CN102145891A - Energy-saving furnace body of polycrystalline silicon reduction furnace - Google Patents
Energy-saving furnace body of polycrystalline silicon reduction furnace Download PDFInfo
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- CN102145891A CN102145891A CN2011100845324A CN201110084532A CN102145891A CN 102145891 A CN102145891 A CN 102145891A CN 2011100845324 A CN2011100845324 A CN 2011100845324A CN 201110084532 A CN201110084532 A CN 201110084532A CN 102145891 A CN102145891 A CN 102145891A
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Abstract
The invention discloses an energy-saving furnace body of a polycrystalline silicon reduction furnace and a method for controlling the inner wall temperature of the furnace body. The furnace body comprises a furnace body heat insulating barrel, a stainless steel bolt, a furnace body outer wall surface, a furnace body inner wall surface, a newly-added inner wall and a newly-added heat insulating layer, wherein the stainless steel bolt is fixed on the furnace body inner wall surface in a welding way; and the newly-added inner wall is fixed on the stainless steel bolt. Compared with the conventional reduction furnace, the reduction furnace has the advantage that: a heat insulating layer is additionally arranged in the reduction furnace. By adopting the invention, the problem of energy waste caused by difficulty in polishing of the conventional furnace body inner wall and a poor polishing effect is solved, and the thermal radiation loss of the reduction furnace is reduced. The energy-saving furnace body has a simple structure and a good energy-saving effect, and is convenient to operate.
Description
Technical field
The present invention relates to a kind of polycrystalline silicon reducing furnace power-saving technology, a kind of specifically inboard wall of furnace body temperature control technology of realizing that polycrystalline silicon reducing furnace is energy-conservation.
Background technology
The production of polysilicon corporate boss will adopt " improvement Siemens Method " both at home and abroad at present.The Production Flow Chart of this method is to utilize chlorine and hydrogen synthesising hydrogen (or outsourcing hydrogenchloride), hydrogenchloride and silica flour be synthesizing trichlorosilane at a certain temperature, then trichlorosilane is separated rectification and purification, after high-purity trichlorosilane after the purification and hydrogen are mixed in proportion, under certain temperature and pressure, feed in the polycrystalline silicon reducing furnace, on energising high temperature silicon core, carry out deposition reaction and generate polysilicon, temperature of reaction is controlled at 1080 ℃～1150 ℃, the final rod-like polycrystal silicon product that generates generates by products such as silicon tetrachloride, dichloro-dihydro silicon, hydrogenchloride simultaneously.
Wherein trichlorosilane and hydrogen need react under 1080 ℃～1150 ℃ high temperature in the polycrystalline silicon reducing furnace, its energy consumption mainly is that the high temperature silicon plug is radiated the wall medium that is cooled and takes away, therefore a lot of producers employing inwall polishes and reduces radiative transfer, to reach the power loss that reduces body of heater inside, finally realize energy-conservation.But because the chemical reaction in the reduction furnace can produce the hydrogenchloride product and deposition indefinite form silicon on the inboard wall of furnace body face, long-term production will reduce the mirror effect of inboard wall of furnace body polished surface, reduced the thermal radiation reflection of inner-wall surface to the high temperature silicon plug, cause energy-saving effect to reduce, therefore need regularly the inboard wall of furnace body face to be polished and safeguards, but direct operational difficulty to the inboard wall of furnace body mirror polish, the mirror effect of polishing is poor, have attenuate influence big and be unfavorable for safety in production to body of heater, we propose a kind of inner wall temperature control techniques for this reason.
Summary of the invention
The technical problem to be solved in the present invention provides a kind of inboard wall of furnace body temperature control technology of realizing that polycrystalline silicon reducing furnace is energy-conservation, can overcome simultaneously above-mentioned deficiency to inboard wall of furnace body polishing difficulty and polishing effect difference, avoid unformed silicon directly to be deposited on the body of heater wall, caused directly the inboard wall of furnace body polishing and caused reducing of body of heater thickness, reduced the energy consumption of reduction furnace when improving the security of reduction furnace operation.
In order to solve the problems of the technologies described above, the invention provides a kind of body of heater and inner wall temperature control method that realizes that polycrystalline silicon reducing furnace is energy-conservation, concrete technology is as follows:
A kind of body of heater of realizing that polycrystalline silicon reducing furnace is energy-conservation, newly-increased one deck inwall in body of heater, the former inwall of newly-increased inwall and reduction furnace body of heater welds with stainless steel bolt, is that 0.2～50mm forms thermofin between the former inwall of newly-increased inwall and reduction furnace body of heater.
The material of newly-increased inwall is the combination of stainless steel, silica glass or stainless steel and silica glass.
The area size of described newly-increased inwall is 0.1～2 square metre.
The thickness of described newly-increased inwall is 0.2～2mm.
The area size of newly-increased inwall and shape can be according to the needs of actual body of heater and different.Newly-increased inwall has caused the energy transfer process in the reduction furnace to become from the silicon plug with thermal radiation and thermal convection mode to newly-increased inwall transmission, after the reflection and absorption of newly-increased inwall, newly-increased inwall is passed to inboard wall of furnace body face through the mode of thermal radiation and thermal convection with energy with the energy that absorbs again, has increased one deck thermofin like this between newly-increased inwall and inboard wall of furnace body face.The described stainless steel bolt that is fixed on the inboard wall of furnace body face, it directly is welded on the inboard wall of furnace body face by welding process, stainless steel bolt is used for fixing newly-increased inwall, can be conveniently to the periodic replacement and the maintenance of newly-increased inwall, avoided directly the difficulty of inboard wall of furnace body mirror polish and helped safety in production.Simultaneously directly generally can reach Ra0.4 μ m to its roughness of inboard wall of furnace body mirror polish, and by increasing the method for inwall newly, its wall polishing can be polished by lathe, the minute surface roughness of polishing can realize Ra0.008 μ m, its specular reflection effect is higher than direct specular reflection effect to the inboard wall of furnace body mirror polish far away, therefore can improve the thermal radiation reflectivity of high temperature silicon plug, reduce the thermal radiation loss of high temperature silicon plug greatly.Moreover newly-increased inwall can also avoid indefinite form silicon directly to be deposited on the inboard wall of furnace body face, thereby has reduced the process that the inboard wall of furnace body face is polished and washes, and has avoided the attenuate influence to body of heater, prolongs the work-ing life of body of heater, reduces production costs.Can control the thickness of thermofin easily by the fixing newly-increased different positions of inwall on stainless steel bolt in addition, thereby reach effective control body of heater internal temperature, improve energy-saving effect.
The energy-conservation inboard wall of furnace body temperature control technology of described realization polycrystalline silicon reducing furnace has been avoided the difficulty of directly the inboard wall of furnace body face being polished, and can realize than directly polishing better mirror effect at the inboard wall of furnace body face, reduce high temperature silicon plug thermal radiation loss, be convenient to regular maintenance and operation to the inboard wall of furnace body face, help safety in production, can effectively control simultaneously the temperature of inboard wall of furnace body, improve energy-saving effect.
Description of drawings
Fig. 1 is the front view of polycrystalline silicon reducing furnace body of heater of the present invention;
Fig. 2 is the vertical view of polycrystalline silicon reducing furnace body of heater of the present invention;
Fig. 3 is the sectional view of polycrystalline silicon reducing furnace of the present invention;
Among the figure: the heat insulation tube of 1-body of heater, the 2-stainless steel bolt, 3-furnace body outer wall face, 4-inboard wall of furnace body face, 5-increases inwall newly, 6-thermofin, 7-bolt hole.
Embodiment
Below in conjunction with accompanying drawing concrete enforcement of the present invention is described in further detail:
Embodiment 1: as shown in Figure 1, 2, the polycrystalline silicon reducing furnace body of heater comprises: the heat insulation tube of 1-body of heater, and the 2-stainless steel bolt, 3-furnace body outer wall face, 4-inboard wall of furnace body face, 5-increases inwall newly, 6-thermofin, 7-bolt hole.Wherein, it is the stainless steel thin slice of 0.2mm that newly-increased inwall 5 is selected thickness for use, its overall shape is identical with body of heater, may be partitioned into rectangle (Fig. 3) during preparation, the square Thin Stainless Steel sheet of every block length area is 0.1 square metre of (high 2m of being, width is 0.05m), all open bolt hole 8 on its thin slice, its perforate size is 10mm, be mainly used in the control needs that fixed needs and conducts heat, the stainless steel thin slice is the polishing through lathe, and its polishing process is convenient and polishing effect is good, and the minute surface roughness of polishing can realize Ra0.008 μ m.Used stainless steel bolt 2 uses model to be M8, and length is 60mm, just can control the thickness of thermofin at 0.2mm by regulating the newly-increased position of inwall on bolt.Stainless steel bolt 2 is fixed on the inboard wall of furnace body face 4 by welding process.The stainless steel thin slice is fixed on the stainless steel bolt 2, can be conveniently to the periodic replacement and the maintenance of stainless steel thin slice, avoided directly the difficulty of inboard wall of furnace body mirror polish and helped safety in production, simultaneously can also realize better polishing effect, improve the thermal radiation reflectivity of stainless steel thin slice, reduce the energy consumption of reduction furnace.
Embodiment 2: as shown in Figure 3, the polycrystalline silicon reducing furnace body of heater comprises: the heat insulation tube of 1-body of heater, and the 2-stainless steel bolt, 3-furnace body outer wall face, 4-inboard wall of furnace body face, 5-increases inwall newly, 6-thermofin, 7-bolt hole.Wherein, it is the stainless steel thin slice of 2mm that newly-increased inwall 5 is selected thickness for use, and its overall shape is identical with body of heater, may be partitioned into rectangle during preparation, the area of the square stainless steel thin slice of every block length is 2 square metres (high 2m of being, width is 1m), all opens bolt hole 8 on its thin slice, its perforate size is 12mm, is mainly used in the control needs that fixed needs and conducts heat, and the stainless steel thin slice is the polishing through lathe, its polishing process is convenient and polishing effect is good, and the minute surface roughness of polishing can realize Ra0.008 μ m.Used stainless steel bolt 2 uses model to be M10, and length is 60mm, just can control the thickness of thermofin at 50mm by regulating the newly-increased position of inwall on bolt.Stainless steel bolt 2 is fixed on the inboard wall of furnace body face 4 by welding process.The stainless steel thin slice is fixed on the stainless steel bolt 2, can be conveniently to the periodic replacement and the maintenance of stainless steel thin slice, avoided directly the difficulty of inboard wall of furnace body mirror polish and helped safety in production, simultaneously can also realize better polishing effect, improve the thermal radiation reflectivity of stainless steel thin slice, reduce the energy consumption of reduction furnace.
Embodiment 3: as shown in Figure 3, the polycrystalline silicon reducing furnace body of heater comprises: the heat insulation tube of 1-body of heater, and the 2-stainless steel bolt, 3-furnace body outer wall face, 4-inboard wall of furnace body face, 5-increases inwall newly, 6-thermofin, 7-bolt hole.Wherein, it is the stainless steel thin slice of 1mm that newly-increased inwall 5 is selected thickness for use, its overall shape is identical with body of heater, may be partitioned into rectangle (Fig. 3) during preparation, the area of the square stainless steel thin slice of every block length is 1 square metre of (high 2m of being, width 0.5m), all open bolt hole 8 on its thin slice, its perforate size is 12mm, be mainly used in the control needs that fixed needs and conducts heat, the stainless steel thin slice is the polishing through lathe, and its polishing process is convenient and polishing effect is good, and the minute surface roughness of polishing can realize Ra0.008 μ m.Used stainless steel bolt 2 uses model to be M10, and length is 60mm, just can control the thickness of thermofin at 30mm by regulating the newly-increased position of inwall on bolt.Stainless steel bolt 2 is fixed on the inboard wall of furnace body face 4 by welding process.The stainless steel thin slice is fixed on the stainless steel bolt 2, can be conveniently to the periodic replacement and the maintenance of stainless steel thin slice, avoided directly the difficulty of inboard wall of furnace body mirror polish and helped safety in production, simultaneously can also realize better polishing effect, improve the thermal radiation reflectivity of stainless steel thin slice, cut down the consumption of energy.
