CN102095788A - Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof - Google Patents
Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof Download PDFInfo
- Publication number
- CN102095788A CN102095788A CN2011100398617A CN201110039861A CN102095788A CN 102095788 A CN102095788 A CN 102095788A CN 2011100398617 A CN2011100398617 A CN 2011100398617A CN 201110039861 A CN201110039861 A CN 201110039861A CN 102095788 A CN102095788 A CN 102095788A
- Authority
- CN
- China
- Prior art keywords
- electrode
- carbon nano
- oxygen
- tube film
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
The invention discloses a carbon nano tube film three-electrode oxygen sensor and a concentration measuring method thereof; the sensor comprises a first, a second and a third electrodes distributed in sequence; the first electrode is provided with an air vent, and the inner surface of the first electrode is bonded with a substrate distributed with a carbon nano tube film; the center of the second electrode is provided with an exist aperture; the surface of the third electrode is provided with a blind hole; and the three electrodes are separated from each other. The method comprises the following steps of: 1) arranging the oxygen sensor, a temperature sensor and a humidity sensor with different electrode spacings in oxygen to be measured; 2) applying voltages on the electrodes; 3) measuring the ion flow value of each sensor; 4) forming a sample by the measured value and oxygen concentration, temperature and humidity calibration value, and constructing an oxygen concentration measuring database with a interpolation sample; 5) constructing a data fusion instrument and building an oxygen concentration measuring model; 6) inputting the measured value of the sensor to the measuring model, and obtaining the accurate measuring value of oxygen concentration. The sensor is high in measurement of oxygen flexibility, good in linearity and high in precision.
Description
Technical field
The present invention relates to the gas sensing field, particularly a kind of based on the three electrode oxygen sensors of carbon nano-tube film and gas discharge principle and the method for measurement oxygen concentration thereof.
Background technology
Along with pressing for and the development of nanometer technology of all trades and professions gas detection, nano-sensor has obtained considerable progress.Especially along with the discovery of carbon nano-tube in latter stage in 20th century, carbon nano-tube shows tempting application prospect in gas, temperature, Humidity Detection field.Carbon nano-tube film two electrode sensors in carbon nano-tube gas-sensitive, temperature sensitive, the moisture sensor with advantages such as its detection sensitivity height, detected gas wide ranges, response are fast, become the research focus in gas, temperature, Humidity Detection field.Carbon nano-tube film two electrode gas sensors have overcome the shortcoming of carbon nano-tube gas-sensitive sensors saturated poisoning in tested gas of other type based on gas discharge principle, and gas concentration measurement scope and tested gaseous species scope are wideer.As air-sensitive, temperature sensitive, moisture sensor that sensitive material constitutes, have the irreplaceable advantage of conventional sensors with carbon nano-tube: the one, the specific surface area of carbon nano-tube is big, under the less situation of sensor overall dimensions, can improve the area of electrode greatly; Two are based on the tip curvature radius of carbon nanotube level, and working sensor voltage is greatly reduced, and obtain extremely strong electric field intensity near the carbon nano-tube tip, make tested gas ionization under low-voltage; The 3rd, the size of having dwindled sensor greatly, dynamic response is fast.Therefore, it has result of extraction at aspects such as biology, chemistry, machinery, aviation, military affairs, anti-terrorisms.
Existing carbon nano-tube film two electrode sensors comprise by people such as Liu Junhua, the Zhang Yong of Xi'an Communications University, Li Xin, professors Zhu Changchun at the international vaccum microelectronics international conference disclosed carbon nano-tube film two-electrode gas sensor (shown in Figure 1) of the 14th IVMC of calendar year 2001.This working sensor is afterwards because interpolar discharge rear space electric charge is difficult to diffusion, sensor is difficult to return to original state, and (Fig. 2 Fig. 3), can't measure gas concentration to present multivalued relation between sensor voltage breakdown, breakdown current and the gas concentration.People such as Nikhil Koratkar of U.S. Rensselaer Polytech Inst (Rensselaer Polytechnic Institute) and Pulickel M professor Ajayan have developed carbon nano-tube film anode two-electrode gas sensor.Present nonlinear relationship between this sensor voltage breakdown and the gas concentration, linear error is bigger between disruptive discharge electric current and the gas concentration; Sparking voltage and discharge current are bigger; Can't realize of the measurement of carbon nano-tube film anode to pure gas.The Hui Guohua of Zhejiang University's biomedical engineering and instrumental science institute, Chen Yuquan professor develops carbon nano-tube thin film cathode two-electrode gas sensor under the condition of 120 microns die openings, studied the flash-over characteristic of sensor in three kinds of pure gases, because sensitivity is lower, do not constitute the gas sensor of measuring concentration.
Therefore, at present all kinds of pure gases of sensitivity are comprised the carbon nano-tube film electrode sensor of oxygen and detect the research of the method for oxygen concentration, become the technical matters that needs to be resolved hurrily.
Summary of the invention
One of purpose of the present invention, provide a kind of carbon nano-tube film three electrode oxygen sensors, the output current of conventional carbon nano-tube film two electrode sensors is divided into electron stream and ion flow, set up the single-valued relationship of ion flow that the present invention's three electrode oxygen sensor collectors collect and oxygen concentration, temperature and humidity, overcome carbon nano-tube film two electrode sensor gas-sensitive properties and the many-valued nonlinear problem of the quick characteristic that wets.This sensor construction is simple, and cost is low, and detected gas is highly sensitive.
Another object of the present invention, provide a kind of method, form sensor array by different poles spacing carbon nano-tube film three electrode sensors and measure oxygen concentration to be measured, temperature and humidity respectively based on carbon nano-tube film three electrode oxygen sensors measurement oxygen concentration; The hardware configuration that this concentration measuring method requires is simple, adopts data anastomosing algorithm, detected gas accuracy height.
The objective of the invention is to realize by following technical proposals.
Carbon nano-tube film three electrode oxygen sensors, it is characterized in that: comprise three first electrode, second electrode and third electrodes that distribute successively from top to bottom, the electrode that described first electrode is bonded with the substrate of the carbon nano-tube film that distributing by inside surface and is provided with bleeder vent constitutes; Second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
Architectural feature of the present invention also is:
Described three interelectrode die openings are 30～250 μ m;
Described first electrode and second electrode pad are 0.01～17mm over against area
2, second electrode and third electrode pole plate are 0.01～190mm over against area
2
The bleeder vent of the electrode surface of described first electrode is 1～4, is attached with carbon nano-tube film in the bonding substrate of electrode inner surface;
The described second electrode extraction pole center is provided with 1～4 bleeder vent;
Described third electrode collector blind hole is corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4.
The present invention gives a kind of method based on carbon nano-tube film three electrode oxygen sensors measurement oxygen concentration, and this method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set at the carbon nano-tube film three electrode oxygen sensors of 30～250 μ m;
The carbon nano-tube film three electrode oxygen sensors of three different poles spacings (2) will setting respectively, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors are placed in the atmosphere that contains oxygen to be measured;
(3) be 0V to the first electrode on-load voltage of three carbon nano-tube films, three electrode oxygen sensors, temperature sensor and humidity sensor respectively, the second electrode on-load voltage, 2～200V, third electrode on-load voltage 1～180V;
(4) in oxygen concentration to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in the measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that in concentration, temperature and humidity measurement range, records in the step (4), with corresponding oxygen concentration, temperature and humidity calibration value, form different experimental calibration samples, adopt the piecewise interpolation technology that the experimental calibration sample is carried out interpolation then, obtain interpolated data, obtain interpolated sample, and set up the measured oxygen concentration database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt the data fusion technology, make up the data fusion instrument, set up the measurement model of oxygen sensor, temperature sensor and humidity sensor; With input sample and the desired output sample of the data in the measured oxygen concentration database as the data fusion instrument, and train and check as the training sample and the test samples of data fusion instrument respectively with data different in the range ability, when assay satisfies the measurement error requirement, the accurate measurement model of concentration of data fusion instrument output oxygen sensor;
The accurate measurement model of oxygen concentration that the ion flow valuve input step (6) of output obtains during (7) with carbon nano-tube film three electrode oxygen sensors, temperature sensor and humidity sensor actual measurement, the accurate measured value of this model concentration of oxygen output.
The inventive method feature also is:
In the described carbon nano-tube film three electrode oxygen sensors, second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.
The described measured oxygen concentration database of setting up, be that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with oxygen concentration, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
Based on the measuring method of carbon nano-tube film three electrode oxygen sensors measurement oxygen concentration, form sensor array by different poles spacing carbon nano-tube film three electrode sensors and measure oxygen concentration to be measured, temperature and humidity respectively; Power by the sensor electrical potential source; Export by pA level current measurement system detecting sensor; Adjust electrode separation, adjust electrode voltage, in oxygen to be measured, in temperature, humidity environment, carry out the calibration experiment of sensor; Based on the piecewise interpolation technology experimental calibration data are carried out interpolation, obtain interpolated data; All data that will comprise experimental calibration data and interpolated data are formed the measured oxygen concentration database, obtain monodrome gas-sensitive property, monodrome responsive to temperature characteristic, the monodrome humidity sensitive characteristic of oxygen to be measured; According to the data in the measured oxygen concentration database, based on the data fusion technology, eliminate the influence of temperature, humidity, set up the accurate measurement model of concentration of oxygen sensor; The measured oxygen concentration model is imported in the output of sensor array in real time during with actual measurement, just can obtain the measured result of oxygen concentration.This measured oxygen concentration method has overcome the many-valued nonlinear problem of carbon nano-tube film two electrode sensor gas-sensitive properties and wet quick characteristic, and the hardware configuration of requirement is simple, and cost is low, and measurement oxygen is highly sensitive, accuracy is high, is suitable for promoting the use of.
Measured oxygen concentration method of the present invention can realize the concentration of oxygen measurement, and accuracy is 1%.The concentration measuring method of tradition three electrode probes that use in this novel measured oxygen concentration method and the existing ionization detector chromatograph is compared, because adopt carbon nano-tube film to do electrode, sensor has the measurement of concetration accuracy of high sensitivity and 1% to oxygen.And carbon nano-tube three electrode sensors can be realized working sensor voltage with the tip curvature radius of carbon nanotube level, from the safe and practical scope below 600 volts of high pressure drop to 200 volts of ionization detector.Novel measured oxygen concentration method of the present invention integrates sensor array technology, pA level current measurement techniques, piecewise interpolation technology and the data fusion technology of different poles spacing, the influence of temperature, humidity can be eliminated, the accurate measurement of oxygen concentration can be realized.
Description of drawings
Fig. 1 is carbon nano-tube thin film cathode two electrode sensor structural representations.
Fig. 2 is the voltage breakdown of prior art carbon nano-tube film two-electrode gas sensor and the many-valued non-linear gas-sensitive property of gas concentration.
Fig. 3 is the breakdown current of prior art carbon nano-tube film two-electrode gas sensor and the non-linear many-valued gas-sensitive property of gas concentration.
Fig. 4 is carbon nano-tube film three electrode oxygen sensor structural representations of the present invention.
Fig. 5 is carbon nano-tube film three electrode oxygen sensor spatial structure side views of the present invention.
Fig. 6 is the gas discharge ion flow exported in oxygen of carbon nano-tube film three electrode oxygen sensors of the present invention and the single valued relation of gas concentration.
Among the figure: 1, first electrode; 2, second electrode; 3, third electrode; 4, be provided with the electrode of bleeder vent; 5, carbon nano-tube film substrate; 6, carbon nano-tube film; 7, insulation column.
Embodiment
The present invention will be further described below in conjunction with drawings and the specific embodiments.
As Fig. 4, shown in Figure 5, these carbon nano-tube film three electrode oxygen sensors, comprise by three successively from top to bottom the electrode of mutual superposition constitute, these three mutual superposition electrodes are respectively equipped with first electrode 1, second electrode 2 and third electrode 3, and the electrode 4 that described first electrode 1 is bonded with the substrate 5 of the carbon nano-tube film 6 that distributing by inside surface and is provided with bleeder vent constitutes; Second electrode 2 is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode 3 is made of the collector that the battery lead plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column 7 respectively.
Among the carbon nano-tube film three electrode oxygen sensor embodiment shown in Figure 4, the bleeder vent of the electrode surface of first electrode 1 has 2, and bleeder vent is circular; Side surface at this bleeder vent is bonded with carbon nano-tube film substrate 5, is distributed with carbon nano-tube film 6 on it, and this carbon nano-tube mouth of pipe is downward.Second electrode, 2 centers are provided with 1 fairlead and fairlead is circle.Third electrode 3 collector blind holes are corresponding with the fairlead of second electrode, provided among Fig. 4, Fig. 5 a blind hole to be set and blind hole is the embodiment of cylindrical structure.Insulation column 7 is separately positioned between the carbon nano-tube film substrate 5 and second electrode 2, between second electrode 2 and the third electrode 3, promptly insulation column 7 is distributed in second electrode 2 over against the surperficial both sides at the carbon nano-tube film substrate two ends of first electrode 1 and the both sides of the inner surface of third electrode 3.
The present invention is provided with the electrode 4 plate faces and the carbon nano-tube film substrate 5 of bleeder vent and all adopts silicon sheet material to make; Described carbon nano-tube film 6 can adopt FePC as catalyzer, and adopts carbon source, and carbon nano-tube film 6 is made in growth in substrate 5, and perhaps the serigraphy carbon nano-tube film 6.Second electrode 2 and third electrode 3 all adopt silicon wafer to manufacture.The two sides that are provided with the electrode 4 of bleeder vent and third electrode 3 medial surfaces, second electrode 2 are equipped with metal film.
On the electrode in the present invention's first electrode 12 bleeder vents are arranged, be convenient to gas to be measured and enter electrode gap; Have conductive capability at the bottom of the silicon wafer-based of carbon nano-tube film, and strong bond is at first electrode, 1 inner surface; Through the fairlead of second electrode 2, third electrode 3 collectors can be collected the positive ion stream that gas ionization produces.Between first electrode 1 and second electrode 2, isolate mutually by insulation column 7 between second electrode 2 and the third electrode 3; Tested gas enters in the gap of adjacent two electrodes of sensor by the gap between the sensor peripheral electrode.
The present invention takes the carbon nano-tube film three electrode oxygen sensors of said structure when measuring oxygen concentration, and second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.Second electrode and first electrode form the electron stream loop, and the third electrode and first electrode form the ion flow loop, realize electron stream is separated with ion flow.Between the ion flow of carbon nano-tube film three electrode oxygen sensors output and oxygen concentration, gas temperature, the humidity, apply at second electrode on the basis of certain voltage, present single valued relation (Fig. 6).By piecewise interpolation and data fusion, realized the accuracy of measurement of oxygen concentration 1%.Carbon nano-tube film three electrode sensor array techniques, pA level current measurement techniques, piecewise interpolation technology and the data fusion technology of different poles spacing are the features of measured oxygen concentration method of the present invention.
Below by an instantiation, the method for carbon nano-tube film three electrode oxygen sensors of the present invention being measured oxygen concentration is described further.
Adopt the fixing carbon nano-tube film three electrode oxygen sensors of die opening, experiment has obtained the monodrome gas-sensitive property (shown in Figure 6) of oxygen, measured oxygen concentration model that the ion flow data input data fusion of sensor output is set up has obtained accuracy less than 1% measured oxygen concentration value.
Carbon nano-tube film three electrode oxygen sensors shown in Figure 6 are measured among the oxygen concentration embodiment, and the experimental situation condition is 24.5 ℃ of temperature, relative humidity 24.3%RH, atmospheric pressure 93.4KPa.Oxygen sensor first electrode 1 and second electrode, 2 die openings are fixed as 200 μ m, second electrode 2 is fixed as 100 μ m with third electrode 3 die openings; The die opening of the carbon nano-tube film three electrode sensor adjacent electrodes that monitor temperature is used is 170 μ m; The die opening of the carbon nano-tube film three electrode sensor adjacent electrodes that monitoring humidity is used is respectively 160 μ m, 100 μ m.First electrode 1 of above-mentioned three carbon nano-tube films, three electrode oxygen sensors and second electrode, 2 pole plates are 17mm over against area
2, second electrode 2 is 190mm with third electrode 3 pole plates over against area
2Oxygen sensor first electrode 1 cathode voltage is 0V, second electrode, 2 extraction pole on-load voltage 90V, third electrode 3 collector on-load voltage 10V; Temperature sensor first, second, third electrode voltage is respectively 0V, 70V, 10V; Humidity sensor first, second, third electrode voltage is respectively 0V, 90V, 10V.Along with the increase of oxygen concentration, the ion flow that the oxygen sensor collector is collected reduces, and presents monodrome decline relation between ion flow and the oxygen concentration; Temperature, humidity sensor sensing characteristic and oxygen sensor are similar.In 0～999950ppm oxygen concentration scope, 10 groups of experimental calibration data have been obtained.Three sensor ion flow valuves are as the input sample, and the oxygen concentration calibration value is as the desired output sample data.Adopt linear interpolation to 10 groups of experimental calibration sample data interpolation, in 0～999950ppm oxygen concentration scope, be that spacing is carried out equidistant interpolation with 10000ppm, obtain 99 groups of interpolated datas, near concentration demand value (being the gas concentration critical value), carry out intensive interpolation, obtain 342 groups of intensive interpolated datas, all 441 groups of interpolated datas and 10 groups of experimental calibration data are formed database; Select for use 441 groups of interpolated datas as training sample, 10 groups of experimental calibration data are as test samples, and input data fusion instrument by the training check, obtains the measured oxygen concentration model.The linearity of measured oxygen concentration model is that the assay fiducial error maximal value of 0.31%, 10 group of test samples is 0.35%, has reached 1% measured oxygen concentration accuracy.
Present embodiment basic structure is with embodiment 1, and different is: adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m in three electrodes of carbon nano-tube film three electrode oxygen sensors, and first electrode 1 and second electrode, 2 pole plates are 0.01mm over against area
2, second electrode 2 is 0.01mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of first electrode 1 has 1, and bleeder vent is quadrilateral, pentagon or hexagon; Second electrode, 2 center fairleads are 4, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 4, and blind hole is 3～6 prisms or pyramid.
The measuring method of present embodiment is substantially the same manner as Example 1, and different is:
The first electrode cathode voltage of sensor is 0V, the second electrode extraction pole on-load voltage 2V, third electrode collector on-load voltage 1V.
Present embodiment basic structure is with embodiment 1, and different is: adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m in three electrodes of carbon nano-tube film three electrode oxygen sensors, and first electrode 1 and second electrode, 2 pole plates are 10mm over against area
2, second electrode 2 is 100mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of first electrode 1 has 4, and bleeder vent is quadrilateral, pentagon or hexagon; Second electrode, 2 center fairleads are 2, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 2, and blind hole is 3～6 prisms or pyramid.
The measuring method of present embodiment is substantially the same manner as Example 1, and different is:
The first electrode cathode voltage of sensor is 0V, the second electrode extraction pole on-load voltage 200V, third electrode collector on-load voltage 180V.
The present invention forms sensor array, the output of pA level current measurement system detecting sensor, piecewise interpolation and data fusion method by different poles spacing carbon nano-tube film three electrode sensors, form a kind of novel, can measure oxygen, antijamming capability is strong, accuracy is high measured oxygen concentration method.The sensor of different poles spacing in the sensor array is measured the disturbing effect of temperature, humidity in real time, directly measures oxygen concentration; PA level current measurement system can detect the pA level electric current of each sensor output of corresponding oxygen concentration, temperature and humidity simultaneously; Piecewise interpolation and data fusion method can be eliminated temperature, humidity interference, the high measured oxygen concentration value of output accuracy.
Though the present invention has made detailed description with above-mentioned preferred embodiment to the present invention, the foregoing description also is not used in qualification the present invention.Under the situation that does not break away from given technical characterictic of technical solution of the present invention and range of structures, the increase that technical characterictic is done, distortion or with the replacement of the same content in this area all should belong to protection scope of the present invention.
Claims (6)
1. carbon nano-tube film three electrode oxygen sensors, it is characterized in that: comprise three first electrode, second electrode and third electrodes that distribute successively from top to bottom, the electrode that described first electrode is bonded with the substrate of the carbon nano-tube film that distributing by inside surface and is provided with bleeder vent constitutes; Second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
2. carbon nano-tube film three electrode oxygen sensors according to claim 1 is characterized in that: the die opening of adjacent two electrodes is 30～250 μ m in described three electrodes; Described first electrode and second electrode pad are 0.01～17mm over against area
2, second electrode and third electrode pole plate are 0.01～190mm over against area
2
3. carbon nano-tube film three electrode oxygen sensors according to claim 1, it is characterized in that: the bleeder vent of the electrode surface of described first electrode is 1～4, is attached with carbon nano-tube film in the bonding substrate of electrode inner surface;
The described second electrode extraction pole center is provided with 1～4 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4.
4. measure the method for oxygen concentration based on carbon nano-tube film three electrode oxygen sensors, it is characterized in that this method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set at carbon nano-tube film three electrode sensors of 30～250 μ m;
The carbon nano-tube film three electrode oxygen sensors of three different poles spacings (2) will setting respectively, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors are placed in the atmosphere that contains oxygen to be measured;
(3) be 0V to the first electrode on-load voltage of three carbon nano-tube films, three electrode oxygen sensors, temperature sensor and humidity sensor respectively, the second electrode on-load voltage, 2～200V, third electrode on-load voltage 1～180V;
(4) in oxygen concentration to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in the measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that in oxygen concentration, temperature and humidity measurement range, records in the step (4), with corresponding oxygen concentration, temperature and humidity calibration value, form different experimental calibration samples, adopt the piecewise interpolation technology that the experimental calibration sample is carried out interpolation then, obtain interpolated data, obtain interpolated sample, and set up the measured oxygen concentration database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt the data fusion technology, make up the data fusion instrument, set up the measurement model of oxygen sensor, temperature sensor and humidity sensor; With input sample and the desired output sample of the data in the measured oxygen concentration database as the data fusion instrument, and train and check as the training sample and the test samples of data fusion instrument respectively with data different in the range ability, when assay satisfies the measurement error requirement, the accurate measurement model of concentration of data fusion instrument output oxygen sensor;
The accurate measurement model of oxygen concentration that the ion flow valuve input step (6) of output obtains during (7) with carbon nano-tube film three electrode oxygen sensors, temperature sensor and humidity sensor actual measurement, the accurate measured value of this model concentration of oxygen output.
5. the method for measuring oxygen concentration based on carbon nano-tube film three electrode oxygen sensors according to claim 4, it is characterized in that: in the described carbon nano-tube film three electrode oxygen sensors, second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.
6. the method for measuring oxygen concentration based on carbon nano-tube film three electrode oxygen sensors according to claim 4, it is characterized in that: the described measured oxygen concentration database of setting up, be that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with oxygen concentration, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110039861 CN102095788B (en) | 2011-02-16 | 2011-02-16 | Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110039861 CN102095788B (en) | 2011-02-16 | 2011-02-16 | Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102095788A true CN102095788A (en) | 2011-06-15 |
| CN102095788B CN102095788B (en) | 2013-05-22 |
Family
ID=44128968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110039861 Expired - Fee Related CN102095788B (en) | 2011-02-16 | 2011-02-16 | Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102095788B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102081070A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof |
| CN102095787A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same |
| CN102095786A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same |
| CN111487304A (en) * | 2020-04-13 | 2020-08-04 | 欧阳彬 | Apparatus and method for monitoring gas concentration and sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220513A (en) * | 2005-02-09 | 2006-08-24 | Fujitsu Ltd | Target detection device, its manufacturing method and target detection method |
| CN101363807A (en) * | 2008-09-11 | 2009-02-11 | 电子科技大学 | Organic gas sensor and method for making same |
| CN102095787A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same |
| CN102095786A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same |
| CN102081073B (en) * | 2011-02-16 | 2012-07-04 | 西安交通大学 | Micro-nanometer carbon nanotube film three-electrode sensor |
-
2011
- 2011-02-16 CN CN 201110039861 patent/CN102095788B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006220513A (en) * | 2005-02-09 | 2006-08-24 | Fujitsu Ltd | Target detection device, its manufacturing method and target detection method |
| CN101363807A (en) * | 2008-09-11 | 2009-02-11 | 电子科技大学 | Organic gas sensor and method for making same |
| CN102095787A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same |
| CN102095786A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same |
| CN102081073B (en) * | 2011-02-16 | 2012-07-04 | 西安交通大学 | Micro-nanometer carbon nanotube film three-electrode sensor |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102081070A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof |
| CN102095787A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same |
| CN102095786A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same |
| CN102081070B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof |
| CN102095787B (en) * | 2011-02-16 | 2013-05-22 | 西安交通大学 | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same |
| CN102095786B (en) * | 2011-02-16 | 2013-05-22 | 西安交通大学 | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same |
| CN111487304A (en) * | 2020-04-13 | 2020-08-04 | 欧阳彬 | Apparatus and method for monitoring gas concentration and sensor |
| CN111487304B (en) * | 2020-04-13 | 2021-12-17 | 欧阳彬 | Apparatus and method for monitoring gas concentration and sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102095788B (en) | 2013-05-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102095781B (en) | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same | |
| CN102081073B (en) | Micro-nanometer carbon nanotube film three-electrode sensor | |
| CN102081071B (en) | Micronano ionizing sensor of carbon nanotube film | |
| CN102081067B (en) | Carbon nanotube (CNT) film based ionization nitrogen dioxide sensor and method for measuring concentration by adopting same | |
| CN102175343B (en) | Carbon nanotube film three-electrode gas temperature sensor and temperature measuring method thereof | |
| CN102095787B (en) | Carbon nano tube film three-electrode ethylene sensor and concentration measuring method using same | |
| CN102095783B (en) | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas | |
| CN102095786B (en) | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same | |
| CN102095790B (en) | Carbon nanotube film ionizing sensor array and method for detecting concentration of mixed gas | |
| CN102095788B (en) | Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof | |
| CN102081068B (en) | Three-electrode sulfur dioxide sensor of carbon nanotube film | |
| CN102109492B (en) | Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof | |
| CN106248776B (en) | A kind of sensor array of detectable multiple groups part mixed gas | |
| CN102095791B (en) | Method for detecting concentration of two-component gas based on carbon nano tube film three-electrode sensor | |
| CN102072784B (en) | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof | |
| CN102175757B (en) | Carbon nanotube film three-electrode sensor and manufacturing method thereof | |
| CN102081072B (en) | Carbon nanotube (CNT) film based ionization nitric oxide (NO) sensor and method for measuring concentration by adopting same | |
| CN102175756B (en) | Carbon nanotube film ionizing sulphur dioxide sensor and concentration measuring method by utilizing same | |
| CN102095782B (en) | Gas on-line detection device based on micro-nano carbon nano tube film three-electrode | |
| CN102095789B (en) | Carbon nanotube film ionizing sensor and method for detecting concentration of bi-component gas | |
| CN102081069B (en) | Carbon nanotube (CNT) film based three-electrode sensor and method for detecting concentration of single gas by adopting same | |
| CN102081070B (en) | Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof | |
| CN102095784B (en) | Carbon nano tube film three-electrode gas humidity sensor and humidity measuring method thereof | |
| CN102095785B (en) | Carbon nano tube thin film three-electrode nitric oxide sensor and concentration measuring method by utilizing same | |
| CN102095792B (en) | Online gas detection device based on carbon-nano-tube membrane micron-nano electrode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130522 Termination date: 20160216 |