CN102183418B - Device for testing micro-torsion mechanical property of low-dimension material - Google Patents
Device for testing micro-torsion mechanical property of low-dimension material Download PDFInfo
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- CN102183418B CN102183418B CN201110049785A CN201110049785A CN102183418B CN 102183418 B CN102183418 B CN 102183418B CN 201110049785 A CN201110049785 A CN 201110049785A CN 201110049785 A CN201110049785 A CN 201110049785A CN 102183418 B CN102183418 B CN 102183418B
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Abstract
The invention provides a device for testing the micro-torsion mechanical property of a low-dimension material. The device comprises a stander, a force sensor, a micro-torsion sensor, a torsion wire rotation angle measurement component, an upper chuck, a lower chuck, a stepping motor, a three-dimensional translation table, a screw and nut component, a servo controller, an analog-to-digital collection card and a computer system, wherein both ends of a tension wire of the micro-torsion sensor are tensioned and fixed on a bracket and have high rigidity and stability; by replacement of the torsion wire, a measurement range can be adjusted; moreover, the force sensor is arranged at the upper end of the micro-torsion sensor, so that an axial force during torsion test can be detected in real time. In the device, a rotation angle of the torsion wire is measured in a manner of combining a light target and a photoelectric displacement sensor; and compared with a conventional light lever method, the device has a compact structure, high automation degree and high stability. By regulation of the three-dimensional translation table, an upper chucking point and a lower chucking point can be aligned. The computer system can obtain a torque-rotation-angle curve of a test sample in real time. The device is applicable to micro-torsion mechanical property of the low-dimension material.
Description
Technical field
The present invention relates to a kind ofly, belong to microscale material mechanical performance precision measurement field the little device that reverses Mechanics Performance Testing of low-dimensional materials such as fiber, film.
Background technology
Microelectromechanical systems (Micro-electromechanical Systems; MEMS) be collection sensing, information processing and the integrated micro-system that is executed in one; Be widely used in acceleration transducer, inertia, pressure transducer, microjet, mass data storage system and miniature biochemical analysis equipment etc., application is also in continuous expansion.The low-dimensional materials such as silicon fiml, metallic film and various fibers of geometric feature sizes in micron or sub-micrometer scale are adopted in the design of MEMS system and selection in a large number.Therefore, the mechanical behavior of this type material is tested accurately and reliably, not only security and the reliability for MEMS is most important, and for the research of micro nanometer mechanics and material science important science and using value is arranged also.Particularly in recent years a large amount of experiments show, when the characteristic length of the non-homogeneous plastic yield of metal material during in micron or sub-micrometer scale, show strong scale effect.In order to test the mechanical property of micro Nano material, the researchist has designed various little stretchings, micro-indentations and microbend experimental provision.But for little torsion test of low-dimensional materials, owing to face the clamping of measurement such as the sensitivity of torque sensor and stability, corner, sample and to medium problem, the work of this respect stagnates always, corresponding experimental provision also rarely has report.
Little mechanics performance measurement that reverses of low-dimensional materials is as a new problem, at present also perfect without comparison measuring method.(M.T.A Saifand N.C MacDonald such as Sail; Journal of Materials Research 13; 3353 (1998) .) utilize micro-processing technology that torsional specimen, actuator and calibration rod etc. are coupling in the MEMS system, the square-section single crystal silicon material that is of a size of 1 μ m * 1 μ m and 1.5 μ m * 1.5 μ m has been carried out little Mechanics Performance Testing of reversing.The problem that this method exists is the demarcation difficulty of driving force, and the small size of sample influences test result, and the range of this device is less.(G.Schiltges such as Schiltges; D.Gsell, and J.Dual, Microsystem technologies 5; 22 (1998) .) development torsion device in sample be bonded on the anchor clamps; And be consistent with the axis of torque sensor, the optical lever principle is adopted in the measurement of windup-degree, and the tension of sample is measured by precision balance.Little torsion test through to silicon and nickel sample finds that the defective that this device exists mainly contains: the clamping of sample and centering are inconvenient, and structural stability is poor, and torsion wire outer corner measurement assembly is complicated, and measuring result error is bigger.(N.A.Fleck et al. such as Fleck; Acta Metallurgica et Materialia 42; 475 (1994) .) in order to study the scale effect in the little twist process of thin copper wire, built a little torsion test device of filament, this device adopts glass fiber as elasticity of torsion element; The two ends of glass fiber are connected with drive unit with sample respectively, and the torsion angle of sample obtains through two pointers and bevel protractor.Still there be the clamping and the centering inconvenience of sample in this device, and structural stability is poor, and the angle-data reading efficiency hangs down inferior shortcoming.
In sum, little torsion test is as observation low-dimensional materials scale effect and reverse the effective means of mechanical property, and its method of testing is still far from perfect.Therefore, the little mechanics performance testing device that reverses of development low-dimensional materials has important scientific meaning and practical value, also will make bigger contribution for the development that promotes micro nanometer mechanics and MEMS.
Summary of the invention
The object of the present invention is to provide the little device that reverses Mechanics Performance Testing of a kind of low-dimensional materials; Automatically, in real time, accurately measure the torsion curves of low-dimensional materials sample when little reversing such as fiber, film, thereby obtain to characterize the parameter value that low-dimensional materials reverse mechanical property; This device has applied widely, and is highly sensitive, Stability Analysis of Structures, the reliable advantage of measurement result.
The little mechanics performance testing device that reverses of a kind of low-dimensional materials provided by the invention; It is characterized in that this device comprises frame, force transducer, little torque sensor, torsion wire outer corner measurement assembly, upper grip, lower chuck, stepper motor, D translation platform, feed screw nut assembly, servo controller, A/D capture card and computer system; Little torque sensor comprises torsion wire, support, rectangle frame, goes up torsion wire fixed block and following torsion wire fixed block; The torsion wire tensioning is fixed on the support, and two ends are used the torsion wire fixed block respectively and compressed with following torsion wire fixed block, and the middle part of torsion wire is fixed in the rectangle frame suspension.
The support of little torque sensor is fixed on the upper end of frame through the force transducer suspension; Upper grip adopts the mode of fastener to be connected the lower end of rectangle frame; Lower chuck is installed on the main shaft of stepper motor, and upper grip and lower chuck are used for the clamping sample, and stepper motor is placed on the D translation platform; The D translation platform is installed on the feed screw nut assembly, and the feed screw nut assembly is fixed on the bottom of frame.
Described servo controller is electrically connected with stepper motor; The A/D capture card is used for the data acquisition to torsion wire corner and axial tension, and servo controller and A/D capture card all are electrically connected with computer system;
Said torsion wire outer corner measurement assembly is made up of one dimension translation stage, photoelectric displacement sensor and light target; The one dimension translation stage is installed on the side support plate of frame; Photoelectric displacement sensor is placed on the one dimension translation stage, and light target is fixed on the junction of rectangle frame and torsion wire, and remains on same plane with torsion wire; And light target is facing to the light-emitting window of photoelectric displacement sensor, and the emission light beam of photoelectric displacement sensor is beaten on light target.
