CN102095788B - Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof - Google Patents
Carbon nano tube film three-electrode oxygen sensor and concentration measuring method thereof Download PDFInfo
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- CN102095788B CN102095788B CN 201110039861 CN201110039861A CN102095788B CN 102095788 B CN102095788 B CN 102095788B CN 201110039861 CN201110039861 CN 201110039861 CN 201110039861 A CN201110039861 A CN 201110039861A CN 102095788 B CN102095788 B CN 102095788B
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Abstract
The invention discloses a carbon nano tube film three-electrode oxygen sensor and a concentration measuring method thereof; the sensor comprises a first, a second and a third electrodes distributed in sequence; the first electrode is provided with an air vent, and the inner surface of the first electrode is bonded with a substrate distributed with a carbon nano tube film; the center of the second electrode is provided with an exist aperture; the surface of the third electrode is provided with a blind hole; and the three electrodes are separated from each other. The method comprises the following steps of: 1) arranging the oxygen sensor, a temperature sensor and a humidity sensor with different electrode spacings in oxygen to be measured; 2) applying voltages on the electrodes; 3) measuring the ion flow value of each sensor; 4) forming a sample by the measured value and oxygen concentration, temperature and humidity calibration value, and constructing an oxygen concentration measuring database with a interpolation sample; 5) constructing a data fusion instrument and building an oxygen concentration measuring model; 6) inputting the measured value of the sensor to the measuring model, and obtaining the accurate measuring value of oxygen concentration. The sensor is high in measurement of oxygen flexibility, good in linearity and high in precision.
Description
Technical field
The present invention relates to the gas sensing field, particularly a kind of based on carbon nano-tube film and gas discharge principle three electrode oxygen sensors and measure the method for oxygen concentration.
Background technology
Along with all trades and professions gas detect in the urgent need to and the development of nanometer technology, nano-sensor has obtained considerable progress.Especially along with the discovery of carbon nano-tube in latter stage in 20th century, carbon nano-tube shows tempting application prospect in gas, temperature and humidity measure field.Carbon nano-tube film two electrode sensors in carbon nano-tube gas-sensitive, temperature sensitive, moisture sensor, high with its detection sensitivity, detect the advantages such as gas wide ranges, response be fast, become the study hotspot in gas, temperature and humidity measure field.Carbon nano-tube film two electrode gas sensors have overcome carbon nano-tube gas-sensitive sensors saturated poisoning shortcoming in tested gas of other type based on gas discharge principle, and gas concentration measurement scope and tested gaseous species scope are wider.As air-sensitive, temperature sensitive, moisture sensor that sensitive material consists of, have the irreplaceable advantage of conventional sensors with carbon nano-tube: the one, the specific surface area of carbon nano-tube is large, in the situation that the sensor overall dimensions is less, can greatly improve the area of electrode; Two are based on the tip curvature radius of carbon nanotube level, and working sensor voltage is greatly reduced, and obtain extremely strong electric field intensity near the carbon nano-tube tip, make tested gas ionization under low-voltage; The 3rd, the size of greatly having dwindled sensor, dynamic response is fast.Therefore, it has development prospect widely at aspects such as biology, chemistry, machinery, aviation, military affairs, anti-terrorisms.
Existing carbon nano-tube film two electrode sensors comprise the 14th the IVMC international vacuum microelectronics international conference disclosed carbon nano-tube film two-electrode gas sensor (shown in Figure 1) in calendar year 2001 by people such as Liu Junhua, the Zhang Yong of Xi'an Communications University, Li Xin, professors Zhu Changchun.This working sensor is afterwards because interpolar discharge rear space electric charge is difficult to diffusion, sensor is difficult to return to original state, and present multivalued relation (Fig. 2, Fig. 3) between sensor voltage breakdown, breakdown current and gas concentration, can't measure gas concentration.The people such as the Nikhil Koratkar of U.S. Rensselaer Polytech Inst (Rensselaer Polytechnic Institute) and Pulickel M professor Ajayan have developed carbon nano-tube film anode two-electrode gas sensor.Present nonlinear relationship between this sensor voltage breakdown and gas concentration, between disruptive discharge electric current and gas concentration, linear error is larger; Sparking voltage and discharge current are larger; Can't realize that the carbon nano-tube film anode is to the measurement of pure gas.Hui Guohua, the Chen Yuquan professor of Zhejiang University's biomedical engineering and instrumental science institute develops carbon nano-tube thin film cathode two-electrode gas sensor under the condition of 120 microns die openings, studied the flash-over characteristic of sensor in three kinds of pure gases, because sensitivity is lower, do not consist of the gas sensor of measuring concentration.
