CN201722157U - Silicon tetrachloride hydrogenation furnace - Google Patents
Silicon tetrachloride hydrogenation furnace Download PDFInfo
- Publication number
- CN201722157U CN201722157U CN2009203191096U CN200920319109U CN201722157U CN 201722157 U CN201722157 U CN 201722157U CN 2009203191096 U CN2009203191096 U CN 2009203191096U CN 200920319109 U CN200920319109 U CN 200920319109U CN 201722157 U CN201722157 U CN 201722157U
- Authority
- CN
- China
- Prior art keywords
- heater
- furnace body
- silicon tetrachloride
- chassis
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a silicon tetrachloride hydrogenation furnace, which comprises a furnace body (6) and a chassis (2). Cooling water flows among the interlayers of the shell of the furnace body (6); a cooling water inlet (10) is arranged at the lower part of the furnace body (6), and a cooling water outlet (7) is arranged on the top of the furnace body (6); a plurality of inverted U-shaped heaters (9) are arranged in the furnace body (6); a heat screen (4) and a corrosion resisting insulating layer (12) are also arranged between the furnace body (6) and each heater (9); the dual-layer compound chassis (2) is provided with a gas outlet (1), a plurality of admission pipes (13) and a plurality of electrodes (11); and the electrodes (11) and the heaters (9) are electrically connected. The furnace body has simple structure and convenient detachment and can reduce the manufacturing cost; the corrosion resisting insulating layer is arranged between the heat screen and the shell of the furnace body, and thereby, the temperature of a thermal field can be effectively maintained, the product reaction rate can be improved, simultaneously, the temperature of the inner wall of the furnace body can be effectively reduced and the energy consumption can be reduced.
Description
Technical field
The utility model discloses a kind of hydrogenation furnace, relate in particular to a kind of hydrogenation furnace of handling the silicon tetrachloride tailing in the polysilicon production process, belong to field of polysilicon technology.
Background technology
The main technique of China's production of polysilicon is " an improvement Siemens Method ": hydrogenchloride and industrial silica fume be synthesizing trichlorosilane at a certain temperature, then trichlorosilane is separated rectification and purification, high-purity trichlorosilane after the purification and hydrogen are mixed in proportion the back and feed in the polycrystalline silicon reducing furnace, under certain temperature and pressure, on energising high temperature silicon core, carry out deposition reaction and generate polysilicon, generate by products such as silicon tetrachloride, dichloro-dihydro silicon, hydrogenchloride simultaneously.Produce in the process of polysilicon at the improvement Siemens Method, certainly will produce a large amount of SiCl
4, generally speaking, every production 1kg polysilicon product, big appointment produces 15kg SiCl
4, the scale operation polysilicon, the essential SiCl that solves
4Problem of outlet.The technology of processing silicon chloride mainly contains hot hydrogenation technology, silicon tetrachloride chlorine hydrogenation technology, cold hydrogenation technology etc.The hot hydrogenation technology of silicon tetrachloride is that silicon tetrachloride and hydrogen are fed hydrogenation furnace simultaneously, under not high pressure, directly with SiCl
4Be reduced into SiHCl
3, again with SiHCl
3Be used for also original production polysilicon.Hot hydrogenation technology can make full use of resource, has avoided the directly environmental pollution that brought of discharging of silicon tetrachloride again, and less demanding to equipment and material, but continuous production need not to add silica flour, the quality product height, purify easily, thereby be to use more silicon tetrachloride treatment process at present.
Hydrogenation furnace is to realize the hydrotreated visual plant of silicon tetrachloride heat, needs long-term operation continuously, the energy consumption height, and the silicon tetrachloride transformation efficiency is lower, and quality product requires very high.The quality of this device structure, material select transformation efficiency, quality product and the device fabrication cost that will directly have influence on silicon tetrachloride for use.
Existing silicon tetrachloride hydrogenation furnace comprises a bell-jar double-layer furnace body 6 and the middle double-layer combined chassis 2 that leads to water coolant, and body of heater 6 is connected by flange, screw rod 3 with chassis 2; The top of body of heater 6 is provided with an inlet mouth 8, is used for entering of unstripped gas; Logical water coolant between the crustless sandwich of body of heater 6, the water-in 10 of water coolant is arranged on the bottom of body of heater 6, and water outlet 7 is arranged at the below of inlet mouth 8, and the upper end is a standard elliptical head; The inside of body of heater 6 is provided with a plurality of inverted U well heaters 9, also is provided with thermoscreen 4 and metal cap 5 between body of heater 6 and the well heater 9; Chassis 2 is provided with air outlet 1 and a plurality of electrode 11, is electrically connected between electrode 11 and the well heater 9.
There is following shortcoming and defect in existing silicon tetrachloride hydrogenation furnace: inlet mouth is positioned at the body of heater top, and the shell structure complexity must be dismantled admission passage earlier when opening the stove tube, and is very inconvenient; Housing and chassis material are 12X18H10T, and this kind material is low carbon austenitic stainless steel, and silicon tetrachloride, trichlorosilane are poisonous, strong corrosive media, easily low carbon stainless steel are caused intergranular corrosion in high temperature, hyperbaric environment, reduce the work-ing life of equipment; Be provided with metal cap between thermoscreen and the housing, oxidizing reaction takes place under high temperature, high pressure, corrosive environment easily, product is polluted.
The utility model content
The purpose of this utility model is to overcome the existing above-mentioned deficiency of silicon tetrachloride hydrogenation furnace in the prior art, provide a kind of rational in infrastructure, control conveniently, silicon tetrachloride hydrogenation furnace that can not polluted product.
The utility model realizes that the technical scheme of above-mentioned purpose is:
A kind of silicon tetrachloride hydrogenation furnace comprises a bell-jar double-layer furnace body 6 and the middle double-layer combined chassis 2 that leads to water coolant, and body of heater 6 is connected by flange, screw rod or quick clamp 3 with chassis 2; Logical water coolant between the crustless sandwich of body of heater 6, the water-in 10 of water coolant is arranged on the bottom of body of heater 6, and water outlet 7 is arranged at the top of body of heater 6, and the upper end is a standard elliptical head; The inside of body of heater 6 is provided with a plurality of inverted U well heaters 9, also is provided with thermoscreen 4 and corrosion-resistant thermal insulation layer 12 between body of heater 6 and the well heater 9; Double-layer combined chassis 2 is provided with air outlet 1, a plurality of inlet pipe 13 and a plurality of electrode 11, is electrically connected between electrode 11 and the well heater 9.
Described screw rod 3 can be replaced by quick clamp.
The electrode 11 of above-mentioned silicon tetrachloride hydrogenation furnace has 36, from inside to outside divide 3 the circle arrange, be respectively 6,12,18, described inlet pipe 13 has 6, with second the circle distribution of electrodes on same circumference.
Described corrosion-resistant thermal insulation layer 12 is a charcoal carbon composite layer, has advantage high temperature resistant, pollution-free, high insulating effect, can effectively keep temperature of thermal field, improves the product reactivity, can effectively reduce the inboard wall of furnace body temperature simultaneously, cuts down the consumption of energy.
Compared with prior art the beneficial effects of the utility model are:The utility model removes body of heater top inlet mouth, and furnace binding is simple, and convenient disassembly can reduce manufacturing cost; Corrosion-resistant thermal insulation layer is set between thermoscreen and the furnace body shell, can effectively keeps temperature of thermal field, improve the product reactivity, can effectively reduce the inboard wall of furnace body temperature simultaneously, cut down the consumption of energy; Inlet mouth is arranged on the chassis, is convenient to the concentrated connection and the field management of pipeline.
Below in conjunction with the drawings and specific embodiments the utility model is further specified.
Description of drawings
The utility model will illustrate by example and with reference to the mode of accompanying drawing, wherein:
Fig. 1 is the structural representation of silicon tetrachloride hydrogenation furnace in the prior art;
Fig. 2 is the structural representation on silicon tetrachloride hydrogenation furnace chassis in the prior art;
Fig. 3 is the structural representation of silicon tetrachloride hydrogenation furnace of the present utility model;
Fig. 4 is the structural representation on silicon tetrachloride hydrogenation furnace of the present utility model chassis.
Wherein, Reference numeral is: 1-air outlet, 2-chassis, 3-screw rod (clamp fast), 4-thermoscreen, 5-metal cap, 6-body of heater, 7-water outlet, 8-inlet mouth, 9-well heater, 10-water-in, 11-electrode, the corrosion-resistant thermal insulation layer of 12-, 13-inlet pipe.
Embodiment
Disclosed arbitrary feature in this specification sheets (comprising any accessory claim, summary and accompanying drawing) is unless special narration all can be replaced by other equivalences or the alternative features with similar purpose.That is, unless special narration, each feature is an example in a series of equivalences or the similar characteristics.
Embodiment
The utility model is enumerated silicon tetrachloride hydrogenation furnace, comprises the double-layer combined chassis 2 of a bell-jar double-layer furnace body 6 and middle logical water coolant, and body of heater 6 is connected by flange, quick clamp 3 with chassis 2; Logical water coolant between the crustless sandwich of body of heater 6, the water-in 10 of water coolant is arranged on the bottom of body of heater 6, and water outlet 7 is arranged at the top of body of heater 6, and the upper end is a standard elliptical head; The inside of body of heater 6 is provided with a plurality of inverted U well heaters 9, also is provided with thermoscreen 4 and corrosion-resistant thermal insulation layer 12 between body of heater 6 and the well heater 9; Double-layer combined chassis 2 is provided with air outlet 1, a plurality of inlet pipe 13 and a plurality of electrode 11, is electrically connected between electrode 11 and the well heater 9.
The electrode 11 of above-mentioned silicon tetrachloride hydrogenation furnace has 36, from inside to outside divide 3 the circle arrange, be respectively 6,12,18, described inlet pipe 13 has 6, with second the circle distribution of electrodes on same circumference.
The material on body of heater and chassis is 00Cr17Ni14Mo2 in the present embodiment, and well heater quantity is 18/platform, single power 75KW, and total power is 1350KW, and thermoscreen is for the charcoal carbon composite is prepared from, and is divided into 5 joints, and it is heat insulation to be mainly used in internal layer, and density is 1.2g/cm
3, all thick 12mm; Corrosion-resistant thermal insulation layer is divided into 5 joints for the charcoal carbon composite is prepared from, and is mainly used in outer insulation, and density is 0.7g/cm
3, all thick 25mm.Body of heater inner bag diameter 1400mm, water-cooling jacket diameter 1500mm, height 3200mm, reaction chamber 316L, working pressure cooling water jecket working pressure 0.6MPa, 150 ℃ of temperature.The hydrogenation furnace of present embodiment can solve the kiloton production of polysilicon silicon tetrachloride as by-product utilize problem again.
Claims (2)
1. a silicon tetrachloride hydrogenation furnace comprises a bell-jar double-layer furnace body (6) and the middle double-layer combined chassis (2) that leads to water coolant, and body of heater (6) is connected by flange, screw rod or quick clamp (3) with chassis (2); Logical water coolant between the crustless sandwich of body of heater (6), the water-in of water coolant (10) is arranged on the bottom of body of heater (6), the inside of body of heater (6) is provided with a plurality of inverted U well heaters (9), double-layer combined chassis (2) is provided with air outlet (1) and a plurality of electrode (11), is electrically connected between electrode (11) and the well heater (9); It is characterized in that: the water outlet of water coolant (7) is arranged at the top of body of heater (6), and the upper end is a standard elliptical head; Also be provided with thermoscreen (4) and corrosion-resistant thermal insulation layer (12) between body of heater (6) and the well heater (9); A plurality of inlet pipe (13) also are set on the double-layer combined chassis (2).
2. silicon tetrachloride hydrogenation furnace according to claim 1, it is characterized in that: the electrode of silicon tetrachloride hydrogenation furnace (11) has 36, from inside to outside divides 3 circles to arrange, and is respectively 6,12,18, described inlet pipe (13) has 6, with second the circle distribution of electrodes on same circumference.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203191096U CN201722157U (en) | 2009-12-30 | 2009-12-30 | Silicon tetrachloride hydrogenation furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009203191096U CN201722157U (en) | 2009-12-30 | 2009-12-30 | Silicon tetrachloride hydrogenation furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201722157U true CN201722157U (en) | 2011-01-26 |
Family
ID=43490467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009203191096U Expired - Fee Related CN201722157U (en) | 2009-12-30 | 2009-12-30 | Silicon tetrachloride hydrogenation furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201722157U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102145891A (en) * | 2011-04-02 | 2011-08-10 | 天津大学 | Energy-saving furnace body of polycrystalline silicon reduction furnace |
