CN101441286A - Method for manufacturing aspherical grating by copy technology - Google Patents

Method for manufacturing aspherical grating by copy technology Download PDF

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Publication number
CN101441286A
CN101441286A CNA200810051626XA CN200810051626A CN101441286A CN 101441286 A CN101441286 A CN 101441286A CN A200810051626X A CNA200810051626X A CN A200810051626XA CN 200810051626 A CN200810051626 A CN 200810051626A CN 101441286 A CN101441286 A CN 101441286A
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China
Prior art keywords
grating
aspheric
motherboard
aspheric grating
board substrate
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CNA200810051626XA
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Chinese (zh)
Inventor
李文昊
齐向东
巴音贺希格
张成山
崔继承
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Application filed by Changchun Institute of Optics Fine Mechanics and Physics of CAS filed Critical Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority to CNA200810051626XA priority Critical patent/CN101441286A/en
Publication of CN101441286A publication Critical patent/CN101441286A/en
Pending legal-status Critical Current

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Abstract

A method for manufacturing non-spherical grating by replica technique belongs to the technical field of spectrum and grating and relates to a method for manufacturing non-spherical grating. The method is aimed at solving the technical problem by providing a method for manufacturing non-spherical grating by replica technique. The technical proposal comprises: step one, selecting a motherboard of non-spherical grating; step two, selecting a substrate, including selecting a replica board substrate and a daughter substrate; step three, manufacturing replica board non-spherical grating, including plating and separating oil membrane and aluminum membrane, bonding and solidifying adhesive layer; step four, manufacturing daughter board non-spherical grating. The method for manufacturing non-spherical grating by replica technique provided by the invention has the advantages of novelty, low cost and easy realization, which can greatly save cost and shorten the manufacturing period of the non-spherical grating. The application of the method can manufacture various non-spherical grating with lower cost; therefore, the method can be used for the batch production of non-spherical grating.

Description

A kind of method that adopts reproduction technology to make aspheric grating
Technical field
The invention belongs to a kind of method of making aspheric grating that relates in the spectral light gate technique field.
Background technology
Concave grating has the self-focusing characteristic, does not need collimating optical system and Focused Optical system can form spectral line when imaging.Aspheric grating is used for spectrometer system to have than concave grating superior characteristic more, can utilize the grating face shape of aspheric grating to adjust the aberration of spectrometer system.
Use aspheric grating can reduce the aberration of optical system, the size of dwindling spectral instrument reduces the amount of parts of forming, and improves image quality, resolving power and the measuring accuracy of spectral instrument.Therefore, aspheric grating becomes the indispensable optical element of development spectral technique.
The making of motherboard aspheric grating has the processing technology complexity, fabrication cycle is long, production efficiency is low, processing cost is high and shortcoming such as repeatable difference.At present, we do not find the method that adopts reproduction technology to make aspheric grating, adopt the epoxide-resin glue reproduction technology to produce aspheric grating and can dwindle fabrication cycle, enhance productivity, reduce cost.
Summary of the invention
The objective of the invention is to reduce cost, enhance productivity, propose a kind of new, cheaply, the aspheric grating that is easy to the realize new method of duplicating.
The technical problem to be solved in the present invention is: a kind of method that adopts reproduction technology to make aspheric grating is provided.The technical scheme of technical solution problem is: the selection of the first step, motherboard aspheric grating; Select the surface not have flaw, motherboard aspheric grating that diffraction efficiency is high, because any defect on surface all can embody on the aspheric grating after duplicating; The selection of second step, substrate comprises the selection of copy board substrate and daughter board substrate; Selection principle is as follows: the motherboard aspheric grating is a concave spherical surface, the copy board substrate should be selected protruding sphere, and the protruding sphere of copy board substrate and the concave spherical surface of motherboard aspheric grating are during relative the coupling, contact around two faces, center section separates, and can make the epoxide-resin glue between grating concave spherical surface and the copy board substrate can retain like this; The 3rd step, manufacturing replica board non-spherical grating, comprise that plating separates oil film, the aluminium film, bonding, curable adhesive layer, as shown in Figure 1, motherboard aspheric grating 1 is put into vacuum coating equipment plate separation oil film 2 and aluminium film 3 respectively, after taking out motherboard aspheric grating 1 epoxide-resin glue is coated on the aluminium film 3 of motherboard aspheric grating 1, form epoxy glue layer 4, then copy board substrate 5 is separated oil film 2 with having, motherboard aspheric grating 1 bonding of aluminium film 3 and epoxy glue layer 4, putting into 63-67 ℃ of drying box then solidifies, be 4-5 hour set time, scraping off with blade then accumulates in around motherboard aspheric grating 1 and copy board substrate 5 bonding parts and epoxide-resin glue that the Chamfer Edge place has cured, copy board substrate 5 after solidifying is separated with the cohesive body of motherboard aspheric grating 1, carry out with blowing up a balloon to obtain copy board aspheric grating 6 after the cleaning; The 4th step, manufacturing daughter board non-spherical grating, as shown in Figure 2, copy board aspheric grating 6 is put into vacuum coating equipment plate separation oil film 7 respectively, aluminium film 8, after the taking-up epoxide-resin glue is coated in and forms epoxy glue layer 9 on the aluminium film 8 of copy board aspheric grating 6, then daughter board substrate 10 is separated oil film 7 with having, copy board aspheric grating 6 bondings of aluminium film 8 and epoxy glue layer 9, putting into drying box then solidifies, solidification temperature is 63-67 ℃, be 4-5 hour set time, scraping off with blade then accumulates in around copy board aspheric grating 6 and daughter board substrate 10 bonding parts and epoxy glue layer 9 that the Chamfer Edge place has cured, daughter board substrate 10 after solidifying is separated with the cohesive body of copy board aspheric grating 6, carry out with blowing up a balloon can obtaining daughter board non-spherical grating 11 after the cleaning, this daughter board non-spherical grating 11 is exactly and 1 identical aspheric grating of shape of motherboard aspheric grating.
Principle of work of the present invention explanation: utilization epoxide-resin glue replica method, take vacuum evaporation to separate oil film and use the technology of epoxy resin glue bond, the aspheric grating by copying that is not easy to make is made.
Good effect of the present invention is: employing replica method that the present invention mentions make aspheric grating be novel, cheaply, be easy to realize, save cost widely, shortened the fabrication cycle of aspheric grating, utilize the inventive method can produce lower-cost all kinds of aspheric grating, this method can be used to produce in batches aspheric grating.
Description of drawings
Fig. 1 is a manufacturing replica board non-spherical grating process synoptic diagram among the present invention.Fig. 2 is the manufacturing process synoptic diagram of daughter board non-spherical grating among the present invention.
Embodiment
The present invention implements by technical scheme making step illustrated in figures 1 and 2, and is specific as follows:
Step 1, to the selection of motherboard aspheric grating, select the surface not have flaw, motherboard aspheric grating that diffraction efficiency is high, what the present invention used is concave grating;
Step 2, manufacturing replica board non-spherical grating are put into the vacuum coating equipment plating with the motherboard aspheric grating and are separated oil film and aluminium film, and the vacuum tightness of vacuum coating equipment requires to reach 5 * 10 -3Pa, use motherboard aspheric grating and copy board substrate bonding after epoxide-resin glue will plate separation oil film and aluminium film, bonding is operated in 60 ℃ the drying box carries out, drying box is put in the motherboard aspheric grating that bonds together and copy board substrate to be solidified, solidification temperature is 63-67 ℃, 4-5 hour set time;
Step 3, with blade scrape off accumulate in motherboard aspheric grating and copy board substrate bonding part around and the epoxide-resin glue that has cured of Chamfer Edge place, copy board substrate after solidifying is separated with the cohesive body of motherboard aspheric grating, carry out with blowing up a balloon obtaining the copy board aspheric grating after the cleaning;
Step 4, make the step of daughter board non-spherical grating: select the surface not have flaw, copy board aspheric grating that diffraction efficiency is high; The copy board aspheric grating is put into the vacuum coating equipment plating separate oil film and aluminium film, the vacuum tightness of vacuum coating equipment requires to reach 5 * 10 -3Pa; Use copy board aspheric grating and daughter board substrate bonding after epoxide-resin glue will plate separation oil film and aluminium film, carry out in the drying box that is operated in 60 ℃ that bonds; Drying box is put in the copy board aspheric grating that bonds together and daughter board substrate solidified, solidification temperature is 63-67 ℃, 4-5 hour set time; With blade scrape off accumulate in copy board aspheric grating and daughter board substrate bonding part around and the epoxide-resin glue that has cured of Chamfer Edge place, daughter board substrate after solidifying is separated with the cohesive body of copy board aspheric grating, carry out obtaining daughter board non-spherical grating after the cleaning with blowing up a balloon.

Claims (1)

1, a kind of method that adopts reproduction technology to make aspheric grating is characterized in that the selection of the first step, motherboard aspheric grating; Select the surface not have flaw, motherboard aspheric grating that diffraction efficiency is high, because any defect on surface all can embody on the aspheric grating after duplicating; The selection of second step, substrate comprises the selection of copy board substrate and daughter board substrate; Selection principle is as follows: the motherboard aspheric grating is a concave spherical surface, the copy board substrate should be selected protruding sphere, and the protruding sphere of copy board substrate and the concave spherical surface of motherboard aspheric grating are during relative the coupling, contact around two faces, center section separates, and can make the epoxide-resin glue between grating concave spherical surface and the copy board substrate can retain like this; The 3rd step, manufacturing replica board non-spherical grating, comprise that plating separates oil film, the aluminium film, bonding, curable adhesive layer, motherboard aspheric grating (1) is put into vacuum coating equipment plate separation oil film (2) and aluminium film (3) respectively, after taking out motherboard aspheric grating (1) epoxide-resin glue is coated on the aluminium film (3) of motherboard aspheric grating (1), form epoxy glue layer (4), then copy board substrate (5) is separated oil film (2) with having, motherboard aspheric grating (1) bonding of aluminium film (3) and epoxy glue layer (4), putting into 63-67 ℃ of drying box then solidifies, be 4-5 hour set time, then with blade scrape off accumulate in motherboard aspheric grating (1) and copy board substrate (5) bonding part around and the epoxide-resin glue that has cured of Chamfer Edge place, copy board substrate (5) after solidifying is separated with the cohesive body of motherboard aspheric grating (1), carry out with blowing up a balloon to obtain copy board aspheric grating (6) after the cleaning; The 4th step, manufacturing daughter board non-spherical grating, copy board aspheric grating (6) is put into vacuum coating equipment plate separation oil film (7) respectively, aluminium film (8), the aluminium film (8) that after the taking-up epoxide-resin glue is coated in copy board aspheric grating (6) is gone up formation epoxy glue layer (9), then daughter board substrate (10) is separated oil film (7) with having, copy board aspheric grating (6) bonding of aluminium film (8) and epoxy glue layer (9), putting into drying box then solidifies, solidification temperature is 63-67 ℃, be 4-5 hour set time, then with blade scrape off accumulate in copy board aspheric grating (6) and daughter board substrate (10) bonding part around and the epoxy glue layer (9) that has cured of Chamfer Edge place, daughter board substrate (10) after solidifying is separated with the cohesive body of copy board aspheric grating (6), carry out with blowing up a balloon can obtaining daughter board non-spherical grating (11) after the cleaning, this daughter board non-spherical grating (11) is exactly and the identical aspheric grating of motherboard aspheric grating (1) face shape.
CNA200810051626XA 2008-12-22 2008-12-22 Method for manufacturing aspherical grating by copy technology Pending CN101441286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA200810051626XA CN101441286A (en) 2008-12-22 2008-12-22 Method for manufacturing aspherical grating by copy technology

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Application Number Priority Date Filing Date Title
CNA200810051626XA CN101441286A (en) 2008-12-22 2008-12-22 Method for manufacturing aspherical grating by copy technology

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CN101441286A true CN101441286A (en) 2009-05-27

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499851A (en) * 2013-09-29 2014-01-08 清华大学深圳研究生院 Glaring concave grating manufacture method
CN104749673A (en) * 2015-04-21 2015-07-01 中国科学院长春光学精密机械与物理研究所 Copying and splicing method of large-size plane diffraction grating
CN108254819A (en) * 2017-12-26 2018-07-06 中国科学院长春光学精密机械与物理研究所 A kind of production method of Chinese character pin-shaped displacement measurement grating
CN108828703A (en) * 2018-08-27 2018-11-16 宜兴市晶科光学仪器有限公司 A kind of clone method of plane diffraction grating
CN109143437A (en) * 2018-10-12 2019-01-04 宁波源禄光电有限公司 A kind of machine cut-ion beam etching prepares grating approach
CN112684530A (en) * 2021-01-22 2021-04-20 宜兴市晶科光学仪器有限公司 Method for preparing aberration-eliminating aspheric flat-field holographic concave grating

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103499851A (en) * 2013-09-29 2014-01-08 清华大学深圳研究生院 Glaring concave grating manufacture method
CN104749673A (en) * 2015-04-21 2015-07-01 中国科学院长春光学精密机械与物理研究所 Copying and splicing method of large-size plane diffraction grating
CN108254819A (en) * 2017-12-26 2018-07-06 中国科学院长春光学精密机械与物理研究所 A kind of production method of Chinese character pin-shaped displacement measurement grating
CN108828703A (en) * 2018-08-27 2018-11-16 宜兴市晶科光学仪器有限公司 A kind of clone method of plane diffraction grating
CN108828703B (en) * 2018-08-27 2020-09-01 宜兴市晶科光学仪器有限公司 Method for copying plane diffraction grating
CN109143437A (en) * 2018-10-12 2019-01-04 宁波源禄光电有限公司 A kind of machine cut-ion beam etching prepares grating approach
CN109143437B (en) * 2018-10-12 2021-03-02 宁波源禄光电有限公司 Method for preparing grating by mechanical cutting-ion beam etching
CN112684530A (en) * 2021-01-22 2021-04-20 宜兴市晶科光学仪器有限公司 Method for preparing aberration-eliminating aspheric flat-field holographic concave grating

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Open date: 20090527