CN107254672B - The detection system of vacuum coating equipment - Google Patents
The detection system of vacuum coating equipment Download PDFInfo
- Publication number
- CN107254672B CN107254672B CN201710392929.7A CN201710392929A CN107254672B CN 107254672 B CN107254672 B CN 107254672B CN 201710392929 A CN201710392929 A CN 201710392929A CN 107254672 B CN107254672 B CN 107254672B
- Authority
- CN
- China
- Prior art keywords
- camera
- detection system
- electric machine
- connect
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Abstract
The present invention provides a kind of detection system of vacuum coating equipment, the detection system includes control device and detection device, the detection device includes camera and driving structure, the camera is connect with the driving structure, the control device includes control unit, for the camera for shooting to the inside of the vacuum coating equipment, described control unit drives the camera mobile for controlling the driving structure.The detection system of vacuum coating equipment provided by the invention, described control unit can control the driving structure and drive the camera mobile, the camera movement can shoot each details of the inside of the vacuum coating equipment, the inside of vacuum coating equipment is detected to be realized in vacuum environment, the inside of vacuum coating equipment is avoided to be exposed in atmospheric environment.
Description
Technical field
The present invention relates to the detection technique field of vacuum coating equipment more particularly to a kind of detection systems of vacuum coating equipment
System.
Background technique
Due to the requirement of modern development in science and technology, vacuum coating technology has obtained development at full speed.Thin film technique can change
Workpiece surface performance, improves that workpiece is wear-resistant, anti-oxidant and corrosion-resistant etc. performances, to extend the service life of workpiece.Film
The preparation of optics, electricity, semiconductor film membrane module also may be implemented in technology, has very high economic value.
Existing vacuum coating equipment can be divided into two major classes according to its productive prospecting, be pipeline system vacuum coating respectively
Equipment and monomer-type vacuum coating equipment.Wherein, pipeline system equipment is extensive because it can be high-efficient with continuous production
Use.In constantly production process, pipeline system vacuum coating equipment inevitably will appear many problems, some are asked
Topic can not be observed, it usually needs vacuum equipment is exposed in atmospheric environment, spot check, for excessive inside equipment
Equipment, the time for detecting consumption can be longer, and for vacuum equipment, and Ying Jinliang avoids inside it locating in an atmosphere
Time.
Summary of the invention
To solve the above-mentioned problems, the present invention proposes a kind of detection system of vacuum coating equipment, does not need Vacuum Deposition
Film device is exposed in atmospheric environment, can be detected to the vacuum coating equipment in vacuum environment.
It is proposed by the present invention the specific technical proposal is: provide a kind of detection system of vacuum coating equipment, the detection system
System includes control device and detection device, and the detection device includes camera and driving structure, the camera and the drive
Dynamic structure connection, the control device includes control unit, the camera be used for the inside of the vacuum coating equipment into
Row shooting, described control unit drive the camera mobile for controlling the driving structure.
Further, the detection device further includes pedestal, and the driving structure includes pushing ram and propulsion electric machine, described
Propulsion electric machine is fixed on the pedestal, and described pushing ram one end is connect with the propulsion electric machine, one end and the camera connect
It connects.
Further, the driving structure further includes the first gear, second gear and rotation being set in the pedestal
Motor, the first gear are connect with the propulsion electric machine, and the second gear is connect with the rotating electric machine, first tooth
It takes turns mutually ratcheting with the second gear.
Further, the detection device further includes the battery and circuit board being set in the pedestal, the battery with
The circuit board connection, the circuit board are connect with the camera, the propulsion electric machine, the rotating electric machine respectively.
Further, the detection device further includes that first connect respectively with the camera, the driving structure is received
Device is sent out, the detection device is communicated by the first transceiver with the control device.
Further, the detection system further includes the protective film for being set to the detection device surface, the protective film
It is made of heat-insulating material.
Further, the detection device further includes temperature sensor, and the temperature sensor and the driving structure connect
It connects.
Further, the detection device further includes the heat insulation structural being set on the camera lens of the camera.
Further, the control device further includes display screen, and the display screen is used for the figure shot to the camera
As being shown.
Further, the control device further includes second transceiver, the second transceiver respectively with the display screen,
Described control unit connection, the control device are communicated by the second transceiver with the detection device.
The detection system of vacuum coating equipment provided by the invention comprising control device and detection device, the detection
Device includes camera and driving structure, and the control device includes control unit, and described control unit can control the drive
Dynamic structure drives the camera mobile, and the camera movement can be to each details of the inside of the vacuum coating equipment
It is shot, the inside of vacuum coating equipment is detected to can be realized in vacuum environment, avoids vacuum coating
The inside of equipment is exposed in atmospheric environment.
Detailed description of the invention
What is carried out in conjunction with the accompanying drawings is described below, above and other aspect, features and advantages of the embodiment of the present invention
It will become clearer, in attached drawing:
Fig. 1 is the structural schematic diagram of the detection device of the detection system of vacuum coating equipment；
Fig. 2 is the structural schematic diagram of the control device of the detection system of vacuum coating equipment.
Specific embodiment
Hereinafter, with reference to the accompanying drawings to detailed description of the present invention embodiment.However, it is possible to come in many different forms real
The present invention is applied, and the present invention should not be construed as limited to the specific embodiment illustrated here.On the contrary, providing these implementations
Example is in order to explain the principle of the present invention and its practical application, to make others skilled in the art it will be appreciated that the present invention
Various embodiments and be suitable for the various modifications of specific intended application.
Referring to Fig.1, Fig. 2, the detection system of vacuum coating equipment provided in this embodiment include detection device 1 and control dress
Set 2.Detection device 1 includes camera 12 and driving structure 13, and camera 12 is connect with driving structure 13.Control device 2 includes
Control unit 21, camera 12 is for shooting the inside of vacuum coating equipment, and control unit 21 is for controlling driving knot
Structure 13 drives camera 12 mobile.
Detection device 1 is fixedly mounted on a pedestal (figure is not marked), and the inside to vacuum coating equipment is being needed to examine
When survey, detection device 1 enters the inside of vacuum coating equipment with pedestal, by camera 12 in vacuum coating equipment
Portion is shot, and control unit 21 is used to control the movement that driving structure 13 drives camera 12, so that camera 12 can
Each details of the inside of vacuum coating equipment is shot.
In order to adjust the vertical height of camera 12, detection device 1 further includes pedestal 14, and driving structure 13 includes pushing away
Into bar 13a and propulsion electric machine 13b.Pedestal 14 is fixed on pedestal, and propulsion electric machine 13b is fixed on pedestal 14, pushing ram 13a mono-
End is connect with propulsion electric machine 13b, one end and camera 12 connect.Control unit 21 can control the rotation side of propulsion electric machine 13b
To, the moving direction of camera 12 is adjusted by the change of rotation direction, for example, when propulsion electric machine 13b is rotated clockwise,
Pushing ram 13a drives camera 12 mobile away from the direction of propulsion electric machine 13b, when propulsion electric machine 13b is rotated counterclockwise,
Pushing ram 13a drives camera 12 towards close to the movement of the direction of propulsion electric machine 13b.It can be driven by propulsion electric machine 13b
Camera 12 moves in vertical direction.
Driving structure 13 further includes the first gear 13c, second gear 13d and rotating electric machine 13e being set in pedestal 14.
First gear 13c is connect with propulsion electric machine 13b, and second gear 13d is connect with rotating electric machine 13e, first gear 13c and the second tooth
It is mutually ratcheting to take turns 13d.Rotating electric machine 13e drives second gear 13d rotation, and second gear 13d drives the by ratcheting mode
One gear 13c is rotated and propulsion electric machine 13b is driven to rotate together, and pushing ram 13a is driven while propulsion electric machine 13b is rotated and is taken the photograph
It rotates together as first 12, so that camera 12 can rotate in the horizontal plane, from different perspectives to vacuum coating equipment
The details of inside shot.Preferably, the gear size of second gear 13d is less than the gear size of first gear 13c, this
Sample can be with the deflection angle of more precise control camera 12.
Detection device 1 further includes the battery 15 and circuit board 16 being set in pedestal 14, and battery 15 is connect with circuit board 16,
Circuit board 16 is connect with camera 12, propulsion electric machine 13b, rotating electric machine 13e respectively, battery 15 be used for propulsion electric machine 13b and
Rotating electric machine 13e power supply.
Detection device 1 further includes the first transceiver 17 connecting respectively with camera 12, driving structure 13, first transceiver
17 are connect by circuit board 16 with camera 12, driving structure 13.Detection device 1 passes through first transceiver 17 and control device 2
It is communicated.Specifically, first transceiver 17 is used to the image information that camera 12 is shot being sent to control device 2, meanwhile,
First transceiver 17 is used for the control information of reception control unit 21 and control information is sent to detection device 1, detection device 1
Further according to the movement of control information driving propulsion electric machine 13b and rotating electric machine 13e.
In order to detect in the high temperature environment to vacuum coating equipment, the detection system in the present embodiment further includes
It is set to the protective film 11 on 1 surface of detection device, protective film 11 is made of heat-insulating material, the covering of protective film 11 camera 12,
The surface of pushing ram 13a, propulsion electric machine 13b, first transceiver 17 and pedestal 14 can be very good by protective film 11 to detection
Device 1 is protected.Detection device 1 further includes temperature sensor 18, and temperature sensor 18 is connect with driving structure 13.Specifically
, temperature sensor 18 is fixed on one end that pushing ram 13a is installed with camera 12.In this way, temperature sensor 18 can be with
Camera 12 moves together, and detects convenient for the temperature to the different zones inside vacuum coating equipment, passes through temperature sensing
Device 18 can be monitored the temperature of the inside of vacuum coating equipment, be damaged with preventing temperature excessively high to detection device 1,
Here, protective film 11 is also covered in the surface of temperature sensor 18.Protective film 11 in the present embodiment is by multiple isolated parts
Composition, multiple isolated parts are covered each by be distinguished in the i.e. multiple isolated parts in the surface of the different elements of detection device 1
It is covered in the surface of camera 12, pushing ram 13a, propulsion electric machine 13b, first transceiver 17, pedestal 14 and temperature sensor 18.
Detection device 1 further includes the heat insulation structural 19 being set on the camera lens of camera 12.Heat insulation structural 19 includes multilayer
Spaced quartz plate.The camera lens of camera 12 can be prevented to be damaged under high temperature environment by heat insulation structural 19.
The interface 14a for charging to battery 15 is offered on pedestal 14, is additionally provided on pedestal 14 for blocking interface
The thermal insulation board 14b of 14a, when charging is required, opening thermal insulation board 14b power supply line are passed through from interface 14a and can be to batteries 15
Charging, when not needing charging, thermal insulation board 14b blocks interface 14a, carries out in inside of the detection device 1 to vacuum coating equipment
When detection, the element in pedestal 14 can be protected by thermal insulation board 14b, prevent these elements in the high temperature environment by
Damage.
Control device 2 further includes display screen 22, and display screen 22 includes image display window 22a and temperature display window 22b,
The image that image display window 22a is used to shoot camera 12 shows that temperature display window 22b is used for temperature sensing
The temperature that device 18 detects is shown.
Control device 2 further includes push-button unit 23, and push-button unit 23 is located on display screen 22, is connected with control unit 21
It connects, wherein push-button unit 23 includes upper shift button 23a, lower shift button 23b, rotates clockwise button 23c and rotate counterclockwise and press
Button 23d.Upper shift button 23a is used to control camera 12 and moves away from the direction of propulsion electric machine 13b, and lower shift button 23b is used
It is moved in control camera 12 towards the direction close to propulsion electric machine 13b, rotates clockwise button 23c and spin button counterclockwise
23d is rotated clockwise or is rotated counterclockwise in the horizontal plane for controlling camera 12.Here, push-button unit 23 is also possible to void
Quasi- key can control camera 12 by touch key-press unit 23 for example, being embedded in the push button in display screen 22
It is mobile.
Control device 2 further includes second transceiver 24, and second transceiver 24 connects with display screen 22, control unit 21 respectively
It connects, control device 2 is communicated by second transceiver 24 with detection device 1.Specifically, second transceiver 24 is for receiving the
The message of one transceiver 17, the temperature information that the image information and temperature sensor 18 shot including camera 12 detects, together
When, second transceiver 24 is used to the control information of control unit 21 being sent to first transceiver 17.First in the present embodiment
It is wirelessly communicated between transceiver 17 and second transceiver 24.
Detection system provided in this embodiment can detect the inside of vacuum coating equipment in vacuum environment, keep away
The inside for exempting from vacuum coating equipment is exposed in atmospheric environment.In addition, detection system provided in this embodiment can also be in high temperature
The inside of vacuum coating equipment is detected in environment.
The above is only the specific embodiment of the application, it is noted that for the ordinary skill people of the art
For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications are also answered
It is considered as the protection scope of the application.
Claims (8)
1. a kind of detection system of vacuum coating equipment, which is characterized in that including control device and detection device, the detection dress
It sets including camera and driving structure, the camera is connect with the driving structure, and the control device includes control unit,
The camera is for shooting the inside of the vacuum coating equipment, and described control unit is for controlling the driving knot
Structure drives the camera mobile, and the detection device further includes pedestal, and the driving structure includes pushing ram and propulsion electric machine,
The propulsion electric machine is fixed on the pedestal, and described pushing ram one end connect with the propulsion electric machine, one end and the camera shooting
Head connection, the driving structure further includes the first gear, second gear and rotating electric machine being set in the pedestal, and described the
One gear is connect with the propulsion electric machine, and the second gear is connect with the rotating electric machine, the first gear and described the
Two gears are mutually ratcheting.
2. detection system according to claim 1, which is characterized in that the detection device further includes being set to the pedestal
Interior battery and circuit board, the battery are connect with the circuit board, the circuit board respectively with the camera, the propulsion
Motor, rotating electric machine connection.
3. detection system according to claim 1, which is characterized in that the detection device further include respectively with the camera shooting
The first transceiver that head, the driving structure connect, the detection device pass through the first transceiver and the control device
It is communicated.
4. detection system according to claim 1, which is characterized in that the detection system further includes being set to the detection
The protective film of apparatus surface, the protective film are made of heat-insulating material.
5. detection system according to claim 4, which is characterized in that the detection device further includes temperature sensor, institute
Temperature sensor is stated to connect with the driving structure.
6. detection system according to claim 5, which is characterized in that the detection device further includes being set to the camera shooting
Heat insulation structural on the camera lens of head.
7. detection system according to claim 1-6, which is characterized in that the control device further includes display
Screen, the image that the display screen is used to shoot the camera are shown.
8. detection system according to claim 7, which is characterized in that the control device further includes second transceiver, institute
It states second transceiver to connect with the display screen, described control unit respectively, the control device passes through the second transceiver
It is communicated with the detection device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710392929.7A CN107254672B (en) | 2017-05-27 | 2017-05-27 | The detection system of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710392929.7A CN107254672B (en) | 2017-05-27 | 2017-05-27 | The detection system of vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107254672A CN107254672A (en) | 2017-10-17 |
| CN107254672B true CN107254672B (en) | 2019-05-21 |
Family
ID=60027494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710392929.7A Active CN107254672B (en) | 2017-05-27 | 2017-05-27 | The detection system of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107254672B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107616719A (en) * | 2017-10-20 | 2018-01-23 | 深圳市北鼎科技有限公司 | Domestic electric oven camera structure and Domestic electric oven |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201305624Y (en) * | 2008-05-21 | 2009-09-09 | 兰州大学 | Film preparation device |
| CN201374309Y (en) * | 2009-01-05 | 2009-12-30 | 天津大学 | Device for scanning electron microscope or ion sputtering film coating and etching in vacuum equipment |
| CN102877032A (en) * | 2012-09-04 | 2013-01-16 | 中国科学院合肥物质科学研究院 | Preparation system for pulse laser deposition film under intense magnetic field |
| CN203049030U (en) * | 2012-12-07 | 2013-07-10 | 深圳市创益科技发展有限公司 | Monitoring device for coating equipment |
| CN203455288U (en) * | 2013-08-16 | 2014-02-26 | 南昌欧菲光科技有限公司 | Device for online monitoring flatness of flexible substrate in coating process |
| CN104651799A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Automatic flexible substrate double-side continuous coiling magnetron sputtering coating production line |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2572817C (en) * | 2004-07-16 | 2014-02-11 | Dofasco Inc. | Monitor system for coating apparatus |
-
2017
- 2017-05-27 CN CN201710392929.7A patent/CN107254672B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201305624Y (en) * | 2008-05-21 | 2009-09-09 | 兰州大学 | Film preparation device |
| CN201374309Y (en) * | 2009-01-05 | 2009-12-30 | 天津大学 | Device for scanning electron microscope or ion sputtering film coating and etching in vacuum equipment |
| CN102877032A (en) * | 2012-09-04 | 2013-01-16 | 中国科学院合肥物质科学研究院 | Preparation system for pulse laser deposition film under intense magnetic field |
| CN203049030U (en) * | 2012-12-07 | 2013-07-10 | 深圳市创益科技发展有限公司 | Monitoring device for coating equipment |
| CN203455288U (en) * | 2013-08-16 | 2014-02-26 | 南昌欧菲光科技有限公司 | Device for online monitoring flatness of flexible substrate in coating process |
| CN104651799A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Automatic flexible substrate double-side continuous coiling magnetron sputtering coating production line |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107254672A (en) | 2017-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102844702B (en) | The laminating apparatus of polarizing coating and there is the manufacturing system of liquid crystal indicator of this laminating apparatus | |
| CN107254672B (en) | The detection system of vacuum coating equipment | |
| CN110177253A (en) | A kind of movable video monitoring device and system for electric energy meter detection assembly line | |
| CN113740176B (en) | Static bending test device and system | |
| CN204143118U (en) | Liquid crystal display detects alignment system | |
| CN104092983A (en) | Energy-saving type parking recorder system and control method | |
| CN209472675U (en) | A kind of visual monitoring equipment with auto-alarm function | |
| CN103962819A (en) | Method for adjusting locating standard of transparent cover plates through automatic assembly machine of solar heat collector | |
| EP3633065A1 (en) | Evaporation device | |
| CN208076404U (en) | Vehicular exhaust blackness detector and system | |
| CN101359905B (en) | Portable electronic apparatus and picture displaying direction switching method | |
| WO2023193327A1 (en) | Dust collector detection device and detection method thereof | |
| US20160263883A1 (en) | Screen assembly, screen printing system and screen printing method | |
| CN105427762A (en) | Three-side flip system | |
| CN201341188Y (en) | Network camera | |
| CN114110341A (en) | Intelligent cradle head | |
| CN107521973B (en) | Multi-panel detector | |
| CN205981620U (en) | Screen test jig | |
| CN206573553U (en) | Detection apparatus and organic compound detector | |
| CN216705137U (en) | Color temperature and brightness debugging device of pipeline display | |
| CN211347979U (en) | Double-sided automatic identification turnover device for smart card | |
| CN219339828U (en) | Cell-phone protective sheath inner wall pad pasting equipment | |
| CN113074674B (en) | Intelligent ultrasonic internal detection device and method thereof | |
| CN220603340U (en) | Pulse generating mechanism and defect detecting device | |
| CN205167052U (en) | Automatic cutting machine , pick up material system and servo -device thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |