CN102095792B - Online gas detection device based on carbon-nano-tube membrane micron-nano electrode - Google Patents
Online gas detection device based on carbon-nano-tube membrane micron-nano electrode Download PDFInfo
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- CN102095792B CN102095792B CN2011100399893A CN201110039989A CN102095792B CN 102095792 B CN102095792 B CN 102095792B CN 2011100399893 A CN2011100399893 A CN 2011100399893A CN 201110039989 A CN201110039989 A CN 201110039989A CN 102095792 B CN102095792 B CN 102095792B
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Abstract
The invention discloses an online gas detection device based on a carbon-nano-tube membrane micron-nano electrode, which comprises a carbon-nano-tube membrane micron-electrode sensor array, a detector based on a microcontroller and connected with the output ends of all sensors in the carbon-nano-tube membrane micron-electrode sensor array through shielded cables, and a computer connected with the detector, wherein the detector comprises a sensor voltage source used for supplying power for the sensor array. The carbon-nano-tube membrane micron-electrode sensor array detects concentration, temperature and humidity of the detected gas online in real time, the data is processed by the detector and then transmitted to the computer, the computer combines the data, outputs the detected values of concentration, temperature and humidity of the detected gas, and prints and outputs the detected values. The online gas detection device can accurately detect concentration, temperature and humidity of single has or mixed gas on line without separating the mixed gas. The online gas detection device has simple detection process, can detect multiple types of gases, has wide concentration range, causes less error of detection, and is applicable to detection of various gases.
Description
Technical field
The present invention relates to field of gas detection; Particularly a kind of based on the micro-nano electrode of carbon nano-tube film, to any gas all responsive, have a monodrome gas-sensitive property; And can eliminate temperature and humidity disturbing effect; Without separating mixed gas, can directly measure the gas on-line measuring device of each component concentration.
Background technology
CNT has shown tempting application prospect in field of gas detection since 1991 find.Carbon nano-tube film two electrode ionizing transducers in the carbon nano tube sensor; Based on gas discharge principle; Overcome the shortcoming of carbon nano-tube gas-sensitive sensors saturated poisoning in tested gas of other type; With advantages such as its detection sensitivity height, detected gas wide ranges, response are fast, become the research focus of field of gas detection.
Yet present stage is based on the gas measurement device of carbon nano-tube film two electrode ionization type gas sensors, is difficult to solve gas concentration in a big way quantitative measurment problem, can not be used for the accurate identification of inflammable, explosion hazard gases kind and concentration.Be in particular in:
1, the working sensor conditional request is high
Present stage carbon nano-tube film two electrode ionization type gas sensor multiplex (MUX)s do under ecotopia, in high temperature, high vacuum environment, can not be applied under the complex environment such as industry spot.
2, many-valued non-linear sensitivity characteristic
Present stage, the on-line measuring device based on carbon nano-tube film two-electrode gas sensor adopted two electrodes of anode and cathode to constitute gas sensor more, and gas-sensitive property and humidity sensitive characteristic all have many-valued nonlinear problem, can not constitute practical on-line measuring device.
3, be not suitable for measurement inflammable, explosion hazard gases
Present stage, carbon nano-tube film two electrode ionization type gas sensors were operated in states such as corona discharge, arc discharge more, and discharge process has big electric current to produce, and follows the phenomenon of emitting light and heat, and therefore is not suitable for measurement inflammable, explosion hazard gases.
Therefore, at present, become the technical matters that needs to be resolved hurrily to development based on the gas on-line measuring device of the micro-nano electrode of carbon nano-tube film.
Summary of the invention
The purpose of this invention is to provide a kind of gas-detecting device based on the micro-nano electrode of carbon nano-tube film; This device is through organically combining the micro-nano electrode sensor array of carbon nano-tube film, shielded cable, detector and computing machine, can online detection variable concentrations, the gas of temperature and humidity.Its measuring process is simple, and the measurement gas kind is many, concentration range is big, and the resolution of measurement is high, error is little, can be used for measurement inflammable, explosive, toxic gas.And realize testing conditions setting, data storage, analysis, graphically show, printout can function.