Therefore, at present all kinds of pure gases of sensitivity are comprised the carbon nano-tube film electrode sensor of oxygen and detect the research of the method for oxygen concentration, become the technical matters that needs to be resolved hurrily.
Summary of the invention
One of purpose of the present invention, be to provide a kind of carbon nano-tube film three electrode oxygen sensors, the output current of conventional carbon nano-tube film two electrode sensors is divided into electron stream and ion current, set up the single-valued relationship of ion current that the present invention's three electrode oxygen sensor collectors collect and oxygen concentration, temperature and humidity, overcome the many-valued nonlinear problem of carbon nano-tube film two electrode sensor gas-sensitive properties and wet sensitive characteristic.This sensor construction is simple, and cost is low, detects gas sensitivity high.
Another object of the present invention, be to provide a kind of method of measuring oxygen concentration based on carbon nano-tube film three electrode oxygen sensors, form sensor array by different poles spacing carbon nano-tube film three electrode sensors and measure respectively oxygen concentration to be measured, temperature and humidity; The hardware configuration that this concentration measuring method requires is simple, adopts data anastomosing algorithm, detects the gas accuracy high.
The objective of the invention is to realize by following technical proposals.
Carbon nano-tube film three electrode oxygen sensors, it is characterized in that: comprise three the first electrode, the second electrode and third electrodes that distribute successively from top to bottom, the electrode that described the first electrode is bonded with the substrate of the carbon nano-tube film that distributing by inside surface and is provided with bleeder vent consists of; The second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
Architectural feature of the present invention also is:
Described three interelectrode die openings are 30～250 μ m;
Described the first electrode and the second electrode pad are 0.01～17mm over against area
2, the second electrode and third electrode pole plate are 0.01～190mm over against area
2
The bleeder vent of the electrode surface of described the first electrode is 1～4, is attached with carbon nano-tube film in the bonding substrate of electrode inner surface;
Described the second electrode extraction pole center is provided with 1～4 bleeder vent;
Described third electrode collector blind hole is corresponding with the fairlead of the second electrode, and the quantity of blind hole is 1～4.
The present invention gives a kind of method of measuring oxygen concentration based on carbon nano-tube film three electrode oxygen sensors, and the method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set as carbon nano-tube film three electrode oxygen sensors of 30～250 μ m;
Carbon nano-tube film three electrode sensors of three different poles spacings (2) will setting respectively are placed in the atmosphere that contains oxygen to be measured as carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors;
(3) respectively to the first electrode on-load voltage 0V of three carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors, second electrode on-load voltage 2～200V, third electrode on-load voltage 1～180V;
(4) in oxygen concentration to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that records in concentration, temperature and humidity measurement range in step (4), with corresponding oxygen concentration, temperature and humidity calibration value, form different experimental calibration samples, then adopt the piecewise interpolation technology to carry out interpolation to the experimental calibration sample, obtain interpolated data, obtain interpolated sample, and set up the measured oxygen concentration database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt Data fusion technique, build the data fusion instrument, set up the measurement model of carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors; With input sample and the desired output sample of the data in the measured oxygen concentration database as the data fusion instrument, and train and check as training sample and the test samples of data fusion instrument respectively with data different in range ability, when assay satisfies the measurement error requirement, the concentration Measurement accuracy model of data fusion instrument output oxygen sensor;
The oxygen concentration Measurement accuracy model that during (7) with carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensor actual measurement, the ion flow valuve input step (6) of output obtains, the Measurement accuracy value of this model concentration of oxygen output.
