CN102244970A - Multi-nozzle radio frequency plasma generator - Google Patents
Multi-nozzle radio frequency plasma generator Download PDFInfo
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- CN102244970A CN102244970A CN 201010169555 CN201010169555A CN102244970A CN 102244970 A CN102244970 A CN 102244970A CN 201010169555 CN201010169555 CN 201010169555 CN 201010169555 A CN201010169555 A CN 201010169555A CN 102244970 A CN102244970 A CN 102244970A
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- quartz ampoule
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Abstract
The invention discloses a multi-nozzle radio frequency plasma generator, which comprises a plurality of radio frequency power supplies, a plurality of plasma spray tubes and the like, and is characterized in that the plurality of plasma spray tubes are installed on one planar bracket; nozzles of the plurality of spray tubes form a horizontal plane; each plasma spray tube comprises a quartz tube covering a metal tube electrode and a circular ring electrode outside the nozzle of the quartz tube; one end of the tube electrode covered by the quartz tube is positioned in the quartz tube while the other end is outside the quartz tube; one radio frequency power supply is respectively connected with an inner electrode and an outer electrode in the quartz tube; the metal tube electrode covered by the quartz tube is connected with an air inlet tube; the other end of the air inlet tube is connected with an air bottle through a gas decompression valve; and, in the process of passing through the end of the metal tube electrode covered by the quartz tube, gas is ionized to generate plasmas and sprayed out through the nozzle of the quartz tube. The system can be applied to surface processing of a larger-area heat sensitive material.
Description
Technical field
The present invention relates to a kind of many shower nozzles RF plasma generator, especially be installed in the system of the outside jet plasma line of a plurality of plasma spouts on the planar bracket.
Background technology
The atmospheric plasma body technique is in the new technology that just develops rapidly in recent years, also has been used widely, and it can be applicable to: (1) surface clean (for example biochemical pollution of clean surface, surperficial organic contamination).(2) modification of material surface.(3) surface sterilization and sterilization or the like.
Traditionally, atmospheric plasma generally is to adopt the high-frequency and high-voltage discharge, and electric power output voltage height, the plasma that is produced are thread discharges, can not produce glow discharge, is not suitable for the surface treatment of sensitive material etc.; In addition, the general power supply that adopts of normal pressure glow plasma spray gun body is 13.56MHz, and this kind power volume is big, the price height, inconvenience is used for a plurality of generator line discharges, thereby has limited the range of application of conventional radio frequency plasma spray gun body, more is not suitable for the requirement that the large tracts of land material surface is handled.
The present invention has introduced a kind of many shower nozzles RF plasma generator, be adopt a plurality of discharge cells integrated, the corresponding power supply of each discharge tube, the discharge frequency of each power supply is 6.78MHz, this radio-frequency power supply power consumption only is tens watts to tens watts, simple in structure, be easier to install and a plurality of plasma discharge tube has constituted a kind of plasma generator of novel many shower nozzles.
Summary of the invention
In order to achieve the above object, the invention discloses a kind of many shower nozzles RF plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: a plurality of plasma torch are mounted on the planar bracket, the spout of a plurality of jet pipes constitutes a horizontal plane, wherein each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and a round loop electrode outside the quartz ampoule spout, one end of the pipe electrode that quartz ampoule coated is in quartz ampoule, the other end is outside pipe, radio-frequency power supply respectively with quartz ampoule in interior electrode be connected with its external electrode, the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, ionization generates plasma when the end of gas by the metal tube electrode that quartz ampoule coated, and by the spout ejection of quartz ampoule.
Described a kind of many shower nozzles RF plasma generator comprises a plurality of radio-frequency power supplies and a plurality of plasma torch etc., and it is characterized by: each plasma torch is mounted on the planar bracket, and the spout of a plurality of jet pipes is on same horizontal plane.
Described a kind of many shower nozzles RF plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and an outer round loop electrode of quartz ampoule spout, the metal tube end that quartz ampoule coated is the 3-10 millimeter from the distance range of the spout of quartz ampoule, and the outer metal ring electrode of quartz ampoule spout is to be coated on outside the quartz ampoule near the spout place.
Described a kind of many shower nozzles RF plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the internal and external electrode of each quartz ampoule is connected with a radio-frequency power supply respectively, and the frequency of radio-frequency power supply is 6.78MHz, and power bracket is 10-30W.
Described a kind of many shower nozzles RF plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, and gas is to adopt argon gas.
Described a kind of many shower nozzles RF plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: be ionized the formation plasma at gas during by metal tube electrode nozzle exit area that quartz ampoule coated, and form the plasma line that outwards sprays.
The invention provides a kind of many shower nozzles RF plasma generator, compare with other type plasma generator, its advantage is: (1), and a plurality of unit RF plasma generator is integrated can to produce larger area glow discharge; (2), equipment is easy to install, and is fit to the surface treatment to the large tracts of land heat-sensitive material.
Main application of the present invention is: to surface treatments such as the surface modification of plane heat-sensitive material, surface clean.
Embodiment
Fig. 1 is a kind of many shower nozzles RF plasma generator of embodiment of the invention side-looking structure chart.
Fig. 2 is a kind of many shower nozzles RF plasma generator of embodiment of the invention plan structure figure.
Fig. 3 is an embodiment of the invention individual plasma generator architecture cross-sectional schematic.
See also Fig. 1, Fig. 2 and Fig. 3, a plurality of plasma torch 103 are mounted on plane 100 supports, the spout of a plurality of jet pipes 103 is at same horizontal plane, wherein each plasma torch 103 is to be made of quartz ampoule, in quartz ampoule 103, coat a metal tube electrode 105, be provided with a round loop electrode 104 outside the end of quartz ampoule 103, the internal and external electrode 105 of quartz ampoule 103 is connected with two outputs of a radio-frequency power supply 101 by stube cable 102 respectively with 104; The other end of metal tube electrode 105 outside quartz ampoule is connected with an air inlet pipe 109, the other end of air inlet pipe 109 is to be connected with gas cylinder 107 by gas pressure reducer 108, ionization generates plasma 106 when metal tube electrode 105 ends that gas is coated by quartz ampoule 103, and this plasma 106 is by the spout ejection of quartz ampoule 103.
Invention has been described in conjunction with specific embodiments with reference to the accompanying drawings above, yet, need to prove, for a person skilled in the art, under the situation that does not break away from the spirit and scope of the present invention, can make many changes and modification to the foregoing description, these changes and modification all drop in the claim restricted portion of the present invention.
Claims (6)
1. the invention discloses a kind of many shower nozzles RF plasma generator, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: a plurality of plasma torch are mounted on the planar bracket, the spout of a plurality of jet pipes constitutes a horizontal plane, wherein each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and a round loop electrode outside the quartz ampoule spout, one end of the pipe electrode that quartz ampoule coated is in quartz ampoule, the other end is outside pipe, radio-frequency power supply respectively with quartz ampoule in interior electrode be connected with its external electrode, the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, ionization generates plasma when the end of gas by the metal tube electrode that quartz ampoule coated, and by the spout ejection of quartz ampoule.
2. a kind of many shower nozzles RF plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: each plasma torch is mounted on the planar bracket, and the spout of a plurality of jet pipes is on same horizontal plane.
3. a kind of many shower nozzles RF plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: each plasma torch is to be made of the quartz ampoule of a clad metal pipe electrode and an outer round loop electrode of quartz ampoule spout, the metal tube end that quartz ampoule coated is the 3-10 millimeter from the distance range of the spout of quartz ampoule, and the outer metal ring electrode of quartz ampoule spout is to be coated on outside the quartz ampoule near the spout place.
4. a kind of many shower nozzles RF plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the internal and external electrode of each quartz ampoule is connected with a radio-frequency power supply respectively, the frequency of radio-frequency power supply is 6.78MHz, and power bracket is 10-30W.
5. a kind of many shower nozzles RF plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: the metal tube electrode that quartz ampoule coated is connected with an air inlet pipe, the other end of air inlet pipe is to be connected with gas cylinder by gas pressure reducer, and gas is to adopt argon gas.
6. a kind of many shower nozzles RF plasma generator as claimed in claim 1, comprise a plurality of radio-frequency power supplies and a plurality of plasma torch etc., it is characterized by: be ionized the formation plasma at gas during by metal tube electrode nozzle exit area that quartz ampoule coated, and form the plasma line that outwards sprays.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010169555 CN102244970A (en) | 2010-05-12 | 2010-05-12 | Multi-nozzle radio frequency plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010169555 CN102244970A (en) | 2010-05-12 | 2010-05-12 | Multi-nozzle radio frequency plasma generator |
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| CN102244970A true CN102244970A (en) | 2011-11-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201010169555 Pending CN102244970A (en) | 2010-05-12 | 2010-05-12 | Multi-nozzle radio frequency plasma generator |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114513890A (en) * | 2022-04-19 | 2022-05-17 | 北京大学第三医院（北京大学第三临床医学院） | Plasma sterilization device with high energy utilization rate and application |
| CN116419462A (en) * | 2023-04-18 | 2023-07-11 | 江苏富乐华功率半导体研究院有限公司 | Plasma generating device with temperature adjusting function |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1812687A (en) * | 2006-02-24 | 2006-08-02 | 清华大学 | Atmospheric radio-frequency discharging high-speed cold plasma array generator |
| EP1689216A1 (en) * | 2005-02-04 | 2006-08-09 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | Atmospheric-pressure plasma jet |
| WO2009157312A1 (en) * | 2008-06-27 | 2009-12-30 | 国立大学法人山梨大学 | Ionization analysis method and device |
| CN201674722U (en) * | 2010-05-12 | 2010-12-15 | 中国科学院嘉兴微电子仪器与设备工程中心 | Same plane plasma generator |
-
2010
- 2010-05-12 CN CN 201010169555 patent/CN102244970A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1689216A1 (en) * | 2005-02-04 | 2006-08-09 | Vlaamse Instelling Voor Technologisch Onderzoek (Vito) | Atmospheric-pressure plasma jet |
| CN1812687A (en) * | 2006-02-24 | 2006-08-02 | 清华大学 | Atmospheric radio-frequency discharging high-speed cold plasma array generator |
| WO2009157312A1 (en) * | 2008-06-27 | 2009-12-30 | 国立大学法人山梨大学 | Ionization analysis method and device |
| CN201674722U (en) * | 2010-05-12 | 2010-12-15 | 中国科学院嘉兴微电子仪器与设备工程中心 | Same plane plasma generator |
Non-Patent Citations (1)
| Title |
|---|
| 《半导体学报》 20071031 赵玲利 等 常压射频冷等离子体刻蚀硅的研究 1615-1619 1-6 第28卷, 第10期 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114513890A (en) * | 2022-04-19 | 2022-05-17 | 北京大学第三医院（北京大学第三临床医学院） | Plasma sterilization device with high energy utilization rate and application |
| CN116419462A (en) * | 2023-04-18 | 2023-07-11 | 江苏富乐华功率半导体研究院有限公司 | Plasma generating device with temperature adjusting function |
| CN116419462B (en) * | 2023-04-18 | 2023-12-01 | 江苏富乐华功率半导体研究院有限公司 | Plasma generating device with temperature adjusting function |
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Application publication date: 20111116 |