CN102208321A - 一种激光诱导等离子体注入基材的方法及装置 - Google Patents
一种激光诱导等离子体注入基材的方法及装置 Download PDFInfo
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- CN102208321A CN102208321A CN2011101208412A CN201110120841A CN102208321A CN 102208321 A CN102208321 A CN 102208321A CN 2011101208412 A CN2011101208412 A CN 2011101208412A CN 201110120841 A CN201110120841 A CN 201110120841A CN 102208321 A CN102208321 A CN 102208321A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32321—Discharge generated by other radiation
- H01J37/32339—Discharge generated by other radiation using electromagnetic radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32412—Plasma immersion ion implantation
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Abstract
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 201110120841 CN102208321B (zh) | 2011-05-11 | 2011-05-11 | 一种激光诱导等离子体注入基材的方法及装置 |
PCT/CN2011/077731 WO2012151789A1 (zh) | 2011-05-11 | 2011-07-28 | 一种激光诱导等离子体注入基材的方法及装置 |
Applications Claiming Priority (1)
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CN 201110120841 CN102208321B (zh) | 2011-05-11 | 2011-05-11 | 一种激光诱导等离子体注入基材的方法及装置 |
Publications (2)
Publication Number | Publication Date |
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CN102208321A true CN102208321A (zh) | 2011-10-05 |
CN102208321B CN102208321B (zh) | 2013-06-19 |
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CN 201110120841 Expired - Fee Related CN102208321B (zh) | 2011-05-11 | 2011-05-11 | 一种激光诱导等离子体注入基材的方法及装置 |
Country Status (2)
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CN (1) | CN102208321B (zh) |
WO (1) | WO2012151789A1 (zh) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102513440A (zh) * | 2011-12-16 | 2012-06-27 | 江苏大学 | 获取优越高温力学性能镁合金成形件的方法及装置 |
CN102978628A (zh) * | 2012-11-27 | 2013-03-20 | 中国人民解放军空军工程大学 | 在化学热处理过程中采用激光等离子体冲击波增渗的方法 |
CN104044017A (zh) * | 2014-06-06 | 2014-09-17 | 江苏大学 | 一种基于激光冲击波的抛光方法及装置 |
CN104651569A (zh) * | 2015-03-02 | 2015-05-27 | 江西省科学院应用物理研究所 | 一种铸铁的表面改性方法 |
CN104745999A (zh) * | 2015-03-02 | 2015-07-01 | 安徽工业大学 | 一种基于激光冲击波技术的内孔孔壁冲击喷涂的方法及装置 |
CN105751251A (zh) * | 2014-12-16 | 2016-07-13 | 哈尔滨市三和佳美科技发展有限公司 | 负压高温生产仓 |
CN107160040A (zh) * | 2017-07-10 | 2017-09-15 | 江苏大学 | 一种辅助电场调控背面能场的薄板激光背反射增效焊接方法 |
WO2018094982A1 (zh) * | 2016-11-23 | 2018-05-31 | 大连民族大学 | 在低气压环境下用激光诱导激发射频等离子体的方法 |
CN108411274A (zh) * | 2018-04-27 | 2018-08-17 | 天津大学 | Mg/Zn梯度合金的脉冲激光等离子注入的制备方法 |
CN110556280A (zh) * | 2018-06-01 | 2019-12-10 | 北京北方华创微电子装备有限公司 | 等离子体产生装置和离子注入设备 |
CN114324181A (zh) * | 2021-12-23 | 2022-04-12 | 重庆融海超声医学工程研究中心有限公司 | 激光换能装置及其控制方法 |
CN114457317A (zh) * | 2021-12-22 | 2022-05-10 | 北京机械工业自动化研究所有限公司 | 一种离子注入纳米强化层的制备方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114380517B (zh) * | 2021-12-09 | 2023-11-03 | 杭州航天电子技术有限公司 | 一种用于钛合金连接器封接的装置及方法 |
CN114523116B (zh) * | 2022-01-24 | 2023-03-28 | 中国科学院福建物质结构研究所 | 一种解决激光球化设备沾粉问题的方法及装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4714628A (en) * | 1986-02-25 | 1987-12-22 | Commissariat A L'energie Atomique | Process and apparatus for treating a material by a thermoionic effect with a view to modifying its physicochemical properties |
CN1664162A (zh) * | 2004-03-04 | 2005-09-07 | 韩国原子力研究所 | 通过离子注入和热处理制备有色金刚石的方法 |
CN101021003A (zh) * | 2007-03-22 | 2007-08-22 | 华东师范大学 | 能提高材料结晶品质的组合离子注入技术 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07252645A (ja) * | 1994-03-11 | 1995-10-03 | Mitsubishi Electric Corp | 薄膜形成装置 |
US6211080B1 (en) * | 1996-10-30 | 2001-04-03 | Matsushita Electric Industrial Co., Ltd. | Repair of dielectric-coated electrode or circuit defects |
US8182862B2 (en) * | 2003-06-05 | 2012-05-22 | Superpower Inc. | Ion beam-assisted high-temperature superconductor (HTS) deposition for thick film tape |
CN101717912B (zh) * | 2009-12-15 | 2012-02-22 | 江苏大学 | 一种激光冲击波辅助离子渗入金属基体的方法 |
-
2011
- 2011-05-11 CN CN 201110120841 patent/CN102208321B/zh not_active Expired - Fee Related
- 2011-07-28 WO PCT/CN2011/077731 patent/WO2012151789A1/zh active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4714628A (en) * | 1986-02-25 | 1987-12-22 | Commissariat A L'energie Atomique | Process and apparatus for treating a material by a thermoionic effect with a view to modifying its physicochemical properties |
CN1664162A (zh) * | 2004-03-04 | 2005-09-07 | 韩国原子力研究所 | 通过离子注入和热处理制备有色金刚石的方法 |
CN101021003A (zh) * | 2007-03-22 | 2007-08-22 | 华东师范大学 | 能提高材料结晶品质的组合离子注入技术 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102513440B (zh) * | 2011-12-16 | 2013-10-23 | 江苏大学 | 获取优越高温力学性能镁合金成形件的方法及装置 |
CN102513440A (zh) * | 2011-12-16 | 2012-06-27 | 江苏大学 | 获取优越高温力学性能镁合金成形件的方法及装置 |
CN102978628A (zh) * | 2012-11-27 | 2013-03-20 | 中国人民解放军空军工程大学 | 在化学热处理过程中采用激光等离子体冲击波增渗的方法 |
CN104044017A (zh) * | 2014-06-06 | 2014-09-17 | 江苏大学 | 一种基于激光冲击波的抛光方法及装置 |
CN104044017B (zh) * | 2014-06-06 | 2016-07-13 | 江苏大学 | 一种基于激光冲击波的抛光方法 |
CN105751251A (zh) * | 2014-12-16 | 2016-07-13 | 哈尔滨市三和佳美科技发展有限公司 | 负压高温生产仓 |
CN104745999B (zh) * | 2015-03-02 | 2017-03-08 | 安徽工业大学 | 一种基于激光冲击波技术的内孔孔壁冲击喷涂的方法及装置 |
CN104745999A (zh) * | 2015-03-02 | 2015-07-01 | 安徽工业大学 | 一种基于激光冲击波技术的内孔孔壁冲击喷涂的方法及装置 |
CN104651569A (zh) * | 2015-03-02 | 2015-05-27 | 江西省科学院应用物理研究所 | 一种铸铁的表面改性方法 |
WO2018094982A1 (zh) * | 2016-11-23 | 2018-05-31 | 大连民族大学 | 在低气压环境下用激光诱导激发射频等离子体的方法 |
CN107160040A (zh) * | 2017-07-10 | 2017-09-15 | 江苏大学 | 一种辅助电场调控背面能场的薄板激光背反射增效焊接方法 |
CN108411274A (zh) * | 2018-04-27 | 2018-08-17 | 天津大学 | Mg/Zn梯度合金的脉冲激光等离子注入的制备方法 |
CN110556280A (zh) * | 2018-06-01 | 2019-12-10 | 北京北方华创微电子装备有限公司 | 等离子体产生装置和离子注入设备 |
CN114457317A (zh) * | 2021-12-22 | 2022-05-10 | 北京机械工业自动化研究所有限公司 | 一种离子注入纳米强化层的制备方法 |
CN114324181A (zh) * | 2021-12-23 | 2022-04-12 | 重庆融海超声医学工程研究中心有限公司 | 激光换能装置及其控制方法 |
CN114324181B (zh) * | 2021-12-23 | 2024-02-27 | 重庆融海超声医学工程研究中心有限公司 | 激光换能装置及其控制方法 |
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Publication number | Publication date |
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CN102208321B (zh) | 2013-06-19 |
WO2012151789A1 (zh) | 2012-11-15 |
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Address after: 528061 Guangdong Province, Foshan City Industrial Zone, Nanzhuang Town Zinan Macao Patentee after: Jiangsu University Patentee after: Air Engineering Univ., PLA Address before: Zhenjiang City, Jiangsu Province, 212013 Jingkou District Road No. 301 Patentee before: Jiangsu University Patentee before: Air Engineering Univ., PLA |
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Address after: 212114 Zhenjiang, Zhejiang Province, Dantu high capital street, Xiangshan Road, No. 1 Patentee after: Jiangsu University Patentee after: Air Engineering Univ., PLA Address before: 528061 Guangdong Province, Foshan City Industrial Zone, Nanzhuang Town Zinan Macao Patentee before: Jiangsu University Patentee before: Air Engineering Univ., PLA |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130619 Termination date: 20160511 |
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