CN102177409B - 谐振器长度的测量 - Google Patents

谐振器长度的测量 Download PDF

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Publication number
CN102177409B
CN102177409B CN200980140143.XA CN200980140143A CN102177409B CN 102177409 B CN102177409 B CN 102177409B CN 200980140143 A CN200980140143 A CN 200980140143A CN 102177409 B CN102177409 B CN 102177409B
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CN
China
Prior art keywords
resonator
spectrum
length
radiation
est
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Expired - Fee Related
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CN200980140143.XA
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English (en)
Chinese (zh)
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CN102177409A (zh
Inventor
安德斯·尤普舍巴卡
H·达尔奎斯特
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Acreo AB
System 3R International AB
Acreo Swedish ICT AB
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Acreo AB
System 3R International AB
Acreo Swedish ICT AB
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Publication of CN102177409A publication Critical patent/CN102177409A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G01B9/02028—Two or more reference or object arms in one interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN200980140143.XA 2008-10-10 2009-10-09 谐振器长度的测量 Expired - Fee Related CN102177409B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP08166344A EP2175228A1 (en) 2008-10-10 2008-10-10 Resonator length measurement
EP08166344.5 2008-10-10
PCT/EP2009/063208 WO2010040838A1 (en) 2008-10-10 2009-10-09 Resonator length measurement

Publications (2)

Publication Number Publication Date
CN102177409A CN102177409A (zh) 2011-09-07
CN102177409B true CN102177409B (zh) 2014-03-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980140143.XA Expired - Fee Related CN102177409B (zh) 2008-10-10 2009-10-09 谐振器长度的测量

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US (1) US8134714B2 (enExample)
EP (2) EP2175228A1 (enExample)
JP (1) JP5538406B2 (enExample)
CN (1) CN102177409B (enExample)
WO (1) WO2010040838A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102288103B (zh) * 2011-06-27 2013-07-03 清华大学 基于折叠式法布里-珀罗腔的腔长测量方法及装置
DE102015009595A1 (de) * 2015-07-24 2017-01-26 Universität Heidelberg Verfahren und Vorrichtung zur Kalibration eines optischen Resonators, Verwendung der Vorrichtung, Verwendung eines optischen Modulators und Computerprogrammprodukt
NL2017595A (en) * 2015-11-10 2017-05-26 Asml Netherlands Bv Proximity sensor, lithographic apparatus and device manufacturing method
DE102016103109B4 (de) 2016-02-23 2018-07-26 Björn Habrich Vermessung einer kavität mittels interferenzspektroskopie
CN106898942A (zh) * 2017-02-28 2017-06-27 中国科学院光电研究院 多束脉冲光同步的调节方法
CN107961986A (zh) * 2017-11-22 2018-04-27 铜陵日兴电子有限公司 一种无动力高协调性谐振器厚度分类筛选装置
CN111122610B (zh) * 2019-11-22 2021-09-03 上海大学 一种基于半整数阶谐振模式的有源传感器

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US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
WO2000017604A1 (en) * 1998-09-22 2000-03-30 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Quasi-static fiber pressure sensor
CN1375682A (zh) * 2001-08-23 2002-10-23 四川大学 大尺寸零件无导轨测量装置及其测试方法
CN101126629A (zh) * 2007-09-25 2008-02-20 北京交通大学 利用光纤光栅的合成波干涉台阶高度在线测量系统

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DE3044183A1 (de) * 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
US5555089A (en) * 1994-11-30 1996-09-10 Anvik Corporation Absolute distance measuring interferometry using multi-pass resonant cavity referenced to a stabilized laser source
DE19528676C2 (de) 1995-08-04 1997-05-22 Zeiss Carl Jena Gmbh Interferometeranordnung zur absoluten Distanzmessung
JPH1183457A (ja) * 1997-09-12 1999-03-26 Yazaki Corp スペクトル干渉顕微鏡及び該顕微鏡を用いた表面形状測定方法
US7057732B2 (en) * 1999-01-25 2006-06-06 Amnis Corporation Imaging platform for nanoparticle detection applied to SPR biomolecular interaction analysis
US6449048B1 (en) * 2000-05-11 2002-09-10 Veeco Instruments, Inc. Lateral-scanning interferometer with tilted optical axis
US6510256B1 (en) * 2000-06-29 2003-01-21 Proximion Fiber Optics Ab Method and arrangement in connection with optical bragg-reflectors
US7099015B2 (en) 2003-08-25 2006-08-29 Ivan Melnyk Fiber optic sensing device for measuring a physical parameter
US7483598B2 (en) * 2004-03-15 2009-01-27 Queen's University At Kingston Phase shift optical loop spectroscopy
EP1586854A3 (en) * 2004-04-15 2006-02-08 Davidson Instruments Interferometric signal conditioner for measurement of the absolute length of gaps in a fiber optic Fabry-Pérot interferometer
US7305158B2 (en) * 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
JP4027352B2 (ja) * 2004-09-17 2007-12-26 アンリツ株式会社 光ファイバプローブ装置
TWI278682B (en) * 2004-11-23 2007-04-11 Ind Tech Res Inst Fiber optic interferometric position sensor and measuring method thereof
EP1744119A1 (en) * 2005-07-15 2007-01-17 Proximion Fiber Systems AB Swept-source optical coherence tomography
US7289220B2 (en) * 2005-10-14 2007-10-30 Board Of Regents, The University Of Texas System Broadband cavity spectrometer apparatus and method for determining the path length of an optical structure
DE502006002379D1 (de) * 2006-04-27 2009-01-29 3R Syst Int Ab Spannvorrichtung mit Einrichtung zur Messung der Distanz zwischen einem Spannfutter und einem Werkzeug- oder Werkstückhalter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4593368A (en) * 1984-06-04 1986-06-03 Kollmorgen Technologies Corporation Technique for measuring very small spacings
WO2000017604A1 (en) * 1998-09-22 2000-03-30 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Quasi-static fiber pressure sensor
CN1375682A (zh) * 2001-08-23 2002-10-23 四川大学 大尺寸零件无导轨测量装置及其测试方法
CN101126629A (zh) * 2007-09-25 2008-02-20 北京交通大学 利用光纤光栅的合成波干涉台阶高度在线测量系统

Also Published As

Publication number Publication date
EP2335013B1 (en) 2014-04-23
JP2012505393A (ja) 2012-03-01
WO2010040838A1 (en) 2010-04-15
JP5538406B2 (ja) 2014-07-02
CN102177409A (zh) 2011-09-07
EP2335013A1 (en) 2011-06-22
US20110176143A1 (en) 2011-07-21
US8134714B2 (en) 2012-03-13
EP2175228A1 (en) 2010-04-14

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Granted publication date: 20140326