CN102121470A - Device and method for monitoring failure of vacuum pump and vacuum sensor - Google Patents
Device and method for monitoring failure of vacuum pump and vacuum sensor Download PDFInfo
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- CN102121470A CN102121470A CN2010100225740A CN201010022574A CN102121470A CN 102121470 A CN102121470 A CN 102121470A CN 2010100225740 A CN2010100225740 A CN 2010100225740A CN 201010022574 A CN201010022574 A CN 201010022574A CN 102121470 A CN102121470 A CN 102121470A
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Abstract
The invention discloses a device and method for monitoring failure of a vacuum pump and a vacuum sensor. The vacuum pump is connected with a target device through a pipeline. The device for monitoring the failure of the vacuum pump comprises the vacuum sensor, a laser emitting unit, a laser detecting unit and a control unit, wherein the vacuum sensor is arranged in the pipeline; when the vacuum in the pipeline is larger than a preset vacuum value, the vacuum sensor prevents light rays from permeating; the laser emitting unit and the laser detecting unit are arranged on both sides of the vacuum sensor respectively; the laser detecting unit is used for detecting laser light emitted by the laser emitting unit; and the control unit is used for judging the failure of the vacuum pump when the laser detecting unit does not detect any laser light. When the target device is a conveying cavity, the phenomenon of break or short circuit of a metal interconnecting line formed in a subsequent process, caused by staining of a silicon chip, when the vacuum in the conveying cavity does not meet a requirement at the failure of the vacuum pump during conveying of the silicon chip in the conveying cavity is avoided.
Description
Technical field
The present invention relates to vacuum pump inefficacy monitoring, relate in particular in the semiconductor applications, when transmission cavity is vacuumized, the apparatus and method that the monitoring vacuum pump lost efficacy, and the degree of vacuum sensor that is used for this device.
Background technique
In semiconductor applications, need utilize transmission cavity silicon chip to be transported in the reaction chamber of appointment, carry out certain technology.In semiconductor technology, not high to the vacuum requirements of transmission cavity, be generally 200～650 person of outstanding talent's holders (mtorr), traditional idea thinks that the size of degree of vacuum is little to the influence of silicon chip in the transmission cavity, therefore, the method for degree of vacuum in the transmission cavity not being monitored in the prior art; Yet through practice for a long time, the inventor finds, when vacuum pump lost efficacy, can influence the cleanliness of silicon chip when degree of vacuum is greater than predetermined value in the transmission cavity, and then when last part technology forms metal interconnecting wires, cause wire to disconnect or short circuit, thereby influence the entire semiconductor device performance.
The patent No. is 200410032743.3 Chinese invention patent, discloses a kind of vacuum treatment installation and substrate convey method, yet, do not solve the above technical problem of prior art.
When vacuum pump lost efficacy, the degree of vacuum in the transmission cavity can surpass setting value, influences the cleanliness of silicon chip, and then when last part technology forms metal interconnecting wires, caused wire to disconnect or short circuit, thereby influence the entire semiconductor device performance.Avoid particle when guaranteeing that silicon chip transmits in transmission cavity and stain, avoid when semiconductor rear section technology forms metal interconnecting wires, metal interconnecting wires disconnects or the phenomenon of short circuit, and expectation proposes a kind of method and apparatus that vacuum pump lost efficacy of monitoring.
Summary of the invention
When the problem that the present invention solves is the vacuum pump inefficacy that in the prior art transmission cavity is vacuumized, do not monitor the method and apparatus that vacuum pump lost efficacy, tarnish when causing silicon chip in transmission cavity, to transmit, in semiconductor rear section technology, when forming metal interconnecting wires, wire produces the shortcoming of disconnection or short circuit.
For solving above technical problem, the invention provides a kind of degree of vacuum sensor, comprising: first bracing ring, second bracing ring and the joint that connects described first bracing ring and second bracing ring;
Wherein, the radius of described first bracing ring is less than the radius of described second bracing ring, described first bracing ring has stretchability, described joint has opaqueness, in the degree of vacuum of described degree of vacuum environment that sensor is put during greater than the predetermined vacuum level value, described first bracing ring is in deflated state, and described joint stops light transmission.