The objective of the invention is to realize through following technical proposals.
A kind of gas on-line measuring device based on the micro-nano electrode of carbon nano-tube film; It is characterized in that: the detector that comprises the micro-nano electrode sensor array of carbon nano-tube film, is connected through each sensor output terminal in the micro-nano electrode sensor array of shielded cable and carbon nano-tube film, and the computing machine that is connected with detector; The micro-nano electrode sensor array of carbon nano-tube film real-time online detects concentration, the temperature and humidity of tested gas; After the detector data processing, transfer to computing machine, merge the measured value and the printout of the tested gas concentration of output, temperature and humidity by computer data;
The micro-nano electrode sensor array of said carbon nano-tube film (1) is made up of the micro-nano electrode sensor of the carbon nano-tube film of 1 ~ 100 different poles spacing;
The micro-nano electrode sensor of said carbon nano-tube film comprises three electrodes of mutual superposition from top to bottom successively; Be respectively first electrode (11), second electrode (12) and third electrode (13); Said first electrode (11) is adhered to by inside surface to be had metallic film base (15) and the electrode (14) that is provided with bleeder vent constitutes, and carbon nano-tube film (16) is distributing on the said metallic film base (15); Second electrode (12) is made up of the extraction pole pole plate that the center is provided with fairlead; Third electrode (13) is made up of the collector that the plate face is provided with blind hole; These three electrodes are isolated through insulation column (17) respectively each other.
Further aspect of the present invention is:
Said on-line measuring device comprises microcontroller and the LCD display, keyboard and the detector system power supply that are connected with microcontroller; Wherein, each sensor output signal is connected with microcontroller through signal conditioning circuit through shielded cable in the micro-nano electrode sensor array of carbon nano-tube film; Microcontroller links to each other with the micro-nano electrode sensor array of carbon nano-tube film through the sensor electrical potential source; Microcontroller is connected with computing machine through communication interface.
Said sensor electrical potential source is that the micro-nano electrode sensor array of carbon nano-tube film provides variable, stable, accurate direct supply.
The die opening of adjacent two electrodes is 30 ~ 250 μ m in said three electrodes.
The blind hole quantity of the fairlead of the bleeder vent of said first electrode, second electrode and third electrode is respectively 1 ~ 4.
Said shielded cable maskable outer signals guarantees that to the influence of the micro-nano electrode sensor array output of carbon nano-tube film feeble signal detector can detect signal of sensor.
Pick-up unit of the present invention is through being provided with the micro-nano electrode sensor array detection of the carbon nano-tube film gas with various of different poles spacing and different electric pole tension; And detected value inputed to the weak current detector; Carry out exchanges data through computing machine and detector; Carry out Data Fusion by computing machine, can realize the online accurate detection under temperature and humidity disturbed condition of pure gas and many components mixed gas.Wherein, The micro-nano electrode sensor of carbon nano-tube film is through applying different voltages with different on three electrodes; Control effectively separates the electron stream that the non-self of gas produces with ion flow; Acquisition and gas concentration, temperature and humidity have the output of the ion flow of single valued relation, construct successfully three kinds of micro-nano electrode gas of novel carbon nano-tube film, temperature, humidity sensor.Gas-detecting device based on non-self effect can carry out online detection to the gas of variable concentrations, temperature and humidity, and realizes functions such as testing conditions setting, data storage, analysis, graphical demonstration, printout.This device can obtain gas-sensitive property, responsive to temperature characteristic and the humidity sensitive characteristic of monodrome, and the accuracy of detected gas reaches 1%, is a kind of gas-detecting device that very high practical value is arranged.
