CN107254672A - The detecting system of vacuum coating equipment - Google Patents
The detecting system of vacuum coating equipment Download PDFInfo
- Publication number
- CN107254672A CN107254672A CN201710392929.7A CN201710392929A CN107254672A CN 107254672 A CN107254672 A CN 107254672A CN 201710392929 A CN201710392929 A CN 201710392929A CN 107254672 A CN107254672 A CN 107254672A
- Authority
- CN
- China
- Prior art keywords
- camera
- detecting system
- detection means
- vacuum coating
- coating equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Abstract
The present invention provides a kind of detecting system of vacuum coating equipment, the detecting system includes control device and detection means, the detection means includes camera and driving structure, the camera is connected with the driving structure, the control device includes control unit, the camera is used to shoot the inside of the vacuum coating equipment, and described control unit is used to control the driving structure to drive the camera movement.The detecting system for the vacuum coating equipment that the present invention is provided, described control unit can control the driving structure to drive the camera movement, the camera movement can be shot to each details of the inside of the vacuum coating equipment, the inside of vacuum coating equipment is detected so as to just be realized in vacuum environment, it is to avoid the inside of vacuum coating equipment is exposed in atmospheric environment.
Description
Technical field
The present invention relates to the detection system of the detection technique field of vacuum coating equipment, more particularly to a kind of vacuum coating equipment
System.
Background technology
Due to the requirement of modern development in science and technology, vacuum coating technology has obtained development at full speed.Thin film technique can change
Workpiece surface performance, improves the performances such as workpiece is wear-resistant, anti-oxidant and corrosion-resistant, so as to extend the service life of workpiece.Film
Technology can also realize optics, electricity, the preparation of semiconductor film membrane module, with very high economic value.
Existing vacuum coating equipment can be divided into two major classes according to its productive prospecting, be pipeline system vacuum coating respectively
Equipment and monomer-type vacuum coating equipment.Wherein, pipeline system equipment is because it can be extensive with continuous production, efficiency high
Use.In constantly production process, many problems inevitably occur in pipeline system vacuum coating equipment, and some are asked
Topic is in device interior, it is impossible to be observed, it usually needs vacuum equipment is exposed in atmospheric environment, spot check, for excessive
Equipment, the time of detection consumption can be longer, and for vacuum equipment, should trying one's best, it is residing in an atmosphere inside it to avoid
Time.
The content of the invention
In order to solve the above problems, the present invention proposes a kind of detecting system of vacuum coating equipment, it is not necessary to by Vacuum Deposition
Film device is exposed in atmospheric environment, and just the vacuum coating equipment can be detected in vacuum environment.
Concrete technical scheme proposed by the present invention is：A kind of detecting system of vacuum coating equipment, the detection system are provided
System includes control device and detection means, and the detection means includes camera and driving structure, and the camera drives with described
Dynamic structure connection, the control device includes control unit, and the camera is used to enter the inside of the vacuum coating equipment
Row is shot, and described control unit is used to control the driving structure to drive the camera movement.
Further, the detection means also includes base, and the driving structure includes pushing ram and propulsion electric machine, described
Propulsion electric machine is fixed on the base, and described pushing ram one end is connected with the propulsion electric machine, one end connects with the camera
Connect.
Further, the driving structure also includes first gear, second gear and the rotation being arranged in the base
Motor, the first gear is connected with the propulsion electric machine, and the second gear is connected with the electric rotating machine, first tooth
Wheel is mutually ratcheting with the second gear.
Further, the detection means also includes being arranged at battery and circuit board in the base, the battery with
The circuit board connection, the circuit board is connected with the camera, the propulsion electric machine, the electric rotating machine respectively.
Further, the detection means also includes the first receipts being connected respectively with the camera, the driving structure
Device is sent out, the detection means is communicated by the first transceiver with the control device.
Further, the detecting system also includes the diaphragm for being arranged at the detection means surface, the diaphragm
It is made up of heat-insulating material.
Further, the detection means also includes temperature sensor, and the temperature sensor connects with the driving structure
Connect.
Further, the detection means also includes the heat insulation structural being arranged on the camera lens of the camera.
Further, the control device also includes display screen, and the display screen is used for the figure shot to the camera
As being shown.
Further, the control device also include second transceiver, the second transceiver respectively with the display screen,
Described control unit is connected, and the control device is communicated by the second transceiver with the detection means.
The detecting system for the vacuum coating equipment that the present invention is provided, it includes control device and detection means, the detection
Device includes camera and driving structure, and the control device includes control unit, and described control unit can control the drive
Dynamic structure drives the camera movement, and the camera movement can be to each details of the inside of the vacuum coating equipment
Shot, the inside of vacuum coating equipment is detected so as to just can be realized in vacuum environment, it is to avoid vacuum coating
The inside of equipment is exposed in atmospheric environment.
Brief description of the drawings
Pass through the following description carried out with reference to accompanying drawing, above and other aspect, feature and the advantage of embodiments of the invention
It will become clearer, in accompanying drawing：
Fig. 1 is the structural representation of the detection means of the detecting system of vacuum coating equipment；
Fig. 2 is the structural representation of the control device of the detecting system of vacuum coating equipment.
Embodiment
Hereinafter, with reference to the accompanying drawings to embodiments of the invention are described in detail.However, it is possible to come real in many different forms
Apply the present invention, and the specific embodiment of the invention that should not be construed as limited to illustrate here.It is opposite that there is provided these implementations
Example is in order to explain the principle and its practical application of the present invention, so that others skilled in the art are it will be appreciated that the present invention
Various embodiments and be suitable for the various modifications of specific intended application.
Reference picture 1, Fig. 2, the detecting system for the vacuum coating equipment that the present embodiment is provided includes detection means 1 and control is filled
Put 2.Detection means 1 includes camera 12 and driving structure 13, and camera 12 is connected with driving structure 13.Control device 2 includes
Control unit 21, camera 12 is used to shoot the inside of vacuum coating equipment, and control unit 21 is used to control driving knot
The driving camera 12 of structure 13 is moved.
Detection means 1 is fixedly mounted on a pedestal (figure is not marked), is examined needing the inside to vacuum coating equipment
During survey, detection means 1 enters the inside of vacuum coating equipment with pedestal, by camera 12 in vacuum coating equipment
Portion is shot, and control unit 21 is used for the movement for controlling driving structure 13 to drive camera 12, to enable camera 12
Each details to the inside of vacuum coating equipment is shot.
In order to adjust the vertical height of camera 12, detection means 1 also includes base 14, and driving structure 13 includes pushing away
Enter bar 13a and propulsion electric machine 13b.Base 14 is fixed on pedestal, and propulsion electric machine 13b is fixed on base 14, pushing ram 13a mono-
End is connected with propulsion electric machine 13b, one end and camera 12 are connected.Control unit 21 can control propulsion electric machine 13b rotation side
To, the moving direction of camera 12 is adjusted by the change of rotation direction, for example, when propulsion electric machine 13b is rotated clockwise,
Pushing ram 13a drives camera 12 to be moved away from propulsion electric machine 13b direction, when propulsion electric machine 13b is rotated counterclockwise,
Pushing ram 13a drives camera 12 towards close to the movement of propulsion electric machine 13b direction.Just it can be driven by propulsion electric machine 13b
Camera 12 is moved in vertical direction.
Driving structure 13 also includes first gear 13c, second gear 13d and the electric rotating machine 13e being arranged in base 14.
First gear 13c is connected with propulsion electric machine 13b, and second gear 13d is connected with electric rotating machine 13e, first gear 13c and the second tooth
Take turns 13d mutually ratcheting.Electric rotating machine 13e drives second gear 13d to rotate, and second gear 13d drives the by ratcheting mode
One gear 13c is rotated and is driven propulsion electric machine 13b to rotate together, and pushing ram 13a is driven while propulsion electric machine 13b is rotated and is taken the photograph
Rotate together as first 12, so that camera 12 can be rotated in the horizontal plane, with from different perspectives to vacuum coating equipment
The details of inside shot.It is preferred that, second gear 13d gear size is less than first gear 13c gear size, this
Sample can be with the deflection angle of more precise control camera 12.
Detection means 1 also includes the battery 15 and circuit board 16 being arranged in base 14, and battery 15 is connected with circuit board 16,
Circuit board 16 is connected with camera 12, propulsion electric machine 13b, electric rotating machine 13e respectively, battery 15 be used for propulsion electric machine 13b and
Electric rotating machine 13e powers.
Detection means 1 also includes the first transceiver 17 being connected respectively with camera 12, driving structure 13, first transceiver
17 are connected by circuit board 16 with camera 12, driving structure 13.Detection means 1 passes through first transceiver 17 and control device 2
Communicated.Specifically, the image information that first transceiver 17 is used to shoot camera 12 is sent to control device 2, meanwhile,
First transceiver 17 is used for the control information of reception control unit 21 and control information is sent into detection means 1, detection means 1
Propulsion electric machine 13b and electric rotating machine 13e motion is driven further according to control information.
In order to be detected in hot environment to vacuum coating equipment, the detecting system in the present embodiment also includes
The diaphragm 11 on the surface of detection means 1 is arranged at, diaphragm 11 is made up of heat-insulating material, the covering of diaphragm 11 camera 12,
Pushing ram 13a, propulsion electric machine 13b, the surface of first transceiver 17 and base 14, can be very good to detection by diaphragm 11
Device 1 is protected.Detection means 1 also includes temperature sensor 18, and temperature sensor 18 is connected with driving structure 13.Specifically
, temperature sensor 18 is fixed on one end that pushing ram 13a is equiped with camera 12.So, temperature sensor 18 just can be with
Camera 12 is moved together, is easy to detect the temperature of the different zones inside vacuum coating equipment, is passed through TEMP
Device 18 can be monitored to the temperature of the inside of vacuum coating equipment, and detection means 1 is caused to damage to prevent temperature too high,
Here, diaphragm 11 is also covered in the surface of temperature sensor 18.Diaphragm 11 in the present embodiment is by the part of multiple separation
Composition, the part of multiple separation is covered each by the part difference in the i.e. multiple separation in surface of the different elements of detection means 1
It is covered in the surface of camera 12, pushing ram 13a, propulsion electric machine 13b, first transceiver 17, base 14 and temperature sensor 18.
Detection means 1 also includes the heat insulation structural 19 being arranged on the camera lens of camera 12.Heat insulation structural 19 includes multilayer
Spaced quartz plate.The camera lens that can prevent camera 12 by heat insulation structural 19 is damaged in high temperature environments.
Offer and be additionally provided with the interface 14a for being charged to battery 15, base 14 for blocking interface on base 14
14a thermal insulation board 14b, when charging is required, opening thermal insulation board 14b power lines are passed through from interface 14a and can be to batteries 15
Charging, when that need not charge, thermal insulation board 14b blocks interface 14a, and the inside of vacuum coating equipment is carried out in detection means 1
During detection, the element in base 14 can be protected by thermal insulation board 14b, prevent these elements in hot environment by
Damage.
Control device 2 also includes display screen 22, and display screen 22 includes image display window 22a and temperature display device mouthful 22b,
Image display window 22a is used to show that temperature display device mouthful 22b is for TEMP to the image of the shooting of camera 12
The temperature that device 18 is detected is shown.
Control device 2 also includes push-button unit 23, and push-button unit 23 is located on display screen 22, and it connects with control unit 21
Connect, wherein, push-button unit 23 includes upper shift button 23a, lower shift button 23b, turn clockwise button 23c and rotate counterclockwise is pressed
Button 23d.Upper shift button 23a is used to control camera 12 to move away from propulsion electric machine 13b direction, and lower shift button 23b is used
In control camera 12 towards close to the motion of propulsion electric machine 13b direction, turn clockwise button 23c and rotate counterclockwise button
23d is used to control camera 12 to rotate clockwise or rotate counterclockwise in the horizontal plane.Here, push-button unit 23 can also be empty
Intend button, for example, being embedded in the push button in display screen 22, camera 12 can just be controlled by touch key-press unit 23
It is mobile.
Control device 2 also includes second transceiver 24, and second transceiver 24 connects with display screen 22, control unit 21 respectively
Connect, control device 2 is communicated by second transceiver 24 with detection means 1.Specifically, second transceiver 24 is used to receive the
The message of one transceiver 17, including the image information that shoots of camera 12 and the temperature information that detects of temperature sensor 18, together
When, second transceiver 24 is used to the control information of control unit 21 being sent to first transceiver 17.First in the present embodiment
Wirelessly communicated between transceiver 17 and second transceiver 24.
The detecting system that the present embodiment is provided can be detected in vacuum environment to the inside of vacuum coating equipment, be kept away
The inside for exempting from vacuum coating equipment is exposed in atmospheric environment.In addition, the detecting system that the present embodiment is provided can also be in high temperature
The inside of vacuum coating equipment is detected in environment.
Described above is only the embodiment of the application, it is noted that for the ordinary skill people of the art
For member, on the premise of the application principle is not departed from, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the protection domain of the application.
Claims (10)
1. a kind of detecting system of vacuum coating equipment, it is characterised in that including control device and detection means, the detection dress
Put including camera and driving structure, the camera is connected with the driving structure, the control device includes control unit,
The camera is used to shoot the inside of the vacuum coating equipment, and described control unit is used to control the driving knot
Structure drives the camera movement.
2. detecting system according to claim 1, it is characterised in that the detection means also includes base, the driving
Structure includes pushing ram and propulsion electric machine, and the propulsion electric machine is fixed on the base, and described pushing ram one end is pushed away with described
Stepper motor connection, one end are connected with the camera.
