CN102175756B - Carbon nanotube film ionizing sulphur dioxide sensor and concentration measuring method by utilizing same - Google Patents
Carbon nanotube film ionizing sulphur dioxide sensor and concentration measuring method by utilizing same Download PDFInfo
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- CN102175756B CN102175756B CN 201110039163 CN201110039163A CN102175756B CN 102175756 B CN102175756 B CN 102175756B CN 201110039163 CN201110039163 CN 201110039163 CN 201110039163 A CN201110039163 A CN 201110039163A CN 102175756 B CN102175756 B CN 102175756B
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Abstract
The invention discloses a carbon nanotube film ionizing sulphur dioxide sensor and a method for measuring concentration of sulphur dioxide gas by the same, wherein the sensor comprises a first electrode, a second electrode and a third electrode which are distributed in sequence; the first electrode is provided with an air hole; a metal film base distributed with a carbon nanotube film is attached to the inner surface of the first electrode; a lead-out hole is arranged at the centre of the second electrode; the plate face of the third electrode is provided with a blind hole; and the three electrodes are mutually isolated. The method comprises the following steps: 1) placing three sensors at different electrode intervals; 2) applying voltages on the electrodes; 3) measuring the ion flow values of the sensor; 4) forming a sample by the measured values and the calibration values of sulphur dioxide (SO2) concentration, temperature and humidity, and building a gas concentration measuring database together with an interpolation sample; 5) building a data fusion device, and building a SO2 concentration measuring model; 6) inputting the actual measured values of the sensor into the measuring model, so as to obtain the accurate measured value of the SO2 concentration. The sensor has the characteristics of high sensitivity of gas detection, good linearity and high accuracy.
Description
Technical field
The present invention relates to the gas sensing field, particularly a kind of based on carbon nano-tube film and gas discharge principle the ionization type SO 2 sensor and measure the method for concentration of SO 2 gas.
Background technology
Along with all trades and professions gas detect in the urgent need to and the development of nanometer technology, nano-sensor has obtained considerable progress.Especially along with the discovery of carbon nano-tube in latter stage in 20th century, carbon nano-tube shows tempting application prospect in gas, temperature and humidity measure field.Carbon nano-tube film two electrode ionizing transducers in carbon nano-tube gas-sensitive, temperature sensitive, moisture sensor, high with its detection sensitivity, detect the advantages such as gas wide ranges, response be fast, become the study hotspot in gas, temperature and humidity measure field.Carbon nano-tube film two electrode Gas-Sensitive Sensor of Ionized Type have overcome carbon nano-tube gas-sensitive sensors saturated poisoning shortcoming in tested gas of other type based on gas discharge principle, and gas concentration measurement scope and tested gaseous species scope are wider.As air-sensitive, temperature sensitive, moisture sensor that sensitive material consists of, have the irreplaceable advantage of conventional sensors with carbon nano-tube: the one, the specific surface area of carbon nano-tube is large, in the situation that the sensor overall dimensions is less, can greatly improve the area of electrode; Two are based on the tip curvature radius of carbon nanotube level, and working sensor voltage is greatly reduced, and obtain extremely strong electric field intensity near the carbon nano-tube tip, make tested gas ionization under low-voltage; The 3rd, the size of greatly having dwindled sensor, dynamic response is fast.Therefore, it has development prospect widely at aspects such as biology, chemistry, machinery, aviation, military affairs, anti-terrorisms.
Existing carbon nano-tube film two electrode ionizing transducers comprise by people such as Liu Junhua, the Zhang Yong of Xi'an Communications University, Li Xin, professors Zhu Changchun at the disclosed carbon nano-tube film two electrode ionization type gas sensors (shown in Figure 1) of the 14th the IVMC international vacuum microelectronics international conference of calendar year 2001.This working sensor is afterwards because interpolar discharge rear space electric charge is difficult to diffusion, sensor is difficult to return to original state, and present multivalued relation (Fig. 2, Fig. 3) between sensor voltage breakdown, breakdown current and gas concentration, can't measure gas concentration.The people such as the Nikhil Koratkar of U.S. Rensselaer Polytech Inst (Rensselaer Polytechnic Institute) and Pulickel M professor Ajayan have developed carbon nano-tube film anode two-electrode gas sensor.Present nonlinear relationship between this sensor voltage breakdown and gas concentration, between disruptive discharge electric current and gas concentration, linear error is larger; Sparking voltage and discharge current are larger; Can't realize that the carbon nano-tube film anode is to the measurement of pure gas.Hui Guohua, the Chen Yuquan professor of Zhejiang University's biomedical engineering and instrumental science institute develops carbon nano-tube thin film cathode two-electrode gas sensor under the condition of 120 microns die openings, studied the flash-over characteristic of sensor in three kinds of pure gases, because sensitivity is lower, do not consist of the gas sensor of measuring concentration.
Therefore, at present all kinds of pure gases of sensitivity are comprised the carbon nano-tube film ionizing transducer of sulphuric dioxide and detect the research of the method for pure gas sulfur dioxide concentration, become the technical matters that needs to be resolved hurrily.
Summary of the invention
One of purpose of the present invention, be to provide a kind of carbon nano-tube film ionization type SO 2 sensor, the output current of conventional carbon nano-tube film two electrode sensors is divided into electron stream and ion current, set up the single-valued relationship of ion current that ionizing transducer collector of the present invention collects and concentration of SO 2 gas, temperature, humidity, overcome the many-valued nonlinear problem of carbon nano-tube film two electrode sensor gas-sensitive properties and wet sensitive characteristic.This sensor construction is simple, and cost is low, detects gas sensitivity high.
Another object of the present invention is to provide a kind of method of measuring concentration of SO 2 gas based on carbon nano-tube film ionization type SO 2 sensor; Form sensor array by different poles spacing carbon nano-tube film ionizing transducer, measure respectively concentration of SO 2 gas to be measured, gas temperature and humidity; The hardware configuration that this concentration measuring method requires is simple, adopts data anastomosing algorithm, detects the gas accuracy high.
The objective of the invention is to realize by following technical proposals.
Carbon nano-tube film ionization type SO 2 sensor, it is characterized in that: comprise three the first electrode, the second electrode and third electrodes that distribute successively from top to bottom, the electrode that described the first electrode adheres to by inside surface the metallic film base that the carbon nano-tube film that distributing is arranged and is provided with bleeder vent consists of; The second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
Architectural feature of the present invention also is:
Described three interelectrode die openings are 30 ~ 250 μ m;
Described the first electrode and the second electrode pad are 0.01 ~ 170mm over against area
2, the second electrode and third electrode pole plate are 0.01 ~ 190mm over against area
2
The bleeder vent of the electrode surface of described the first electrode is 1 ~ 4, and growth or screen printing are brushed with carbon nano-tube film on the metallic film base that the electrode inner surface adheres to;
Described the second electrode extraction pole center is provided with 1 ~ 4 bleeder vent;
Described third electrode collector blind hole is corresponding with the fairlead of the second electrode, and the quantity of blind hole is 1 ~ 4.
The present invention gives a kind of method of measuring concentration of SO 2 gas based on carbon nano-tube film ionization type SO 2 sensor, and the method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set as the carbon nano-tube film ionizing transducer of 30 ~ 250 μ m, described carbon nano-tube film ionizing transducer comprises three the first electrode, the second electrode and the third electrodes that distribute successively from top to bottom, and the electrode that described the first electrode adheres to by inside surface the metallic film base that the carbon nano-tube film that distributing is arranged and is provided with bleeder vent consists of; The second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively;
The carbon nano-tube film ionizing transducer of three different poles spacings (2) will setting respectively is placed in the atmosphere that contains sulfur dioxide gas to be measured as carbon nano-tube film ionization type SO 2 sensor, carbon nano-tube film ionization type temperature sensor, carbon nano-tube film ionization type humidity sensor;
(3) respectively to the first electrode on-load voltage 0V of described carbon nano-tube film ionization type sulfur dioxide gas body sensor, carbon nano-tube film ionization type temperature sensor and carbon nano-tube film ionization type humidity sensor, second electrode on-load voltage 2 ~ 200V, third electrode on-load voltage 1 ~ 180V;
(4) in concentration of SO 2 gas to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that records in concentration, temperature and humidity measurement range in step (4), with corresponding concentration of SO 2 gas, temperature and humidity calibration value, form different experimental calibration samples, then adopt the piecewise interpolation technology to carry out interpolation to the experimental calibration sample, obtain interpolated data, obtain interpolated sample, and set up the concentration of SO 2 gas measured database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt Data fusion technique, build the data fusion instrument, set up the measurement model of carbon nano-tube film ionization type SO 2 sensor, carbon nano-tube film ionization type temperature sensor and carbon nano-tube film ionization type humidity sensor; With input sample and the desired output sample of the data in the concentration of SO 2 gas measured database as the data fusion instrument, and train and check as training sample and the test samples of data fusion instrument respectively with data different in range ability, when assay satisfies the measurement error requirement, the concentration Measurement accuracy model of data fusion instrument output SO 2 sensor;
The concentration of SO 2 gas Measurement accuracy model that during (7) with carbon nano-tube film ionization type SO 2 sensor, carbon nano-tube film ionization type temperature sensor and the actual measurement of carbon nano-tube film ionization type humidity sensor, the ion flow valuve input step (6) of output obtains, the Measurement accuracy value of this model output concentration of SO 2 gas.