Description of drawings
Fig. 1 is the structural representation that the present invention is based on the gas on-line measuring device of the micro-nano electrode of carbon nano-tube film;
Fig. 2 is the principle schematic that the present invention is based on the gas on-line measuring device of the micro-nano electrode of carbon nano-tube film;
Fig. 3 is the micro-nano electrode sensor structural representation of carbon nano-tube film of the present invention;
Fig. 4 is the gas discharge ion flow in pure gas sulphuric dioxide, exported of gas on-line measuring device of the present invention and the single valued relation of gas concentration;
Fig. 5 is the gas discharge ion flow of gas-detecting device output of the present invention and the single valued relation of air ambient temperature;
Fig. 6 is the single valued relation of humidity in gas discharge ion flow and the nitrogen of gas-detecting device of the present invention output;
Fig. 7 is the gas discharge ion flow in sulphuric dioxide and nitrogen monoxide two component mixed gass, exported of gas-detecting device of the present invention and the single valued relation of gas concentration.
Among the figure: 1, the micro-nano electrode sensor array of carbon nano-tube film; 2, shielded cable; 3, detector; 4, computing machine; 11, first electrode; 12, second electrode; 13, third electrode; The electrode that 14, bleeder vent is arranged; 15, metallic film base; 16, carbon nano-tube film; 17, insulation column; 31, microcontroller; 32, signal conditioning circuit; 33, LCD display; 34, communication interface; 35, keyboard; 36, detector system power supply; 37, sensor electrical potential source.
Embodiment
Below in conjunction with specific embodiment and accompanying drawing gas-detecting device of the present invention is further specified.
As shown in Figure 1; Should be based on the gas on-line measuring device of the micro-nano electrode of carbon nano-tube film; The detector 3 that comprises the micro-nano electrode sensor array of carbon nano-tube film 1, is connected through each sensor output terminal in the micro-nano electrode sensor array 1 of shielded cable 2 and carbon nano-tube film, and the computing machine 4 that is connected with detector 3; Micro-nano electrode sensor array 1 real-time online of carbon nano-tube film detects concentration, the temperature and humidity of tested gas; After detector 3 data processing, transfer to computing machine 4, export the measured value and the printout of tested gas concentration, temperature and humidity by computing machine 4 data fusion.
As shown in Figure 2, detector 3 comprises microcontroller 31 and the LCD display 33, keyboard 35 and the detector system power supply 36 that are connected with microcontroller 31; Wherein, each signal of sensor in the micro-nano electrode sensor array 1 of carbon nano-tube film is connected with microcontroller 31 through signal conditioning circuit 32 through shielded cable 2; Microcontroller 31 links to each other with the micro-nano electrode sensor array 1 of carbon nano-tube film through sensor electrical potential source 37; Microcontroller 31 is connected with computing machine 4 through communication interface 34.Sensor electrical potential source 37 provides direct supply for the micro-nano electrode sensor array 1 of carbon nano-tube film.
The micro-nano electrode sensor array 1 of carbon nano-tube film of the present invention is made up of the micro-nano electrode sensor of the carbon nano-tube film of 1 ~ 100 different poles spacing.
As shown in Figure 3; The micro-nano electrode sensor of carbon nano-tube film comprises three electrodes of mutual superposition from top to bottom successively; These three mutual superposition electrodes are respectively equipped with first electrode 11, second electrode 12 and third electrode 13, and the electrode 14 that said first electrode 11 adheres to the metallic film base 15 that the carbon nano-tube film 16 that distributing is arranged by inside surface and is provided with bleeder vent constitutes; Second electrode 12 is made up of the extraction pole pole plate that the center is provided with fairlead; Third electrode 13 is made up of the collector that the plate face is provided with blind hole; These three electrodes are isolated through insulation column 17 respectively each other.
The die opening of two adjacent electrodes is 30 ~ 250 μ m in three electrodes.The blind hole quantity of the fairlead of the bleeder vent of first electrode 11, second electrode 12 and third electrode 13 is 1 ~ 4.