The inventive method feature also is:
In described carbon nano-tube film three electrode oxygen sensors, the second electrode potential is higher than the first electrode potential, and the third electrode current potential is lower than the second electrode potential and higher than the first electrode potential.
Described establishment measured oxygen concentration database, that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with oxygen concentration, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
Measure the measuring method of oxygen concentration based on carbon nano-tube film three electrode oxygen sensors, form sensor array by different poles spacing carbon nano-tube film three electrode sensors and measure respectively oxygen concentration to be measured, temperature and humidity; Powered by the sensor electrical potential source; Exported by pA level current measurement system detecting sensor; Adjust electrode separation, adjust electrode voltage, in oxygen to be measured, carry out the calibration experiment of sensor in temperature, humidity environment; Based on the piecewise interpolation technology, the experimental calibration data are carried out interpolation, obtain interpolated data; All data that will comprise experimental calibration data and interpolated data form the measured oxygen concentration database, obtain monodrome gas-sensitive property, monodrome responsive to temperature characteristic, the monodrome humidity sensitive characteristic of oxygen to be measured; According to the data in the measured oxygen concentration database, the based on data integration technology is eliminated the impact of temperature, humidity, sets up the concentration Measurement accuracy model of oxygen sensor; During with actual measurement, the measured oxygen concentration model is inputted in the output of sensor array in real time, just can obtain the measured result of oxygen concentration.This measured oxygen concentration method has overcome the many-valued nonlinear problem of carbon nano-tube film two electrode sensor gas-sensitive properties and wet sensitive characteristic, and the hardware configuration of requirement is simple, and cost is low, and measurement oxygen is highly sensitive, accuracy is high, is suitable for promoting the use of.
Measured oxygen concentration method of the present invention can realize the measurement of concetration of oxygen, and accuracy is 1%.The concentration measuring method of tradition three electrode probes that use in this Novel oxygen concentration measuring method and existing ionization detector chromatograph is compared, owing to adopting carbon nano-tube film to do electrode, sensor has the measurement of concetration accuracy of high sensitivity and 1% to oxygen.And carbon nano-tube three electrode sensors can be realized working sensor voltage with the tip curvature radius of carbon nanotube level, from the safe and practical scope below 600 volts of high pressure drop to 200 volts of ionization detector.Novel oxygen concentration measuring method of the present invention integrates sensor array technology, pA level current measurement techniques, piecewise interpolation technology and the Data fusion technique of different poles spacing, the impact of temperature, humidity can be eliminated, the Measurement accuracy of oxygen concentration can be realized.
Description of drawings
Fig. 1 is carbon nano-tube thin film cathode two electrode sensor structural representations.
Fig. 2 is the voltage breakdown of prior art carbon nano-tube film two-electrode gas sensor and the many-valued non-linear gas-sensitive property of gas concentration.
Fig. 3 is the breakdown current of prior art carbon nano-tube film two-electrode gas sensor and the non-linear many-valued gas-sensitive property of gas concentration.
Fig. 4 is carbon nano-tube film three electrode oxygen sensor structural representations of the present invention.
Fig. 5 is carbon nano-tube film three electrode oxygen sensor spatial structure side views of the present invention.
Fig. 6 is the gas discharge ion current exported in oxygen of carbon nano-tube film three electrode oxygen sensors of the present invention and the single valued relation of gas concentration.
In figure: 1, the first electrode; 2, the second electrode; 3, third electrode; 4, be provided with the electrode of bleeder vent; 5, carbon nano-tube film substrate; 6, carbon nano-tube film; 7, insulation column.
Embodiment
The present invention will be further described below in conjunction with drawings and the specific embodiments.
As Fig. 4, shown in Figure 5, these carbon nano-tube film three electrode oxygen sensors, comprise by three electrodes that mutually superpose from top to bottom successively and consisting of, these three mutual overlay electrodes are respectively the first electrode 1, the second electrode 2 and third electrode 3, and the electrode 4 that described the first electrode 1 is bonded with the substrate 5 of the carbon nano-tube film 6 that distributing by inside surface and is provided with bleeder vent consists of; The second electrode 2 is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode 3 is made of the collector that the battery lead plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column 7 respectively.
In carbon nano-tube film three electrode oxygen sensor embodiment shown in Figure 4, the bleeder vent of the electrode surface of the first electrode 1 has 2, and bleeder vent is circular; Inner surface at this first electrode 1 is bonded with carbon nano-tube film substrate 5, is distributed with carbon nano-tube film 6 on it, and this carbon nano-tube mouth of pipe is downward.The second electrode 2 centers are provided with 1 fairlead and fairlead for circular.Third electrode 3 collector blind holes are corresponding with the fairlead of the second electrode, provided in Fig. 4, Fig. 5 a blind hole to be set and blind hole is the embodiment of cylindrical structure.Insulation column 7 is separately positioned between carbon nano-tube film substrate 5 and the second electrode 2, between the second electrode 2 and third electrode 3, namely insulation column 7 is distributed in the second electrode 2 over against the surperficial both sides at the carbon nano-tube film substrate two ends of the first electrode 1 and the both sides of the inner surface of third electrode 3.
The present invention is provided with electrode 4 plate faces and the carbon nano-tube film substrate 5 of bleeder vent and all adopts silicon sheet material to make; Described carbon nano-tube film 6 can adopt FePC as catalyzer, and adopts carbon source, and carbon nano-tube film 6 is made in growth in substrate 5, and perhaps the serigraphy carbon nano-tube film 6.The second electrode 2 and third electrode 3 all adopt silicon wafer to manufacture.The two sides that are provided with the electrode 4 of bleeder vent and third electrode 3 medial surfaces, the second electrode 2 are equipped with metal film.
On electrode in the present invention's the first electrode 1,2 bleeder vents are arranged, be convenient to gas to be measured and enter electrode gap; Have conductive capability at the bottom of the silicon wafer-based of carbon nano-tube film, and strong bond is at the first electrode inner surface; Through the fairlead of the second electrode 2, third electrode 3 collectors can be collected the positive ion stream that gas ionization produces.Between the first electrode 1 and the second electrode 2, mutually isolate by insulation column 7 between the second electrode 2 and third electrode 3; Tested gas enters in the gap of adjacent two electrodes of sensor by the gap between the sensor peripheral electrode.
The present invention takes carbon nano-tube film three electrode oxygen sensors of said structure when measuring oxygen concentration, and the second electrode potential is higher than the first electrode potential, and the third electrode current potential is lower than the second electrode potential and higher than the first electrode potential.The second electrode and the first electrode form the electron stream loop, and third electrode and the first electrode form the ion current loop, and realization separates electron stream with ion current.Between the ion current of carbon nano-tube film three electrode oxygen sensor outputs and oxygen concentration, gas temperature, humidity, apply at the second electrode on the basis of certain voltage, present single valued relation (Fig. 6).By piecewise interpolation and data fusion, realized the accuracy of measurement of oxygen concentration 1%.Carbon nano-tube film three electrode sensor array technology, pA level current measurement techniques, piecewise interpolation technology and the Data fusion technique of different poles spacing are the features of measured oxygen concentration method of the present invention.
Below by an instantiation, the method that carbon nano-tube film three electrode oxygen sensors of the present invention are measured oxygen concentration is described further.
Adopt fixing carbon nano-tube film three electrode oxygen sensors of die opening, experiment has obtained the monodrome gas-sensitive property (shown in Figure 6) of oxygen, measured oxygen concentration model that the ion current data input data fusion of sensor output is set up has obtained accuracy less than 1% measured oxygen concentration value.