Embodiment 4: as shown in Figure 3, the polycrystalline silicon reducing furnace body of heater comprises: the heat insulation tube of 1-body of heater, and the 2-stainless steel bolt, 3-furnace body outer wall face, 4-inboard wall of furnace body face, 5-increases inwall newly, 6-thermofin, 7-bolt hole.Wherein, it is the silica glass thin slice of 1mm that newly-increased inwall 5 is selected thickness for use, its overall shape is identical with body of heater, may be partitioned into rectangle (Fig. 3) during preparation, and the area of the square quartzy glass flake of every block length is 1 square metre of (high 2m of being, width is 0.5m), all open bolt hole 8 on its thin slice, its perforate size is 12mm, is mainly used in the control needs that fixed needs and conducts heat, silica glass surface plating thin film, the thermal radiation that can reflect the high temperature silicon rod.Used stainless steel bolt 2 uses model to be M10, and length is 60mm, just can control the thickness of thermofin at 20mm by regulating the newly-increased position of inwall on bolt.Stainless steel bolt 2 is fixed on the inboard wall of furnace body face 4 by welding process.The silica glass thin slice is fixed on the stainless steel bolt 2, can be conveniently to the periodic replacement and the maintenance of silica glass thin slice, avoided directly the difficulty of inboard wall of furnace body mirror polish and helped safety in production, can also improve the thermal radiation reflectivity of body of heater wall simultaneously, cut down the consumption of energy.
The above example only is to prove absolutely the present invention and the preferred embodiment of being lifted, and protection scope of the present invention is not limited thereto.Being equal to that those skilled in the art are done on basis of the present invention substitutes or conversion, all within protection scope of the present invention.Protection scope of the present invention is as the criterion with claims.
Claims (4)
1. body of heater of realizing that polycrystalline silicon reducing furnace is energy-conservation, it is characterized in that, newly-increased one deck inwall in body of heater, the former inwall of newly-increased inwall and reduction furnace body of heater welds with stainless steel bolt, is that 0.2～50mm forms thermofin between the former inwall of newly-increased inwall and reduction furnace body of heater.
2. body of heater according to claim 1 is characterized in that the material of newly-increased inwall is stainless steel, silica glass.
3. body of heater according to claim 1, the area size that it is characterized in that described newly-increased inwall is 0.1～2 square metre.
4. body of heater according to claim 1, the thickness that it is characterized in that described newly-increased inwall is 0.2～2mm.
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| CN2011100845324A CN102145891A (en) | 2011-04-02 | 2011-04-02 | Energy-saving furnace body of polycrystalline silicon reduction furnace |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102424386A (en) * | 2011-09-06 | 2012-04-25 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| CN102659109A (en) * | 2012-04-27 | 2012-09-12 | 四川新光硅业科技有限责任公司 | Polycrystalline silicon reduction furnace |
| CN102674363A (en) * | 2012-05-09 | 2012-09-19 | 天津大学 | Double-layer structure of inner container of energy-saving type polysilicon reduction furnace and implementation method for double-layer structure |
| CN102730693A (en) * | 2012-05-09 | 2012-10-17 | 天津大学 | Vacuum interlayer liner structure of energy-saving polysilicon reduction furnace |
| WO2013053495A1 (en) * | 2011-10-12 | 2013-04-18 | Centrotherm Sitec Gmbh | Coating for a reactor vessel and coating process |
