CN102165858B - Apparatus and method for mounting electronic component - Google Patents
Apparatus and method for mounting electronic component Download PDFInfo
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- CN102165858B CN102165858B CN200980138068.3A CN200980138068A CN102165858B CN 102165858 B CN102165858 B CN 102165858B CN 200980138068 A CN200980138068 A CN 200980138068A CN 102165858 B CN102165858 B CN 102165858B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/02—Feeding of components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
An apparatus for mounting an electronic component is provided with: a punching apparatus (5A, 5B) which is arranged at one end of an apparatus main body (1) and punches out a TCP from a carrier tape (3); a first receiving/transferring means (6A, 6B) which receives the punched out TCP and transfers the TCP to a predetermined position; an index means (18A, 18B) having a plurality of holding heads which receive and hold the transferred TCPs; an adhering apparatus (31A, 31B) which adheres the adhesive tape on the TCPs which have been transferred to the holding heads; a table apparatus which receives and aligns a substrate; a mounting head (53) which mounts the TCP having the adhesive tape adhered thereon on the substrate which has been aligned by the table apparatus; a gas-supplying unit (72) which introduces an external gas into an apparatus main body from above the apparatus main body, and makes the gas flow downward along the punching apparatus; and a gas-releasing unit (77) which ejects, from a bottom section, dusts generated in the apparatus main body due to such flow.
Description
Technical field
The present invention relates to erecting device and the installation method of electronic unit, for example, the TCP (Tape Carrier Package: band carries encapsulation) as electronic unit is installed on the display panels as substrate.
Background technology
In the situation that manufacture the display panels as substrate, the TCP as electronic unit is installed on this display panels by erecting device.Above-mentioned erecting device has the apparatus main body of box shape.In this apparatus main body, be provided with doffer, this doffer is from the above-mentioned TCP of carrier band blanking.TCP by doffer blanking is accepted by the body of accepting that forms connecting mechanism.
Above-mentioned accept body by the TCP conveyance of institute's blanking to assigned position, and in this position, join to a plurality of holding heads that are located on circular dividing table, this circular dividing table at every turn in accordance with regulations angle rotarilyd actuate off and on.Holding head is arranged on above-below direction, to drive.
Be handed off to the TCP in the holding head of circular dividing table, corresponding to the intermittent rotary of this circular dividing table, after having cleaned the portion of terminal of above-mentioned TCP by rotating brush, be positioned on installation site.On this installation site, the substrate of TCP is installed by table apparatus location standby.
Then, when the intermittent rotary by circular dividing table has kept the above-mentioned holding head of TCP to be positioned on installation site, this holding head is driven downwards.Thus, remain on the side portion that above-mentioned TCP in holding head is installed to substrate.This formerly technology is open in patent documentation 1 and patent documentation 2.
In the past, along the total length of the side portion of substrate, pasted the splicing tape being formed by anisotropic conductive parts, and at this, sentence predetermined distance above-mentioned TCP is installed.But when the total length of the side portion along substrate is pasted splicing tape, the part that TCP is not installed of splicing tape can be wasted, or adhering to dust not installing in the part of TCP, is not therefore preferred sometimes.
Therefore, recently, if cleaned the portion of terminal of the TCP that the holding head of circular dividing table keeps by rotating brush, by sticker, in this portion of terminal, paste the splicing tape being cut to the roughly the same length of portion of terminal of TCP.
Then, the TCP that has pasted splicing tape is handed off to mounting head from above-mentioned holding head, and make this mounting head navigate to substrate side portion above after decline, the above-mentioned TCP thus mounting head being kept is installed to the side portion of substrate.
Technical literature formerly
Patent documentation
Patent documentation 1: No. 2002-305398, TOHKEMY
Patent documentation 2: No. 2006-120929, TOHKEMY
Brief summary of the invention
The technical problem that invention will solve
Yet, when during from carrier band blanking TCP, now not avoiding producing dust by doffer, and the swim inside of auto levelizer main body of this dust sometimes.And when being cleaned being handed off to the portion of terminal of the TCP on circular dividing table by rotating brush, the dust of sometimes removing from portion of terminal also can swim in auto levelizer main body.
When dust swims in apparatus main body, this dust can be attached to and is adhered to the splicing tape of TCP before upper or has been adhered to the splicing tape on TCP or installed in the part of set terminal above of side portion of substrate of TCP sometimes.At dust, be attached under the state on the terminal of splicing tape or substrate, when above-mentioned TCP being installed on above-mentioned terminal, dust is clipped between TCP and the terminal of substrate, therefore sometimes causes the installation of TCP bad.
Summary of the invention
The invention provides a kind of erecting device and installation method of electronic unit, the dust producing can be discharged to outside reliably in this apparatus main body in apparatus main body.
Means for technical solution problem
The present invention is a kind of erecting device of electronic unit, is at the erecting device of the side portion mounting electronic parts of substrate, it is characterized in that possessing:
Apparatus main body;
Doffer, is located at an end of the fore-and-aft direction of this apparatus main body, from the above-mentioned electronic unit of strip-shaped parts blanking;
Connecting mechanism, accepts by the above-mentioned electronic unit of this doffer blanking conveyance to assigned position;
Indexing mechanism, has acceptance and keeps a plurality of holding heads by the electronic unit of this connecting mechanism conveyance;
Sticker is pasted splicing tape on the above-mentioned electronic unit being handed off in the holding head of this indexing mechanism;
Table apparatus, is located at the other end of the fore-and-aft direction of said apparatus main body, accepts aforesaid substrate and positions;
Installing mechanism is installed the above-mentioned electronic unit of having been pasted splicing tape by above-mentioned sticker on the aforesaid substrate of being located by this table apparatus; And
Dust is removed mechanism, from the top of said apparatus main body, imports outside gas to inside, and it is flowed downwards along above-mentioned doffer, by this, is flowed the dust producing in said apparatus main body is discharged from bottom.
The present invention is a kind of installation method of electronic unit, is at the installation method of the side portion mounting electronic parts of substrate, it is characterized in that possessing:
Be located at an end of the fore-and-aft direction of apparatus main body, from the operation of the above-mentioned electronic unit of strip-shaped parts blanking;
The operation of acceptance from the above-mentioned electronic unit of zonal part part blanking conveyance to assigned position;
Acceptance by conveyance to the electronic unit of assigned position and be handed off to the operation in the holding head of indexing mechanism;
The operation of pasting splicing tape on the above-mentioned electronic unit being handed off in the holding head of above-mentioned indexing mechanism;
On the aforesaid substrate keeping at the table apparatus of the other end that is arranged on the fore-and-aft direction of said apparatus main body, the operation of the above-mentioned electronic unit of having pasted splicing tape is installed; And
The gas of said apparatus main body outside is imported to inside from the top of apparatus main body, and it is flowed downwards, the operation that flows the dust producing in said apparatus main body is discharged from the bottom of said apparatus main body by this.
The effect of invention
According to the present invention, gas is downward flowed from the top of apparatus main body, the gas medium in apparatus main body is flowed into towards flowing of this gas, make thus the dust producing in apparatus main body discharge from the bottom of apparatus main body.
Therefore,, even produce dust from the doffer in apparatus main body etc., also can prevent that this dust is attached to the splicing tape of sticker, to stick on splicing tape on electronic unit or the substrate of mounting electronic parts etc. upper, and cause the installation of electronic unit bad.
Accompanying drawing explanation
Fig. 1 means the cross-sectional view of internal structure of the erecting device of an embodiment of the invention.
Fig. 2 means the longitudinal section of the internal structure of erecting device.
Fig. 3 means and is scrubbing the TCP on position, holding head being kept and carry out the end view of clean state.
Fig. 4 means and will from feed roller, stick on off-tape and the splicing tape transferring out blocks the end view into the state of specific length.
Fig. 5 means the end view that the TCP that has pasted splicing tape is handed off to the state in mounting head on delivery position.
Fig. 6 is the front view of the part that is formed with supply port and outlet of the sidewall of apparatus main body.
Fig. 7 means the key diagram of the air-flow producing when the spatial portion of gas in apparatus main body flowed.
Fig. 8 means the key diagram of the air-flow producing when the spatial portion of gas in the apparatus main body of other execution modes of the present invention flowed.
Embodiment
Below, with reference to accompanying drawing, embodiments of the present invention are described.
Fig. 1～Fig. 7 represents an embodiment of the invention.Fig. 1 means the cross-sectional view of the internal structure of erecting device, and Fig. 2 is same longitudinal section.As depicted in figs. 1 and 2, above-mentioned erecting device possesses the apparatus main body 1 of the box shape being arranged in clean room.Width central portion in the fore-and-aft direction rear end side of this apparatus main body 1 is formed with rearward outstanding protuberance 2, in this protuberance 2, the first doffer 5A and the second doffer 5B symmetrically configure with respect to the center line O (shown in Fig. 1) of the Width of apparatus main body 1, and this first doffer 5A and the second doffer 5B are for the TCP4 as electronic unit from carrier band 3 blankings.
Above-mentioned the first doffer 5A and the second doffer 5B alternate run, accepted by a pair of the first connecting mechanism 6A, 6B by the TCP4 of a doffer 5A or 5B blanking.
That is, in the second doffer 5B standby when the first doffer 5A blanking TCP4, when supplying with to the first doffer 5A, blanking TCP4 finishes, the second doffer 5B operation and supply with the new part of carrier band 3 to the first doffer 5A.Thus, from the TCP4 of carrier band 3 blankings, be alternately supplied to a pair of the first connecting mechanism 6A, 6B.
As shown in Figure 2, above-mentioned first, second doffer 5A, 5B possess: mold 11, is provided with drift 11a below; With bed die 12, on above-below direction, be formed with the through hole 12a entering for above-mentioned drift 11a.Above-mentioned mold 11 is driven on the above-below direction shown in arrow by drive source 13.
Above-mentioned carrier band 3 transfers out from feed roller 14, by a plurality of deflector rolls 15, is transformed direction, and be directed to a part above above-mentioned bed die 12, advance abreast, by coiler drum 16, batched afterwards.
In addition, the boundary belt 17 of protection carrier band 3 is wrapped on feed roller 14 overlappingly with carrier band 3.
Above-mentioned carrier band 3 and boundary belt 17 transfer out discretely from above-mentioned feed roller 14, above-mentioned boundary belt 17 with by above-mentioned doffer 5A, 5B blanking be wound on above-mentioned reel 16 together with the carrier band 3 of TCP4.
The TCP4 that above-mentioned first connecting mechanism 6A accepts is by conveyance to the first indexing mechanism 18A, and the holding head 19 being arranged on this first indexing mechanism 18A is accepted.
The TCP4 that another first connecting mechanism 6B accepts is by conveyance to the second indexing mechanism 18B, and the holding head 19 being arranged on this second indexing mechanism 18B is accepted.
As shown in Figure 2, above-mentioned first, second indexing mechanism 18A, 18B have circular dividing table 22, and this circular dividing table 22 is rotarilyd actuate with 90 degree intervals in a circumferential direction off and on by a θ drive source 21.On below each circular dividing table 22, with 90 degree, be interval with above-mentioned holding head 19 in a circumferential direction.
Thus, by the TCP4 of above-mentioned a pair of the first connecting mechanism 6A, 6B conveyance, by the holding head 19 absorption maintenances of each indexing mechanism 18A, 18B.That is, TCP4 is handed off to the holding head 19 of indexing mechanism 18A, 18B from the first connecting mechanism 6A, 6B.The position of accepting that the holding head 19 of indexing mechanism 18A, 18B is accepted TCP4 represents with A in Fig. 1.
In addition, as shown by the arrows in Figure 1, the direction of rotation of each circular dividing table 22 is rightabout.
By the TCP4 of above-mentioned first, second doffer 5A, 5B blanking, by each connecting mechanism 6A, 6B bracket 24 separately, alternately accept.This bracket 24 is configured to, can be at the directions X shown in the arrow along Fig. 2, be on the driven X platform 25 of fore-and-aft direction of apparatus main body 1, by Z θ drive source 23, drive becoming the Z direction of above-below direction and become in the θ direction of direction of rotation.Above-mentioned X platform 25 is, can be arranged on movably on the X guide way 26 arranging along directions X, can along above-mentioned X guide way 26, drive by not shown linear motor etc.
The bracket 24 of a first connecting mechanism 6A, when accepting TCP4 from the first doffer 5A, driven on the fore-and-aft direction of the apparatus main body 1 shown in the arrow X of Fig. 1 and the Width shown in arrow Y, and driven orientating as, an end of the TCP4 keeping above of above-mentioned bracket 24, with circular dividing table 22 at the first indexing mechanism 18A below in a circumferential direction with in spaced 4 holding heads 19 of 90 degree, be positioned in the above-mentioned holding head 19 of accepting position A below opposed.
Equally, the bracket 24 of another first connecting mechanism 6B, driven orientating as when having accepted TCP4, with circular dividing table 22 at the second indexing mechanism 18B below in a circumferential direction with in spaced 4 holding heads 19 of 90 degree, be positioned in the above-mentioned holding head 19 of accepting position A below opposite.
The bracket 24 being positioned is driven to ascent direction by Z θ drive source 23.Thus, the TCP4 that bracket 24 keeps be located at contacting of holding head 19 on above-mentioned circular dividing table 22 below, under this state, TCP4 is handed off to above-mentioned holding head 19 and is adsorbed maintenance from above-mentioned bracket 24.
When TCP4 is handed off to the holding head 19 on the circular dividing table 22 that is located at first, second indexing mechanism 18A, 18B, a pair of circular dividing table 22 is rotarilyd actuate with the angle of 90 degree respectively to the rightabout shown in the arrow of Fig. 1 off and on by an above-mentioned θ drive source 21.Thus, absorption has kept the holding head 19 of each circular dividing table 22 of TCP4 to be positioned in Fig. 1 by the position of scrubbing shown in B.
When accepted the holding head 19 of TCP4 from above-mentioned bracket 24, be driven in rotation in a circumferential direction 90 degree and be positioned to while scrubbing position B together with circular dividing table 22, the portion of terminal (not shown) of the above-mentioned TCP4 that above-mentioned holding head 19 keeps rotating brush 28 as shown in Figure 3 scrubs, clean.Thus, remove the dust that is attached to portion of terminal.In addition, above-mentioned rotating brush 28 is driven to the direction rotation shown in arrow R by not shown motor.
A part for above-mentioned rotating brush 28 is immersed in the cleaning fluid L that clean container 29 accommodates.And, with the opposed part of above-mentioned rotating brush 28, be the part of the radial outside of circular dividing table 22, by the lid 30 of the box of lower aperture, covered.On this lid 30, be connected with the suction tube 30a being communicated with not shown suction pump.Thus, the internal gas medium of lid 30 is discharged by above-mentioned suction tube 30a.
Above-mentioned rotating brush 28, clean container 29 and lid 30 put on mounting table 27.This mounting table 27 is by upper and lower drive source 27a and driven on above-below direction.
When above-mentioned mounting table 27 is driven to ascent direction and above-mentioned rotating brush 28 while contacting with the portion of terminal of TCP4, remove the dust being attached in this portion of terminal to arrow R direction rotation time.A part for the dust of removing is dispersed as shown in arrow S in above-mentioned lid 30, and remainder is attached on rotating brush 28.The dust in 30 to lid that disperses is attracted discharge by suction tube 30a, is attached to dust on the rotating brush 28 cleaning fluid L by clean container 29 and is cleaned and removes.
Therefore,, even if remove the dust of the portion of terminal that is attached to TCP4 by rotating brush 28, also can significantly reduce the ratio that the dust removed from above-mentioned portion of terminal swims in the inside of apparatus main body 1.
After the portion of terminal of TCP4 is clean by rotating brush 28, keeps the holding head 19 of this TCP4 to be driven in rotation in a circumferential direction 90 degree together with circular dividing table 22, and be positioned to the paste position shown in the C of Fig. 1.
Be positioned in the TCP4 on paste position C, by first, second sticker 31A, 31B, in the cleaned portion of terminal of above-mentioned TCP4, paste like that as described later the splicing tape 32 being formed by anisotropic conductive parts, this splicing tape 32 is cut to the length corresponding with this portion of terminal.
Above-mentioned first, second indexing mechanism 18A, 18B and first, second sticker 31A, 31B and first, second doffer 5A, 5B are same, are configured to symmetrical with respect to the center line O of the Width of apparatus main body 1.
First, second indexing mechanism 18A, 18B are configured to more lean on than first, second doffer 5A, 5B the Width outside of apparatus main body 1, and first, second sticker 31A, 31B are configured to than first, second indexing mechanism 18A, 18B more by Width outside.
As shown in Figure 2, above-mentioned first, second sticker 31A, 31B have the feed roller 34 that is configured in the bottom that approaches bottom surface in apparatus main body 1.Above-mentioned splicing tape 32 sticks on a side of off-tape 35 and is wrapped on this feed roller 34.
Stick on the above-mentioned splicing tape 32 on a side of off-tape 35, the plate face of the support piece 33 from above-mentioned feed roller 34 along band plate-like and being almost vertically drawn out upward, by the first deflector roll 36, splicing tape 32 is changed direction and is advanced to horizontal direction in the mode towards top.
As shown in Figure 4, and the part of vertically advancing opposed at above-mentioned splicing tape 32 and above-mentioned support piece 33, by forming the drive source 37a of shut-off mechanism 37, the cutter 37b with two blades is driven to the direction that approaches splicing tape 32 shown in arrow, forms two undercut broken string 32a thus on this splicing tape 32 with predetermined distance.In addition, the approach of above-mentioned cutter 37b is set to, and the off-tape 35 that is pasted with splicing tape 32 can not cut off by cutter 37b.
The passing through 2 undercuts broken strings 32a of above-mentioned splicing tape 32 and the part separated with other parts, extract part 32b out, the drawing mechanism 39 that is configured in shut-off mechanism 37 tops is extracted out.Thus, splicing tape 32 is separated into specific length, the i.e. length corresponding with TCP4.
Above-mentioned drawing mechanism 39 has: drive source 39a; The 39b of pushing portion, by this drive source 39a near or the direction of leaving above-mentioned splicing tape 32 drive; And remove and be with 40, by the 39b of this pushing portion, be pressed on above-mentioned extraction part 32b.
Remove the extraction part 32b that is pressed to splicing tape 32 by the above-mentioned pushing 39b of portion with a part of 40 upper, this extraction part 32b is adhered to remove and is with on 40 and is removed thus.In addition, remove be with 40 never illustrated feed roller transfer out, by same not shown coiler drum at every turn in accordance with regulations length batch.
As shown in Figure 2, be separated into the splicing tape 32 of specific length, together by above-mentioned the first deflector roll 36, to horizontal direction, change direction and advance with off-tape 35, and by changing direction downwards with the second deflector roll 41 of predetermined distance configuration with respect to above-mentioned the first deflector roll 36.
The part of above-mentioned off-tape 35 between above-mentioned the first deflector roll 36 and the second deflector roll 41 advanced below the cleaned portion of terminal of TCP4, and this TCP4 remains in the holding head that is located in paste position C 19 of above-mentioned circular dividing table 22.
Above-mentioned off-tape 35 is clamped by chuck mechanism 42 and the intermittently conveyance of each specific length ground, this chuck mechanism 42 by not shown drive source by driven for opening and closing and in the figure by back and forth being driven on the above-below direction shown in Z.Thus, stick on the part that is cut off into specific length of the splicing tape 32 on off-tape 35, by chuck mechanism 42, navigated to successively the below of the holding head 19 being positioned on paste position C.
Above-mentioned off-tape 35 passes through chuck mechanism 42 by conveyance off and on, when being separated into the splicing tape 32 of specific length, be oriented to the below of portion of terminal of the TCP4 that keeps with the holding head 19 being positioned on paste position C when opposite, this splicing tape 32 is together boosted in the heated while by boosting mechanism 43 with above-mentioned off-tape 35, and pressurization pastes on above-mentioned TCP4.
The above-mentioned mechanism 43 that boosts has press body 45, and this press body 45 is driven to ascent direction by drive source 44.This press body 45 is built-in with becomes the heater of thermal source 45a.Then, when press body 45 is driven to ascent direction, this press body 45 is pressurized to the above-mentioned splicing tape 32 that is separated into specific length in the portion of terminal of above-mentioned TCP4 across off-tape 35 in heating.Thus, splicing tape 32 is adhered to the portion of terminal of TCP4.In addition, splicing tape 32, by being heated by heater 45a, improves cementability thus, so stick on reliably in the portion of terminal of TCP4.
When splicing tape 32 is adhered on TCP4, by not shown release roller, from this splicing tape 32, off-tape 35 is peeled off.After peeling off, make circular dividing table 22 be further rotated 90 degree.Thus, kept being pasted with the holding head 19 of the TCP4 of splicing tape 32, be positioned in Fig. 1 by the delivery position shown in D.Meanwhile, off-tape 35 is by chuck mechanism 42 conveyances, and the new part that is cut to specific length of splicing tape 32 is oriented to the TCP4 of paste position C opposed.In addition, being stuck of off-tape 35 removed the part of splicing tape 32, is received in returnable 46.
Be pasted with splicing tape 32 and be positioned to the TCP4 of delivery position D, by a pair of the second connecting mechanism 51A, 51B, be handed off to respectively in a pair of mounting head 53 as installing mechanism.
In addition, from a pair of the second connecting mechanism 51A, 51B, to the handing-over of the TCP4 of a pair of mounting head 53, be, carried out handing-over for one in a pair of mounting head 53 at one from a pair of the second connecting mechanism 51A, 51B after, from another, for another mounting head 53, join.That is, TCP4 alternately joins for a pair of mounting head 53.
As shown in Figure 5, above-mentioned the second connecting mechanism 51A, 51B have along the X guide way 55 of directions X configuration.On this X guide way 55, movable body 56 is arranged to be driven by not shown drive source.On this movable body 56, be provided with Z drive source 57.The driving shaft 57a of this Z drive source 57 is driven in the Z direction as above-below direction, at its front end, the bracket 54 that side view is L word shape is installed.
Bracket 54 is driven on directions X by above-mentioned movable body 56, and is oriented to, above it (adsorption plane) adsorb the other end that is not pasted with splicing tape 32 of TCP4 of maintenance opposed with being positioned in holding head 19 on above-mentioned delivery position D.
Then,, as shown in chain-dotted line, bracket 54 is driven and the lower surface of the other end of above-mentioned TCP4 is adsorbed to Z direction top.Meanwhile, the absorption based on holding head 19 of TCP4 keeps being disengaged.Thus, TCP4 is handed off to bracket 54 from the holding head 19 of circular dividing table 22.
When having accepted bracket 54 decline of TCP4, movable body 56 is driven by the direction being represented by arrow X in Fig. 5, and is positioned on the position shown in chain-dotted line.Thus, bracket 54 be positioned as with above-mentioned mounting head 53 in standby above its moving direction below opposed.Mounting head 53 is driven to X, Y, Z and θ direction by XYZ θ drive source 58.
When above-mentioned bracket 54 is positioned in the below of above-mentioned mounting head 53, mounting head 53 is driven to descent direction, and the upper surface that bracket 54 adsorbs an end that is pasted with splicing tape 32 of the TCP4 keeping is adsorbed.Meanwhile, the adsorbed state of 54 couples of above-mentioned TCP4 of above-mentioned bracket is disengaged.Thus, TCP4 is handed off to mounting head 53 from above-mentioned bracket 54.
As shown in Figure 2, the mounting head 53 of having accepted TCP4 is positioned to the top of sidepiece of the above-mentioned TCP4 of installation of substrate W, and this substrate W is adsorbed on the upper surface that remains on table apparatus 61.Mounting head 53 and substrate W are photographed by not shown camera mechanism, and the photography signal based on from this camera mechanism driven with respect to X, Y and θ direction by above-mentioned XYZ θ drive source 58, so that above-mentioned TCP4 is positioned to the top of the installation site of aforesaid substrate W.
When above-mentioned mounting head 53 is adsorbed the TCP4 keeping and is positioned in the top of installation site of substrate W, above-mentioned mounting head 53 is driven to descent direction by above-mentioned XYZ θ drive source 58.Thus, mounting head 53 is adsorbed the side portion that the TCP4 keeping is installed to substrate W.
So, as shown in the chain-dotted line of Fig. 1, be pasted with a plurality of TCP4 of splicing tape 32, for the side portion of substrate W, with predetermined distance, install successively, this substrate W is adsorbed the upper surface that remains on table apparatus 61.
Leading section in said apparatus main body 1, along the Width of apparatus main body 1, be equipped with a pair of Y guide rail 62 with the Y-direction of directions X quadrature.Above-mentioned table apparatus 61 is configured to move on above-mentioned Y guide rail 62, and drives along Y guide rail 62 by not shown drive source.
As shown in Figure 1, at a sidepiece of the Width of the leading section of said apparatus main body 1, opening is formed with supply port 64.When above-mentioned table apparatus 61 moves to the sidepiece of Width of said apparatus main body 1 along Y guide rail 62, the above-mentioned table apparatus 61 supplying substrate Ws of the feedway 63 being represented by chain-dotted line in Fig. 1 in from above-mentioned supply port 64 to apparatus main body 1.
In the other side of the Width of the leading section of said apparatus main body 1, opening is formed with outlet 66.When above-mentioned table apparatus 61 moves to the other side of Width of said apparatus main body 1 along Y guide rail 62, the discharger 65 being represented by chain-dotted line in Fig. 1 is in above-mentioned outlet 66 access to plant main bodys 1, and the substrate W that the substrate W of above-mentioned table apparatus 61 has been installed to a plurality of TCP4 in side portion takes out of.
As shown in Figure 6, on both sides and the opposed position, top above-mentioned supply port 64 and outlet 66 of said apparatus main body 1, along Width total length, be provided with the nozzle body 67 as gas injection equipment.On nozzle body 67, with predetermined distance, be provided with a plurality of injection nozzles 68, by the clean gas spraying from these injection nozzles 68, at above-mentioned supply port 64 and outlet 66, form air curtain.Thus, prevent that the extraneous gas that comprises dust from entering inside from the outside of apparatus main body 1.
As shown in Figure 1, the central portion of said apparatus main body 1 is formed with the spatial portion 71 being surrounded by a pair of doffer 5A, 5B, a pair of indexing mechanism 18A, 18B and table apparatus 61.As shown in Figure 7, this spatial portion 71 connects along the above-below direction total length of apparatus main body 1.
Be provided with the ceiling portion of the opposed said apparatus main body 1 of above-mentioned spatial portion 71 unit 72 of supplying gas.As shown in Figure 2, this unit 72 of supplying gas has had HEPA filter 73 built-in and has supplied gas the shell 75 of fan 74, gas (air) in the clean room having been purified by HEPA filter 73, by supplying gas, fan 74 formed blow-off outlets 76 in the lower surface from above-mentioned shell 75 are supplied in apparatus main body 1 with regulation flow velocity.
Above-mentioned blow-off outlet 76 slenderly forms along the Width (Y-direction) of apparatus main body 1.Thus, from above-mentioned blow-off outlet 76, be supplied to the gas (being represented by blank arrow M) in apparatus main body 1 among Fig. 7, along being located at a pair of doffer 5A, 5B in apparatus main body 1, being that upper and lower a pair of golden type 11,12 flows from top downwards.
Be provided with exhaust unit 77 with the bottom of the opposed said apparatus main body 1 of above-mentioned spatial portion 71, this exhaust unit 77 forms dust with the above-mentioned unit 72 of supplying gas and removes mechanism.As shown in Figure 2, this exhaust unit 77 is provided with ventilating fan 79 in shell 78, gas in the apparatus main body 1 being attracted by this ventilating fan 79 is discharged to outside from exhaust outlet 80 below, and 79 pairs of gases that are supplied to the spatial portion 71 of apparatus main body 1 from the above-mentioned unit 72 of supplying gas of this ventilating fan attract and discharge.
When the gas of supplying with from the above-mentioned unit 72 of supplying gas flows with fixing speed and during from exhaust unit 77 discharge above-mentioned spatial portion 71 in, by this gas, be flowing in the interior generation of apparatus main body 1 towards the attraction at the mobile gas of above-mentioned spatial portion 71.The air-flow producing due to attraction is represented by arrow N in Fig. 7.
Using from the above-mentioned air-flow of supplying gas unit 72 outputs and discharging from exhaust unit 77 as main flow, the gas medium in apparatus main body 1 is induced to stream due to the attraction of this main flow towards mobile the becoming of above-mentioned main flow.
Thus, the dust producing during from carrier band 3 blanking TCP4 in upper and lower a pair of golden type 11,12 in said apparatus main body 1, the dust of being removed from TCP4 by rotating brush 28 in above-mentioned a pair of circular dividing table 22, or the dust that the various drive parts in apparatus main body 1 produce etc., the dust producing due to a variety of causes in apparatus main body 1, by at above-mentioned spatial portion 71 mobile main flow M and induction stream N of producing due to the attraction of main flow M on above-below direction, from exhaust unit 77, be discharged to outside.That is,, by dust is concentrated to the central part in apparatus main body 1, can prevent that thus dust from spreading and being attached on other devices.
As shown in Figure 1, among the perisporium of said apparatus main body 1, form peristome 81 on the two side of for example Width.At each peristome 81, be provided with filter 82.When gas is when the spatial portion 71 of said apparatus main body 1 flows and produces attraction due to this air-flow M, by this attraction, the gas of apparatus main body 1 outside is purified and is imported in apparatus main body 1 by above-mentioned filter 82.
While filter 82 being set on the sidewall at apparatus main body 1, due to when the mobile main flow M of spatial portion 71 produces attraction, by this attraction, the induction stream N in the interior easy generation of apparatus main body 1 towards above-mentioned spatial portion 71.That is the flow of the induction stream N, producing due to the attraction of main flow M increases.Thus, the dust in apparatus main body 1 interior generation is easily involved in the mobile air-flow of above-mentioned spatial portion 71 (main flow M and induction stream N).
That is, though in apparatus main body 1 because a variety of causes produces dust, this dust can not swim in apparatus main body 1 yet, and by being easily discharged to outside at the mobile main flow M of spatial portion 71 and induction stream N.In addition, by attraction, from filter 82, import the gas having purified.
Thus, can prevent that dust in apparatus main body 1 interior generation is attached to the splicing tape 32 that transfers out from the feed roller 34 of first, second sticker 31A, 31B, from first, second sticker 31A, 31B, pastes above the substrate W that splicing tape 32 TCP4 or table apparatus 61 keep etc.And, can by the gas purifying, make dust flow out and maintain all the time clean state.
According to the erecting device of said structure, in apparatus main body 1, dispose: first, second doffer 5A, 5B, by producing dust from carrier band 3 blanking TCP4; First, second indexing mechanism 18A, 18B, before the portion of terminal stickup to TCP4 is truncated the splicing tape 32 into specific length, by clean this portion of terminal of rotating brush 28, produce dust thus; And the various driving mechanisms that likely produce dust.
On the other hand, the central part in apparatus main body 1 forms the spatial portion 71 connecting along above-below direction total length, and main flow M downward flows from the top of this spatial portion 71.
Therefore, by the attraction towards above-mentioned spatial portion 71 at the mobile main flow M of above-mentioned spatial portion 71 and in the interior generation of apparatus main body 1, by this attraction, produce the induction stream N towards main flow M, so flow N by induction and periphery in apparatus main body 1 flows towards central part at the dust of apparatus main body 1 interior generation, this induction stream N and spatial portion 71 at central part mobile main flow M interflow on above-below direction, and be discharged to outside from exhaust unit 77.
; even at the interior generation dust of apparatus main body 1; this dust also flows towards spatial portion 71; and be discharged to outside from this spatial portion 71; therefore can prevent from being attached on splicing tape 32 or substrate W at the dust of apparatus main body 1 interior generation, and be clipped in substrate W and be installed between the TCP4 on this substrate W and cause the installation of TCP4 bad.
Filter 82 is set on the two side at apparatus main body 1, and by when the mobile main flow M of spatial portion 71 produces attraction, the gas of apparatus main body 1 outside flows into the induction stream N producing due to this attraction by above-mentioned filter 82, and makes it and collaborate at the mobile main flow M of spatial portion 71.
; when due to when the mobile main flow M of spatial portion 71 produces attraction; the flow that N is flowed in the induction not only producing due to this attraction increases; and this induction stream N is mobile towards central part from the periphery in apparatus main body 1, so the dust swimming in apparatus main body 1 is easily discharged to outside by above-mentioned spatial portion 71.
By having connected the lid 30 of suction tube 30a, cover the portion of terminal of TCP4 is carried out to clean rotating brush 28.Therefore,, even because the clean TCP4 of rotating brush 28 has produced dust, a part for this dust also can be attracted pipe 30a attraction and discharge from covering 30 inside.Therefore, even because the cleaning action of rotating brush 28 produces dust, also can reduce the amount that this dust swims in apparatus main body 1.
A part for rotating brush 28 is immersed in the cleaning fluid L of clean container 29.Therefore, even if a part for the dust of removing from TCP4 is attached to rotating brush 28, this dust is also removed by cleaning fluid L is clean, so also can reduce in this way from rotating brush 28, disperses and the dust that swims in apparatus main body 1.
Fig. 8 represents other execution modes of the present invention.In this embodiment, at dust, remove and on the unit 72 of supplying gas of mechanism, connect a pair of branched pipe 85 as branch.The front end of each branched pipe 85 is configured to, with the side of first, second sticker 31A, 31B, be positioned at apparatus main body 1 a sidepiece of Width inner side opposed.
Thus, from a part for unit 72 effluent airs of supplying gas, to above-mentioned branched pipe 85, flow, and as represented by R in Fig. 8, the Width flows inside from this branched pipe 85 along a pair of sticker 31A, 31B.
If air-flow R downward flows from top along the Width inner side of sticker 31A, 31B, by this air-flow R, be created in the opposite side of the Width from sticker 31A, 31B being represented by r in Fig. 8 towards the air-flow of a side, so can prevent from being attached on splicing tape 32 near the dust swimming sticker 31A, 31B by this air-flow r.
; dust is easily attached on the splicing tape 32 being located on sticker 31A, 31B; but by will making it along the side flow of sticker 31A, 31B from a part of branch of unit 72 effluent airs of supplying gas with branched pipe 85, can prevent that thus dust is attached on splicing tape 32.
That is, make from the main flow M branch of unit 72 output of supplying gas, and the device easily adhering to dust, be the Flow Structure Nearby of first, second sticker 31A, 31B.Therefore, the flow draws of the gas of dust Bei Suo branch and prevent diffusion, so can further prevent reliably that dust is attached on first, second sticker 31A, 31B.In addition, due to main flow, M is cleaned, and therefore also first, second sticker 31A, 31B can be remained to clean in this way.
In an above-mentioned execution mode, in apparatus main body, doffer, indexing mechanism, sticker philosophy is symmetrical, each one arranges two groups over the ground, but according to the size etc. that the substrate of TCP is installed, doffer, indexing mechanism, sticker etc. also can be 1 group, also can apply the present invention in this case.
Symbol description
1 ... apparatus main body, 3 ... carrier band, 4 ... TCP (electronic unit), 5A, 5B ... doffer, 6A, 6B ... the first connecting mechanism, 11 ... mold, 12 ... bed die, 18A, 18B ... indexing mechanism, 19 ... holding head, 22 ... circular dividing table, 28 ... rotating brush, 29 ... clean container, 30 ... lid, 31A, 31B ... sticker, 32 ... splicing tape, 35 ... off-tape, 37 ... shut-off mechanism, 39 ... drawing mechanism, 51A, 51B ... the second connecting mechanism, 53 ... mounting head (installing mechanism), 61 ... table apparatus, 63 ... feedway, 64 ... supply port, 65 ... discharger, 66 ... outlet, 67 ... nozzle body, 71 ... spatial portion, 72 ... the unit of supplying gas, 77 ... exhaust unit.
Claims (10)
1. an erecting device for electronic unit, is at the erecting device of the side portion mounting electronic parts of substrate, it is characterized in that possessing:
Apparatus main body;
A pair of doffer, is symmetrically configured in an end of the fore-and-aft direction of this apparatus main body, from the above-mentioned electronic unit of strip-shaped parts blanking;
Connecting mechanism, accepts by the above-mentioned electronic unit of this doffer blanking conveyance to assigned position;
A pair of indexing mechanism, has acceptance and keeps a plurality of holding heads by the electronic unit of this connecting mechanism conveyance, is symmetrically configured in the pars intermedia of the fore-and-aft direction of said apparatus main body;
A pair of sticker is pasted splicing tape on the above-mentioned electronic unit being handed off in the holding head of this indexing mechanism, is symmetrically configured in the pars intermedia of the fore-and-aft direction of said apparatus main body;
Table apparatus, is located at the other end of the fore-and-aft direction of said apparatus main body, accepts aforesaid substrate and positions;
Spatial portion, at the symmetrical central part of becoming of said apparatus main body, along the total length formation of above-below direction;
Installing mechanism is installed the above-mentioned electronic unit of having been pasted splicing tape by above-mentioned sticker on the aforesaid substrate of being located by this table apparatus; And
Dust is removed mechanism, from the top of above-mentioned spatial portion, to inside, import outside gas, and it is flowed downwards along above-mentioned doffer, and by this, flow and flowed by this induction producing of flowing, the dust producing in said apparatus main body is concentrated and discharged from bottom to above-mentioned spatial portion.
2. the erecting device of electronic unit according to claim 1, is characterized in that,
Above-mentioned dust is removed mechanism and is comprised:
The unit of supplying gas, is arranged on the top of said apparatus main body, in outside gas leading-in device main body; And
Exhaust unit, the gas that the unit of being supplied gas by this is imported to apparatus main body inside is discharged to outside from bottom.
3. the erecting device of electronic unit according to claim 2, is characterized in that,
Above-mentioned dust is removed mechanism, by being discharged by above-mentioned exhaust unit from the gas of the above-mentioned unit output of supplying gas, in said apparatus main body, produce from top towards the main flow of bottom thus, by the attraction producing due to this main flow, in said apparatus main body, produce the induction stream towards above-mentioned main flow.
4. the erecting device of electronic unit according to claim 1, is characterized in that,
Above-mentioned a pair of indexing mechanism at the both ends of the Width of said apparatus main body with than the large interval of above-mentioned a pair of doffer and symmetrically configuration,
Above-mentioned a pair of sticker at the both ends of the Width of said apparatus main body with than the large interval of above-mentioned a pair of doffer and symmetrically configuration,
In the other end of said apparatus main body, along Width, dispose above-mentioned table apparatus, above-mentioned spatial portion is formed on the central part of said apparatus main body thus.
5. the erecting device of electronic unit according to claim 1, is characterized in that,
Be provided with branch, this branch carries out branch by a part of removing the gas of mechanism's gatherer body interior from above-mentioned dust, and it is flowed along above-mentioned sticker.
6. the erecting device of electronic unit according to claim 1, is characterized in that,
In Width one end of the other end of the fore-and-aft direction of said apparatus main body, opening is formed with for the supply port to above-mentioned table apparatus handing-over substrate, is formed with the outlet of taking out of the substrate that electronic unit has been installed from above-mentioned table apparatus at other end opening,
At above-mentioned supply port and outlet, be provided with gas injection equipment, this gas injection equipment is formed for stoping outside dust to flow into the gas curtain in said apparatus main body.
7. the erecting device of electronic unit according to claim 1, is characterized in that,
Side wall portion in said apparatus main body is provided with filter, and the attraction that this filter makes outside gas flow and produce towards bottom from the top of apparatus main body by remove mechanism due to above-mentioned dust imports outside gas inner.
8. the erecting device of electronic unit according to claim 1, is characterized in that,
There is rotating brush, the electronic unit that this rotating brush keeps the first holding head of above-mentioned indexing mechanism cleans, by lid, cover this rotating brush, at this, cover and be provided with attraction mechanism, this attraction mechanism attracts to remove the dust dispersing in above-mentioned lid from above-mentioned rotating brush.
9. the erecting device of electronic unit according to claim 8, is characterized in that,
Be provided with the clean container that contains liquid, a part for above-mentioned rotating brush is immersed in this liquid, and this liquid is attached to above-mentioned rotating brush dust to removing from above-mentioned electronic unit rinses.
10. an installation method for electronic unit, is at the installation method of the side portion mounting electronic parts of substrate, it is characterized in that possessing:
By being symmetrically configured in a pair of doffer of an end of the fore-and-aft direction of apparatus main body, from the operation of the above-mentioned electronic unit of strip-shaped parts blanking;
The operation of acceptance from the above-mentioned electronic unit of zonal part part blanking conveyance to assigned position;
By the operation being handed off to the electronic unit of assigned position by conveyance in the holding head of a pair of indexing mechanism of pars intermedia of the fore-and-aft direction that is symmetrically configured in said apparatus main body;
By being symmetrically configured in a pair of sticker of pars intermedia of the fore-and-aft direction of said apparatus main body, the operation of pasting splicing tape on the above-mentioned electronic unit being handed off in the holding head of above-mentioned indexing mechanism;
On the aforesaid substrate keeping at the table apparatus of the other end that is arranged on the fore-and-aft direction of said apparatus main body, the operation of the above-mentioned electronic unit of having pasted splicing tape is installed; And
From the top along the spatial portion of the total length formation of above-below direction at the symmetrical central part of becoming of said apparatus main body, outside gas is imported to inside, and it is flowed downwards, by this, flow and flowed by this induction producing of flowing, the dust producing in said apparatus main body is concentrated and the operation of discharging from the bottom of said apparatus main body to above-mentioned spatial portion.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008250516A JP5173708B2 (en) | 2008-09-29 | 2008-09-29 | Electronic component mounting apparatus and mounting method |
| JP2008-250516 | 2008-09-29 | ||
| PCT/JP2009/064143 WO2010035582A1 (en) | 2008-09-29 | 2009-08-10 | Apparatus and method for mounting electronic component |
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| CN102165858A CN102165858A (en) | 2011-08-24 |
| CN102165858B true CN102165858B (en) | 2014-11-12 |
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| CN200980138068.3A Active CN102165858B (en) | 2008-09-29 | 2009-08-10 | Apparatus and method for mounting electronic component |
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| JP (1) | JP5173708B2 (en) |
| KR (1) | KR101223896B1 (en) |
| CN (1) | CN102165858B (en) |
| TW (1) | TWI462664B (en) |
| WO (1) | WO2010035582A1 (en) |
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| JP2012033612A (en) * | 2010-07-29 | 2012-02-16 | Hitachi High-Technologies Corp | Fpd module assembly apparatus |
| JP5702110B2 (en) * | 2010-10-26 | 2015-04-15 | 芝浦メカトロニクス株式会社 | Electronic component mounting apparatus and mounting method |
| JP5650983B2 (en) * | 2010-10-26 | 2015-01-07 | 芝浦メカトロニクス株式会社 | Electronic component mounting apparatus and mounting method |
| CN106102439B (en) * | 2012-04-09 | 2019-04-09 | 株式会社富士 | Mounting head cleaning device |
| JP5996241B2 (en) * | 2012-04-12 | 2016-09-21 | デクセリアルズ株式会社 | Adhesive film sticking device, adhesive film sticking method, and connection structure |
| JP6045837B2 (en) * | 2012-07-26 | 2016-12-14 | 日東電工株式会社 | Semiconductor wafer mounting method and semiconductor wafer mounting apparatus |
| WO2014147733A1 (en) * | 2013-03-19 | 2014-09-25 | 富士機械製造株式会社 | Component mounting machine |
| JP6155467B2 (en) * | 2013-09-18 | 2017-07-05 | パナソニックＩｐマネジメント株式会社 | Component mounter |
| CN107432115B (en) * | 2015-04-10 | 2020-06-30 | 株式会社富士 | Component mounting machine |
| TWI567011B (en) * | 2016-06-15 | 2017-01-21 | All Ring Tech Co Ltd | Method and device for conveying the components of the bonding process |
| CN107322685A (en) * | 2017-07-04 | 2017-11-07 | 深圳市联得自动化装备股份有限公司 | Chip on film automatic cutting equipment |
| JP6820809B2 (en) * | 2017-07-27 | 2021-01-27 | 三菱電機株式会社 | How to make chip mounters, electronic circuit boards, and power modules |
| CN112420547A (en) * | 2019-08-23 | 2021-02-26 | 盛美半导体设备(上海)股份有限公司 | Annealing chamber with isolating door plate |
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| JP2956312B2 (en) * | 1991-10-14 | 1999-10-04 | 松下電器産業株式会社 | Punching device for electronic parts with guard |
| JP4011843B2 (en) * | 2000-09-18 | 2007-11-21 | 芝浦メカトロニクス株式会社 | Component mounting apparatus and component delivery method used in the apparatus |
| JP4262903B2 (en) * | 2001-04-11 | 2009-05-13 | 芝浦メカトロニクス株式会社 | Component mounting apparatus and method |
| JP2003164652A (en) * | 2001-11-30 | 2003-06-10 | Heiwa Corp | Exhaust fan device |
| JP2004214574A (en) * | 2003-01-09 | 2004-07-29 | Renesas Technology Corp | Inner lead bonding apparatus having humidity adjusting function |
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| JP4598124B2 (en) * | 2006-05-30 | 2010-12-15 | 平田機工株式会社 | Automatic work device |
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| CN101578933B (en) * | 2007-02-22 | 2012-02-22 | 芝浦机械电子株式会社 | Apparatus and method for mounting electronic component |
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| WO2010035582A1 (en) | 2010-04-01 |
| KR20110081825A (en) | 2011-07-14 |
| JP2010080874A (en) | 2010-04-08 |
| JP5173708B2 (en) | 2013-04-03 |
| CN102165858A (en) | 2011-08-24 |
| TWI462664B (en) | 2014-11-21 |
| KR101223896B1 (en) | 2013-01-17 |
| TW201026179A (en) | 2010-07-01 |
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