CN100594595C - 微机电系统器件与集成电路的集成方法及集成芯片 - Google Patents
微机电系统器件与集成电路的集成方法及集成芯片 Download PDFInfo
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- CN100594595C CN100594595C CN200710044324A CN200710044324A CN100594595C CN 100594595 C CN100594595 C CN 100594595C CN 200710044324 A CN200710044324 A CN 200710044324A CN 200710044324 A CN200710044324 A CN 200710044324A CN 100594595 C CN100594595 C CN 100594595C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
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- Engineering & Computer Science (AREA)
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- Computer Hardware Design (AREA)
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN200710044324A CN100594595C (zh) | 2007-07-27 | 2007-07-27 | 微机电系统器件与集成电路的集成方法及集成芯片 |
Applications Claiming Priority (1)
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CN200710044324A CN100594595C (zh) | 2007-07-27 | 2007-07-27 | 微机电系统器件与集成电路的集成方法及集成芯片 |
Publications (2)
Publication Number | Publication Date |
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CN101355038A CN101355038A (zh) | 2009-01-28 |
CN100594595C true CN100594595C (zh) | 2010-03-17 |
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CN200710044324A Active CN100594595C (zh) | 2007-07-27 | 2007-07-27 | 微机电系统器件与集成电路的集成方法及集成芯片 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102540916B (zh) * | 2010-12-21 | 2016-04-06 | 新奥科技发展有限公司 | 能源终端芯片 |
KR101307436B1 (ko) | 2011-11-10 | 2013-09-12 | (주)유우일렉트로닉스 | Mems 센서 패키징 및 그 방법 |
CN103922267A (zh) * | 2013-01-10 | 2014-07-16 | 深迪半导体(上海)有限公司 | 一种基于mems的惯性传感器生产及晶圆级封装工艺 |
JP2014187354A (ja) * | 2013-02-21 | 2014-10-02 | Ricoh Co Ltd | デバイス、及びデバイスの作製方法 |
CN103227161B (zh) * | 2013-05-15 | 2016-08-17 | 中国电子科技集团公司第四十三研究所 | 一种电子产品用焊接基片及其制备方法 |
CN104401929B (zh) * | 2014-11-20 | 2016-05-11 | 上海华虹宏力半导体制造有限公司 | 用于融合键合晶片的键合结构及锚点结构 |
US9502248B1 (en) * | 2015-10-16 | 2016-11-22 | Infineon Technologies Ag | Methods for making a semiconductor chip device |
CN106145026B (zh) * | 2016-06-30 | 2018-03-27 | 清华大学 | 用于mems的气密性封装结构和封装方法 |
US10483221B2 (en) | 2017-10-30 | 2019-11-19 | Micron Technology, Inc. | 3DI solder cup |
US20200385263A1 (en) * | 2019-06-06 | 2020-12-10 | Solid State System Co., Ltd. | Package structure of micro-electro-mechanical-system (mems) microphone package and packaging method thereof |
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2007
- 2007-07-27 CN CN200710044324A patent/CN100594595C/zh active Active
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Publication number | Publication date |
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CN101355038A (zh) | 2009-01-28 |
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Owner name: SUZHOU MEMSENSING MICROSYSTEMS TECHNOLOGY CO., LTD Free format text: FORMER OWNER: LI GANG Effective date: 20100601 |
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Free format text: CORRECT: ADDRESS; FROM: 201203 ROOM 5116, NO.151, KEYUAN ROAD,ZHANGJIANG, PUDONG, SHANGHAI CITY TO: 215213 213B, BUILDING A2, BIO NANO PARK, NO.218, XINGHU STREET, SUZHOU INDUSTRY PARK DISTRICT, SUZHOU CITY, JIANGSU PROVINCE |
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Effective date of registration: 20100601 Address after: Suzhou City, Jiangsu province 215213 Industrial Park Suzhou Xinghu street BioBAY No. 218 A2 213B Patentee after: Suzhou MEMSensing Microsystems Co., Ltd. Address before: Pudong Zhangjiang 201203 Keyuan Road Shanghai City No. 151 room 5116 Patentee before: Li Gang |
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CP03 | Change of name, title or address |
Address after: 215100 NW-09 building 99, Jinji Lake Avenue, Suzhou Industrial Park, Jiangsu, 102 Patentee after: MEMSENSING MICROSYSTEMS (SUZHOU, CHINA) CO., LTD. Address before: Suzhou City, Jiangsu province 215213 Industrial Park Suzhou Xinghu street BioBAY No. 218 A2 213B Patentee before: Suzhou MEMSensing Microsystems Co., Ltd. |
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