CN102200169A - Fluid bearing structure and method for forming bearing concaves of fluid bearing structure - Google Patents
Fluid bearing structure and method for forming bearing concaves of fluid bearing structure Download PDFInfo
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- CN102200169A CN102200169A CN2010101481848A CN201010148184A CN102200169A CN 102200169 A CN102200169 A CN 102200169A CN 2010101481848 A CN2010101481848 A CN 2010101481848A CN 201010148184 A CN201010148184 A CN 201010148184A CN 102200169 A CN102200169 A CN 102200169A
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Abstract
The invention provides a fluid bearing structure with bearing concaves of uniform depth and a method for forming the bearing concaves of the fluid bearing structure. In the fluid bearing structure, a tubular part is inserted into a through hole installed on a bearing base so as to form a fluid nozzle for spurting pressurized fluid towards the gap between fluid bearing surfaces. And bearing concaves are formed around the fluid nozzle. Wherein, the bearing base and the tubular part are made from different kinds of materials, and films are generated through an anodic oxidation treatment on the surfaces of the bearing base and the tubular part. Due to different materials of the bearing base and the tubular part, the protective film on the bearing base and the protective film on the tubular part are different in depth. The bearing base adopts a material of fast growth, while the tubular part adopts a material of slow growth.
Description
Technical field
But the present invention relates in the non-contact mode the rotatable or straight line FDB of supporting part movably.
Background technique
In pneumatic bearing, send into pressurized air from the micro-gap of several μ m of fluid ejiction opening between bearing surface as the hydrostatic fluid bearing.Known have, the bearing concave surface of counting μ m by the degree of depth that around the ejiction opening of air, forms groove shape or recess shape, thus bearing rigidity becomes several times.If the degree of depth of bearing concave surface is shallow excessively, then bearing rigidity reduces, if the degree of depth of bearing concave surface is dark excessively, then the flow of the fluid of FDB increases, and produces microvibration.Like this, because the precision of the depth direction of bearing concave surface gives very big influence to the performance of pneumatic bearing, therefore require high-precision processing.
As the method for the bearing concave surface that makes FDB, use the processing of removing of existing grinding or cutting.Use the projecting laser light beam to form the method for the groove of Rack, prescribed depth, specific length in addition.
Thereby disclose for Japanese kokai publication hei 10-113832 number by the rotation that utilizes axle and made the mobile manufacture method that produces the Hydrodynamic bearing of pressure of fluid.The cutting tool that the outside has a groove processing sword is being located at when relatively rotating with bearing part in the through hole of bearing part and is being moved, and produces groove thereby form dynamic pressure.Rotational speed, groove by the change cutting tool are processed the shape and the radical of the sword of usefulness, produce grooves thereby form various dynamic pressures.
In TOHKEMY 2001-159426 number, record for the distance between the bearing surface that makes Hydrodynamic bearing keeps certain and produces dynamic pressure, form the content of dynamic pressure groove at least at a side bearing surface by cutting.The document discloses, and forms lining at bearing surface, utilizes the high-energy rays bundle of laser beam etc. to be radiated at this and is covered with, and forms the groove of Rack, prescribed depth, specific length.
In the method for the bearing groove that utilizes cutting formation FDB, owing to produce protuberance, they must be removed, so expense increases in the outer ring of established groove edge portion.In addition, the degree of depth of groove is set with 1 μ m level, must form these sizes and position exactly, therefore, is difficult to form this groove with machining.In addition, the high-energy light of coating illuminating laser beam etc. is formed the method for bearing groove, need laer machnie, manufacture cost rises.
Summary of the invention
The present invention provides a kind of fluid dynamic bearing structure of the bearing concave surface with even degree of depth and the method that forms this bearing concave surface at bearing surface.