Gas-detecting device structure of the present invention is as shown in Figure 2, is divided into 4 major parts: the micro-nano electrode sensor array of carbon nano-tube film, shielded cable, detector, computing machine.The micro-nano electrode sensor array 1 of carbon nano-tube film is made up of the micro-nano electrode sensor of the carbon nano-tube film of 1 ~ 100 different poles spacing.The carbon nano tube sensor of different poles spacing is operated in non-self state, and the output signal is the ion flow from skin peace level to microampere order in variety classes, variable concentrations gas; Shielded cable 2 maskable outer signals guarantee that to the interference of the micro-nano electrode sensor array 1 output signal of carbon nano-tube film detector 3 can detect signal of sensor; Detector 3 comprises microcontroller 31 and peripheral LCD display 33, keyboard 35, communication interface 34 and the system power supply 36 of giving microcontroller 31 power supplies; Wherein, Microcontroller 31 is a bidirectional interface with the connectivity port of sensor electrical potential source 37; Microcontroller 31 provides variable, stable, accurate DC voltage for the micro-nano electrode sensor array 1 of carbon nano-tube film through sensor electrical potential source 37; Microcontroller 31 also can obtain the needs of monodrome sensitivity characteristic according to different sensors, the correspondent voltage value that sets that object computer transmits, the magnitude of voltage of adjustment sensor electrical potential source output; Computing machine 4 carries out exchanges data through communication interface 34 and microcontroller 31.
The principle of work of gas-detecting device of the present invention is that the micro-nano electrode sensor array 1 of carbon nano-tube film is placed gas to be measured, and gas to be measured can be pure gas or polycomponent mixed gas; Sensor electrical potential source 37 applies certain DC voltage for the micro-nano electrode sensor array 1 of carbon nano-tube film; Because it is most advanced and sophisticated that the carbon nano-tube film that the micro-nano electrode sensor of carbon nano-tube film uses has nano level radius-of-curvature; Therefore first electrode 11 and 12 at second electrode can produce than highfield; Make and generate charged ion at this regional gas molecule or atomic ionization; Be added in the voltage on second electrode 12 and the third electrode 13 through control, can the electronics and the ion isolation of first electrode 11 and 12 generations of second electrode be opened.The faint ion flow of pA level that ion forms is drawn by third electrode 13; Ion flow passes through signal conditioning circuit again through shielded cable, is read in by microcontroller 31, and computing machine 4 carries out exchanges data through communication interface 34 and detector 3.Microcontroller 31 is given computing machine 4 with the data transmission of reading in, and carries out Data Fusion by computing machine 4, thereby shows, exports tested gas concentration, gas temperature and moisture measurement value.
Through the embodiment that detects gas with various concentration, temperature and humidity the present invention is further specified below.
Embodiment 1:
The micro-nano electrode sensor array 1 of the carbon nano-tube film of gas on-line measuring device is made up of the carbon nano tube sensor that die opening is fixed and numerical value is different of adjacent two electrodes in three electrodes; The bleeder vent of first electrode 11 is that 2, the fairlead of second electrode 12 are 1, and the blind hole of third electrode 13 is 1.The micro-nano electrode sensor structure of carbon nano-tube film is as shown in Figure 3.
Adopt the fixing micro-nano electrode sensor of carbon nano-tube film of above-mentioned die opening; Experiment has obtained the monodrome gas-sensitive property (shown in Figure 4) of pure gas sulphuric dioxide; Pure gas sulfur dioxide concentration measurement model that the ion flow data input data fusion of sensor output is set up has obtained accuracy less than 1% pure gas sulfur dioxide concentration measured value.