Carbon nano-tube film three electrode oxygen sensors shown in Figure 6 are measured in oxygen concentration embodiment, and the experimental situation condition is 24.5 ℃ of temperature, relative humidity 24.3%RH, atmospheric pressure 93.4KPa.Oxygen sensor the first electrode 1 and the second electrode 2 die openings are fixed as 200 μ m, the second electrode 2 is fixed as 100 μ m with third electrode 3 die openings; The die opening of the carbon nano-tube film three electrode sensor adjacent electrodes that monitor temperature is used is 170 μ m; The die opening of the carbon nano-tube film three electrode sensor adjacent electrodes that monitoring humidity is used is respectively 160 μ m, 100 μ m.The first electrode 1 of above-mentioned three carbon nano-tube film three electrode oxygen sensors and the second electrode 2 pole plates are 17mm over against area
2, the second electrode 2 is 190mm with third electrode 3 pole plates over against area
2Oxygen sensor the first electrode 1 cathode voltage is 0V, the second electrode 2 extraction pole on-load voltage 90V, third electrode 3 collector on-load voltage 10V; Temperature sensor first, second, third electrode voltage is respectively 0V, 70V, 10V; Humidity sensor first, second, third electrode voltage is respectively 0V, 90V, 10V.Along with the increase of oxygen concentration, the ion current that the oxygen sensor collector is collected reduces, and presents monodrome decline relation between ion current and oxygen concentration; Temperature-humidity sensor sensitivity characteristic and oxygen sensor are similar.In 0～999950ppm oxygen concentration scope, 10 groups of experimental calibration data have been obtained.Three sensor ion flow valuves are as the input sample, and the oxygen concentration calibration value is as the desired output sample data.Adopt linear interpolation to 10 groups of experimental calibration sample data interpolation, carry out equidistant interpolation take 10000ppm as spacing in 0～999950ppm oxygen concentration scope, obtain 99 groups of interpolated datas, carry out intensive interpolation near concentration demand value (being the gas concentration critical value), obtain 342 groups of intensive interpolated datas, all 441 groups of interpolated datas and 10 groups of experimental calibration data form database; Select 441 groups of interpolated datas as training sample, 10 groups of experimental calibration data are as test samples, and input data fusion instrument is checked by training, obtains the measured oxygen concentration model.The linearity of measured oxygen concentration model is that the assay fiducial error maximal value of 0.31%, 10 group of test samples is 0.35%, has reached 1% measured oxygen concentration accuracy.
The present embodiment basic structure is with embodiment 1, and difference is: in three electrodes of carbon nano-tube film three electrode oxygen sensor, adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m, and the first electrode 1 and the second electrode 2 pole plates are 0.01mm over against area
2, the second electrode 2 is 0.01mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of the first electrode 1 has 1, and bleeder vent is quadrilateral, pentagon or hexagon; The second electrode 2 center fairleads are 4, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 4, and blind hole is 3～6 prisms or pyramid.
The measuring method of the present embodiment is substantially the same manner as Example 1, and difference is:
The first electrode cathode voltage of sensor is 0V, the second electrode extraction pole on-load voltage 2V, third electrode collector on-load voltage 1V.
The present embodiment basic structure is with embodiment 1, and difference is: in three electrodes of carbon nano-tube film three electrode oxygen sensor, adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m, and the first electrode 1 and the second electrode 2 pole plates are 10mm over against area
2, the second electrode 2 is 100mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of the first electrode 1 has 4, and bleeder vent is quadrilateral, pentagon or hexagon; The second electrode 2 center fairleads are 2, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 2, and blind hole is 3～6 prisms or pyramid.
The measuring method of the present embodiment is substantially the same manner as Example 1, and difference is:
The first electrode cathode voltage of sensor is 0V, the second electrode extraction pole on-load voltage 200V, third electrode collector on-load voltage 180V.
