CN105509959B - A kind of method of laser method non-destructive testing vacuum tube vacuum-degree - Google Patents
A kind of method of laser method non-destructive testing vacuum tube vacuum-degree Download PDFInfo
- Publication number
- CN105509959B CN105509959B CN201510844428.9A CN201510844428A CN105509959B CN 105509959 B CN105509959 B CN 105509959B CN 201510844428 A CN201510844428 A CN 201510844428A CN 105509959 B CN105509959 B CN 105509959B
- Authority
- CN
- China
- Prior art keywords
- vacuum
- measurement
- angle
- laser generator
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000009659 non-destructive testing Methods 0.000 title claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 56
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
Abstract
The invention belongs to electric power technical field of nondestructive testing, and in particular to a kind of method of laser method non-destructive testing vacuum tube vacuum-degree.Present invention mainly solves existing vacuum detecting method, there are problems that is time-consuming and laborious, and measuring inaccuracy.The method of the present invention is the following steps are included: (1) adjusts laser, (2) it determines set angle: driving measurement arm to rotate using stepper motor, photoelectric tube is installed on measurement arm, photoelectric tube is used to detect the reflected light that measurement laser generator is radiated in vacuum bubbles, when the maximum value of photocell detection to reflected light, the pulse for starting counting stepper motor is converted into the rotational angle of measurement arm, i.e. set angle according to umber of pulse；(3) vacuum bubbles in step (2) are changed into vacuum bubbles to be detected, repeated step (2), obtain measurement angle；(4) according to deviation angle=measurement angle-set angle, when deviation angle is timing, illustrate vacuum decay in vacuum bubbles；When deviation angle is negative, illustrate that vacuum house vacuum is good.
Description
Technical field
The invention belongs to electric power non-destructive testings and electric instrument technical field, and in particular to a kind of lossless inspection of laser method
The method for surveying vacuum tube vacuum-degree.
Background technique
The vacuum degree of vacuum interrupter is the important technology index of power vacuum switch, when vacuum degree is lower than 1.33X10-5
When, it is necessary to vacuum interrupter is replaced, otherwise will be caused the accident.There is a problem of vacuum degree measurement difficulty for a long time, it is open
Way be to remove vacuum interrupter, apply voltage at contact both ends, house vacuum degree judged by measurement ionic current.This
Kind method is time-consuming and laborious, and measures inaccuracy, often judges by accident.
Summary of the invention
Present invention is generally directed to existing vacuum detecting methods there are problem that is time-consuming and laborious, and measuring inaccuracy, mention
For a kind of method of laser method non-destructive testing vacuum tube vacuum-degree.
The technical solution that the present invention takes in order to solve the above problem are as follows:
A kind of method of laser method non-destructive testing vacuum tube vacuum-degree, comprising the following steps:
(1) adjust laser: in the side of vacuum bubbles installation positioning laser generator and measurement laser generator, it is fixed to open
Position laser generator and measurement laser generator, first adjustment positioning laser generator beat positioned light source in vacuum bubbles plastic jacket
Luminous point and arc-extinguish chamber on luminous point it is in alignment, then adjust measurement laser generator, make to measure laser generator and be radiated at
Luminous point on arc-extinguish chamber is radiated at the luminous point on arc-extinguish chamber with positioning laser generator and is overlapped, and adjustment terminates at this time；
(2) it determines set angle: driving measurement arm to rotate using stepper motor, and set a demarcation switch to measurement arm and use
In making measurement arm stop rotating, photoelectric tube is installed on measurement arm, convex lens is installed in the front of photoelectric tube, and photoelectric tube is for detecting
Measurement laser generator is radiated at the reflected light in the identical vacuum bubbles of an external and internal pressure, when photocell detection arrives reflected light
When maximum value, the pulse of stepper motor is started counting, after measurement arm rotates to demarcation switch, stepper motor stops rotating, and closes
Measurement laser generator is closed, is converted into the rotational angle of measurement arm, i.e. set angle according to umber of pulse at this time；
(3) the identical vacuum bubbles of external and internal pressure in step (2) are changed into vacuum bubbles to be detected, repeats step (2), obtains
To measurement angle；
(4) according to deviation angle=measurement angle-set angle, then illustrating in vacuum bubbles under vacuum when deviation angle is timing
Drop；When deviation angle is negative, illustrate that vacuum house vacuum is good.
Wherein the set angle or measure the calculation method at angle are as follows: Pv=K θ, θ=K1*N/P, Pv is measurement in formula
Obtained vacuum values, θ indicate that measurement angle or set angle, N are the umber of pulse of measurement, and P vacuum degree is that -100KPa, K and K1 are roots
The coefficient obtained according to the thickness and material of glass tube.
By adopting the above technical scheme, established using anaclasis principle has light transmission phenomenon in transparent glass material to the present invention
On the basis of, so that the measurement of vacuum in vacuum tube is converted into optical measurement.
Specific embodiment
Embodiment 1
A kind of method of laser method non-destructive testing vacuum tube vacuum-degree, comprising the following steps:
(1) adjust laser: in the side of vacuum bubbles installation positioning laser generator and measurement laser generator, it is fixed to open
Position laser generator and measurement laser generator, first adjustment positioning laser generator beat positioned light source in vacuum bubbles plastic jacket
Luminous point and arc-extinguish chamber on luminous point it is in alignment, then adjust measurement laser generator, make to measure laser generator and be radiated at
Luminous point on arc-extinguish chamber is radiated at the luminous point on arc-extinguish chamber with positioning laser generator and is overlapped, and adjustment terminates at this time；
(2) it determines set angle: driving measurement arm to rotate using stepper motor, and set a demarcation switch to measurement arm and use
In making measurement arm stop rotating, photoelectric tube is installed on measurement arm, convex lens is installed in the front of photoelectric tube, and photoelectric tube is for detecting
Measurement laser generator is radiated at the reflected light in the identical vacuum bubbles of an external and internal pressure, when photocell detection arrives reflected light
When maximum value, the pulse of stepper motor is started counting, after measurement arm rotates to demarcation switch, stepper motor stops rotating, and closes
Measurement laser generator is closed, is converted into the rotational angle of measurement arm, i.e. set angle according to umber of pulse at this time；
(3) the identical vacuum bubbles of external and internal pressure in step (2) are changed into vacuum bubbles to be detected, repeats step (2), obtains
To measurement angle；
(4) according to deviation angle=measurement angle-set angle, then illustrating in vacuum bubbles under vacuum when deviation angle is timing
Drop；When deviation angle is negative, illustrate that vacuum house vacuum is good.
Wherein the set angle or measure the calculation method at angle are as follows: Pv=K θ, θ=K1*N/P, Pv is measurement in formula
Obtained vacuum values, θ indicate that measurement angle or set angle, N are the umber of pulse of measurement, and P vacuum degree is that -100KPa, K and K1 are roots
The coefficient obtained according to the thickness and material of glass tube.
Claims (2)
1. a kind of method of laser method non-destructive testing vacuum tube vacuum-degree, it is characterized in that the following steps are included:
(1) it adjusts laser: in the side of vacuum bubbles installation positioning laser generator and measurement laser generator, opening positioning and swash
Optical generator and measurement laser generator, first adjustment positioning laser generator make positioned light source beat the light in vacuum bubbles plastic jacket
Luminous point on point and arc-extinguish chamber is in alignment, then adjusts measurement laser generator, and measurement laser generator is made to be radiated at arc extinguishing
Luminous point on cover is radiated at the luminous point on arc-extinguish chamber with positioning laser generator and is overlapped, and adjustment terminates at this time；
(2) it determines set angle: driving measurement arm to rotate using stepper motor, and set a demarcation switch for making to measurement arm
Measurement arm stops rotating, and photoelectric tube is installed on measurement arm, and convex lens is installed in the front of photoelectric tube, and photoelectric tube is for detecting measurement
Laser generator is radiated at the reflected light in the identical vacuum bubbles of an external and internal pressure, when the maximum of photocell detection to reflected light
When value, the pulse of stepper motor is started counting, after measurement arm rotates to demarcation switch, stepper motor stops rotating, and closes and surveys
Laser generator is measured, is converted into the rotational angle of measurement arm, i.e. set angle according to umber of pulse at this time；
(3) the identical vacuum bubbles of external and internal pressure in step (2) are changed into vacuum bubbles to be detected, repeats step (2), is surveyed
Angulation；
(4) according to deviation angle=measurement angle-set angle, then illustrating vacuum decay in vacuum bubbles when deviation angle is timing；When
When deviation angle is negative, illustrate that vacuum house vacuum is good.