Gas on-line measuring device shown in Figure 4 detects among the embodiment of concentration of SO 2 gas in the nitrogen background, and the experimental situation condition is 20.5 ℃ of temperature, relative humidity 25.8%RH, atmospheric pressure 93.4KPa.Micro-nano electrode sensor first electrode 11 of carbon nano-tube film and second electrode, 12 die openings of measuring concentration of SO 2 gas are that 200 μ m, second electrode 12 are 220 μ m with third electrode 13 die openings; The die opening of the micro-nano electrode sensor adjacent electrode of the carbon nano-tube film that monitor temperature is used is 170 μ m; The die opening of the micro-nano electrode sensor adjacent electrode of carbon nano-tube film that monitoring humidity is used is respectively 200 μ m, 100 μ m.First electrode 11 of above-mentioned three micro-nano electrode sensors of carbon nano-tube film and second electrode, 12 pole plates are 170mm over against area
2, second electrode 12 is 190mm with third electrode 13 pole plates over against area
2The pure gas SO 2 sensor first electrode cathode voltage is 0V, the second electrode extraction pole on-load voltage 100V, third electrode collector on-load voltage 10V; Temperature sensor first, second, third electrode voltage is respectively 0V, 70V, 10V; Humidity sensor first, second, third electrode voltage is respectively 0V, 90V, 10V.Along with the increase of sulfur dioxide concentration, the ion flow that pure gas SO 2 sensor collector is collected reduces, and presents monodrome decline relation between ion flow and the sulfur dioxide concentration; Temperature, humidity sensor sensing characteristic and pure gas SO 2 sensor are similar.In 0 ~ 739ppm concentration of SO 2 gas scope, 10 groups of experimental calibration data have been obtained.Three sensor ion flow valuves are as the input sample, and the concentration of SO 2 gas calibration value is as the desired output sample data.Adopt linear interpolation to 10 groups of experimental calibration sample data interpolation; In 0 ~ 739ppm concentration of SO 2 gas scope, be that spacing is carried out equidistant interpolation with 20ppm; And near concentration demand value (being the concentration of SO 2 gas critical value), carry out intensive interpolation; Obtain 67 groups of interpolated datas altogether, and form database with 10 groups of experimental calibration data; Select for use 67 groups of interpolated datas and 2 groups of experimental calibration data totally 69 groups of data as training sample; Remaining 8 groups of experimental calibration data that are different from training sample are as test samples; Input data fusion appearance through the training check, obtains pure gas sulfur dioxide concentration measurement model.The linearity of sulfur dioxide concentration measurement model is that the assay fiducial error maximal value of 0.31%, 8 group of test samples is 0.32%, has reached 1% measurement of concetration accuracy.
Embodiment 2:
The micro-nano electrode sensor array 1 of the carbon nano-tube film of gas on-line measuring device is made up of the carbon nano tube sensor that the die opening of adjacent two electrodes in three electrodes is fixed as 170 μ m; The bleeder vent of first electrode 11 is that 2, the fairlead of second electrode 12 are 1, and the blind hole of third electrode 13 is 1.
Adopt the fixing carbon nano tube sensor of above-mentioned die opening; Experiment has obtained airborne monodrome temperature characterisitic (shown in Figure 5); Temperature survey model that the ion flow input data fusion of sensor output is set up has obtained accuracy less than 1% airborne measured temperature.
Gas on-line measuring device shown in Figure 5 detects among the embodiment of air ambient temperature, and the experimental situation condition is relative humidity 25.7%RH, atmospheric pressure 94.1KPa.Micro-nano electrode sensor first electrode 11 of carbon nano-tube film and second electrode, 12 die openings, second electrode 12 are 170 μ m with third electrode 13 die openings, and first electrode 11 of sensor and second electrode, 12 pole plates are 17mm over against area
2, second electrode 12 is 190mm with third electrode 13 pole plates over against area
2The sensor first electrode cathode voltage is 0V, the second electrode extraction pole on-load voltage 70V, third electrode collector on-load voltage 10V.Along with the rising of temperature, the ion flow that collector is collected increases, and presents monodrome rising relation between ion flow and the temperature.In 20 ~ 110 ℃ of temperature ranges, 19 groups of experimental calibration data have been obtained.Gas temperature sensor ion flow valuve is as the input sample, and the gas temperature calibration value is as the desired output sample data.Adopt piecewise linear interpolation to 19 groups of experimental calibration sample data interpolation; In 20 ~ 110 ℃ of temperature ranges, be that spacing is carried out equidistant interpolation with 1 ℃; And near temperature demand value (being the gas temperature critical value), carry out intensive interpolation; Obtain 119 groups of interpolated datas altogether, and form database with 19 groups of experimental calibration data; Select for use 119 groups of interpolated datas and 1 group of experimental calibration data totally 120 groups of data as training sample; Remaining 18 groups of experimental calibration data that are different from training sample are as test samples; Input data fusion appearance through the training check, obtains temperature survey model in the air.The linearity of this temperature survey model is that the assay fiducial error maximal value of 0.33%, 18 group of test samples is 0.36%, has reached 1% temperature survey accuracy.
Embodiment 3:
The micro-nano electrode sensor array 1 of the carbon nano-tube film of gas on-line measuring device is made up of the carbon nano tube sensor that die opening is fixed and numerical value is different of adjacent two electrodes in three electrodes; The bleeder vent of first electrode 11 is that 2, the fairlead of second electrode 12 are 1, and the blind hole of third electrode 13 is 1.
Adopt the fixing carbon nano tube sensor of die opening; Experiment has obtained the monodrome humidity characteristic (shown in Figure 6) in the nitrogen; The moisture measurement model that the ion flow input data fusion of sensor output is set up has obtained accuracy less than the moisture measurement value in 1% the nitrogen.
Gas on-line measuring device shown in Figure 6 detects among the embodiment of nitrogen environment humidity, and the experimental situation condition is 20.8 ~ 21.8 ℃ of temperature, atmospheric pressure 93.6 ~ 100KPa.Sensor first electrode 11 and second electrode, 12 die openings are that 200 μ m, second electrode 12 are 100 μ m with third electrode 13 die openings; First electrode 11 and second electrode, 12 pole plates are 170mm over against area
2, second electrode 12 is 190mm with third electrode 13 pole plates over against area
2The first electrode cathode voltage is 0V, the second electrode extraction pole on-load voltage 90V, third electrode collector on-load voltage 10V.Along with the rising of humidity, the ion flow that collector is collected increases, and presents monodrome rising relation between ion flow and the humidity.In 25.8 ~ 100%RH humidity range, 25 groups of experimental calibration data have been obtained.Humidity sensor ion flow valuve is as the input sample, and the humidity demarcating value is as the desired output sample data.Adopting linear interpolation, is that step-length is carried out equidistant interpolation with 0.5%RH 25.8 ~ 100%RH humidity range in, obtains 150 groups of interpolated datas, and with 25 groups of experimental calibration data composition databases.Select for use 45 groups of interpolated datas as training sample, 25 groups of experimental calibration data are as test samples, and input data fusion appearance through the training check, obtains moisture measurement model in the nitrogen.The linearity of this moisture measurement model is that the assay fiducial error maximal value of 0.15%, 25 group of test samples is 0.2%, has reached 1% moisture measurement accuracy.
Embodiment 4:
4 micro-nano electrode sensors of carbon nano-tube film that the micro-nano electrode sensor array 1 of the carbon nano-tube film of gas on-line measuring device is fixed by the die opening of adjacent two electrodes of three electrodes and numerical value is different are formed; The bleeder vent of first electrode 11 is that 2, the fairlead of second electrode 12 are 1, and the blind hole of third electrode 13 is 1.
Adopt the micro-nano electrode temperature of carbon nano-tube film, the humidity sensor of two micro-nano electrode gas concentration sensors of different poles spacing carbon nano-tube film, two different poles spacings to form sensor array, experiment has obtained sulphuric dioxide SO
2Monodrome gas-sensitive property (shown in Figure 7) with nitrogen monoxide NO two component mixed gass; Sulphuric dioxide and nitrogen monoxide two component mixed gas concentration measurement models that the ion flow data input data fusion of sensor output is set up have obtained accuracy less than 1% sulphuric dioxide and nitrogen monoxide two component mixed gas concentration measured values.