The present invention forms sensor arraies, the output of pA level current measurement system detecting sensor, piecewise interpolation and data fusion method by different poles spacing carbon nano-tube film three electrode sensors, form a kind of novel, can measure oxygen, antijamming capability is strong, accuracy is high measured oxygen concentration method.The sensor of different poles spacing in sensor array, the disturbing effect of Real-time Measuring amount temperature, humidity is directly measured oxygen concentration; PA level current measurement system can detect the pA level electric current of each sensor output of corresponding oxygen concentration, temperature and humidity simultaneously; Piecewise interpolation and data fusion method can be eliminated temperature, humidity interference, the high measured oxygen concentration value of output accuracy.
Although the present invention has made detailed description with above-mentioned preferred embodiment to the present invention, above-described embodiment is not intended to limit the present invention.In the situation that do not break away from the given technical characterictic of technical solution of the present invention and range of structures, the increase that technical characterictic is done, distortion or with the replacement of the same content in this area all should belong to protection scope of the present invention.
Claims (4)
1. carbon nano-tube film three electrode oxygen sensors, it is characterized in that: comprise three the first electrode, the second electrode and third electrodes that distribute successively from top to bottom, the electrode that described the first electrode is bonded with the substrate of the carbon nano-tube film that distributing by inside surface and is provided with bleeder vent consists of; The second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively;
In described three electrodes, the die opening of adjacent two electrodes is 30 ~ 250 μ m; Described the first electrode and the second electrode pad are 0.01 ~ 17mm over against area
2, the second electrode and third electrode pole plate are 0.01 ~ 190mm over against area
2
The bleeder vent of the electrode surface of described the first electrode is 1 ~ 2, is attached with carbon nano-tube film in the bonding substrate of electrode inner surface;
Described the second electrode extraction pole center is provided with 1 ~ 2 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of the second electrode, and the quantity of blind hole is 1 ~ 2.
2. measure the method for oxygen concentration based on carbon nano-tube film three electrode oxygen sensors claimed in claim 1, it is characterized in that, the method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set as carbon nano-tube film three electrode oxygen sensors of 30 ~ 250 μ m;
Carbon nano-tube film three electrode sensors of three different poles spacings (2) will setting respectively are placed in the atmosphere that contains oxygen to be measured as carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors;
(3) respectively to the first electrode on-load voltage 0V of three carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors, second electrode on-load voltage 2 ~ 200V, third electrode on-load voltage 1 ~ 180V;
(4) in oxygen concentration to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that records in oxygen concentration, temperature and humidity measurement range in step (4), with corresponding oxygen concentration, temperature and humidity calibration value, form different experimental calibration samples, then adopt the piecewise interpolation technology to carry out interpolation to the experimental calibration sample, obtain interpolated data, obtain interpolated sample, and set up the measured oxygen concentration database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt Data fusion technique, build the data fusion instrument, set up the measurement model of carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensors; With input sample and the desired output sample of the data in the measured oxygen concentration database as the data fusion instrument, and train and check as training sample and the test samples of data fusion instrument respectively with data different in range ability, when assay satisfies the measurement error requirement, the concentration Measurement accuracy model of data fusion instrument output oxygen sensor;
The oxygen concentration Measurement accuracy model that during (7) with carbon nano-tube film three electrode oxygen sensors, carbon nano-tube film three electrode temperature sensors and carbon nano-tube film three electrode humidity sensor actual measurement, the ion flow valuve input step (6) of output obtains, the Measurement accuracy value of this model concentration of oxygen output.
3. the method for measuring oxygen concentrations based on carbon nano-tube film three electrode oxygen sensors according to claim 2, it is characterized in that: in described carbon nano-tube film three electrode oxygen sensors, the second electrode potential is higher than the first electrode potential, and the third electrode current potential is lower than the second electrode potential and higher than the first electrode potential.
4. the method for measuring oxygen concentrations based on carbon nano-tube film three electrode oxygen sensors according to claim 2, it is characterized in that: described establishment measured oxygen concentration database, that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with oxygen concentration, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
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| CN102081070B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof |
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| CN102095786A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube thin film three-electrode hydrogen sensor and concentration measuring method by utilizing same |
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