2. the method for laser method non-destructive testing vacuum tube vacuum-degree according to claim 1, it is characterized in that: the setting
Angle or the calculation method for measuring angle are as follows: Pv=K θ, θ=K1*N/P, Pv be the vacuum values that measurement obtains in formula, and θ indicates to measure
Angle or set angle, N are the umber of pulse of measurement, and P vacuum degree is that -100KPa, K and K1 are obtained according to the thickness and material of glass tube
The coefficient arrived.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510844428.9A CN105509959B (en) | 2015-11-26 | 2015-11-26 | A kind of method of laser method non-destructive testing vacuum tube vacuum-degree |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510844428.9A CN105509959B (en) | 2015-11-26 | 2015-11-26 | A kind of method of laser method non-destructive testing vacuum tube vacuum-degree |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105509959A CN105509959A (en) | 2016-04-20 |
| CN105509959B true CN105509959B (en) | 2019-03-05 |
Family
ID=55718103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510844428.9A Active CN105509959B (en) | 2015-11-26 | 2015-11-26 | A kind of method of laser method non-destructive testing vacuum tube vacuum-degree |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105509959B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107328519B (en) * | 2017-07-06 | 2019-09-27 | 南开大学 | Based on optical reflection law to the online test method of vacuum glass vacuum degree |
| CN109510533B (en) * | 2018-11-26 | 2020-09-22 | 浙江大学 | Control pulse area-adjustable film stretching control system and method for human-computer interaction stepping motor set |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201555688U (en) * | 2009-11-17 | 2010-08-18 | 刘保龙 | Mirror surface reflecting type vacuum degree measuring device |
| CN102062666A (en) * | 2010-11-17 | 2011-05-18 | 糜强 | Vacuum degree detecting method and device for vacuum heat insulating plate |
| CN102121470A (en) * | 2010-01-08 | 2011-07-13 | 中芯国际集成电路制造(上海)有限公司 | Device and method for monitoring failure of vacuum pump and vacuum sensor |
| CN203100971U (en) * | 2012-12-28 | 2013-07-31 | 青岛科瑞新型环保材料有限公司 | Built-in vacuum degree detecting device for vacuum insulation board |
| CN104409275A (en) * | 2014-11-19 | 2015-03-11 | 大连理工大学 | Vacuum degree online monitoring instrument for vacuum arc-extinguishing chamber |
| CN104458080A (en) * | 2014-12-15 | 2015-03-25 | 中国工程物理研究院流体物理研究所 | Optical fiber pressure sensing measurement method and device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3170136B2 (en) * | 1994-03-30 | 2001-05-28 | 株式会社東芝 | Vacuum-pack type insulation material vacuum measurement system |
-
2015
- 2015-11-26 CN CN201510844428.9A patent/CN105509959B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201555688U (en) * | 2009-11-17 | 2010-08-18 | 刘保龙 | Mirror surface reflecting type vacuum degree measuring device |
| CN102121470A (en) * | 2010-01-08 | 2011-07-13 | 中芯国际集成电路制造(上海)有限公司 | Device and method for monitoring failure of vacuum pump and vacuum sensor |
| CN102062666A (en) * | 2010-11-17 | 2011-05-18 | 糜强 | Vacuum degree detecting method and device for vacuum heat insulating plate |
| CN203100971U (en) * | 2012-12-28 | 2013-07-31 | 青岛科瑞新型环保材料有限公司 | Built-in vacuum degree detecting device for vacuum insulation board |
| CN104409275A (en) * | 2014-11-19 | 2015-03-11 | 大连理工大学 | Vacuum degree online monitoring instrument for vacuum arc-extinguishing chamber |
| CN104458080A (en) * | 2014-12-15 | 2015-03-25 | 中国工程物理研究院流体物理研究所 | Optical fiber pressure sensing measurement method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105509959A (en) | 2016-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204177363U (en) | A kind of minute surface ceramic tile flatness on-line measuring device | |
| CN105509959B (en) | A kind of method of laser method non-destructive testing vacuum tube vacuum-degree | |
| WO2021062939A1 (en) | Method for optical detection of diaphragm | |
| CN109341553A (en) | A kind of tube material and tube wall measurer for thickness and measurement method | |
| WO2009034825A1 (en) | Location measurement device in semiconductor single crystal manufacturing device, and location measurement method | |
| CN102183301B (en) | Portable type unified glare measuring apparatus | |
| CN204405004U (en) | Valve spring physical dimension measures testing machine | |
| CN202267594U (en) | Three-dimensional (3D) glasses testing device | |
| CN104296873A (en) | Spectrum bi-direction measuring system | |
| CN204594848U (en) | A kind of monitoring device of atmosphere particle concentration | |
| CN104792498A (en) | Dynamic testing method for light source | |
| CN101586982A (en) | Device and method for detecting position of object | |
| CN201885837U (en) | Micro-stress detecting device | |
| CN204439501U (en) | A kind of self-checking device of on-line continuous particle concentration monitor | |
| CN201059965Y (en) | Cylindrical form material deformation testing apparatus | |
| CN203672908U (en) | Photoelectric non-contact type tachometer calibrator | |
| CN105891921A (en) | Beam splitter prism device for generation of non-interference reference light | |
| CN102338692A (en) | Device and method for measuring static extinction ratio | |
| ES2808550T3 (en) | Method and system for real-time measurement during the coating thickness process | |
| CN203615919U (en) | Railway gauging rule detector and automatic measuring device thereof | |
| CN106443609B (en) | A kind of servo-actuated monitoring system and method for angle | |
| CN206248820U (en) | A kind of angle self-operated measuring unit | |
| CN107037412B (en) | A kind of automatic Angle Measuring System and method | |
| CN210922522U (en) | Film tape on-line thickness measuring device based on light refraction | |
| CN202903138U (en) | Metal level linewidth measuring apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |