CN102157577A - 纳米硅/单晶硅异质结径向纳米线太阳电池及制备方法 - Google Patents
纳米硅/单晶硅异质结径向纳米线太阳电池及制备方法 Download PDFInfo
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- CN102157577A CN102157577A CN2011100329636A CN201110032963A CN102157577A CN 102157577 A CN102157577 A CN 102157577A CN 2011100329636 A CN2011100329636 A CN 2011100329636A CN 201110032963 A CN201110032963 A CN 201110032963A CN 102157577 A CN102157577 A CN 102157577A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 66
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 65
- 239000010703 silicon Substances 0.000 title claims abstract description 65
- 239000002070 nanowire Substances 0.000 title claims abstract description 54
- 229910021421 monocrystalline silicon Inorganic materials 0.000 title claims abstract description 43
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 15
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 11
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract 10
- 238000000231 atomic layer deposition Methods 0.000 claims abstract 5
- 239000011787 zinc oxide Substances 0.000 claims abstract 5
- 239000005543 nano-size silicon particle Substances 0.000 claims description 15
- 238000000137 annealing Methods 0.000 claims description 14
- 239000004411 aluminium Substances 0.000 claims description 10
- 238000002161 passivation Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 6
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- 230000007797 corrosion Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 abstract description 8
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract description 7
- 239000012528 membrane Substances 0.000 abstract description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract description 4
- 239000000377 silicon dioxide Substances 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 abstract description 4
- 230000008569 process Effects 0.000 abstract description 3
- 239000002210 silicon-based material Substances 0.000 abstract description 3
- 238000001039 wet etching Methods 0.000 abstract description 3
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 238000007738 vacuum evaporation Methods 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000001257 hydrogen Substances 0.000 description 11
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 10
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 9
- 229910000077 silane Inorganic materials 0.000 description 9
- 239000010408 film Substances 0.000 description 8
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 7
- 229910000085 borane Inorganic materials 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 238000010926 purge Methods 0.000 description 6
- UORVGPXVDQYIDP-UHFFFAOYSA-N trihydridoboron Substances B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 6
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- 239000008367 deionised water Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
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- 229910021641 deionized water Inorganic materials 0.000 description 2
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- 239000002994 raw material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101710134784 Agnoprotein Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
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- 238000003912 environmental pollution Methods 0.000 description 1
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- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000005984 hydrogenation reaction Methods 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 238000004377 microelectronic Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
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- 239000002086 nanomaterial Substances 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN2011100329636A CN102157577B (zh) | 2011-01-31 | 2011-01-31 | 纳米硅/单晶硅异质结径向纳米线太阳电池及制备方法 |
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102593205A (zh) * | 2012-02-28 | 2012-07-18 | 常州天合光能有限公司 | 一种硅基薄膜太阳能电池 |
CN103346214A (zh) * | 2013-07-03 | 2013-10-09 | 上海交通大学 | 一种硅基径向同质异质结太阳电池及其制备方法 |
CN103390688A (zh) * | 2012-05-11 | 2013-11-13 | 华中科技大学 | 一种太阳能电池表面覆膜结构的制备方法 |
CN103681965A (zh) * | 2013-12-03 | 2014-03-26 | 常州大学 | 柔性基底硅纳米线异质结太阳电池的制备方法 |
JP2016529707A (ja) * | 2013-07-29 | 2016-09-23 | コリア インスチチュート オブ インダストリアル テクノロジー | 太陽電池用シリコン基板及びその製造方法 |
CN106898543A (zh) * | 2017-03-16 | 2017-06-27 | 南京大学 | Al2O3薄膜钝化硅基纳米线的方法及器件 |
CN107394013A (zh) * | 2017-07-26 | 2017-11-24 | 卡姆丹克太阳能(江苏)有限公司 | 一种硅锗黑磷烯pin异质结太阳能电池的制备方法 |
CN107464854A (zh) * | 2017-07-26 | 2017-12-12 | 卡姆丹克太阳能(江苏)有限公司 | 一种硅锗黑磷烯pin异质结太阳能电池 |
CN107910393A (zh) * | 2017-10-23 | 2018-04-13 | 电子科技大学 | 一种纳米线异质结太阳能电池及其制备方法 |
CN110854232A (zh) * | 2019-10-12 | 2020-02-28 | 江苏华富储能新技术股份有限公司 | 新型叠层硅量子点异质结太阳能电池及其制备方法 |
Citations (3)
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CN101132028A (zh) * | 2006-08-25 | 2008-02-27 | 通用电气公司 | 单个共形结纳米线光伏器件 |
CN101136444A (zh) * | 2006-08-25 | 2008-03-05 | 通用电气公司 | 薄膜硅太阳能电池中的纳米线 |
US20100012190A1 (en) * | 2008-07-16 | 2010-01-21 | Hajime Goto | Nanowire photovoltaic cells and manufacture method thereof |
-
2011
- 2011-01-31 CN CN2011100329636A patent/CN102157577B/zh active Active
Patent Citations (3)
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CN101132028A (zh) * | 2006-08-25 | 2008-02-27 | 通用电气公司 | 单个共形结纳米线光伏器件 |
CN101136444A (zh) * | 2006-08-25 | 2008-03-05 | 通用电气公司 | 薄膜硅太阳能电池中的纳米线 |
US20100012190A1 (en) * | 2008-07-16 | 2010-01-21 | Hajime Goto | Nanowire photovoltaic cells and manufacture method thereof |
Non-Patent Citations (2)
Title |
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《Solar Energy Materials & Solar Cells》 20090405 Oki Gunawan 等 Characteristics of vapor-liquid-solid grown silicon nanowire solar cells 摘要、第1391页右栏-第1392页 1-4 第93卷, * |
《纳米技术材料》 20030731 周瑞发等 纳米晶硅薄膜材料 第294页 1-5 , * |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102593205A (zh) * | 2012-02-28 | 2012-07-18 | 常州天合光能有限公司 | 一种硅基薄膜太阳能电池 |
CN103390688A (zh) * | 2012-05-11 | 2013-11-13 | 华中科技大学 | 一种太阳能电池表面覆膜结构的制备方法 |
CN103346214A (zh) * | 2013-07-03 | 2013-10-09 | 上海交通大学 | 一种硅基径向同质异质结太阳电池及其制备方法 |
CN103346214B (zh) * | 2013-07-03 | 2016-04-06 | 上海交通大学 | 一种硅基径向同质异质结太阳电池及其制备方法 |
JP2016529707A (ja) * | 2013-07-29 | 2016-09-23 | コリア インスチチュート オブ インダストリアル テクノロジー | 太陽電池用シリコン基板及びその製造方法 |
CN103681965A (zh) * | 2013-12-03 | 2014-03-26 | 常州大学 | 柔性基底硅纳米线异质结太阳电池的制备方法 |
CN106898543A (zh) * | 2017-03-16 | 2017-06-27 | 南京大学 | Al2O3薄膜钝化硅基纳米线的方法及器件 |
CN107394013A (zh) * | 2017-07-26 | 2017-11-24 | 卡姆丹克太阳能(江苏)有限公司 | 一种硅锗黑磷烯pin异质结太阳能电池的制备方法 |
CN107464854A (zh) * | 2017-07-26 | 2017-12-12 | 卡姆丹克太阳能(江苏)有限公司 | 一种硅锗黑磷烯pin异质结太阳能电池 |
CN107394013B (zh) * | 2017-07-26 | 2019-02-01 | 卡姆丹克太阳能(江苏)有限公司 | 一种硅锗黑磷烯pin异质结太阳能电池的制备方法 |
CN107464854B (zh) * | 2017-07-26 | 2019-11-05 | 南通鸿图健康科技有限公司 | 一种硅锗黑磷烯pin异质结太阳能电池 |
CN107910393A (zh) * | 2017-10-23 | 2018-04-13 | 电子科技大学 | 一种纳米线异质结太阳能电池及其制备方法 |
CN110854232A (zh) * | 2019-10-12 | 2020-02-28 | 江苏华富储能新技术股份有限公司 | 新型叠层硅量子点异质结太阳能电池及其制备方法 |
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