembly |
CN1214234C (zh) * | 2003-06-13 | 2005-08-10 | 中国科学院上海微系统与信息技术研究所 | 微机械传感器气密封装用等温凝固方法 |
CN100560475C (zh) * | 2007-08-31 | 2009-11-18 | 中国电子科技集团公司第二十四研究所 | 谐振型压力传感器芯片的局部真空封装方法 |
US8058144B2 (en) * | 2008-05-30 | 2011-11-15 | Analog Devices, Inc. | Method for capping a MEMS wafer |
CN101434374A (zh) * | 2008-12-23 | 2009-05-20 | 中国科学院上海微系统与信息技术研究所 | Mems器件圆片级芯片尺寸气密封装的结构及实现方法 |
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