Fluid dynamic bearing structure of the present invention, have first parts, with by first parts rotations freely or straight line move second parts that support freely, first parts and second parts have mutual opposed bearing surface, side at this bearing surface is provided with the fluid ejiction opening, around this fluid ejiction opening, be provided with concave surface, at least one square tube with first parts of the bearing surface that the fluid ejiction opening is set and second parts is crossed and is formed integrally and constitute having the bearing base of bearing surface and having the fluid ejiction opening and be fixed on concave surface on the bearing base, bearing base makes with the different aluminum alloy with different attribute with concave surface formation portion, have in bearing base and concave surface formation portion that the anodizing utilized forms by overlay film, utilize on the bearing base by in overlay film and the concave surface formation portion by the thickness difference of overlay film, around the fluid ejiction opening, form concave surface.
Bearing base and concave surface formation portion do not have the mode of ladder difference by integrated with the end of this concave surface formation portion and the bearing surface of bearing base.
The bearing concave surface creating method of FDB of the present invention is used for fluid dynamic bearing structure, this fluid dynamic bearing structure have first parts and by the rotation of this first parts freely or straight line move second parts that support freely, first parts and second parts have mutual opposed bearing surface, side at this bearing surface is provided with the fluid ejiction opening, is provided with bearing concave surface around this fluid ejiction opening.This method may further comprise the steps: at least one square tube of first parts and second parts is crossed bearing base with bearing surface that the aluminum alloy with unlike material is made and the concave surface with fluid ejiction opening and formed the step that integrally forms; And utilize anodizing in bearing base and concave surface formation portion, to form protective film, and utilize the protective film on the bearing base and the thickness difference of the protective film in the concave surface formation portion, around the fluid ejiction opening, form the step of bearing concave surface.
Perhaps, the bearing concave surface creating method of fluid dynamic bearing structure of the present invention also can may further comprise the steps: at least one square tube of first parts and second parts is crossed bearing base with bearing surface and concave surface that the aluminum alloy with unlike material is made form the step that integrally forms; In concave surface formation portion, form the step of fluid ejiction opening; And utilize anodizing in bearing base and concave surface formation portion, to form protective film, and utilize the protective film on the bearing base and the thickness difference of the protective film in the concave surface formation portion, around the fluid ejiction opening, form the step of bearing concave surface.
Description of drawings
Fig. 1 a and Fig. 1 b are as the straight movable slider of straight moving FDB of the present invention and the approximate three-dimensional map of rotating fluid bearing.
Fig. 2 a and Fig. 2 b are the figure that is illustrated in the fluid ejiction opening that the flow axis bearing surface of the straight movable slider that used FDB or rotating fluid bearing is provided with.
Fig. 3 is the local amplification view of straight movable slider.
Fig. 4 a and Fig. 4 b are explanation makes the example of small concave surface on the surface of aluminium alloy part figure.
Fig. 5 a～Fig. 5 d is the different figure of thickness that explanation forms on each material when utilizing the aluminium alloy material qualitative difference to carry out anodizing (pellumina processing).
Fig. 6 a and Fig. 6 b are that explanation utilizes anodizing to form the figure of bearing concave surface.
Fig. 7 is that explanation is according to the material of aluminum alloy and the different plotted curve of the growth rate of thickness.
Embodiment
Fig. 1 a is the straight movable slider of expression as straight moving FDB of the present invention.Slider part 10 surrounds guide element 11 ground and forms, and slider part 10 is the flow axis bearing surface with the opposed faces of guide element 11, and slider part 10 is supported by guide element 11.On slider part 10 or guide element 11, be provided for spraying the fluid ejiction opening of the pressure fluid of pressurized air etc.In order to supply with sufficient pressure fluid as FDB action convection cell bearing surface.Straight movable slider is used as follows, promptly, with guide element 11 be fixed as static part and movably supporting slider parts 10 mode and slider part 10 is fixed as static part and the mode of supporting guide parts 11 movably.In addition, can also with the fluid ejiction opening about the flow axis bearing surface be configured on the guide element 11, be configured on the slider part 10 in flow axis bearing surface up and down.
Fig. 1 b represents rotating fluid bearing of the present invention.It is the plectane portion 26 of running shaft that rotary component 20 possesses by hole enlargement.The both ends of the surface of the plectane portion 26 of rotary component 20 and side face and constitute the flow axis bearing surface with the inner face of these both ends of the surface and the opposed static part 21 of side face, sufficient fluid is supplied with in gap between this flow axis bearing surface, and rotary component 20 rotatably supports by static part 21 and in the non-contact mode.
Fig. 2 a and Fig. 2 b represent to be arranged on the fluid ejiction opening on the flow axis bearing surface of straight movable slider shown in Fig. 1 a and Fig. 1 b or rotating fluid bearing and the figure of bearing concave surface.Shown in Fig. 2 a, bearing concave surface 31 can form the recess shape at the periphery of each fluid ejiction opening 30, shown in Fig. 2 b, can also form the groove shape at the periphery of a plurality of fluid ejiction openings 30.In other words, shown in Fig. 2 a or Fig. 2 b, can also in the zone of a bearing concave surface 31, form a fluid ejiction opening or a plurality of fluid ejiction opening.Fluid ejiction opening 30 and bearing concave surface 31 are arranged on the either party of the opposed flow axis bearing surface of moving member or static part.By bearing concave surface 31 being set, improve bearing rigidity in the flow axis bearing surface.
Fig. 3 represents along the partial cross section of the straight movable slider of the straight line A-A among Fig. 1 a.Guide element 11 is made of bearing base 33, the cylindrical portion 32 that forms portion as the concave surface that forms concave surface.The through hole of fluid is supplied with in the gap that is provided for 34 of convection cell bearing surfaces on bearing base 33, inserts the cylindrical portion 32 of both ends open at this through hole.Cylindrical portion 32 constitute fluid ejiction openings 30 with the opposed openings of slider part 10.Gap ejection pressure fluid from 34 of fluid ejiction opening 30 convection cell bearing surfaces.Near zone at fluid ejiction opening 30 is formed with bearing concave surface 31.By bearing concave surface 31 is arranged on the near zone of this fluid ejiction opening 30 in the mode of surrounding fluid ejiction opening 30, thereby improve bearing rigidity.
Then, with reference to Fig. 4 a and Fig. 4 b and Fig. 5 a～5d to describing in the situation that the surface of aluminium parts forms small concave surface by anodizing.The surface that Fig. 4 a and Fig. 4 b are illustrated in aluminium alloy part 40 forms the example of small concave surface.A plurality of positions that Fig. 4 a is illustrated in the surface of aluminium alloy part 40 form small concave surface, and Fig. 4 b represents the enlarged view of a small concave surface.
Fig. 5 a～5d represents to utilize the different situation of protective film thickness that the difference of aluminum alloy character forms is obtained by anodizing on two aluminum alloys.Utilize anodizing to form the protective film of thickness on the mother metal surface of aluminum alloy for number μ m～tens of μ m.The thickness of this protective film carries out the occasion of anodizing under the same conditions, because of the material difference of aluminum alloy.
Under the situation identical of the materials A shown in Fig. 5 a, there is not difference at the thickness b of the thickness a of the protective film that forms on the materials A and the protective film that on material B, forms with material B.Fig. 5 b is illustrated in the thickness a situation bigger than the thickness b of the protective film that forms of the protective film that forms on the materials A on material B.Fig. 5 c is illustrated in the thickness a situation littler than the thickness b of the protective film that forms of the protective film that forms on the materials A on material B.Fig. 5 d is illustrated in the situation that does not form protective film on the materials A.According to the present invention, select the dissimilar metal that the thickness of formed protective film creates a difference and utilize anodizing to form bearing concave surface.
Fig. 6 a and Fig. 6 b represent to utilize anodizing to form the operation of bearing concave surface.Shown in Fig. 6 a, guide element 11 is made of bearing base 33 and the cylindrical portion 32 that is inserted in the through hole that is provided with on bearing base 33.Bearing base 33 and cylindrical portion 32 by bonding or be pressed into and in both top concordant mode by integrated.
In the present embodiment, as the material use aluminum alloy A7075 of bearing base 33, as the material use aluminum alloy A2024 of cylindrical portion 32.The anodic oxidation protective film is grown up on aluminum alloy A7075 than on aluminum alloy A2024 apace.Aluminum alloy A2024 is called superduralumin, and aluminum alloy A7075 is called super superduralumin.Aluminum alloy A2024 mainly is made of aluminium and copper.Aluminum alloy A7075 mainly is made of aluminium, zinc, magnesium.
Shown in Fig. 6 b, to bearing base 33 and cylindrical portion 32 are integrated and guide element 11 that constitute carries out anodizing.By making bearing base 33 and cylindrical portion 32 is foreign material, thereby can change the thickness of anode oxide film, can form bearing concave surface 31.The thickness of anodizing can accurately be managed, and can form the concave surface of the degree of depth of bearing concave surface 31 permissible accuracies.
For the depth D EP of the regulation that obtains bearing concave surface 31, the test of anodizing is carried out in the combination of the material that is used to do grooving, obtain the condition of the degree of depth of bearing concave surface 31 for the anodizing of the depth D EP of regulation.The thickness of anode oxide film can be according to managing in the data that the test of the relation of the thickness of condition such as the time of soup, the temperature of soup and anodic oxidation protective film obtains with the voltage of representing anodizing or with material soaking.
Fig. 7 is that expression is according to the kind of aluminum alloy and the different figure of the growth rate of thickness.Obtain in advance in the thickness of the anodic oxidation protective film that forms on the bearing base and the relation in the processing transit time of the thickness of the anodic oxidation protective film that in concave surface formation portion, forms.The degree of depth that can obtain bearing concave surface according to this figure becomes the time t1 of the depth D EP of regulation.
In the above-described embodiment, insert in the through hole of bearing base, between bearing surface, form the fluid ejiction opening of ejecting fluid as the cylindrical portion of the concave surface formation portion that forms concave surface.Replace, also the concave surface formation portion that does not have the hole can be inserted in the through hole of bearing base and with both integrated backs by perforate or perforation formation fluid ejiction opening.
According to the present invention, can on the flow axis bearing surface, form the uniform bearing concave surface of the degree of depth, can also simplify the manufacturing procedure of bearing concave surface, can effectively produce.In addition, can according to the degree of depth of bearing concave surface or concave surface formation portion in the face of the area of flow axis bearing surface changes the quantity or the bore of fluid ejiction opening, can improve bearing rigidity or adjust flowing of fluid.
Claims (4)
1. a fluid dynamic bearing structure is characterized in that,
Have first parts, with support freely by the rotation of above-mentioned first parts or straight line moves second parts that support freely, above-mentioned first parts and above-mentioned second parts have mutual opposed bearing surface, side at this bearing surface is provided with the fluid ejiction opening, around this fluid ejiction opening, be provided with concave surface, at least one square tube with first parts of the bearing surface that the fluid ejiction opening is set and second parts is crossed and is formed integrally and constitute having the bearing base of bearing surface and having the fluid ejiction opening and be fixed on concave surface on the above-mentioned bearing base, above-mentioned bearing base makes with the different aluminum alloy with different attribute with above-mentioned concave surface formation portion
Have in above-mentioned bearing base and above-mentioned concave surface formation portion that the anodizing utilized forms by overlay film, utilize on the above-mentioned bearing base by in overlay film and the above-mentioned concave surface formation portion by the thickness difference of overlay film, around the fluid ejiction opening, form concave surface.
2. fluid dynamic bearing structure according to claim 1 is characterized in that, above-mentioned bearing base and above-mentioned concave surface formation portion do not have the mode of ladder difference integrated with the end of this concave surface formation portion and the bearing surface of bearing base.
3. the bearing concave surface creating method of a fluid dynamic bearing structure, this fluid dynamic bearing structure has first parts and moves second parts that support freely by this first parts rotation support freely or straight line, above-mentioned first parts and above-mentioned second parts have mutual opposed bearing surface, side at this bearing surface is provided with the fluid ejiction opening, around this fluid ejiction opening, be provided with bearing concave surface, the bearing concave surface creating method of above-mentioned fluid dynamic bearing structure is characterised in that to possess following steps:
At least one square tube of above-mentioned first parts and above-mentioned second parts is crossed bearing base with above-mentioned bearing surface that the aluminum alloy with unlike material is made and the concave surface with above-mentioned fluid ejiction opening form the step that integrally forms; And
Utilize anodizing in bearing base and concave surface formation portion, to form protective film, utilize the protective film on the bearing base and the thickness difference of the protective film in the concave surface formation portion, around above-mentioned fluid ejiction opening, form the step of bearing concave surface.
4. the bearing concave surface creating method of a fluid dynamic bearing structure, this fluid dynamic bearing structure has first parts and moves second parts that support freely by this first parts rotation support freely or straight line, above-mentioned first parts and above-mentioned second parts have mutual opposed bearing surface, side at this bearing surface is provided with the fluid ejiction opening, around this fluid ejiction opening, be provided with bearing concave surface, the bearing concave surface creating method of above-mentioned fluid dynamic bearing structure is characterised in that to possess following steps:
At least one square tube of above-mentioned first parts and above-mentioned second parts is crossed bearing base with above-mentioned bearing surface and concave surface that the aluminum alloy with unlike material is made form the step that integrally forms;
In above-mentioned concave surface formation portion, form the step of above-mentioned fluid ejiction opening; And
Utilize anodizing in bearing base and concave surface formation portion, to form protective film, and utilize the protective film on the bearing base and the thickness difference of the protective film in the concave surface formation portion, around above-mentioned fluid ejiction opening, form the step of bearing concave surface.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101481848A CN102200169B (en) | 2010-03-24 | 2010-03-24 | Fluid bearing structure and method for forming bearing concaves of fluid bearing structure |
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| CN2010101481848A CN102200169B (en) | 2010-03-24 | 2010-03-24 | Fluid bearing structure and method for forming bearing concaves of fluid bearing structure |
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| CN102200169A true CN102200169A (en) | 2011-09-28 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04277317A (en) * | 1991-03-05 | 1992-10-02 | Sony Corp | Thrust bearing and manufacture of the same |
| JPH10113832A (en) * | 1996-10-09 | 1998-05-06 | Tokyo Parts Ind Co Ltd | Manufacture of dynamic pressure fluid beaking |
| JP2001159426A (en) * | 1999-10-20 | 2001-06-12 | Minebea Co Ltd | Method of manufacturing fluid bearing |
| CN1749590A (en) * | 2004-09-16 | 2006-03-22 | 发那科株式会社 | Fluid dynamic bearing structure and method of adjusting bearing gap |
| CN1920316A (en) * | 2005-08-23 | 2007-02-28 | 发那科株式会社 | Fluid bearing |
| CN101490430A (en) * | 2006-06-30 | 2009-07-22 | 瑞尼斯豪公司 | Gas bearing fabrication method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4277317B2 (en) * | 2004-09-29 | 2009-06-10 | Ｔｏｔｏ株式会社 | Electrolyzed water generator |
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2010
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04277317A (en) * | 1991-03-05 | 1992-10-02 | Sony Corp | Thrust bearing and manufacture of the same |
| JPH10113832A (en) * | 1996-10-09 | 1998-05-06 | Tokyo Parts Ind Co Ltd | Manufacture of dynamic pressure fluid beaking |
| JP2001159426A (en) * | 1999-10-20 | 2001-06-12 | Minebea Co Ltd | Method of manufacturing fluid bearing |
| CN1749590A (en) * | 2004-09-16 | 2006-03-22 | 发那科株式会社 | Fluid dynamic bearing structure and method of adjusting bearing gap |
| CN1920316A (en) * | 2005-08-23 | 2007-02-28 | 发那科株式会社 | Fluid bearing |
| CN101490430A (en) * | 2006-06-30 | 2009-07-22 | 瑞尼斯豪公司 | Gas bearing fabrication method |
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