CN102185119A - Oled玻璃基片清洗设备及其清洗方法 - Google Patents
Oled玻璃基片清洗设备及其清洗方法 Download PDFInfo
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- CN102185119A CN102185119A CN2011100841624A CN201110084162A CN102185119A CN 102185119 A CN102185119 A CN 102185119A CN 2011100841624 A CN2011100841624 A CN 2011100841624A CN 201110084162 A CN201110084162 A CN 201110084162A CN 102185119 A CN102185119 A CN 102185119A
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- Prior art keywords
- glass substrate
- oled glass
- oled
- shower
- cleaning
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- 239000000758 substrate Substances 0.000 title claims abstract description 148
- 239000011521 glass Substances 0.000 title claims abstract description 124
- 238000004140 cleaning Methods 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 title claims abstract description 27
- 238000001035 drying Methods 0.000 claims abstract description 22
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 239000007921 spray Substances 0.000 claims abstract description 14
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 230000008520 organization Effects 0.000 claims description 25
- 239000012530 fluid Substances 0.000 claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 238000007664 blowing Methods 0.000 claims description 8
- 238000010926 purge Methods 0.000 claims description 4
- 230000001154 acute effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000005201 scrubbing Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 abstract description 6
- 230000003749 cleanliness Effects 0.000 abstract description 2
- 238000005096 rolling process Methods 0.000 abstract 2
- 238000011086 high cleaning Methods 0.000 abstract 1
- 230000008569 process Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
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Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201110084162 CN102185119B (zh) | 2011-04-02 | 2011-04-02 | Oled玻璃基片清洗设备及其清洗方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201110084162 CN102185119B (zh) | 2011-04-02 | 2011-04-02 | Oled玻璃基片清洗设备及其清洗方法 |
Publications (2)
Publication Number | Publication Date |
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CN102185119A true CN102185119A (zh) | 2011-09-14 |
CN102185119B CN102185119B (zh) | 2013-04-10 |
Family
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Application Number | Title | Priority Date | Filing Date |
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CN 201110084162 Expired - Fee Related CN102185119B (zh) | 2011-04-02 | 2011-04-02 | Oled玻璃基片清洗设备及其清洗方法 |
Country Status (1)
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CN (1) | CN102185119B (zh) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102632061A (zh) * | 2012-03-21 | 2012-08-15 | 李莉 | 一种平板玻璃辊洗装置 |
CN103394482A (zh) * | 2013-08-14 | 2013-11-20 | 耀安电池电源科技(深圳)有限公司 | 一种纽扣电池清洗机 |
CN104907289A (zh) * | 2014-03-13 | 2015-09-16 | 东莞高伟光学电子有限公司 | 清洁电子元件的清洁设备及工艺 |
CN106695489A (zh) * | 2016-12-12 | 2017-05-24 | 重庆兆冠玻璃有限公司 | 新型带风洗和水洗功能的玻璃双边磨边机 |
WO2018090303A1 (zh) * | 2016-11-17 | 2018-05-24 | 深圳市柔宇科技有限公司 | 传送装置和玻璃清洗装置 |
CN108705694A (zh) * | 2018-04-26 | 2018-10-26 | 杨国亭 | 一种玻璃加工厂用玻璃移栽装置 |
CN108723046A (zh) * | 2018-07-18 | 2018-11-02 | 北京铂阳顶荣光伏科技有限公司 | 清洗设备 |
CN114798648A (zh) * | 2022-03-10 | 2022-07-29 | 深圳市卓尔航科技有限公司 | 一种用于lcd玻璃清洗的蚀刻脱模清洗机 |
CN114931338A (zh) * | 2022-06-17 | 2022-08-23 | 广东栗子科技有限公司 | 一种洗地机 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101170056A (zh) * | 2007-11-28 | 2008-04-30 | 上海广电电子股份有限公司 | 有机电致发光显示面板蚀刻设备及其方法 |
US20080261409A1 (en) * | 2007-04-20 | 2008-10-23 | Applied Materials, Inc. | Processing device and method for processing a substrate |
WO2010055851A1 (ja) * | 2008-11-14 | 2010-05-20 | 東京エレクトロン株式会社 | 基板処理システム |
CN202067842U (zh) * | 2011-04-02 | 2011-12-07 | 东莞宏威数码机械有限公司 | Oled玻璃基片清洗设备 |
-
2011
- 2011-04-02 CN CN 201110084162 patent/CN102185119B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080261409A1 (en) * | 2007-04-20 | 2008-10-23 | Applied Materials, Inc. | Processing device and method for processing a substrate |
CN101170056A (zh) * | 2007-11-28 | 2008-04-30 | 上海广电电子股份有限公司 | 有机电致发光显示面板蚀刻设备及其方法 |
WO2010055851A1 (ja) * | 2008-11-14 | 2010-05-20 | 東京エレクトロン株式会社 | 基板処理システム |
CN202067842U (zh) * | 2011-04-02 | 2011-12-07 | 东莞宏威数码机械有限公司 | Oled玻璃基片清洗设备 |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102632061A (zh) * | 2012-03-21 | 2012-08-15 | 李莉 | 一种平板玻璃辊洗装置 |
CN103394482A (zh) * | 2013-08-14 | 2013-11-20 | 耀安电池电源科技(深圳)有限公司 | 一种纽扣电池清洗机 |
CN104907289A (zh) * | 2014-03-13 | 2015-09-16 | 东莞高伟光学电子有限公司 | 清洁电子元件的清洁设备及工艺 |
WO2018090303A1 (zh) * | 2016-11-17 | 2018-05-24 | 深圳市柔宇科技有限公司 | 传送装置和玻璃清洗装置 |
CN106695489A (zh) * | 2016-12-12 | 2017-05-24 | 重庆兆冠玻璃有限公司 | 新型带风洗和水洗功能的玻璃双边磨边机 |
CN108705694A (zh) * | 2018-04-26 | 2018-10-26 | 杨国亭 | 一种玻璃加工厂用玻璃移栽装置 |
CN108723046A (zh) * | 2018-07-18 | 2018-11-02 | 北京铂阳顶荣光伏科技有限公司 | 清洗设备 |
WO2020015219A1 (zh) * | 2018-07-18 | 2020-01-23 | 北京铂阳顶荣光伏科技有限公司 | 清洗设备 |
CN114798648A (zh) * | 2022-03-10 | 2022-07-29 | 深圳市卓尔航科技有限公司 | 一种用于lcd玻璃清洗的蚀刻脱模清洗机 |
CN114931338A (zh) * | 2022-06-17 | 2022-08-23 | 广东栗子科技有限公司 | 一种洗地机 |
Also Published As
Publication number | Publication date |
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CN102185119B (zh) | 2013-04-10 |
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