The present invention compared with prior art; Have the following advantages and the high-lighting effect: (1) adopts torsion wire as elasticity of torsion element; The torsion wire tensioning is fixed on the support, has improved the rigidity and the stability of system widely, for robotization, the intelligent measuring of realizing the little moment of torsion of low-dimensional materials are laid a good foundation; The moment of torsion that acts on the sample is directly passed to torsion wire through upper grip and rectangle frame, and no frictional resistance moment is disturbed, and test result is stable more, accurate; Through changing the torsion wire of different size, can produce little torque sensor of different ranges, thereby realize the little wide-range of reversing mechanical property of low-dimensional materials is measured.(2) the present invention adopts the displacement δ of non-contact type photoelectricity displacement sensor target surface luminous point, then displacement is converted into the corner of torsion wire, and resolution can be up to 10
-6Rad.Measure corner with traditional optical lever principle and compare, structure is compact more, and automaticity is higher, and stability is better.(3) chuck component all adopts special four-head rope to chew the cylindrical chuck of formula, through regulate the D translation platform with guarantee upper and lower chuck to neutrality.(4) upper grip adopts fastener type to be connected the sample convenient mounting and clamping with rectangle frame.(5) upper end of little torque sensor is fixed with force transducer, and the pre-tension of test samples and the Z in little twist process are to the tension force size in real time.The whole measuring measurer has the characteristics of robotization, real time implementation, intellectuality, high precision, high sensitivity and wide-range, and apparatus structure is compact, stable performance, and easy and simple to handle, measurement result is reliable, and what be applicable to various low-dimensional materials littlely reverses Mechanics Performance Testing.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is a torsion wire outer corner measurement assembly synoptic diagram.
Fig. 3 is the torsion curve figure of copper wire (38 μ m).
Among the figure: the 1-frame; 2-D translation platform; 3-feed screw nut assembly; The 4-stepper motor; The 5-lower chuck; The 6-sample; The 7-upper grip; The 8-support; Torsion wire fixed block under the 9-; The 10-rectangle frame; 11-one dimension translation stage; The 12-photoelectric displacement sensor; The 13-light target; The 14-torsion wire; The last torsion wire fixed block of 15-; The 16-force transducer; The 17-servo controller; The 18-A/D capture card; The 19-computer system; The A-laser beam; B-light target initial position; B '-light target current location; The C-luminous point.
Embodiment
Combine accompanying drawing that embodiment of the present invention is done further to specify at present.
The present invention is based on the quiescent operation principle of torsion balance, but improves in form, has improved the rigidity of structure, has guaranteed good stable property.
As shown in Figure 1, apparatus of the present invention comprise frame 1, force transducer 16, little torque sensor, torsion wire outer corner measurement assembly, upper grip 7, lower chuck 5, stepper motor 4, D translation platform 2, feed screw nut assembly 3, servo controller 17, A/D capture card 18 and computer system 19.
Little torque sensor is made up of torsion wire 14, support 8, rectangle frame 10 and upper and lower torsion wire fixed block 15,9; Torsion wire 14 tensionings are fixed on the support 8, and two ends are compressed by torsion wire fixed block 15,9 respectively, and the middle part of torsion wire 14 is fixed in rectangle frame 10 suspensions.
Torsion wire outer corner measurement assembly is made up of one dimension translation stage 11, photoelectric displacement sensor 12 and light target 13.One dimension translation stage 11 is installed on the side support plate of frame 1; Photoelectric displacement sensor 12 is placed on the one dimension translation stage 11; Light target 13 is fixed on the junction of rectangle frame 10 and torsion wire 14; And remain on same plane with torsion wire 14, and light target 13 is facing to the light-emitting window of photoelectric displacement sensor 12, and the emission light beam A of photoelectric displacement sensor 12 is beaten on light target 13.
The support 8 of little torque sensor is fixed on the upper end of frame 1 through force transducer 16 suspensions; Upper grip 7 is connected the lower end of rectangle frame 10; Lower chuck 5 is installed on the main shaft of stepper motor 4, upper and lower chuck 7, clamping sample 6 between 5, and stepper motor 4 is placed on the D translation platform 2; D translation platform 2 is installed on the feed screw nut assembly 3, and feed screw nut assembly 3 is fixed on the bottom of frame 1.
Described little torque sensor; It is characterized in that flexible member turns round 14 two ends tensionings and be fixed on the support 8, improved the rigidity of system greatly, the moment of torsion that acts on the sample 6 is directly passed to torsion wire 14 through upper grip 7 and rectangle frame 10; No frictional resistance moment is disturbed, and test result is stable, accurate; Described torsion wire outer corner measurement assembly is characterized in that adopting the non-contacting method of optics to measure the corner of torsion wire, and simple in structure, resolution is high, and wherein luminous point C and the distance turned round between 14 obtain through regulating one dimension translation stage 11 on the target surface 13; Described upper and lower chuck 7,5 is characterized in that all adopting the four-head rope to chew the cylindrical chuck of formula, and is good to neutrality, and wherein upper grip 7 adopts fastener type to be connected the sample convenient mounting and clamping with rectangle frame 10; Described servo controller 17 is used for the motion control to stepper motor 4; A/D capture card 18 is used for the data acquisition to torsion wire 14 corners and axial tension; Computer system 19 is used to accomplish parameter setting, data analysis and the processing of test macro and the real-time demonstration of torsion curve.
Its step:
(1) according to measurement requirement, the undamaged material sample of intercepting certain-length is done the two ends that liner is pasted sample with soft sill, accomplishes the making of sample 6.With tweezers with sample holder between upper grip 7 and lower chuck 5, and make it to be in relaxed state.Then, regulate X, the Y direction of D translation platform 2, make upper and lower bite and torsion wire 14 remain on same axis.
(2) sample is applied certain pre-tension, make sample 6 keep stretching.At first coarse adjustment feed screw nut assembly 3 then along Z direction accurate adjustment D translation platform 2, drives stepper motor 4 and moves down with lower chuck 5, applies a pre-tension for sample 6, and the size of pre-tension is detected by force transducer 16.
(3) sample 6 is reversed loading, when sample 6 reverses certain angle, the torque T in the sample 6; Pass to little torque sensor through upper grip 7; The equilibrium position of little torque sensor will deflect under the effect of T, at this moment, as the torsion wire 14 of elasticity of torsion element one counter torque T will be provided
w, the system that makes reaches balance again.Go out torsion wire 14 corresponding rotational angle theta with torsion wire outer corner measurement component detection, get the moment of torsion of sample according to equalising torque
T＝T
w＝Kθ ①
In the formula, K is the elasticity of torsion coefficient of torsion wire 14, and θ is the torsion angle of torsion wire 14.Because rectangle frame 10 is divided into l to torsion wire 14
1, l
2Two sections, have according to mechanics of materials knowledge
In the formula, G is the shear modulus of torsion wire 14, and d is the diameter of torsion wire 14.
Described torsion wire outer corner measurement assembly is shown in accompanying drawing 2; The initial position B (reference field) of light target 13 is vertical with the laser beam A of photoelectric displacement sensor 12; When driving light target 13, torsion wire 14 turns to B ' time; Photoelectric displacement sensor 12 is measured its displacement δ that departs from reference field B, and then the corner of torsion wire 14 does
In the formula, L is that luminous point C on the light target 13 is apart from the distance of torsion wire.
At this moment, the torsion angle of sample 6 does
④
In the formula, the corner that
applies for 4 pairs of samples 6 of stepper motor.
(4) corner
that applies of 4 pairs of samples 6 of the rotational angle theta of torsion wire 14 and stepper motor passes to computer system 19 by A/D capture card 18 and servo controller 17 respectively; Torsion curve when again according to formula 1.～4., computer system 19 just can obtain in real time that sample is little to be reversed.After test finishes, preserve related data, as shown in Figure 3.
Instance:
The torsion wire of little torque sensor employing diameter is the pure tungsten silk of 80 μ m in the device, and the length of upper and lower two sections torsion wires is all got 20cm, and its resolution is 0.5 μ N.cm, and range is ± 6000 μ N.cm.The resolution of force transducer is 0.1mN, and measurement range is ± 5N.The resolution of the photoelectric displacement sensor of selecting for use is 1 μ m, and range is ± 15mm to adopt the rotation distance of triangulation target surface.The minimum step angle of the stepper motor of selecting for use is 0.0072 °.The stroke of feed screw nut assembly is 200mm, and the stroke of one dimension translation stage is 20mm, and the stroke of D translation platform X, Y, three directions of Z is all 10mm.
The present invention not only is confined to above-mentioned embodiment; Persons skilled in the art are according to content disclosed by the invention; Can adopt other multiple embodiment embodiment of the present invention, therefore, every employing project organization of the present invention and thinking; Do some simple designs that change or change, all fall into the scope of the present invention's protection.
Claims (1)
1. little mechanics performance testing device that reverses of low-dimensional materials; It is characterized in that this device comprises frame (1), force transducer (16), little torque sensor, torsion wire outer corner measurement assembly, upper grip (7), lower chuck (5), stepper motor (4), D translation platform (2), feed screw nut assembly (3), servo controller (17), A/D capture card (18) and computer system (19); Little torque sensor comprises torsion wire (14), support (8), rectangle frame (10), goes up torsion wire fixed block (15) and following torsion wire fixed block (9); Torsion wire (14) tensioning is fixed on the support (8), and torsion wire fixed block (15) is used at two ends respectively and following torsion wire fixed block (9) compresses, and the middle part of torsion wire (14) is fixed in rectangle frame (10) suspension;
The support of little torque sensor (8) is fixed on the upper end of frame (1) through force transducer (16) suspension; Upper grip (7) adopts the mode of fastener to be connected the lower end of rectangle frame (10); Lower chuck (5) is installed on the main shaft of stepper motor (4); Upper grip (7) is used for clamping sample (6) with lower chuck (5); Stepper motor (4) is placed on the D translation platform (2), and D translation platform (2) is installed on the feed screw nut assembly (3), and feed screw nut assembly (3) is fixed on the bottom of frame (1);
Described servo controller (17) is electrically connected with stepper motor (4); A/D capture card (18) is used for the data acquisition to torsion wire (14) corner and axial tension, and servo controller (17) and A/D capture card (18) all are electrically connected with computer system (19);
Said torsion wire outer corner measurement assembly is made up of one dimension translation stage (11), photoelectric displacement sensor (12) and light target (13); One dimension translation stage (11) is installed on the side support plate of frame (1); Photoelectric displacement sensor (12) is placed on the one dimension translation stage (11); Light target (13) is fixed on the junction of rectangle frame (10) and torsion wire (14); And and torsion wire (14) remain on same plane, and light target (13) is facing to the light-emitting window of photoelectric displacement sensor (12), the emission light beam of photoelectric displacement sensor (12) is beaten on light target (13).
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| CN102183418B true CN102183418B (en) | 2012-09-05 |
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| CN103217342A (en) * | 2013-04-18 | 2013-07-24 | 吉林大学 | Micro-torsion testing platform |
| CN103557975B (en) * | 2013-11-05 | 2016-04-13 | 上海宝宜威机电有限公司 | Floating torsion sensor fixing structure |
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| CN105716966B (en) * | 2016-02-03 | 2023-07-25 | 南京信息工程大学 | Device for measuring shear elastic modulus of material |
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| CN113203639A (en) * | 2021-04-21 | 2021-08-03 | 华中科技大学 | Torsion testing device for microscale material |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| FR2799547B1 (en) * | 1999-10-06 | 2002-05-24 | Gradient Ass | DISC TRIBOMETER FOR MEASURING TRIBOLOGICAL PHENOMENES |
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|---|---|---|---|---|
| CN1601252A (en) * | 2004-10-26 | 2005-03-30 | 东华大学 | Combining method for measuring fiber profile and mechanics behavior and equipment |
| CN101354299A (en) * | 2008-08-29 | 2009-01-28 | 奇瑞汽车股份有限公司 | Bolt torque test stand |
| CN101949797A (en) * | 2010-08-27 | 2011-01-19 | 华中科技大学 | Method and device for testing micro-tensile mechanical properties of metal fiber |
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