3. detecting system according to claim 2, it is characterised in that the driving structure also includes being arranged at the base
Interior first gear, second gear and electric rotating machine, the first gear is connected with the propulsion electric machine, the second gear with
The electric rotating machine connection, the first gear is mutually ratcheting with the second gear.
4. detecting system according to claim 3, it is characterised in that the detection means also includes being arranged at the base
Interior battery and circuit board, the battery is connected with the circuit board, the circuit board respectively with the camera, the propulsion
Motor, electric rotating machine connection.
5. detecting system according to claim 1, it is characterised in that the detection means also include respectively with the shooting
Head, the first transceiver of driving structure connection, the detection means pass through the first transceiver and the control device
Communicated.
6. detecting system according to claim 1, it is characterised in that the detecting system also includes being arranged at the detection
The diaphragm of apparatus surface, the diaphragm is made up of heat-insulating material.
7. detecting system according to claim 6, it is characterised in that the detection means also includes temperature sensor, institute
Temperature sensor is stated to be connected with the driving structure.
8. detecting system according to claim 7, it is characterised in that the detection means also includes being arranged at the shooting
Heat insulation structural on the camera lens of head.
9. the detecting system according to claim any one of 1-8, it is characterised in that the control device also includes display
Screen, the display screen is used to show the image that the camera is shot.
10. detecting system according to claim 9, it is characterised in that the control device also includes second transceiver, institute
State second transceiver to be connected with the display screen, described control unit respectively, the control device passes through the second transceiver
Communicated with the detection means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710392929.7A CN107254672B (en) | 2017-05-27 | 2017-05-27 | The detection system of vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710392929.7A CN107254672B (en) | 2017-05-27 | 2017-05-27 | The detection system of vacuum coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107254672A true CN107254672A (en) | 2017-10-17 |
| CN107254672B CN107254672B (en) | 2019-05-21 |
Family
ID=60027494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710392929.7A Active CN107254672B (en) | 2017-05-27 | 2017-05-27 | The detection system of vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107254672B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107616719A (en) * | 2017-10-20 | 2018-01-23 | 深圳市北鼎科技有限公司 | Domestic electric oven camera structure and Domestic electric oven |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201305624Y (en) * | 2008-05-21 | 2009-09-09 | 兰州大学 | Film preparation device |
| CN201374309Y (en) * | 2009-01-05 | 2009-12-30 | 天津大学 | Device for scanning electron microscope or ion sputtering film coating and etching in vacuum equipment |
| CN102877032A (en) * | 2012-09-04 | 2013-01-16 | 中国科学院合肥物质科学研究院 | Preparation system for pulse laser deposition film under intense magnetic field |
| CN203049030U (en) * | 2012-12-07 | 2013-07-10 | 深圳市创益科技发展有限公司 | Monitoring device for coating equipment |
| US20140033979A1 (en) * | 2004-07-16 | 2014-02-06 | Arcelormittal Dofasco Inc. | Monitor system for coating apparatus |
| CN203455288U (en) * | 2013-08-16 | 2014-02-26 | 南昌欧菲光科技有限公司 | Device for online monitoring flatness of flexible substrate in coating process |
| CN104651799A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Automatic flexible substrate double-side continuous coiling magnetron sputtering coating production line |
-
2017
- 2017-05-27 CN CN201710392929.7A patent/CN107254672B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20140033979A1 (en) * | 2004-07-16 | 2014-02-06 | Arcelormittal Dofasco Inc. | Monitor system for coating apparatus |
| CN201305624Y (en) * | 2008-05-21 | 2009-09-09 | 兰州大学 | Film preparation device |
| CN201374309Y (en) * | 2009-01-05 | 2009-12-30 | 天津大学 | Device for scanning electron microscope or ion sputtering film coating and etching in vacuum equipment |
| CN102877032A (en) * | 2012-09-04 | 2013-01-16 | 中国科学院合肥物质科学研究院 | Preparation system for pulse laser deposition film under intense magnetic field |
| CN203049030U (en) * | 2012-12-07 | 2013-07-10 | 深圳市创益科技发展有限公司 | Monitoring device for coating equipment |
| CN203455288U (en) * | 2013-08-16 | 2014-02-26 | 南昌欧菲光科技有限公司 | Device for online monitoring flatness of flexible substrate in coating process |
| CN104651799A (en) * | 2015-03-09 | 2015-05-27 | 常州工学院 | Automatic flexible substrate double-side continuous coiling magnetron sputtering coating production line |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107616719A (en) * | 2017-10-20 | 2018-01-23 | 深圳市北鼎科技有限公司 | Domestic electric oven camera structure and Domestic electric oven |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107254672B (en) | 2019-05-21 |
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