The inventive method feature also is:
In described carbon nano-tube film ionization type SO 2 sensor, the second electrode potential is higher than the first electrode potential, and the third electrode current potential is lower than the second electrode potential and higher than the first electrode potential.
The described concentration of SO 2 gas measured database of setting up, that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with concentration of SO 2 gas, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
Measure the measuring method of concentration of SO 2 gas based on carbon nano-tube film ionization type SO 2 sensor, form sensor array by different poles spacing carbon nano-tube film ionizing transducer, measure respectively concentration of SO 2 gas to be measured, temperature and humidity; Powered by the sensor electrical potential source; Exported by pA level current measurement system detecting sensor; Adjust electrode separation, adjust electrode voltage, in sulfur dioxide gas to be measured, carry out the calibration experiment of sensor in temperature, humidity environment; Based on the piecewise interpolation technology, the experimental calibration data are carried out interpolation, obtain interpolated data; All data that will comprise experimental calibration data and interpolated data form the concentration of SO 2 gas measured database, obtain monodrome gas-sensitive property, monodrome responsive to temperature characteristic, the monodrome humidity sensitive characteristic of sulfur dioxide gas to be measured; According to the data in the concentration of SO 2 gas measured database, the based on data integration technology is eliminated the impact of temperature, humidity, sets up the concentration Measurement accuracy model of sulfur dioxide gas body sensor; During with actual measurement, the concentration of SO 2 gas measurement model is inputted in the output of sensor array in real time, just can obtain the measured result of concentration of SO 2 gas.This concentration of SO 2 gas measuring method has overcome the many-valued nonlinear problem of carbon nano-tube film two electrode sensor gas-sensitive properties and wet sensitive characteristic, the hardware configuration that requires is simple, adopts data anastomosing algorithm, and cost is low, the detection gas sensitivity is high, accuracy is high, is suitable for promoting the use of.
Concentration of SO 2 gas measuring method of the present invention can realize the measurement of concetration of sulfur dioxide gas, and accuracy is 1%.The gas concentration detection method of tradition three electrode probes that use in this new gas concentration detection method and existing ionization detector chromatograph is compared, owing to adopting carbon nano-tube film to do electrode, sensor has the measurement of concetration accuracy of high sensitivity and 1% to sulfur dioxide gas.And the carbon nano-tube film ionizing transducer can be realized working sensor voltage with the tip curvature radius of carbon nanotube level, from the safe and practical scope below 600 volts of high pressure drop to 200 volts of ionization detector.Novel concentration of SO 2 gas measuring method of the present invention integrates sensor array technology, pA level current measurement techniques, piecewise interpolation technology and the Data fusion technique of different poles spacing, the impact of temperature, humidity can be eliminated, the Measurement accuracy of concentration of SO 2 gas can be realized.
Description of drawings
Fig. 1 is existing carbon nano-tube thin film cathode two electrode sensor structural representations.
Fig. 2 is the voltage breakdown of prior art carbon nano-tube film two-electrode gas sensor and the many-valued non-linear gas-sensitive property of gas concentration.
Fig. 3 is the breakdown current of prior art carbon nano-tube film two-electrode gas sensor and the non-linear many-valued gas-sensitive property of gas concentration.
Fig. 4 is carbon nano-tube film ionization type SO 2 sensor structural representation of the present invention.
Fig. 5 is carbon nano-tube film ionization type SO 2 sensor spatial structure side view of the present invention.
Fig. 6 is the gas discharge ion current exported in the pure gas sulfur dioxide gas of carbon nano-tube film ionizing transducer of the present invention and the single valued relation of gas concentration.
In figure: 1, the first electrode; 2, the second electrode; 3, third electrode; 4, be provided with the electrode of bleeder vent; 5, metallic film base; 6, carbon nano-tube film; 7, insulation column.