| CN102288030A (en) * | 2011-07-21 | 2011-12-21 | 广东世创金属科技有限公司 | Uniform-heating screen with cooling structure for thermally-stimulated furnace |
| CN102491336A (en) * | 2011-11-29 | 2012-06-13 | 天津大学 | Energy-saving device and method for polycrystalline silicon reduction furnace with polycrystalline silicon insert heat insulation layer |
| CN102701209A (en) * | 2011-03-28 | 2012-10-03 | 四川瑞能硅材料有限公司 | Polysilicon reducing furnace |
| CN104567713A (en) * | 2014-12-29 | 2015-04-29 | 南京理工大学 | Multi-spot snow-depth measuring method and device |
| CN106082237A (en) * | 2016-08-19 | 2016-11-09 | 太仓市金锚化工有限公司 | A kind of hydrogenation of silicon tetrachloride reactor |
-
2009
- 2009-12-30 CN CN2009203191096U patent/CN201722157U/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102701209A (en) * | 2011-03-28 | 2012-10-03 | 四川瑞能硅材料有限公司 | Polysilicon reducing furnace |
| CN102145891A (en) * | 2011-04-02 | 2011-08-10 | 天津大学 | Energy-saving furnace body of polycrystalline silicon reduction furnace |
| CN102288030A (en) * | 2011-07-21 | 2011-12-21 | 广东世创金属科技有限公司 | Uniform-heating screen with cooling structure for thermally-stimulated furnace |
| CN102288030B (en) * | 2011-07-21 | 2014-09-03 | 广东世创金属科技有限公司 | Uniform-heating screen with cooling structure for thermally-stimulated furnace |
| CN102491336A (en) * | 2011-11-29 | 2012-06-13 | 天津大学 | Energy-saving device and method for polycrystalline silicon reduction furnace with polycrystalline silicon insert heat insulation layer |
| CN102491336B (en) * | 2011-11-29 | 2014-02-12 | 天津大学 | Energy-saving device and method for polycrystalline silicon reduction furnace with polycrystalline silicon insert heat insulation layer |
| CN104567713A (en) * | 2014-12-29 | 2015-04-29 | 南京理工大学 | Multi-spot snow-depth measuring method and device |
| CN104567713B (en) * | 2014-12-29 | 2017-08-04 | 南京理工大学 | A kind of multiple spot snow depth measuring method and device |
| CN106082237A (en) * | 2016-08-19 | 2016-11-09 | 太仓市金锚化工有限公司 | A kind of hydrogenation of silicon tetrachloride reactor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN201722157U (en) | Silicon tetrachloride hydrogenation furnace | |
| CN102249241B (en) | Polycrystalline silicon reduction furnace | |
| CN201512418U (en) | Polycrystalline silicon reducing furnace | |
| CN201793375U (en) | Reduction furnace for producing polysilicon | |
| CN203006955U (en) | 72-cobar polycrystalline silicon reduction furnace | |
| CN201232028Y (en) | Polycrystalline silicon reducing furnace with adjustable air inlet pipe nozzle | |
| CN103011154B (en) | A kind of method of internal heat type continuous seepage high-purity natural graphite and device thereof | |
| CN201326030Y (en) | Polysilicon reducing furnace | |
| CN205687570U (en) | A kind of 45 to rod compact polycrystalline silicon reducing furnace | |
| CN201801385U (en) | Reactor capable of converting silicon tetrachloride into trichlorosilane | |
| CN203319708U (en) | Polysilicon manufacturing device | |
| CN201525754U (en) | Polysilicon experiment reduction furnace | |
| CN101973551B (en) | Polysilicon reducing furnace | |
| CN101830467B (en) | Polycrystalline silicon decomposing furnace | |
| CN201648567U (en) | Polysilicon decomposing furnace | |
| CN207016494U (en) | A kind of electric controllable efficient polycrystalline silicon reduction furnace | |
| CN201162066Y (en) | Energy conservation type polysilicon reduction furnace | |
| CN206069385U (en) | A kind of hydrogenation of silicon tetrachloride reactor | |
| CN202322407U (en) | Nano-alumina powder manufacturing device | |
| CN201834768U (en) | Polycrystalline silicon production device | |
| CN105060297A (en) | Method and apparatus for producing trichlorosilane | |
| CN201538830U (en) | 18-pair-of-stick polycrystalline silicon reducing furnace | |
| CN201678457U (en) | Heat transfer oil silicon chip jacking device for polycrystalline silicon decomposing furnace | |
| CN103880009B (en) | A kind of offgas outlet connects polycrystalline silicon reducing furnace and the method for attachment of inside extending tube | |
| CN203498095U (en) | Temperature control and energy saving system for polysilicon reduction furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110126 Termination date: 20161230 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |