CN102200169B - Fluid bearing structure and method for forming bearing concaves of fluid bearing structure - Google Patents
Fluid bearing structure and method for forming bearing concaves of fluid bearing structure Download PDFInfo
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- CN102200169B CN102200169B CN2010101481848A CN201010148184A CN102200169B CN 102200169 B CN102200169 B CN 102200169B CN 2010101481848 A CN2010101481848 A CN 2010101481848A CN 201010148184 A CN201010148184 A CN 201010148184A CN 102200169 B CN102200169 B CN 102200169B
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Abstract
The invention provides a fluid bearing structure with bearing concaves of uniform depth and a method for forming the bearing concaves of the fluid bearing structure. In the fluid bearing structure, a tubular part is inserted into a through hole installed on a bearing base so as to form a fluid nozzle for spurting pressurized fluid towards the gap between fluid bearing surfaces. And bearing concaves are formed around the fluid nozzle. Wherein, the bearing base and the tubular part are made from different kinds of materials, and films are generated through an anodic oxidation treatment on the surfaces of the bearing base and the tubular part. Due to different materials of the bearing base and the tubular part, the protective film on the bearing base and the protective film on the tubular part are different in depth. The bearing base adopts a material of fast growth, while the tubular part adopts a material of slow growth.
Description
Technical field
But the present invention relates to FDB rotatable with cordless or traveling priority ground supporting part.
Background technique
In the pneumatic bearing as Hydrostatic fluid bearing, from the fluid ejiction opening, to the micro-gap of the several μ m between bearing surface, send into pressurized air.Be known to, the bearing concave surface of by the degree of depth that forms groove shape or recess shape around the ejiction opening at air, counting μ m, thus bearing rigidity becomes several times.If the degree of depth of bearing concave surface is excessively shallow, bearing rigidity reduces, if the degree of depth of bearing concave surface is excessively dark, the flow of the fluid of FDB increases, and produces microvibration.Like this, because the precision of the depth direction of bearing concave surface gives very large impact to the performance of pneumatic bearing, therefore require high-precision processing.
As the method for the bearing concave surface that makes FDB, use the processing of removing of existing grinding or cutting.Use in addition the projecting laser light beam to form the method for the groove of Rack, prescribed depth, specific length.
Thereby the manufacture method of the Hydrodynamic bearing that the rotation that Japanese kokai publication hei discloses by utilizing axle for No. 10-113832 is flowed fluid produces pressure.The cutting tool that outside has a groove processing sword is being located in the through hole of bearing part and is being moved when relatively rotating with bearing part, thereby form dynamic pressure, produces groove.Rotational speed, groove by the change cutting tool are processed shape and the radical of the sword of use, thereby form various dynamic pressures, produce grooves.
The distance recorded in No. 2001-159426, TOHKEMY between the bearing surface in order to make Hydrodynamic bearing keeps certain and produces dynamic pressure, and at least the bearing surface a side forms the content of dynamic pressure groove by cutting.The document discloses, and at bearing surface, forms coating, utilizes the high-energy rays bundle of laser beam etc. to be radiated at this and is covered with, and forms the groove of Rack, prescribed depth, specific length.
In the method for the bearing groove that utilizes cutting formation FDB, because the edge, outer ring at established groove produces protuberance, they must be removed, so expense increases.In addition, the degree of depth of groove is set with 1 μ m level, must form exactly these sizes and position, therefore, is difficult to form this groove by machining.In addition, the high-energy light of coating illuminating laser beam etc. is formed to the method for bearing groove, need laer machnie, manufacture cost rises.
Summary of the invention
The present invention is to provide a kind of fluid dynamic bearing structure of the bearing concave surface with even degree of depth and the method that forms this bearing concave surface at bearing surface.
Fluid dynamic bearing structure of the present invention, there is first component, with the second component by first component rotates freely or traveling priority supports freely, first component and second component have mutual opposed bearing surface, a side at this bearing surface is provided with the fluid ejiction opening, be provided with concave surface around this fluid ejiction opening, having the first component of the bearing surface that the fluid ejiction opening is set and at least one party of second component forms by the bearing base that will have bearing surface and the concave surface formation integrally that has the fluid ejiction opening and be fixed on bearing base, bearing base and concave surface forming portion make with the different aluminum alloy with different attribute, have on bearing base and concave surface forming portion that the anodizing utilized forms by overlay film, utilize on bearing base by overlay film and concave surface forming portion by the thickness difference of overlay film, form concave surface around the fluid ejiction opening.
Bearing base and concave surface forming portion do not have the poor mode of ladder by integrated with the end of this concave surface forming portion and the bearing surface of bearing base.
The bearing concave surface creating method of FDB of the present invention is for fluid dynamic bearing structure, this fluid dynamic bearing structure has first component and by the rotation of this first component freely or the second component that supports freely of traveling priority, first component and second component have mutual opposed bearing surface, a side at this bearing surface is provided with the fluid ejiction opening, is provided with bearing concave surface around this fluid ejiction opening.The method comprises the following steps: at least one party of first component and second component is formed to the step that integrally forms by the bearing base with bearing surface that will make with the aluminum alloy of unlike material and the concave surface with fluid ejiction opening; And utilize anodizing to form protective film on bearing base and concave surface forming portion, and utilize protective film on bearing base and the thickness difference of the protective film on the concave surface forming portion, form the step of bearing concave surface around the fluid ejiction opening.
Perhaps, the bearing concave surface creating method of fluid dynamic bearing structure of the present invention also can comprise the following steps: at least one party of first component and second component is formed to the step that integrally forms by the bearing base with bearing surface and the concave surface that will make with the aluminum alloy of unlike material; Form the step of fluid ejiction opening on the concave surface forming portion; And utilize anodizing to form protective film on bearing base and concave surface forming portion, and utilize protective film on bearing base and the thickness difference of the protective film on the concave surface forming portion, form the step of bearing concave surface around the fluid ejiction opening.
The accompanying drawing explanation
Fig. 1 a and Fig. 1 b are as the straight movable slider of straight moving FDB of the present invention and the approximate three-dimensional map of rotating fluid bearing.
Fig. 2 a and Fig. 2 b mean the figure at the fluid ejiction opening of the flow axis bearing surface setting of the straight movable slider that has used FDB or rotating fluid bearing.
Fig. 3 is the local amplification view of straight movable slider.
Fig. 4 a and Fig. 4 b are that explanation makes the figure of the example of small concave surface on the surface of aluminium alloy part.
Fig. 5 a～Fig. 5 d is the different figure of thickness that explanation forms when utilizing the aluminium alloy material qualitative difference to carry out anodizing (pellumina processing) on each material.
Fig. 6 a and Fig. 6 b are that explanation utilizes anodizing to form the figure of bearing concave surface.
Fig. 7 is that explanation is according to the material of aluminum alloy and the different plotted curve of the growth rate of thickness.
Embodiment
Fig. 1 a means the straight movable slider as straight moving FDB of the present invention.Slider part 10 surrounds guide element 11 ground and forms, and slider part 10 is the flow axis bearing surface with the opposed faces of guide element 11, and slider part 10 is supported by guide element 11.Be provided for spraying the fluid ejiction opening of the pressure fluid of pressurized air etc. on slider part 10 or guide element 11.In order as FDB action convection cell bearing surface, to supply with sufficient pressure fluid.Straight movable slider is used as follows,, the guide element 11 of usining is fixed as static part and movably supporting slider parts 10 mode and slider part 10 is fixed as static part and the mode of supporting guide parts 11 movably.In addition, the fluid ejiction opening can also be configured on guide element 11, be configured on slider part 10 in upper and lower flow axis bearing surface the flow axis bearing surface in left and right.
Fig. 1 b means rotating fluid bearing of the present invention.The plectane section 26 that it is running shaft that rotary component 20 possesses by hole enlargement.The both ends of the surface of the plectane section 26 of rotary component 20 and side face and form the flow axis bearing surface with the inner face of these both ends of the surface and the opposed static part 21 of side face, sufficient fluid is supplied with in gap between this flow axis bearing surface, and rotary component 20 is by static part 21 and rotatably support with cordless.
Fig. 2 a and Fig. 2 b mean to be arranged on fluid ejiction opening on the flow axis bearing surface of the straight movable slider shown in Fig. 1 a and Fig. 1 b or rotating fluid bearing and the figure of bearing concave surface.As shown in Figure 2 a, bearing concave surface 31 can form at the periphery of each fluid ejiction opening 30 the recess shape, as shown in Figure 2 b, can also form at the periphery of a plurality of fluid ejiction openings 30 the groove shape.In other words, as shown in Fig. 2 a or Fig. 2 b, can also in the zone of a bearing concave surface 31, form a fluid ejiction opening or a plurality of fluid ejiction opening.Fluid ejiction opening 30 and bearing concave surface 31 are arranged on the either party of the opposed flow axis bearing surface of moving member or static part.By in the flow axis bearing surface, bearing concave surface 31 being set, improve bearing rigidity.
Fig. 3 means along the partial cross section of the straight movable slider of the straight line A-A in Fig. 1 a.Guide element 11 is by bearing base 33, form as the cylindrical portion 32 of the concave surface forming portion that forms concave surface.The through hole of fluid is supplied with in the gap that is provided for 34 of convection cell bearing surfaces on bearing base 33, inserts the cylindrical portion 32 of both ends open at this through hole.Cylindrical portion 32 form fluid ejiction opening 30 with the opposed opening of slider part 10.Gap ejection pressure fluid from 34 of fluid ejiction opening 30 convection cell bearing surfaces.Near zone at fluid ejiction opening 30 is formed with bearing concave surface 31.By bearing concave surface 31 is arranged on to the near zone of this fluid ejiction opening 30 in the mode of surrounding fluid ejiction opening 30, thereby improve bearing rigidity.
Then, with reference to Fig. 4 a and Fig. 4 b and Fig. 5 a～5d, the situation that forms small concave surface on the surface of aluminium parts by anodizing is described.The surface that Fig. 4 a and Fig. 4 b are illustrated in aluminium alloy part 40 forms the example of small concave surface.A plurality of positions that Fig. 4 a is illustrated in the surface of aluminium alloy part 40 form small concave surface, and Fig. 4 b means the enlarged view of a small concave surface.
The different situation of protective film thickness obtained by anodizing that Fig. 5 a～5d means to utilize the difference of aluminum alloy character to form on two aluminum alloys.Utilize anodizing to form on the mother metal surface of aluminum alloy the protective film that thickness is several μ m～tens of μ m.The thickness of this protective film carries out the occasion of anodizing under the same conditions, because of the material difference of aluminum alloy.
In the situation that the materials A shown in Fig. 5 a is identical with material B, the thickness a of the protective film formed on materials A and the thickness b of the protective film formed on material B do not have difference.Fig. 5 b is illustrated in the thickness a situation larger than the thickness b of the protective film formed on material B of the protective film formed on materials A.Fig. 5 c is illustrated in the thickness a situation less than the thickness b of the protective film formed on material B of the protective film formed on materials A.Fig. 5 d is illustrated in the situation that does not form protective film on materials A.According to the present invention, the dissimilar metal of selecting the thickness of formed protective film to create a difference also utilizes anodizing to form bearing concave surface.
Fig. 6 a and Fig. 6 b mean to utilize anodizing to form the operation of bearing concave surface.As shown in Figure 6 a, guide element 11 consists of bearing base 33 and the cylindrical portion 32 be inserted in the through hole arranged on bearing base 33.Bearing base 33 and cylindrical portion 32 by bonding or be pressed into and in both top concordant mode by integrated.
In the present embodiment, as the materials'use aluminum alloy A7075 of bearing base 33, as the materials'use aluminum alloy A2024 of cylindrical portion 32.The anodic oxidation protective film is grown up rapidly on aluminum alloy A7075 than on aluminum alloy A2024.Aluminum alloy A2024 is called superduralumin, and aluminum alloy A7075 is called super superduralumin.Aluminum alloy A2024 mainly consists of aluminium and copper.Aluminum alloy A7075 mainly consists of aluminium, zinc, magnesium.
As shown in Figure 6 b, to bearing base 33 and cylindrical portion 32 is integrated and guide element 11 that form carries out anodizing.Be foreign material by making bearing base 33 and cylindrical portion 32, thereby can change the thickness of anode oxide film, can form bearing concave surface 31.The thickness of anodizing can accurately be managed, and can form the concave surface of the degree of depth of bearing concave surface 31 permissible accuracies.
Depth D EP for the regulation that obtains bearing concave surface 31, carry out the test of anodizing to the combination of the material for doing grooving, obtain the condition that the degree of depth of bearing concave surface 31 is the anodizing of the depth D EP of regulation.The thickness of anode oxide film can manage according to the voltage with meaning anodizing or the data that material soaking is obtained in the test of the relation of the thickness of the condition such as the time of liquid, the temperature of liquid and anodic oxidation protective film.
Fig. 7 means according to the kind of aluminum alloy and the different figure of the growth rate of thickness.Obtain in advance the thickness of the anodic oxidation protective film formed and the relation in the processing transit time of the thickness of the anodic oxidation protective film formed on the concave surface forming portion on bearing base.The degree of depth that can obtain bearing concave surface according to this figure becomes the time t1 of the depth D EP of regulation.
In the above-described embodiment, as the cylindrical portion of the concave surface forming portion that forms concave surface, insert in the through hole of bearing base, form the fluid ejiction opening of ejecting fluid between bearing surface.Replace, also the concave surface forming portion that does not have hole can be inserted in the through hole of bearing base and after both are integrated by perforate or perforation formation fluid ejiction opening.
According to the present invention, can form the uniform bearing concave surface of the degree of depth on the flow axis bearing surface, can also simplify the manufacturing procedure of bearing concave surface, can effectively produce.In addition, can change quantity or the bore of fluid ejiction opening according to the area in the face of the flow axis bearing surface of the degree of depth of bearing concave surface or concave surface forming portion, can improve bearing rigidity or adjust flowing of fluid.
Claims (4)
1. a fluid dynamic bearing structure, is characterized in that,
There is first component, with the second component by above-mentioned first component rotation is supported freely or traveling priority supports freely, above-mentioned first component and above-mentioned second component have mutual opposed bearing surface, a side at this bearing surface is provided with the fluid ejiction opening, be provided with concave surface around this fluid ejiction opening, having the first component of the bearing surface that the fluid ejiction opening is set and at least one party of second component forms by the bearing base that will have bearing surface and the concave surface formation integrally that has the fluid ejiction opening and be fixed on above-mentioned bearing base, above-mentioned bearing base and above-mentioned concave surface forming portion make with the different aluminum alloy with different attribute, adopt the slow material of growth of comparing the anodic oxidation protective film with the material of above-mentioned bearing base for above-mentioned concave surface forming portion,
Have on above-mentioned bearing base and above-mentioned concave surface forming portion that the anodizing utilized forms by overlay film, utilize on above-mentioned bearing base by overlay film and above-mentioned concave surface forming portion by the thickness difference of overlay film, form concave surface around the fluid ejiction opening.
2. fluid dynamic bearing structure according to claim 1, is characterized in that, above-mentioned bearing base and above-mentioned concave surface forming portion do not have the poor mode of ladder integrated with the end of this concave surface forming portion and the bearing surface of bearing base.
3. the bearing concave surface creating method of a fluid dynamic bearing structure, the second component that this fluid dynamic bearing structure has first component and supported freely by this first component rotation support freely or traveling priority, above-mentioned first component and above-mentioned second component have mutual opposed bearing surface, a side at this bearing surface is provided with the fluid ejiction opening, be provided with bearing concave surface around this fluid ejiction opening, the bearing concave surface creating method of above-mentioned fluid dynamic bearing structure is characterised in that to possess following steps:
At least one party of above-mentioned first component and above-mentioned second component is formed to the step that integrally forms by the bearing base with above-mentioned bearing surface that will make with the aluminum alloy of unlike material and the concave surface with above-mentioned fluid ejiction opening, adopt the slow material of growth of comparing the anodic oxidation protective film with the material of above-mentioned bearing base for above-mentioned concave surface forming portion; And
Utilize anodizing to form protective film on bearing base and concave surface forming portion, utilize protective film on bearing base and the thickness difference of the protective film on the concave surface forming portion, form the step of bearing concave surface around above-mentioned fluid ejiction opening.
4. the bearing concave surface creating method of a fluid dynamic bearing structure, the second component that this fluid dynamic bearing structure has first component and supported freely by this first component rotation support freely or traveling priority, above-mentioned first component and above-mentioned second component have mutual opposed bearing surface, a side at this bearing surface is provided with the fluid ejiction opening, be provided with bearing concave surface around this fluid ejiction opening, the bearing concave surface creating method of above-mentioned fluid dynamic bearing structure is characterised in that to possess following steps:
At least one party of above-mentioned first component and above-mentioned second component is formed to the step that integrally forms by the bearing base with above-mentioned bearing surface and the concave surface that will make with the aluminum alloy of unlike material, adopt the slow material of growth of comparing the anodic oxidation protective film with the material of above-mentioned bearing base for above-mentioned concave surface forming portion;
Form the step of above-mentioned fluid ejiction opening on above-mentioned concave surface forming portion; And
Utilize anodizing to form protective film on bearing base and concave surface forming portion, and utilize protective film on bearing base and the thickness difference of the protective film on the concave surface forming portion, form the step of bearing concave surface around above-mentioned fluid ejiction opening.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101481848A CN102200169B (en) | 2010-03-24 | 2010-03-24 | Fluid bearing structure and method for forming bearing concaves of fluid bearing structure |
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| CN2010101481848A CN102200169B (en) | 2010-03-24 | 2010-03-24 | Fluid bearing structure and method for forming bearing concaves of fluid bearing structure |
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| CN102200169B true CN102200169B (en) | 2013-12-11 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001159426A (en) * | 1999-10-20 | 2001-06-12 | Minebea Co Ltd | Method of manufacturing fluid bearing |
| CN1749590A (en) * | 2004-09-16 | 2006-03-22 | 发那科株式会社 | Fluid dynamic bearing structure and method of adjusting bearing gap |
| CN1920316A (en) * | 2005-08-23 | 2007-02-28 | 发那科株式会社 | Fluid bearing |
| JP4277317B2 (en) * | 2004-09-29 | 2009-06-10 | Ｔｏｔｏ株式会社 | Electrolyzed water generator |
| CN101490430A (en) * | 2006-06-30 | 2009-07-22 | 瑞尼斯豪公司 | Gas bearing fabrication method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04277317A (en) * | 1991-03-05 | 1992-10-02 | Sony Corp | Thrust bearing and manufacture of the same |
| JPH10113832A (en) * | 1996-10-09 | 1998-05-06 | Tokyo Parts Ind Co Ltd | Manufacture of dynamic pressure fluid beaking |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001159426A (en) * | 1999-10-20 | 2001-06-12 | Minebea Co Ltd | Method of manufacturing fluid bearing |
| CN1749590A (en) * | 2004-09-16 | 2006-03-22 | 发那科株式会社 | Fluid dynamic bearing structure and method of adjusting bearing gap |
| JP4277317B2 (en) * | 2004-09-29 | 2009-06-10 | Ｔｏｔｏ株式会社 | Electrolyzed water generator |
| CN1920316A (en) * | 2005-08-23 | 2007-02-28 | 发那科株式会社 | Fluid bearing |
| CN101490430A (en) * | 2006-06-30 | 2009-07-22 | 瑞尼斯豪公司 | Gas bearing fabrication method |
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