For overcoming the above problems, the present invention also provides a kind of device that vacuum pump lost efficacy of monitoring, and described vacuum pump is connected with destination apparatus by pipeline, and the device that this monitoring vacuum pump lost efficacy comprises:
The degree of vacuum sensor places in the described pipeline, and the degree of vacuum in described pipeline is during greater than the predetermined vacuum level value, and described degree of vacuum sensor stops light transmission;
Laser emission element and laser detection unit place the both sides of described degree of vacuum sensor respectively, and described laser emission element emitted laser is surveyed in described laser detection unit;
Control unit when not detecting laser in described laser detection unit, judges that described vacuum pump lost efficacy.
Optionally, described destination apparatus is the transmission cavity that is used for transmitting silicon chip in the semiconductor technology.
The present invention also provides a kind of method that vacuum pump lost efficacy of monitoring, and described vacuum pump is connected with destination apparatus by pipeline, and this method comprises:
The degree of vacuum sensor is provided, described degree of vacuum sensor is placed in the described pipeline, the degree of vacuum in described pipeline is during greater than the predetermined vacuum level value, and described degree of vacuum sensor stops that light passes through;
At the side emission laser of described degree of vacuum sensor, opposite side exploring laser light;
When the opposite side of described degree of vacuum sensor does not detect laser, judge that described vacuum pump lost efficacy.
Compared with prior art, the present invention has the following advantages:
Vacuum pump is connected with destination apparatus by pipeline, destination apparatus is vacuumized, when the degree of vacuum in the destination apparatus surpasses the predetermined vacuum level value, the degree of vacuum sensor stops that the laser emission element emitted laser sees through, the laser detection unit does not receive laser, thereby can learn that vacuum pump lost efficacy, degree of vacuum in the destination apparatus is greater than predetermined value, can change vacuum pump this moment, proceed to vacuumize, guarantee the degree of vacuum value of degree of vacuum in the destination apparatus for setting, when destination apparatus is transmission cavity, technique scheme can be avoided because when transmitting silicon chip in transmission cavity, silicon chip tarnishes, and causes the metal interconnecting wires that forms in last part technology to disconnect or the phenomenon of short circuit.
Description of drawings
Fig. 1 is in the vacuum pump view of the device that lost efficacy of the monitoring vacuum pump of the specific embodiment of the invention just often;
Fig. 2 is the view of the device that lost efficacy of the monitoring vacuum pump of the specific embodiment of the invention when vacuum pump lost efficacy;
Fig. 3 is the schematic representation of the degree of vacuum sensor of the specific embodiment of the invention;
Fig. 4 is the left view of the degree of vacuum sensor shown in Fig. 3.
Embodiment
Method and apparatus, degree of vacuum sensor that the monitoring vacuum pump of embodiment of the present invention lost efficacy, at vacuum pump just often, degree of vacuum in the transmission cavity is in predetermined range the time, place with pipeline that transmission cavity is connected in light blocking/see through blocking unit be in a kind of equilibrium of forces state, the laser emission element emitted laser was passed and was stopped/see through that the unit stops this moment, the laser detection unit can receive laser, and alarm unit is not reported to the police; When vacuum pump lost efficacy, the equilibrium of forces state of degree of vacuum sensor is destroyed, when the degree of vacuum in the transmission cavity during greater than predetermined value, light blocking sees through the unit and reaches another equilibrium of forces state, this moment, the degree of vacuum sensor stopped the laser emission element emitted laser, the laser detection unit does not receive laser, and alarm unit is reported to the police, thereby learns that vacuum pump lost efficacy.
The embodiment of the invention is described in detail the spirit that those skilled in the art be can better understand the present invention below in conjunction with accompanying drawing.
Fig. 1 is the vacuum pump view of the device of the monitoring vacuum pump inefficacy of the specific embodiment of the invention just often; The view of the device that the monitoring vacuum pump of the specific embodiment of the invention lost efficacy when Fig. 2 was the vacuum pump inefficacy.
With reference to figure 1, the device that degree of vacuum lost efficacy in the monitoring transmission cavity of the embodiment of the invention, described vacuum pump 10 is connected with destination apparatus by pipeline 20, destination apparatus is a transmission cavity 30 in this specific embodiment, this device comprises: degree of vacuum sensor 80, place in the described pipeline 20, degree of vacuum in described pipeline 20 is during greater than the predetermined vacuum level value, in this specific embodiment, described predetermined vacuum level value is that described degree of vacuum sensor 80 stops light transmission than the value of the degree of vacuum setting value big 10% of transmission cavity 30; Laser emission element 40 and laser detection unit 50 place the both sides of described degree of vacuum sensor 80 respectively, and described laser emission element 40 emitted laser are surveyed in described laser detection unit 50; Control unit 60 when not detecting laser in described laser detection unit 50, judges that described vacuum pump 10 lost efficacy.
Consult Fig. 3, Fig. 4 simultaneously, described degree of vacuum sensor 80 comprises: first bracing ring 81, second bracing ring 82 and the joint 83 that connects described first bracing ring 81 and second bracing ring 82.
The radius of described first bracing ring 81 is less than the radius of described second bracing ring 82, and described first bracing ring has stretchability; The difference that the radius of described second bracing ring 82 and described first bracing ring 81 are in the radius of deflated state is 8%～25% of second bracing ring, 82 radiuses; In this specific embodiment, the diameter of described second bracing ring is 10cm, and the difference that described first bracing ring 81 is in the radius of the radius of deflated state and described second bracing ring 82 is 10% of the second bracing ring radius, i.e. 5mm; Described second bracing ring 82 is an eyelet, and in other embodiment, second bracing ring 82 also can be made of other materials, such as plastics or polyurethane (PU).
Described first bracing ring 81 is interconnected to constitute by first supporting element 811 and second supporting element 812, and wherein, first supporting element 811 has the bendable folding endurance, in this specific embodiment, first supporting element 811 is a wire, and certainly in other embodiments of the invention, it can be other filamentary pieces, as long as this filamentary pieces has the bendable folding endurance, under the effect of pulling force, can stretch, under the effect of pressure, can bend, just can reach purpose of the present invention; Second supporting element 812 is metal bar in this specific embodiment, certainly in other embodiments, also can be other bars, such as the plastic strip that can play a supporting role.
Described joint 83 has opaqueness, and the degree of vacuum in described pipeline 20 is during greater than the predetermined vacuum level value, and described first bracing ring 81 is in deflated state, and described joint 83 stops light transmission.Described joint 83 comprises that first link 831 and second link, 832, the first links 831 and second link 832 are provided with at interval, and wherein, first link 831 has opaqueness; First link 831 is a sheet rubber in this specific embodiment, and sheet rubber is 8, and second link 832 is a nonwovens, and non-woven fabric plate also is 8; Two relative edges of described sheet rubber are connected with second bracing ring 82 with described first bracing ring 81 respectively, can be for bonding, also can be for sewing up and the connection of other modes, two relative edges of described nonwovens are connected with second bracing ring 82 with described first bracing ring 81 respectively, can be for bonding, also can be for sewing up and the connection of other modes, two relative edges in addition of described sheet rubber are connected with two relative edges in addition of described nonwovens respectively, can be for bonding, also can be for sewing up and the connection of other modes.
Need to prove that in this specific embodiment, the quantity of non-woven fabric plate and sheet rubber is respectively 8, in other embodiments, can be other quantity, such as 6.
At the specific embodiment of the invention first link 831 is sheet rubber, and second link 832 is a non-woven fabric plate, so degree of vacuum sensor 80 can fold stretching, and when being in extended state, as shown in Figure 3, light blocking sees through unit 80 and is round table-like.From Fig. 1, Fig. 2, stretch and contraction state, all be round table-like.
In this concrete enforcement, described pipeline 20 has a horizontal segment 21, described degree of vacuum sensor 80 places the horizontal segment 21 of described pipeline 20, described second bracing ring 82 is fitted with the tube wall of the horizontal segment 21 of described pipeline 20, described first bracing ring 81 arrives the distance of described laser detection unit 50 less than described first bracing ring 81 to the distance of described laser emission element 40, in the specific embodiment of the present invention, described laser emission element is no more than 100 meters to the distance of described laser detection unit, is preferably 75 meters in this specific embodiment.The radius that the light path of described laser emission element 40 emitted laser is in extended mode greater than radius and described first bracing ring 81 of described second bracing ring 82 near the distance of the tube wall of described light paths to described pipe level section 21 poor is in radius poor of deflated state less than described second bracing ring 82 and described first bracing ring 81.
In specific embodiments of the invention, also comprise alarm unit 70, described control unit 60 is connected with described alarm unit 70, laser emission element 40, laser detection unit 50 respectively, by the working state of these control unit 60 control described laser emission element 40, laser detection unit 50 and alarm unit 70.When described degree of vacuum sensor 80 stops described laser emission element 40 emitted laser, described control unit 60 judged when described vacuum pump 10 lost efficacy that the described alarm unit 70 of these control unit 60 controls is reported to the police.
Wherein, the used laser emission element 40 of the present invention is existing laser beam emitting device, can be gas laser, and liquid laser or semiconductor laser for example can adopt xenon (Xe) laser or KrF (KrF) laser.
The used laser detection unit 40 of the present invention is existing laser detector, and it has reception laser, and the function of error correction.
Described control unit 60 can be formed in the intergrated circuit on the printed circuit board (PCB) (PCB), described laser emission element 40, laser detection unit 50 and alarm unit 70 are electrically connected with intergrated circuit on this PCB circuit board respectively, when vacuum pump 10 begins to vacuumize, opening described control unit 60 makes it in running order, the described laser emission element of control unit 60 control 40 is in running order, laser emission element 40 emission laser, it is in running order to control described laser detection unit 50, laser detection unit 50 receives laser emission element 40 emitted laser, when laser detection unit 50 receives laser, the information that this laser detection unit 50 will receive laser sends to control unit 60, control unit 60 is not reported to the police according to this information control alarm unit 70, when laser detection unit 50 does not receive laser, the information that this laser detection unit 50 will not receive laser sends to control unit 60, and control unit 60 is reported to the police according to this information control alarm unit 70.
Described alarm unit 70 can be an independent emergency alarm, also can be for an emergency alarm that is provided with on the control unit 60, and when laser detection unit 50 received laser, the loop at control unit 60 control alarm unit 70 places disconnected, and alarm unit 70 is not reported to the police; When laser detection unit 50 does not receive laser, the loop conducting at control unit 60 control alarm unit 70 places, alarm unit 70 is reported to the police.Alarm unit 70 of the present invention also can be other warning device, for example is warning light, and when vacuum pump inefficacy degree of vacuum sensor stopped laser, warning light brightened, and the prompting vacuum pump lost efficacy; Also can be a display unit, when vacuum pump inefficacy degree of vacuum sensor stopped laser, display unit can output information, informs that vacuum pump lost efficacy.
Fig. 1 shows vacuum pump 10 just often, first supporting element 811 of degree of vacuum sensor 80 is in extended state, and first bracing ring 81 is in the state of expansion, and laser emission element 40 emitted laser are passed first bracing ring 81, laser detection unit 50 detects laser, and alarm unit 70 is not reported to the police; Fig. 2 showed when vacuum pump lost efficacy, first supporting element 811 of degree of vacuum sensor 80 is in bending state, first bracing ring 81 is in the state of deflation, laser emission element 40 emitted laser are stopped by lighttight first link 831 of degree of vacuum sensor 80, in the specific embodiment of the present invention, stopped by sheet rubber, laser detection unit 50 is surveyed less than laser, and alarm unit 70 is reported to the police.
With in semiconductor applications, vacuum pump vacuumizes transmission cavity below, and the method for the monitoring vacuum pump inefficacy of the specific embodiment of the invention is described.
Describe the method that the monitoring vacuum pump of the specific embodiment of the invention lost efficacy in detail with reference to figure 1 and Fig. 2, described vacuum pump 10 is connected with transmission cavity 30 by pipeline 20, and transmission cavity 30 is vacuumized, and this method may further comprise the steps:
Degree of vacuum sensor 80 is provided, described degree of vacuum sensor 80 is placed in the described pipeline 20, degree of vacuum in described pipeline 20 is during greater than the predetermined vacuum level value, in predetermined vacuum level value described in this specific embodiment for being the value of the degree of vacuum setting value big 10% of transmission cavity than destination apparatus; Described degree of vacuum sensor 80 stops that light passes through; One side of described degree of vacuum sensor 80 emission laser, in this specific embodiment, by laser emission element 40 at side emission laser, the opposite side exploring laser light, in this specific embodiment, by the laser detection unit at the opposite side exploring laser light; When the opposite side of described degree of vacuum sensor 80 does not detect laser, judge that described vacuum pump 10 lost efficacy.
The position of described degree of vacuum sensor 80 is set, and when vacuum pump lost efficacy, described joint 83 stopped described laser emission element emitted laser; From the device that above-described monitoring vacuum pump lost efficacy as can be known, described joint 83 comprises first link 811 and second link 812, first link 811 and second link 812 are provided with at interval, wherein, first link 811 has opaqueness, therefore in the position that described degree of vacuum sensor 80 is set, when vacuum pump lost efficacy, described first link 811 stopped described laser emission element emitted laser.
In this specific embodiment, described degree of vacuum sensor 80 is placed the horizontal segment 21 of described pipeline 20, described second bracing ring 82 is set, make the central lines of the horizontal segment 21 of its center line and described pipeline 20, described second bracing ring 82 and the tube wall of the horizontal segment 21 of described pipeline 20 are fitted, and described second bracing ring 82 is fixing; Described first bracing ring 81 arrives the distance of described laser detection position less than described first bracing ring to the distance of described Laser emission position, distance in Laser emission position described in this specific embodiment to described laser detection position is no more than 100 meters, be preferably 75 meters, described second bracing ring 82 equals the distance of described laser detection unit 50 to the distance of described laser emission element 40, in other embodiment, second bracing ring 82 also can be not equal to the distance of described laser detection unit 50 to the distance of described laser emission element 40.And, the radius that the light path of described laser emission element 40 emitted laser is in extended mode greater than the radius and described first bracing ring 81 of described second bracing ring 82 near the distance H of the tube wall of described light path to described pipe level section poor; The radius that is in deflated state less than the radius and described first bracing ring of described second bracing ring poor.
The principle of the method that monitoring vacuum pump of the present invention lost efficacy is: utilize vacuum pump that transmission cavity is vacuumized, first bracing ring is subjected to two power, vacuum pump is owing to vacuumizing the power F2 that the power F1 that applies and joint (being sheet rubber and non-woven fabric plate in the specific embodiment of the invention) apply, at vacuum pump just often, first bracing ring is in first kind of equilibrium of forces state, and first bracing ring is in extended mode, at this moment, the laser emission element emitted laser can be passed first bracing ring, the laser detection unit can detect laser, and alarm unit is not reported to the police; When vacuum pump lost efficacy, owing to vacuumizing the power that imposes on first bracing ring, vacuum pump diminishes, vacuum pump just often, the residing first kind of equilibrium of forces state of first bracing ring is destroyed, first bracing ring tightens under the effect of the power F2 that joint applies, until arriving second kind of equilibrium of forces state, under this state, first bracing ring is in deflated state, at this moment, the laser emission element emitted laser is stopped by the lightproof part of the joint of degree of vacuum sensor (being sheet rubber in the concrete example of the present invention), the laser detection unit can not detect laser, alarm unit is reported to the police, thereby can know that vacuum pump lost efficacy, and changed vacuum pump, after changing vacuum pump, continue to vacuumize, avoid because the interior degree of vacuum of transmission cavity surpasses the degree of vacuum value of setting, cause the silicon chip in the transmission cavity to tarnish, form in the process of metal interconnecting wires, avoid metal interconnecting wires to disconnect or short circuit in semiconductor rear section technology.
In concrete experimentation, utilize three groups of data to test respectively.First group of data: the degree of vacuum of setting in the transmission cavity is 200mtorr, loses efficacy if the inventor finds vacuum pump, and when the degree of vacuum in the transmission cavity during greater than 200+200*10%, alarm unit is reported to the police; Second group of data: the degree of vacuum of setting in the transmission cavity is 100mtorr, loses efficacy if the inventor finds vacuum pump, and when the degree of vacuum in the transmission cavity during greater than 100+100*10%, alarm unit is reported to the police; The 3rd group of data: the degree of vacuum of setting in the transmission cavity is 50mtorr, loses efficacy if the inventor finds vacuum pump, and when the degree of vacuum in the transmission cavity during greater than 50+50*10%, alarm unit is reported to the police; By above experimental result, the inventor reaches a conclusion, when the degree of vacuum in the described transmission cavity greater than the degree of vacuum value of setting 10% the time, described laser emission element emitted laser is stopped by described degree of vacuum sensor, described laser detection unit can not detect laser, and described alarm unit is reported to the police.By above-described embodiment, avoid because when transmitting silicon chip in transmission cavity, silicon chip tarnishes, cause the metal interconnecting wires that in last part technology, forms to disconnect or the phenomenon of short circuit.
The above for the present invention in semiconductor applications, when transmission cavity is vacuumized, the method and apparatus that the monitoring vacuum pump lost efficacy, the present invention also can be used for the field that other needs are used vacuum pump, the monitoring vacuum pump lost efficacy.
Though the present invention discloses as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (28)
1. a degree of vacuum sensor is characterized in that, comprising: first bracing ring, second bracing ring and the joint that connects described first bracing ring and second bracing ring;
Wherein, the radius of described first bracing ring is less than the radius of described second bracing ring, described first bracing ring has stretchability, described joint has opaqueness, in the degree of vacuum of described degree of vacuum environment that sensor is put during greater than the predetermined vacuum level value, described first bracing ring is in deflated state, and described joint stops light transmission.
2. degree of vacuum sensor as claimed in claim 1 is characterized in that, the difference that the radius of described second bracing ring and described first bracing ring are in the radius of deflated state is 8%～25% of the second bracing ring radius.
3. degree of vacuum sensor as claimed in claim 1 is characterized in that, described joint comprises first link and second link, and first link and second link are provided with at interval, and wherein, first link has opaqueness.
4. degree of vacuum sensor as claimed in claim 3 is characterized in that, first link of described joint is a sheet rubber, and second link is a nonwovens;
Two relative edges of described sheet rubber are connected with second bracing ring with described first bracing ring respectively, two relative edges of described nonwovens are connected with second bracing ring with described first bracing ring respectively, and two relative edges in addition of described sheet rubber are connected with two relative edges in addition of described nonwovens respectively.
5. degree of vacuum sensor as claimed in claim 4 is characterized in that, described first bracing ring is interconnected to constitute by first supporting element and second supporting element, and wherein, first supporting element has the bendable folding endurance.
6. degree of vacuum sensor as claimed in claim 5 is characterized in that, described first supporting element is a wire.
7. degree of vacuum sensor as claimed in claim 1 is characterized in that, described second bracing ring is an eyelet.
8. monitor the device that vacuum pump lost efficacy for one kind, described vacuum pump is connected with destination apparatus by pipeline, it is characterized in that, comprising:
The degree of vacuum sensor places in the described pipeline, and the degree of vacuum in described pipeline is during greater than the predetermined vacuum level value, and described degree of vacuum sensor stops light transmission;
Laser emission element and laser detection unit place the both sides of described degree of vacuum sensor respectively, and described laser emission element emitted laser is surveyed in described laser detection unit;
Control unit when not detecting laser in described laser detection unit, judges that described vacuum pump lost efficacy.
9. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that described predetermined vacuum level value is the value than the degree of vacuum setting value big 10% of destination apparatus.
10. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that described degree of vacuum sensor comprises: first bracing ring, second bracing ring and the joint that connects described first bracing ring and second bracing ring;
Wherein, the radius of described first bracing ring is less than the radius of described second bracing ring, described first bracing ring has stretchability, described joint has opaqueness, degree of vacuum in described pipeline is during greater than the predetermined vacuum level value, described first bracing ring is in deflated state, and described joint stops light transmission.
11. the device as right 10 described monitoring vacuum pumps lost efficacy is characterized in that the difference that the radius of described second bracing ring and described first bracing ring are in the radius of deflated state is 8%～25% of the second bracing ring radius.
12. the device that monitoring vacuum pump as claimed in claim 10 lost efficacy is characterized in that described joint comprises first link and second link, first link and second link are provided with at interval, and wherein, first link has opaqueness.
13. the device that monitoring vacuum pump as claimed in claim 12 lost efficacy is characterized in that first link of described joint is a sheet rubber, second link is a nonwovens;
Two relative edges of described sheet rubber are connected with second bracing ring with described first bracing ring respectively, two relative edges of described nonwovens are connected with second bracing ring with described first bracing ring respectively, and two relative edges in addition of described sheet rubber are connected with two relative edges in addition of described nonwovens respectively.
14. the device that monitoring vacuum pump as claimed in claim 13 lost efficacy is characterized in that described first bracing ring is interconnected to constitute by first supporting element and second supporting element, wherein, first supporting element has the bendable folding endurance.
15. the device that monitoring vacuum pump as claimed in claim 10 lost efficacy, it is characterized in that, described pipeline has horizontal segment, described degree of vacuum sensor places the horizontal segment of described pipeline, the tube wall of the horizontal segment of described second bracing ring and described pipeline is fitted, and described first bracing ring arrives the distance of described laser detection unit less than described first bracing ring to the distance of described laser emission element.
16. the device that monitoring vacuum pump as claimed in claim 15 lost efficacy, it is characterized in that, the radius that the light path of described laser emission element emitted laser is in extended mode greater than the radius and described first bracing ring of described second bracing ring near the distance of the tube wall of described light path to described pipe level section poor is in radius poor of deflated state less than described second bracing ring and described first bracing ring.
17. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that described laser emission element is no more than 100 meters to the distance of described laser detection unit.
18. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that described control unit is also controlled the working state of described laser emission element.
19. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that described control unit is also controlled the working state of described laser detection unit.
20. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that, also comprises alarm unit, described control unit is controlled described alarm unit and is reported to the police when judging that described vacuum pump lost efficacy.
21. the device that monitoring vacuum pump as claimed in claim 8 lost efficacy is characterized in that described destination apparatus is the transmission cavity that is used for transmitting silicon chip in the semiconductor technology.
22. monitor the method that vacuum pump lost efficacy for one kind, described vacuum pump is connected with destination apparatus by pipeline, it is characterized in that, comprising:
The degree of vacuum sensor is provided, described degree of vacuum sensor is placed in the described pipeline, the degree of vacuum in described pipeline is during greater than the predetermined vacuum level value, and described degree of vacuum sensor stops that light passes through;
At the side emission laser of described degree of vacuum sensor, opposite side exploring laser light;
When the opposite side of described degree of vacuum sensor does not detect laser, judge that described vacuum pump lost efficacy.
23. the method that monitoring vacuum pump as claimed in claim 22 lost efficacy is characterized in that described predetermined vacuum level value is the value than the degree of vacuum setting value big 10% of destination apparatus.
24. the method that monitoring vacuum pump as claimed in claim 22 lost efficacy is characterized in that, described light blocking sees through the unit and comprises: first bracing ring, second bracing ring and the joint that connects described first bracing ring and second bracing ring;
The radius of described first bracing ring is less than the radius of described second bracing ring, described first bracing ring has stretchability, described joint has opaqueness, in the degree of vacuum of described degree of vacuum environment that sensor is put during greater than the predetermined vacuum level value, described first bracing ring is in deflated state, and described joint stops light transmission.
25. the method that monitoring vacuum pump as claimed in claim 22 lost efficacy is characterized in that described joint comprises first link and second link, first link and second link are provided with at interval, and wherein, first link has opaqueness.
26. the method that monitoring vacuum pump as claimed in claim 24 lost efficacy, it is characterized in that, described pipeline has horizontal segment, described degree of vacuum sensor placed in the described pipeline comprises: with described degree of vacuum sensor in the horizontal segment that places described pipeline, the tube wall of the horizontal segment of described second bracing ring and described pipeline is fitted, and described first bracing ring arrives the distance of described laser detection position less than described first bracing ring to the distance of described Laser emission position.
27. the method that monitoring vacuum pump as claimed in claim 26 lost efficacy, it is characterized in that the radius that the light path of described emitted laser is in extended mode greater than the radius and described first bracing ring of described second bracing ring near the distance of the tube wall of described light path to described pipe level section poor; The radius that is in deflated state less than the radius and described first bracing ring of described second bracing ring poor.
28. the method that monitoring vacuum pump as claimed in claim 22 lost efficacy is characterized in that described Laser emission position is no more than 100 meters to the distance of described laser detection position.
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| CN105355506A (en) * | 2015-11-26 | 2016-02-24 | 国网山西省电力公司临汾供电公司 | Apparatus for nondestructive test of vacuum degree of vacuum tube |
| CN105513888A (en) * | 2015-11-27 | 2016-04-20 | 国网山西省电力公司临汾供电公司 | Method for nondestructive detection of vacuum degree of vacuum tube based on measurement of optical path difference by laser method |
| CN105509959A (en) * | 2015-11-26 | 2016-04-20 | 国网山西省电力公司临汾供电公司 | Laser-method vacuum tube vacuum degree nondestructive test method |
| CN109976589A (en) * | 2019-04-08 | 2019-07-05 | 深圳市华星光电半导体显示技术有限公司 | Detect touch screen abutted equipment and its applying method |
| CN114530348A (en) * | 2022-03-16 | 2022-05-24 | 登高电气有限公司 | Insulating shell structure of arc extinguish chamber of vacuum circuit breaker |
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| CN105355506A (en) * | 2015-11-26 | 2016-02-24 | 国网山西省电力公司临汾供电公司 | Apparatus for nondestructive test of vacuum degree of vacuum tube |
| CN105509959A (en) * | 2015-11-26 | 2016-04-20 | 国网山西省电力公司临汾供电公司 | Laser-method vacuum tube vacuum degree nondestructive test method |
| CN105355506B (en) * | 2015-11-26 | 2017-05-17 | 国网山西省电力公司临汾供电公司 | Apparatus for nondestructive test of vacuum degree of vacuum tube |
| CN105509959B (en) * | 2015-11-26 | 2019-03-05 | 国网山西省电力公司临汾供电公司 | A kind of method of laser method non-destructive testing vacuum tube vacuum-degree |
| CN105513888A (en) * | 2015-11-27 | 2016-04-20 | 国网山西省电力公司临汾供电公司 | Method for nondestructive detection of vacuum degree of vacuum tube based on measurement of optical path difference by laser method |
| CN109976589A (en) * | 2019-04-08 | 2019-07-05 | 深圳市华星光电半导体显示技术有限公司 | Detect touch screen abutted equipment and its applying method |
| CN109976589B (en) * | 2019-04-08 | 2022-04-26 | 深圳市华星光电半导体显示技术有限公司 | Touch screen laminating detection equipment and laminating method thereof |
| CN114530348A (en) * | 2022-03-16 | 2022-05-24 | 登高电气有限公司 | Insulating shell structure of arc extinguish chamber of vacuum circuit breaker |
| CN114530348B (en) * | 2022-03-16 | 2022-08-12 | 登高电气有限公司 | Insulating shell structure of arc extinguish chamber of vacuum circuit breaker |
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