CN102221428A - Method for pasting strain foil and equipment for pasting strain foil - Google Patents
Method for pasting strain foil and equipment for pasting strain foil Download PDFInfo
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- CN102221428A CN102221428A CN 201010150778 CN201010150778A CN102221428A CN 102221428 A CN102221428 A CN 102221428A CN 201010150778 CN201010150778 CN 201010150778 CN 201010150778 A CN201010150778 A CN 201010150778A CN 102221428 A CN102221428 A CN 102221428A
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Abstract
The invention is suitable for the field of a method for manufacturing a micro-fusion semiconductor silicon strain foil sensor, which provides a method for pasting a strain foil. The method provided by the invention comprises the following steps: 1) coating viscose on at least one fixing glue which is coated on a pressure film; 2) placing the strain foil on the fixing glue by means of the viscose, thereby enabling the strain foil and the fixing glue to be pasted; and 3.) moving the strain foil in the specified position of the fixing glue. After the technical scheme is adopted, one strain foil is pasted on another strain foil through the three steps; the viscose is pasted on the fixing glue; the strain foil is fixed on the fixing glue; the strain foil and the fixing glue are pasted; and the strain foil is moved to the specified position of the fixing glue, thereby better realizing the technical effect that the strain foil is accurately pasted in the specified position of the fixing glue. The invention also provides equipment for pasting the strain foil.
Description
Technical field
The invention belongs to the semiconductor silicon strain-ga(u)ge transducer and make the field, relate in particular to a kind of method of foil gauge and equipment that pastes foil gauge of pasting.
Background technology
The principle of work of foil gauge is, light strong when external environment condition, temperature, humidity etc. when influence foil gauge, can cause the variation of the resistance, inductance, electric capacity etc. of foil gauge, produces corresponding electricity to export, thereby the variation of external environment condition is measured accurately.
In reality, using more widely, foil gauge mainly is to be made by pressure resistance type strain sensing material, be called as strain gauge pressure sensor, its groundwork principle is: be delivered to by measuring pressure on diaphragm, elastic beam or the strain tube that is pasted with pressure resistance type strain sensing material, make it to produce distortion, the electric bridge of being made up of pressure resistance type strain sensing material has unbalance voltage output, this voltage with act on sensor on be directly proportional by measuring pressure; Therefore, reach by the accurate measurement of measuring pressure by the variation of measuring output voltage.In the time of advantages such as this foil gauge has the precision height, volume is little, in light weight, measurement range is wide, natural frequency is high, dynamic response is fast, also have vibration resistance, the good characteristics of shock resistance, be applicable to and measure hyperpressure, change or pressure, the acceleration of huge pulsation fast, be widely used in fields such as pressure-measuring instrument, automotive electronics, aeronautical product.
Current strain gauge pressure sensor generally is to cut out foil gauge with machinery from stamper, and the workman utilizes epoxy resin that foil gauge is pasted on the pressure film by hand.Because the less and thickness of foil gauge as thin as a wafer, rely on the workman to operate by rule of thumb fully, therefore the quality of the equal strain gauge pressure sensor of any error that the workman is in operation affects greatly, and utilizes the precision of the strain gauge pressure sensor that this method produces low, performance is not good, consistance is bad, reliability is not high and yield rate is lower.
Summary of the invention
The object of the present invention is to provide a kind of method of pasting foil gauge, described method is for making a step of semiconductor silicon strain-ga(u)ge transducer, solved in the strain gauge pressure sensor manufacturing technical matters that how foil gauge is pasted on the fixing glue.
The present invention is achieved in that a kind of method of pasting foil gauge, may further comprise the steps:
1. with foil gauge be coated with and coat one of at least viscose glue in the fixing glue that is imprinted on the pressure film;
2. by viscose glue, foil gauge is positioned on the fixing glue, foil gauge is pasted mutually with fixing glue;
3. foil gauge is toggled it to the assigned address on the fixing glue.
Wherein, step 2. and step 3. between C in steps also, in step C, described bearing part is put into the bearing part anchor clamps that are used for fixing bearing part.
Wherein, step 3. in, utilize to paste foil gauge equipment foil gauge toggled it to assigned address on the fixing glue.
Wherein, step 1. in, with the gluing instrument viscose glue is coated onto on foil gauge or the fixing glue.
Wherein, the front end of described gluing instrument is spherical.
Wherein, step 3. in, with the plectrum instrument foil gauge is toggled it to assigned address on the fixing glue.
Wherein, the front end of described plectrum instrument is conical.
After adopting above technical scheme, the present invention divides 3 steps that foil gauge is pasted on the foil gauge: earlier fixing glue is coated viscose glue, again foil gauge is positioned on the fixing glue, foil gauge is pasted mutually with fixing glue, after foil gauge is toggled it to assigned address on the fixing glue, can reach the technique effect that foil gauge is accurately pasted assigned address on the fixing glue.
The present invention also provides a kind of subsides foil gauge equipment, the support, TV box and the display that comprise digit microscope, support digital micrograph camera lens, described digit microscope is installed on the support, described bearing part anchor clamps place in the digit microscope range of observation, are electrically connected between described digit microscope, TV box and the display.
Wherein also comprise one with reference to frame, describedly be pasted on the display that this is with reference to also offering posting on the frame with reference to frame.
Description of drawings
Fig. 1 is first synoptic diagram from stamper separation foil gauge step that the embodiment of the invention provides.
Fig. 2 is second synoptic diagram from stamper separation foil gauge step that the embodiment of the invention provides.
Fig. 3 is the 3rd synoptic diagram from stamper separation foil gauge step that the embodiment of the invention provides.
Fig. 4 be the embodiment of the invention provide on pressure film, be coated with first synoptic diagram in the seal fixing glue step.
Fig. 5 be the embodiment of the invention provide on pressure film, be coated with second synoptic diagram in the seal fixing glue step.
Fig. 6 be the embodiment of the invention provide with viscose glue foil gauge is pasted synoptic diagram in the fixing glue step.
Fig. 7 is the synoptic diagram in the little fixing glue step that is fused on the sensor construction bearing part of foil gauge that provides of the embodiment of the invention.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer,, the present invention is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
The invention provides a kind of method of using little molten technology manufacturing strain-ga(u)ge transducer, may further comprise the steps:
(1) from the stamper that is carved with foil gauge, isolates foil gauge;
(2) on the sensor metal structure that supports foil gauge, add the fixedly fixing glue of foil gauge;
(3) foil gauge is aligned be positioned over fixedly colloid;
(4) fixing glue is heated fusing, foil gauge are sunk in the fixing glue of fusing to the degree of depth of setting, treat the fixing glue cooling after, foil gauge just for good and all is fixed on the sensor construction bearing part.
After adopting above technical scheme, be coated with on the sensor construction bearing part that is printed on fixing glue, adopt microscope to operate, guarantee that foil gauge pastes the assigned address on the fixing glue owing to foil gauge is separated to paste from stamper; By melting fixing glue, foil gauge sinks among the fixing glue of fusing, treat the fixing glue cooling after, foil gauge just firmly is adhered on the fixing glue.Compared with prior art, scribble one deck fixing glue in the technical program on the sensor construction bearing part, foil gauge and fixing glue are firmly bonded together by the fusing fixing glue; Overcome in the prior art that the workman is manual to paste foil gauge on the sensor construction bearing part with epoxy resin one by one, the precision that the strain-ga(u)ge transducer of being produced exists is low, performance is not good, consistance is bad, reliability is not high and the low problem of yield rate.Practice has proved that also the strain-ga(u)ge transducer that utilizes the technical program to produce not only has precision height, stable performance, high conformity and high reliability features, and yield rate is also higher, also helps large batch of commercial production.
A kind of method of using little molten technology to make strain-ga(u)ge transducer provided by the invention is divided into 4 big steps altogether, and each big step is realized suddenly by some small steps again, existing detailed description one by one.
Step (1): from the stamper that is carved with foil gauge, isolate foil gauge.Below the method for separating foil gauge is elaborated.
See also Fig. 1, in the present embodiment, described stamper is a silicon wafer 1, is carved with the foil gauge (not shown) on it, and described foil gauge is the semiconductor silicon foil gauge; Described silicon wafer 1 is the base stock that is widely used in the silicon semiconductor integrated circuit manufacturing field, and its principal ingredient is a silicon, by polysilicon is purified, made to the silicon dioxide ore through electric arc furnaces refinement, chlorination of hydrochloric acid, distillation; After passing through pull-rod, grinding, polishing, section again, become the silicon wafer finished product; On silicon wafer, scribe required foil gauge by semiconductor technologies such as oxidation, diffusion, photoetching development, etching, cleaning, thin film depositions again, can cut out thousands of foil gauges on the silicon wafer.Because the manufacturing process of silicon wafer and the manufacturing process of scribing foil gauge on silicon wafer are prior art, are not focused protection contents of the present invention, do not elaborate at this.
See also Fig. 1, from the stamper that is carved with foil gauge, isolate foil gauge and comprise following step:
The stamper that 1. will be carved with foil gauge fits on the paster anchor clamps 2 with bonding agent, and wherein, the stamper front that is carved with foil gauge contacts with the paster anchor clamps.
See also Fig. 1, offer a paster groove 21 on the described paster anchor clamps 2, described paster groove 21 sizes are suitable with silicon wafer 1; The stamper of foil gauge is fitted on the paster anchor clamps 2 securely by bonding agent.
During concrete operations, earlier bonding agent is applied to the front (mint-mark has the one side of foil gauge) of silicon wafer 1 and the inside surface of paster groove 21, again silicon wafer 1 is fitted in the paster groove 21 gently.Should prevent to move excessive breakdown strain sheet in above-mentioned applying process, note again with the stand of the bonding agent between silicon wafer 1 and the paster groove 21 evenly not producing bubble; In order to avoid influence subsequent operation.After finishing above-mentioned operation, treat adhesive cools, the paster groove 21 that silicon wafer 1 just is fixed on the paster anchor clamps 2 is interior.
2. with the reverse side of mordant corrosion stamper, the remainder of stamper except that foil gauge eroded,, separate foil gauge.
All be reserved with the groove (not shown) when scribing foil gauge on the described silicon wafer 1 between each foil gauge, the degree of depth of described groove is suitable with the thickness of foil gauge, helps adopting corrosion silicon wafer 1 method to separate foil gauge.
Separate foil gauge with the method for using machine cuts in the prior art and compare, utilize this step to separate and foil gauge is not caused damage the high foil gauge of precision, isolated foil gauge yield rate is higher; In addition, utilize this step can the foil gauge on the whole silicon wafer 1 be separated simultaneously, separation efficiency is higher.Specifically, the thickness of foil gauge has only tens microns to tens microns usually, utilize the method separation foil gauge of machine cuts accurately foil gauge to be separated from silicon wafer 1, even foil gauge is separated, also easily foil gauge is caused damage, reduce the yield rate of foil gauge greatly, in addition, utilizing machinery to separate foil gauge needs one by one foil gauge to be cut out from silicon wafer 1, and can not simultaneously foil gauge be cut, and production efficiency is lower.
3. plastering agent is removed from paster anchor clamps 2, taken out foil gauge.
When completing steps 2. the time, foil gauge is fixed on the paster anchor clamps 2 by bonding agent, and as with the bonding agent dissolving, foil gauge just is separated naturally.
See also Fig. 3, step 3. in, will utilize the lysate dissolved adhesive to separate foil gauge.
In the present embodiment, employing lysate steam dissolves and cleans bonding agent, and described lysate steam is produced by solvent 31 heating of solubilized bonding agent.Opening part at container 3 is placed with a condensation cap 4, is connected with the cooling water pipe (not shown) in the described condensation cap 4, and therefore this condensation cap 4 can keep lower temperature.When running into the lower condensation cap 4 of temperature in the process that lysate steam rises, can condense into liquid and drip, thereby avoid the evaporation of lysate steam from condensation cap 4.
After the whole dissolved liquid steam dissolvings of bonding agent, foil gauge has just been separated fully.
In this step, also provide a kind of equipment that separates foil gauge, the equipment of described separation foil gauge comprises paster anchor clamps and the container that is used for device solubilized bonding agent, offer on the described paster anchor clamps one with the suitable paster groove of silicon wafer size; Be placed with a condensation cap that is used for hot-cold lysis liquid steam on the opening of described container.
Step (2): be coated with the seal fixing glue being used to support on the strain-ga(u)ge transducer structural bearing spare of strain-ga(u)ge transducer.
See also Fig. 4 and Fig. 5, described sensor construction bearing part 53 is a metal parts, which is provided with a pressure film 54.Described pressure film 54 is a plane, and it can provide mounting platform for foil gauge.Below specifically the method that is coated with the seal fixing glue on the sensor construction bearing part is elaborated.
The manufacturing core of strain-ga(u)ge transducer is that semiconductor gauge is joined to the sensor construction bearing part, the position of the used foil gauge of this engaging process, and the thickness of fixing glue, shape etc. all directly influence the precision and the reliability of final strain-ga(u)ge transducer.On the sensor construction bearing part, be coated with the seal fixing glue and can adopt manual or mechanical form to carry out, in the present embodiment, adopt on the pressure film of mechanical mode in the sensor construction bearing part and be coated with the seal fixing glue.See also Fig. 4 and Fig. 5, the method that is coated with the seal fixing glue on the pressure film 54 in sensor construction bearing part 53 comprises following step:
1. fixing glue 55 is positioned over that to offer meshed silk-screen online, sensor construction bearing part 53 is placed under the silk-screen net.
See also Fig. 4 and Fig. 5, step 1. in, described silk-screen net 5 places on the bracing frame (not shown), is placed with sensor construction bearing part 53 below silk-screen net 5, the pressure film 54 on the sensor construction bearing part 53 also is positioned at the below of silk-screen net 5.
Described in the present embodiment fixing glue 55 is for being fit to the mobile slurry of silk-screen, and it can be glass or pottery.Described fixing glue 55 is positioned over silk-screen net 5, can easily it be scraped in the mesh 56 on the silk-screen net 5 with silk-screen scraper 51.The main effect that described fixing glue 55 is play in the present embodiment is to connect foil gauge and sensor construction bearing part 53 and make the foil gauge secure on the pressure film on the sensor construction bearing part 53 54.
See also Fig. 4 and Fig. 5, described silk-screen net 5 is provided with a plurality of mesh 56, in the present embodiment, described mesh 56 is divided into two rows at the length direction of silk-screen net 5, every row's mesh 56 is arranged in a linear, and the size of described mesh 56 is according to the size of sensor construction bearing part 53, determine in the multiple factors such as thickness of sensor construction bearing part 53 fixing glue that is coated with.The below of described mesh 56 is equipped with a sensor construction bearing part 53, between described sensor construction bearing part 53 and the mesh 56 certain intervals is arranged, when firmly pressing down silk-screen net 5, deformation takes place in silk-screen net 5, and the mesh 56 on it contacts with sensor construction bearing part 53; When removing downforce, 5 reinstatements of silk-screen net, mesh 56 is separated with sensor construction bearing part 53.
2. press down and scrape the online fixing glue of silk-screen with the silk-screen scraper, silk-screen net pressurized is close to the sensor construction bearing part 53 of its below, and fixing glue is passed mesh and is printed on the surface of sensor construction bearing part 53 under the pressure of silk-screen scraper.
See also Fig. 4 and Fig. 5, step 2. in, describedly make for the material of wear-resistant material with silk-screen scraper 51, avoid it in the process that scrapes fixing glue 55, to cross quick-wearing; This silk-screen scraper 51 is installed on the screen printer doctor blade holder (not shown).Described screen printer doctor blade holder can drive silk-screen scraper about 51 and move around, with about scrape fixing glue 55 back and forth.Described these silk-screen scraper 51 bottoms are scraper head 52, the main effect of described scraper head 52 is to scrape fixing glue 55 in the mesh 56 and be printed on the sensor construction bearing part 54, the both sides of this scraper head 52 are inclined-plane 521, when scraper head 52 scrapes fixing glue 55, described inclined-plane 521 not only promotes fixing glue 55 forward and moves, but also downward press fit glue 55 makes fixing glue 55 enter mesh 56 more smoothly and is printed on the pressure film 54 on the sensor construction bearing part 53.
See also Fig. 4 and Fig. 5, scrape fixing glue 55 when moving when the screen printer doctor blade holder drives silk-screen scraper 51 along straight line, the scraper head 52 of silk-screen scraper 51 promotes fixing glue 55 on the one hand and moves forward, and presses down fixing glue 55 and silk-screen net 5 on the one hand.Distortion downwards behind described silk-screen net 5 pressurizeds, the mesh 56 on it contacts with the pressure film 54 of below.Described fixing glue 55 is smoothly by mesh 56 and be printed on the pressure film 54.Because silk-screen scraper 51 moves along a straight line, mesh 56 also is arranged in a linear, so silk-screen scraper 51 once can be coated with seal to a plurality of pressure films 54, has improved work efficiency greatly.
3. after the silk-screen scraper was removed on the net from silk-screen, the reinstatement of silk-screen net also separated with the sensor construction bearing part, and fixing glue is printed on the surface of pressure film.
See also Fig. 4 and Fig. 5, described silk-screen scraper 51 just can be removed from silk-screen net 5 after finishing the step that is coated with the seal fixing glue, because silk-screen scraper 51 no longer presses down silk-screen net 5, therefore described silk-screen net 5 reinstatements, mesh 56 is separated with sensor construction bearing part 53.Treat fixing glue 55 after solidifying on the sensor construction bearing part 53, fixing glue 55 just very firm being coated with is imprinted on the sensor construction bearing part 53.
4. described sensor construction bearing part 53 is put into the heating furnace (not shown) and heat, make fixing glue 55 fusings on the pressure film 54, relief fixing glue 55 natural cooling, fixing glue 55 just is solidified as whole and firm sticking on the pressure film 54.
In the present embodiment, 1. described step also has a steps A before, in steps A, on sensor construction bearing part 53 upward pressure films 54 surfaces through pre-service, to obtain consistent rough surface, rough surface had both helped fixing glue 55 and had been coated with seal on the pressure film 54, helped strengthening the cohesive strength of fixing glue 55 and pressure film 54 again.
In this step, a kind of equipment that is coated with the seal fixing glue on the sensor construction bearing part also is provided, comprise bearing part anchor clamps, the silk-screen net that is used for clamping and fixation of sensor structural bearing spare and be used to be coated with the silk-screen scraper that prints fixing glue, wherein, described bearing part anchor clamps place the below of silk-screen net, and described silk-screen scraper places the top of silk-screen net.Wherein, described sensor construction bearing part is that metal material is made; The material that described silk-screen scraper is a wear-resistant material is made, and its underpart is a scraper head, and the two sides of described scraper head are the inclined-plane.
Step (3): foil gauge aligned be positioned on the fixing glue.In the present embodiment, be to paste fixing glue on viscose glue semiconductor gauge and align, certainly, foil gauge also can directly be positioned on the fixing glue without viscose glue.
With fixing glue 55 fusing and allow behind its natural cooling, will use subsides foil gauge instrument foil gauge to be pasted on the fixing glue that is put on the sensor construction bearing part, relative sensor construction bearing part of foil gauge and fixing glue have high status requirement, and whether the position that its subsides are put meets the quality that technological requirement directly determines strain gauge pressure sensor.In the present embodiment, comprise following step:
1. with foil gauge and be coated with in the fixing glue that is imprinted on the pressure film at least one coat viscose glue.
At first with foil gauge and be coated with in the fixing glue that is imprinted on the sensor construction bearing part at least one coat viscose glue, the main effect of described viscose glue is foil gauge temporarily to be fixed on do on the dried fixing glue.
In this step, available gluing instrument is coated viscose glue on foil gauge or fixing glue, described in the present embodiment gluing instrument front end is spherical, so both viscose glue can easily be coated onto foil gauge or fixing glue gets on, and can avoid scratch foil gauge or fixing glue in the process of gluing again.Certainly, described gluing instrument can also be other forms of instrument.
2. by viscose glue, foil gauge is positioned on the fixing glue, foil gauge is pasted mutually with fixing glue;
After coating viscose glue in foil gauge or the fixing glue, foil gauge is placed on the fixing glue, at this moment viscose glue is still wet, therefore can stir foil gauge on fixing glue.
2. also have a step C in step after, in step C, be provided with sensor construction bearing part anchor clamps, described sensor construction bearing part is put into the bearing part anchor clamps; Described solid bearing part anchor clamps are mainly used in fixation of sensor structural bearing spare, and it can not be moved freely.
3. foil gauge is toggled it to the assigned address on the fixing glue.
In the present embodiment, main subsides foil gauge instrument and the vision system of utilizing toggles it to assigned address on the fixing glue with foil gauge.See also Fig. 6, described subsides foil gauge equipment comprises digital micrograph camera lens 61, supports the support 6 of digital micrograph camera lens, TV box 62, display 63 and with reference to frame 64, described digital micrograph camera lens 61 is installed on the support 6, described bearing part anchor clamps 67 place in the range of observation of digital micrograph camera lens 61, be electrically connected between described digital micrograph camera lens 61, TV box 63 and the display 63, describedly need calibration and be pasted on the display with reference to frame 64.
See also Fig. 6, in the time will stirring foil gauge, the sensor construction bearing part put into bearing part anchor clamps 67 and the sensor construction bearing part is added and fasten with bearing part anchor clamps 67; Because bearing part anchor clamps 67 place in the range of observation of digital micrograph camera lens 61, so digital micrograph camera lens 61 can clearly be observed the relative position of foil gauge and fixing glue; Described digital micrograph camera lens 61 is electrically connected with display 63 by TV box, therefore this digital micrograph camera lens 61 can be converted into the relative position of foil gauge and fixing glue electric signal and be sent among the display 63, and therefore described display 63 can clearly demonstrate the relative position of foil gauge and fixing glue.
See also Fig. 6, be pasted with a foil gauge position on the screen of described display 63 with reference to frame 64, described with reference to offering posting 65 on the frame 64, when foil gauge was toggled it to described posting 65, foil gauge just toggled it to the assigned address of fixing glue accordingly.Specifically, described bearing part anchor clamps 67 are fixed on the support 6, described digital micrograph camera lens 61 relative fixed ground observation bearing part anchor clamps 67, therefore the position of bearing part anchor clamps 67 in display 63 also is relatively-stationary, on display 63, paste one offer posting 65 with reference to frame 64, by using the position of the adjustable school of standard model posting 65, the assigned address that itself and foil gauge should be toggled it on the fixing glue in theory coincides, in the time will holding sensor construction and carry foil gauge on the part and toggle it to the foil gauge position with reference to the posting 65 on the frame 64, foil gauge just toggles it to the assigned address of fixing glue accordingly.
With directly stir foil gauge at microscopically in the former technology and compare to the assigned address on the fixing glue, use subsides foil gauge equipment provided by the invention can greatly improve the foil gauge positional precision, made things convenient for workman's operation, shorten the time of group foil gauge, greatly improved work efficiency.
In this step, can adopt the plectrum instrument that foil gauge is toggled it to assigned address on the fixing glue, described plectrum tool head is soft, can accurately stir foil gauge on fixing glue, and foil gauge is stirred the assigned address on the fixing glue and do not damaged foil gauge.
A kind of subsides foil gauge equipment also is provided in this step, the support, TV box and the display that comprise digit microscope, support digital micrograph camera lens, described digit microscope is installed on the support, described bearing part anchor clamps place in the digit microscope range of observation, are electrically connected between described digit microscope, TV box and the display.Wherein, described subsides foil gauge equipment also comprises one with reference to frame, describedly is pasted on the display with reference to frame, and this is with reference to also offering posting on the frame.
Step (4): with the fixing glue fusing of heating, foil gauge sinks in the fixing glue of fusing to the degree of depth of setting, the cooling fixing glue, and foil gauge just is permanently affixed on the sensor construction bearing part.Method to the bonding foil gauge of slightly soluble elaborates below.
After foil gauge pastes assigned address on the fixing glue, the sensor construction bearing part is put into heating furnace heats with the fixing glue on little molten sensor construction bearing part, make foil gauge mutually bonding with fixing glue, the method for the bonding foil gauge of described slightly soluble comprises following step:
1. the sensor construction bearing part being put into heating furnace heats.
See also Fig. 7, step 1. in, described heating furnace 7 comprises air intake opening 71, gas outlet 72, charging aperture 73 and discharging opening 74, the sensor construction bearing part is put into the burner hearth 75 of heating furnace 7 from charging aperture through travelling belt 73, open heating furnace 7, the fixing glue on the sensor construction bearing part is heated.See also Fig. 7, when the fixing glue on 7 pairs of sensor construction bearing parts of heating furnace heated, to burner hearth 75 input pressurized air, described pressurized air was exported from gas outlet 72 from air intake opening 71.The beneficial effect of this step is: 1, to burner hearth 75 input pressurized air, pressurized air flows burner hearth 75 in, makes the more uniform temperature that burner hearth 75 is interior, is of value to the heat fused of fixing glue; 2, to burner hearth 75 input pressurized air, the harmful gas that produces in the time of can taking away or dilute the fixing glue fusing guarantees that effectively these harmful gases do not enter or seldom enter among the fixing glue; 3, compressed-air actuated input and output form a gas curtain, can effectively intercept getting in touch of the outer air of burner hearth 75 and heating furnace 7, prevent that hot stove 7 outer air from bringing dust and impurity into and entering in the burner hearth 75 and combine with the fixing glue of fusing, influence the quality of fixing glue.
2. the fixing glue melted by heat on the sensor construction bearing part, the foil gauge on the fixing glue sink to the fixing glue of fusing to the degree of depth of setting.
3. stop heating, described sensor construction bearing part is taken out from discharging opening 74, allow described fixing glue natural cooling, described foil gauge is adhered among the fixing glue with regard to little melting.In the present embodiment, step 3. after, also have a step B, in step B, the sensor construction bearing part is put into pot arch once more heats to 200～300 ℃, keep the temperature 5～20 hours in the pot arch, to eliminate the internal stress of fixing glue.
At last the sensor construction bearing part is taken out from pot arch, described sensor construction bearing part just is a semiconductor silicon strain-ga(u)ge transducer.Facts have proved that the semiconductor silicon strain-ga(u)ge transducer that utilizes above slightly soluble technical scheme to produce has not only that precision height, performance are good, high conformity and high reliability features, and yield rate also higher, help commercial production in enormous quantities.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a method of pasting foil gauge is characterized in that, may further comprise the steps:
1. with foil gauge be coated with and coat one of at least viscose glue in the fixing glue that is imprinted on the pressure film;
2. by viscose glue, foil gauge is positioned on the fixing glue, foil gauge is pasted mutually with fixing glue;
3. foil gauge is toggled it to the assigned address on the fixing glue.
2. a kind of method of pasting foil gauge as claimed in claim 1 is characterized in that: step 2. and step 3. between C in steps also, in step C, described bearing part is put into the bearing part anchor clamps that are used for fixing bearing part.
3. a kind of method of pasting foil gauge as claimed in claim 2 is characterized in that: step 3. in, utilize to paste foil gauge equipment foil gauge toggled it to assigned address on the fixing glue.
4. a kind of method of pasting foil gauge as claimed in claim 1 is characterized in that: step 1. in, with the gluing instrument viscose glue is coated onto on foil gauge or the fixing glue.
5. a kind of method of pasting foil gauge as claimed in claim 4 is characterized in that: the front end of described gluing instrument is for spherical.
6. a kind of method of pasting foil gauge as claimed in claim 1 is characterized in that: step 3. in, with the plectrum instrument foil gauge is toggled it to assigned address on the fixing glue.
7. a kind of method of pasting foil gauge as claimed in claim 6 is characterized in that: the front end of described plectrum instrument is for conical.
8. one kind is pasted foil gauge equipment, the support, TV box and the display that comprise digit microscope, support digital micrograph camera lens, described digit microscope is installed on the support, described bearing part anchor clamps place in the digit microscope range of observation, are electrically connected between described digit microscope, TV box and the display.
9. a kind of subsides foil gauge equipment as claimed in claim 8 is characterized in that: also comprise one with reference to frame, describedly be pasted on the display with reference to frame that this is with reference to also offering posting on the frame.
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| CN 201010150778 CN102221428B (en) | 2010-04-13 | 2010-04-13 | Method for pasting strain foil and equipment for pasting strain foil |
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| CN 201010150778 CN102221428B (en) | 2010-04-13 | 2010-04-13 | Method for pasting strain foil and equipment for pasting strain foil |
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| CN102221428A true CN102221428A (en) | 2011-10-19 |
| CN102221428B CN102221428B (en) | 2013-04-03 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103662077A (en) * | 2012-09-07 | 2014-03-26 | 中国飞机强度研究所 | Method for protecting strain gauge under oil-water mixture environment |
| CN103727107A (en) * | 2014-01-13 | 2014-04-16 | 清华大学 | Strain piece pasting device suitable for weighing force measuring sensor |
| CN105115649A (en) * | 2015-09-08 | 2015-12-02 | 西南交通大学 | Wheel-rail force strain gage fast and precise positioning device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0442003A (en) * | 1990-06-07 | 1992-02-12 | Meidensha Corp | Method for fixing electric-resistance strain gage |
| CN1595049A (en) * | 2004-07-15 | 2005-03-16 | 赵玉成 | Method for sticking strain foils in polythene composite geomembrane deformation direct measuring and testing technique |
| CN101403829A (en) * | 2008-11-10 | 2009-04-08 | 友达光电（苏州）有限公司 | Contraposition detection method and apparatus |
| CN101619959A (en) * | 2009-08-18 | 2010-01-06 | 中国电力科学研究院 | Device for pressing resistance strain sheets and magnetic patches and method for adhering resistance strain sheets |
-
2010
- 2010-04-13 CN CN 201010150778 patent/CN102221428B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0442003A (en) * | 1990-06-07 | 1992-02-12 | Meidensha Corp | Method for fixing electric-resistance strain gage |
| CN1595049A (en) * | 2004-07-15 | 2005-03-16 | 赵玉成 | Method for sticking strain foils in polythene composite geomembrane deformation direct measuring and testing technique |
| CN101403829A (en) * | 2008-11-10 | 2009-04-08 | 友达光电（苏州）有限公司 | Contraposition detection method and apparatus |
| CN101619959A (en) * | 2009-08-18 | 2010-01-06 | 中国电力科学研究院 | Device for pressing resistance strain sheets and magnetic patches and method for adhering resistance strain sheets |
Non-Patent Citations (2)
| Title |
|---|
| 《传感器世界》 20061231 《传感器世界》编辑部 业界动态-美国精量微熔应变片技术解决医疗产品难题 , * |
| 《自动化仪表》 19851231 颜重光 电阻应变片的粘贴技术 , * |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103662077A (en) * | 2012-09-07 | 2014-03-26 | 中国飞机强度研究所 | Method for protecting strain gauge under oil-water mixture environment |
| CN103662077B (en) * | 2012-09-07 | 2016-01-20 | 中国飞机强度研究所 | Strain-gauge means of defence under a kind of oil mixing with water substance environment |
| CN103727107A (en) * | 2014-01-13 | 2014-04-16 | 清华大学 | Strain piece pasting device suitable for weighing force measuring sensor |
| CN105115649A (en) * | 2015-09-08 | 2015-12-02 | 西南交通大学 | Wheel-rail force strain gage fast and precise positioning device |
| CN105115649B (en) * | 2015-09-08 | 2019-01-15 | 西南交通大学 | Wheel rail force foil gauge fast accurate positioning device |
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