Embodiment
The present invention will be further described below in conjunction with drawings and the specific embodiments.
As Fig. 4, shown in Figure 5, this carbon nano-tube film ionization type SO 2 sensor, comprise by three electrodes that mutually superpose from top to bottom successively and consisting of, these three mutual overlay electrodes are respectively the first electrode 1, the second electrode 2 and third electrode 3, and described the first electrode adheres to by inside surface the metallic film base 5 that the carbon nano-tube film that distributing is arranged and the electrode 4 that is provided with bleeder vent consists of; The second electrode 2 is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode 3 is made of the collector that the battery lead plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column 7 respectively.
In carbon-nano-tube membrane micron-nano ionization type SO 2 sensor embodiment shown in Figure 4, the bleeder vent of the electrode surface of the first electrode 1 has 2, and bleeder vent is circular; A side surface at this electrode is attached with metallic film base 5, is distributed with carbon nano-tube film 6 on it, and this carbon nano-tube mouth of pipe is downward, and this carbon nano-tube mouth of pipe is downward.The second electrode 2 centers are provided with 1 fairlead and fairlead for circular.Third electrode 3 collector blind holes are corresponding with the fairlead of the second electrode, provided in Fig. 4, Fig. 5 a blind hole to be set and blind hole is the embodiment of cylindrical structure.Insulation column 7 is separately positioned between the metallic film base 5 and the second electrode 2 of the carbon nano-tube film that distributing, between the second electrode 2 and third electrode 3, namely insulation column 7 be distributed in the second electrode 2 over against the both sides on the inboard golden film surface of the first electrode 1 and the second electrode 2 over against the both sides of third electrode 3.
The electrode 4 plate faces that the present invention is provided with bleeder vent adopt silicon sheet material to make; The metallic film base 5 of carbon nano-tube film of distributing adopts titaniums, nickel, three kinds of metal materials of gold to make; Described carbon nano-tube film 6 can adopt FePC as catalyzer, and adopts carbon source, and carbon nano-tube film 6 is made in growth on metallic film base 5, and perhaps the serigraphy carbon nano-tube film 6.The second electrode 2 and third electrode 3 all adopt silicon wafer to manufacture.The two sides of the first electrode 1 and third electrode 3 medial surfaces, the second electrode 2 are equipped with metal film.
On electrode in the present invention's the first electrode 1, some bleeder vents are arranged, be convenient to gas to be detected and enter electrode gap; The metallic film base of carbon nano-tube film of distributing has conductive capability, and firm attachment is at the first electrode 1 one side surfaces; Through the fairlead of the second electrode 2, third electrode 3 collectors can be collected the positive ion stream that gas ionization produces.Between the first electrode 1 and the second electrode 3, mutually isolate by insulation column 7 between the second electrode 2 and third electrode 3; Tested gas enters in the gap of adjacent two electrodes of sensor by the gap between the sensor peripheral electrode.
The present invention takes the carbon nano-tube film ionization type SO 2 sensor of said structure when measuring concentration of SO 2 gas, and the second electrode potential is higher than the first electrode potential, and the third electrode current potential is lower than the second electrode potential and higher than the first electrode potential.The second electrode and the first electrode form the electron stream loop, and third electrode and the first electrode form the ion current loop, and realization separates electron stream with ion current.Between the ion current and concentration of SO 2 gas, gas temperature and humidity of the output of carbon nano-tube film ionizing transducer, apply at the second electrode on the basis of certain voltage, present monodrome gas concentration sensitive relations (Fig. 6), monodrome responsive to temperature relation, monodrome humidity sensitive relation.By piecewise interpolation and data fusion, realized the accuracy of measurement of concentration of SO 2 gas 1%.The carbon nano-tube film ionizing transducer array technique of different poles spacing, pA level current measurement techniques, piecewise interpolation technology and Data fusion technique are the features of concentration measuring method of the present invention.
Below by an instantiation, the method for carbon nano-tube film ionization type SO 2 sensor of the present invention being measured concentration of SO 2 gas is described further.
Adopt the fixing carbon nano-tube film ionization type SO 2 sensor of die opening, experiment has obtained the monodrome gas-sensitive property (shown in Figure 6) of pure gas sulphuric dioxide, concentration of SO 2 gas measurement model that the ion current data input data fusion of sensor output is set up has obtained accuracy less than 1% pure gas sulfur dioxide concentration measured value.
Carbon nano-tube film ionization type SO 2 sensor shown in Figure 6 is measured in pure gas sulfur dioxide concentration embodiment, and the experimental situation condition is 20.5 ℃ of temperature, relative humidity 25.8%RH, atmospheric pressure 93.4KPa.Carbon nano-tube film ionization type SO 2 sensor the first electrode 1 and the second electrode 2 die openings are that 200 μ m, the second electrode 2 are 220 μ m with third electrode 3 die openings; The die opening of the carbon nano-tube film ionizing transducer adjacent electrode that monitor temperature is used is 170 μ m; The die opening of the carbon nano-tube film ionizing transducer adjacent electrode that monitoring humidity is used is respectively 200 μ m, 100 μ m.The first electrode 1 of above-mentioned three carbon nano-tube film ionizing transducers and the second electrode 2 pole plates are 170mm over against area
2, the second electrode 2 is 190mm with third electrode 3 pole plates over against area
2SO 2 sensor the first electrode cathode voltage is 0V, the second electrode extraction pole on-load voltage 100V, third electrode collector on-load voltage 10V; Temperature sensor first, second, third electrode voltage is respectively 0V, 70V, 10V; Humidity sensor first, second, third electrode voltage is respectively 0V, 90V, 10V.Along with the increase of sulfur dioxide concentration, the ion current that the SO 2 sensor collector is collected reduces, and presents monodrome decline relation between ion current and sulfur dioxide concentration; Temperature-humidity sensor sensitivity characteristic and SO 2 sensor are similar.In 0 ~ 739ppm concentration of SO 2 gas scope, 10 groups of experimental calibration data have been obtained.Three sensor ion flow valuves are as the input sample, and the concentration of SO 2 gas calibration value is as the desired output sample data.Adopt linear interpolation to 10 groups of experimental calibration sample data interpolation, carry out equidistant interpolation take 20ppm as spacing in 0 ~ 739ppm concentration of SO 2 gas scope, and carry out intensive interpolation near concentration demand value (being the gas concentration critical value), obtain altogether 67 groups of interpolated datas, and form database with 10 groups of experimental calibration data; Select 67 groups of interpolated datas and 2 groups of experimental calibration data totally 69 groups of data as training sample, the remaining 8 groups of experimental calibration data of training sample that are different from are as test samples, input data fusion instrument is checked by training, obtains pure gas sulfur dioxide concentration measurement model.The linearity of sulfur dioxide concentration measurement model is that the assay fiducial error maximal value of 0.31%, 8 group of test samples is 0.32%, has reached 1% measurement of concetration accuracy.
The present embodiment basic structure is with embodiment 1, difference is: in three electrodes of carbon nano-tube film ionization type SO 2 sensor, adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m, and the first electrode 1 and the second electrode 2 pole plates are 0.01mm over against area
2, the second electrode 2 is 0.01mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of the first electrode 1 has 1, and bleeder vent is quadrilateral, pentagon or hexagon; The second electrode 2 center fairleads are 4, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 4, and blind hole is 3 ~ 6 prisms or pyramid.
The measuring method of the present embodiment is substantially the same manner as Example 1, and difference is:
The first electrode cathode voltage of carbon nano-tube film ionization type SO 2 sensor is 0V, the second electrode extraction pole on-load voltage 2V, third electrode collector on-load voltage 1V.
The present embodiment basic structure is with embodiment 1, difference is: in three electrodes of carbon nano-tube film ionization type SO 2 sensor, adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m, and the first electrode 1 and the second electrode 2 pole plates are 100mm over against area
2, the second electrode 2 is 120mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of the first electrode 1 has 4, and bleeder vent is quadrilateral, pentagon or hexagon; The second electrode 2 center fairleads are 2, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 2, and blind hole is 3 ~ 6 prisms or pyramid.
The measuring method of the present embodiment is substantially the same manner as Example 1, and difference is:
The first electrode cathode voltage of carbon nano-tube film ionization type SO 2 sensor is 0V, the second electrode extraction pole on-load voltage 200V, third electrode collector on-load voltage 180V.
The present invention forms sensor array, the output of pA level current measurement system detecting sensor, piecewise interpolation and data fusion method by different poles spacing carbon nano-tube film ionizing transducer, forms a kind of novel, antijamming capability is strong, accuracy is high concentration of SO 2 gas measuring method.The sensor of different poles spacing in sensor array, the disturbing effect of real-time detected temperatures, humidity, direct-detection concentration of SO 2 gas; PA level current measurement system can detect the pA level electric current of each sensor output of corresponding concentration of SO 2 gas, temperature and humidity simultaneously; Piecewise interpolation and data fusion method can be eliminated temperature, humidity interference, the high concentration of SO 2 gas measured value of output accuracy.
Although the present invention has made detailed description with above-mentioned preferred embodiment to the present invention, above-described embodiment is not intended to limit the present invention.In the situation that do not break away from the given technical characterictic of technical solution of the present invention and range of structures, the increase that technical characterictic is done, distortion or with the replacement of the same content in this area all should belong to protection scope of the present invention.
Claims (4)
1. carbon nano-tube film ionization type SO 2 sensor, it is characterized in that: comprise three the first electrode, the second electrode and third electrodes that distribute successively from top to bottom, the electrode that described the first electrode adheres to by inside surface the metallic film base that the carbon nano-tube film that distributing is arranged and is provided with bleeder vent consists of; The second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively;
In described three electrodes, the die opening of adjacent two electrodes is 200～220 μ m; Described the first electrode and the second electrode pad are 0.01～170mm over against area
2, the second electrode and third electrode pole plate are 0.01～190mm over against area
2
The bleeder vent of the electrode surface of described the first electrode is 1～4, and growth or screen printing are brushed with carbon nano-tube film on the metallic film base that the electrode inner surface adheres to;
Described the second electrode extraction pole center is provided with 1～4 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of the second electrode, and the quantity of blind hole is 1～4.
2. based on the method for carbon nano-tube film ionization type SO 2 sensor measurements of sulfur dioxide concentrations law, it is characterized in that, the method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set as the carbon nano-tube film ionizing transducer of 200～220 μ m, described carbon nano-tube film ionizing transducer comprises three the first electrode, the second electrode and the third electrodes that distribute successively from top to bottom, and the electrode that described the first electrode adheres to by inside surface the metallic film base that the carbon nano-tube film that distributing is arranged and is provided with bleeder vent consists of; The second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively;
The carbon nano-tube film ionizing transducer of three different poles spacings (2) will setting respectively is placed in the atmosphere that contains sulfur dioxide gas to be measured as carbon nano-tube film ionization type SO 2 sensor, carbon nano-tube film ionization type temperature sensor and carbon nano-tube film ionization type humidity sensor;
(3) respectively to the first electrode on-load voltage 0V of described carbon nano-tube film ionization type sulfur dioxide gas body sensor, carbon nano-tube film ionization type temperature sensor and carbon nano-tube film ionization type humidity sensor, second electrode on-load voltage 2～200V, third electrode on-load voltage 1～180V;
(4) in concentration of SO 2 gas to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that records in concentration, temperature and humidity measurement range in step (4), with corresponding concentration of SO 2 gas, temperature and humidity calibration value, form different experimental calibration samples, then adopt the piecewise interpolation technology to carry out interpolation to the experimental calibration sample, obtain interpolated data, obtain interpolated sample, and set up the concentration of SO 2 gas measured database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt Data fusion technique, build the data fusion instrument, set up the measurement model of carbon nano-tube film ionization type SO 2 sensor, carbon nano-tube film ionization type temperature sensor and carbon nano-tube film ionization type humidity sensor; With input sample and the desired output sample of the data in the concentration of SO 2 gas measured database as the data fusion instrument, and train and check as training sample and the test samples of data fusion instrument respectively with data different in range ability, when assay satisfies the measurement error requirement, the concentration Measurement accuracy model of data fusion instrument output SO 2 sensor;
The concentration of SO 2 gas Measurement accuracy model that during (7) with carbon nano-tube film ionization type SO 2 sensor, carbon nano-tube film ionization type temperature sensor and the actual measurement of carbon nano-tube film ionization type humidity sensor, the ion flow valuve input step (6) of output obtains, the Measurement accuracy value of this model output concentration of SO 2 gas.
3. the method for measuring concentration of SO 2 gas based on carbon nano-tube film ionization type SO 2 sensor according to claim 2, it is characterized in that: in described carbon nano-tube film ionization type SO 2 sensor, the second electrode potential is higher than the first electrode potential, and the third electrode current potential is lower than the second electrode potential and higher than the first electrode potential.
4. the method for measuring concentration of SO 2 gas based on carbon nano-tube film ionization type SO 2 sensor according to claim 2, it is characterized in that: the described sulfur dioxide concentration measured database of setting up, that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with concentration of SO 2 gas, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
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