| CN103342362A (en) * | 2013-07-12 | 2013-10-09 | 新特能源股份有限公司 | Heat shield of polysilicon CVD (chemical vapor deposition) reactor |
| CN104556041A (en) * | 2015-01-16 | 2015-04-29 | 中国矿业大学 | Polycrystalline silicon reduction furnace body |
| CN106145118A (en) * | 2015-03-10 | 2016-11-23 | 周正平 | Reduction furnace bell jar in a kind of production of polysilicon goes to cool down water method |
| CN106918226A (en) * | 2017-03-03 | 2017-07-04 | 清华大学 | A kind of ceramic kiln with the adjustable wicket that radiates |
| CN111957280A (en) * | 2020-08-03 | 2020-11-20 | 亚洲硅业(青海)股份有限公司 | Reactor with adjustable electromagnetic field distribution |
| CN113526510A (en) * | 2021-08-17 | 2021-10-22 | 昆明学院 | Method for reducing radiation heat loss of polycrystalline silicon reduction furnace and application |
| JP7395793B1 (en) | 2022-01-18 | 2023-12-11 | 株式会社トクヤマ | Reactor for manufacturing polycrystalline silicon rod, gas supply nozzle, method for manufacturing polycrystalline silicon rod, and polycrystalline silicon rod |
Citations (2)
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| CN1884068A (en) * | 2005-06-24 | 2006-12-27 | 刘雅銘 | Reducing furnace for producing polysilicon |
| CN201722157U (en) * | 2009-12-30 | 2011-01-26 | 峨嵋半导体材料研究所 | Silicon tetrachloride hydrogenation furnace |
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2011
- 2011-04-02 CN CN2011100845324A patent/CN102145891A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1884068A (en) * | 2005-06-24 | 2006-12-27 | 刘雅銘 | Reducing furnace for producing polysilicon |
| CN201722157U (en) * | 2009-12-30 | 2011-01-26 | 峨嵋半导体材料研究所 | Silicon tetrachloride hydrogenation furnace |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102424386A (en) * | 2011-09-06 | 2012-04-25 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| CN102424386B (en) * | 2011-09-06 | 2012-12-19 | 江苏中圣高科技产业有限公司 | Efficient energy-saving type polysilicon reduction furnace |
| WO2013053495A1 (en) * | 2011-10-12 | 2013-04-18 | Centrotherm Sitec Gmbh | Coating for a reactor vessel and coating process |
| CN102659109A (en) * | 2012-04-27 | 2012-09-12 | 四川新光硅业科技有限责任公司 | Polycrystalline silicon reduction furnace |
| CN102674363A (en) * | 2012-05-09 | 2012-09-19 | 天津大学 | Double-layer structure of inner container of energy-saving type polysilicon reduction furnace and implementation method for double-layer structure |
| CN102730693A (en) * | 2012-05-09 | 2012-10-17 | 天津大学 | Vacuum interlayer liner structure of energy-saving polysilicon reduction furnace |
| CN103342362A (en) * | 2013-07-12 | 2013-10-09 | 新特能源股份有限公司 | Heat shield of polysilicon CVD (chemical vapor deposition) reactor |
| CN104556041A (en) * | 2015-01-16 | 2015-04-29 | 中国矿业大学 | Polycrystalline silicon reduction furnace body |
| CN104556041B (en) * | 2015-01-16 | 2016-12-07 | 江苏省特种设备安全监督检验研究院 | A kind of polysilicon reduction furnace body |
| CN106145118A (en) * | 2015-03-10 | 2016-11-23 | 周正平 | Reduction furnace bell jar in a kind of production of polysilicon goes to cool down water method |
| CN106918226A (en) * | 2017-03-03 | 2017-07-04 | 清华大学 | A kind of ceramic kiln with the adjustable wicket that radiates |
| CN111957280A (en) * | 2020-08-03 | 2020-11-20 | 亚洲硅业(青海)股份有限公司 | Reactor with adjustable electromagnetic field distribution |
| CN113526510A (en) * | 2021-08-17 | 2021-10-22 | 昆明学院 | Method for reducing radiation heat loss of polycrystalline silicon reduction furnace and application |
| JP7395793B1 (en) | 2022-01-18 | 2023-12-11 | 株式会社トクヤマ | Reactor for manufacturing polycrystalline silicon rod, gas supply nozzle, method for manufacturing polycrystalline silicon rod, and polycrystalline silicon rod |
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Application publication date: 20110810 |