Gas on-line measuring device shown in Figure 7 detects among the embodiment of sulphuric dioxide and nitrogen monoxide two component mixed gas concentrations, and the experimental situation condition is 20.5 ℃ of temperature, relative humidity 25.2%RH, atmospheric pressure 93.7KPa.Top-surface camber is the monodrome characteristic of nitric oxide sensor among Fig. 7, and lower surface camber is the monodrome characteristic of SO 2 sensor.First electrode 11 of nitric oxide sensor and second electrode 12, second electrode 12 are 100 μ m with third electrode 13 die openings, and SO 2 sensor first electrode 11 is 150 μ m with second electrode 12, second electrode 12 and third electrode 13 die openings; The die opening of the micro-nano electrode sensor adjacent electrode of the carbon nano-tube film that monitor temperature is used is 170 μ m; The die opening of the micro-nano electrode sensor adjacent electrode of carbon nano-tube film that monitoring humidity is used is respectively 200 μ m, 100 μ m.First electrode 11 of the micro-nano electrode sensor of above-mentioned carbon nano-tube film and second electrode, 12 pole plates are 170mm over against area
2, second electrode 12 is 190mm with third electrode 13 pole plates over against area
2Two first electrode cathode voltages of measuring two component mixed gas concentration sensors are 0V, the equal on-load voltage 100V of the second electrode extraction pole, the equal on-load voltage 10V of third electrode collector; Temperature sensor first, second, third electrode voltage is respectively 0V, 70V, 10V; Humidity sensor first, second, third electrode voltage is respectively 0V, 90V, 10V.Along with SO
2With the rising of NO gas concentration, the ion flow that the collector of two measurement two component gases concentration sensors is collected all reduces, and ion flow presents the relation that monodrome descends with two component gases concentration increases; Temperature, humidity sensor sensing characteristic and gas sensor are similar.At SO
2In gas 0 ~ 737.884ppm concentration range and in the concentration range of NO gas 0 ~ 1127.976ppm, 36 groups of experimental calibration data have been obtained.Four sensor ion flow valuves are as the input sample, and two component gases concentration calibration values are as the desired output sample data.Adopt two-dimentional curved section linear interpolation, at SO
2In gas 0 ~ 737.884ppm concentration range and in the concentration range of NO gas 0 ~ 1127.976ppm, 36 groups of experimental calibration sample datas are carried out interpolation, obtain 1352 groups of interpolated datas altogether, and form database with 36 groups of experimental calibration data; Select for use 1332 groups of interpolated datas as training sample; Remain 20 groups of interpolated datas that are different from training sample and 30 groups of experimental calibration data totally 50 groups of concentration demand values (being the gas concentration critical value) data as test samples; Input data fusion appearance through the training check, obtains SO
2, NO two component mixed gas concentration measurement models.This model SO
2Component measurement of concetration result's the linearity is that the assay fiducial error maximal value of 0.49%, 50 group of test samples is 0.49%; NO component measurement of concetration result's the linearity is that the assay fiducial error maximal value of 0.23%, 50 group of test samples is 0.24%, has reached 1% measurement of concetration accuracy.
Embodiment 5:
10 micro-nano electrode sensors of carbon nano-tube film that the micro-nano electrode sensor array 1 of the carbon nano-tube film of gas on-line measuring device is fixed by the die opening of adjacent two electrodes of three electrodes and numerical value is different are formed; The bleeder vent of first electrode 11 is that 1, the fairlead of second electrode 12 are 4, and the blind hole of third electrode 13 is 4.The consecutive roots spacing range of 10 each sensors of sensor is 30 ~ 250 μ m, and the scope of each electrode application voltage is 0 ~ 200V.This embodiment can eliminate the disturbing effect of temperature and humidity, can carry out NO, NO
2, SO
2, O
2, H
2, C
2H
2, C
2H
4Reach the accurate measurement of eight kinds of pure gas concentration such as CO, and the accurate measurement of eight kinds of component mixed gas concentrations.
Embodiment 6:
100 micro-nano electrode sensors of carbon nano-tube film that the micro-nano electrode sensor array 1 of the carbon nano-tube film of gas on-line measuring device is fixed by the die opening of adjacent two electrodes of three electrodes and numerical value is different are formed; The bleeder vent of first electrode 11 is that 4, the fairlead of second electrode 12 are 2, and the blind hole of third electrode 13 is 2.The consecutive roots spacing range of 100 each sensors of sensor is 30 ~ 250 μ m, and the scope of each electrode application voltage is 0 ~ 200V.This embodiment can eliminate the disturbing effect of temperature and humidity, can carry out NO, NO
2, SO
2, O
2, H
2, C
2H
2, C
2H
4, nearly hundred kinds of pure gas concentration such as CO accurate measurement, and the accurate measurement of nearly hundred kinds of component mixed gas concentrations.
Though the present invention has made detailed description with above-mentioned preferred embodiment to the present invention, the foregoing description also is not used in qualification the present invention.Under the situation that does not break away from given technical characterictic of technical scheme of the present invention and range of structures, the increase that technical characterictic is done, distortion or with the replacement of the same content in this area all should belong to protection scope of the present invention.
Claims (5)
1. gas on-line measuring device based on the micro-nano electrode of carbon nano-tube film; It is characterized in that: the detector (3) that comprises the micro-nano electrode sensor array of carbon nano-tube film (1), is connected through each sensor output terminal in the micro-nano electrode sensor array of shielded cable (2) and carbon nano-tube film (1), and the computing machine (4) that is connected with detector (3); The micro-nano electrode sensor array of carbon nano-tube film (1) real-time online detects concentration, the temperature and humidity of tested gas; After detector (3) data processing, transfer to computing machine (4), merge the measured value and the printout of the tested gas concentration of output, temperature and humidity by computer data;
The micro-nano electrode sensor array of said carbon nano-tube film (1) is made up of the micro-nano electrode sensor of the carbon nano-tube film of 1 ~ 100 different poles spacing;
The micro-nano electrode sensor of said carbon nano-tube film comprises three electrodes of mutual superposition from top to bottom successively; Be respectively first electrode (11), second electrode (12) and third electrode (13); Said first electrode (11) is adhered to by inside surface to be had metallic film base (15) and the electrode (14) that is provided with bleeder vent constitutes, and carbon nano-tube film (16) is distributing on the said metallic film base (15); Second electrode (12) is made up of the extraction pole pole plate that the center is provided with fairlead; Third electrode (13) is made up of the collector that the plate face is provided with blind hole; These three electrodes are isolated through insulation column (17) respectively each other.
2. gas on-line measuring device according to claim 1 is characterized in that: said detector (3) comprises microcontroller (31) and the LCD display (33), keyboard (35) and the detector system power supply (36) that are connected with microcontroller (31); Wherein, the micro-nano electrode sensor array of carbon nano-tube film (1) output signal is connected with microcontroller (31) through signal conditioning circuit (32) through shielded cable (2); Microcontroller (31) links to each other with the micro-nano electrode sensor array of carbon nano-tube film (1) through sensor electrical potential source (37); Microcontroller (31) is connected with computing machine (4) through communication interface (34).
3. gas on-line measuring device according to claim 2 is characterized in that: said sensor electrical potential source (37) provides direct supply for the micro-nano electrode sensor array of carbon nano-tube film (1).
4. gas on-line measuring device according to claim 1 is characterized in that: the die opening of adjacent two electrodes is 30 ~ 250 μ m in said three electrodes.
5. gas on-line measuring device according to claim 1 is characterized in that: the fairlead of the bleeder vent of said first electrode (11), second electrode (12) and the blind hole quantity of third electrode (13) are respectively 1 ~ 4.
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| CN102095782B (en) * | 2011-02-16 | 2013-02-06 | 西安交通大学 | Gas on-line detection device based on micro-nano carbon nano tube film three-electrode |
| CN103941185B (en) * | 2014-05-06 | 2017-01-18 | 西安交通大学 | Copper metal vapor concentration detection system based on micrometer scale sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2700876Y (en) * | 2003-12-23 | 2005-05-18 | 西安交通大学 | Carbon nano tube thin film gas transducer |
| KR20090099361A (en) * | 2008-03-17 | 2009-09-22 | 삼성전자주식회사 | Gas sensor included carbon nano-tube wire and method of manufacturing the same |
| CN101281154B (en) * | 2008-05-21 | 2011-03-30 | 中国科学院合肥物质科学研究院 | Capacitance type gas sensor based on carbon nano-tube array and preparing method thereof |
| CN201653962U (en) * | 2009-12-23 | 2010-11-24 | 中国科学院沈阳自动化研究所 | Carbon nano tube-electrode structure and temperature sensor chip based on the same |
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