CN2700876Y - Carbon nano tube thin film gas transducer - Google Patents
Carbon nano tube thin film gas transducer Download PDFInfo
- Publication number
- CN2700876Y CN2700876Y CN 200320109975 CN200320109975U CN2700876Y CN 2700876 Y CN2700876 Y CN 2700876Y CN 200320109975 CN200320109975 CN 200320109975 CN 200320109975 U CN200320109975 U CN 200320109975U CN 2700876 Y CN2700876 Y CN 2700876Y
- Authority
- CN
- China
- Prior art keywords
- silicon dioxide
- utility
- model
- carbon nano
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The utility model discloses a carbon nanometer tube thin film gas sensor which comprises a substrate made of glass, semiconductor material or metal and an exterior leading wire. The utility model is characterized in that the substrate is provided with a silicon dioxide insulation layer in which interdigital electrodes are distributed. The interdigital electrodes are separated by the silicon dioxide insulation layer and covered by the silicon dioxide insulation layer. On the topside of the utility model is provided with a composite film layer which is formed by mixing a multi-walled carbon nanometer tube with silicon dioxide. The composite film layer which is formed by mixing a multi-walled carbon nanometer tube with silicon dioxide (SiO2 and MWNTS) is transplanted onto the interdigital capacitor electrodes to serve as a gas sensing element of the interdigital capacitor type carbon nanometer tube thin film gas sensor. The utility model has the advantages of simple structure, reliable work, long service life, simple preparation process, good sensitivity, etc. The utility model can be widely used for testing of the gases such as methane, carbon monoxide, hydrogen gas, acetylene, etc.
Description
One, technical field
The utility model relates to the absorption type gas sensor in thin film sensor field, is specifically related to a kind of employing and transplants the gas sensor of multi-walled carbon nano-tubes-silicon dioxide (SiO2 and MWNTS) laminated film as gas sensitive element on the interdigitation capacitance electrode.This sensor comes the concentration of detected gas by the chemisorption situation of tested gas on the gas sensitive element surface.
Two, background technology
A class important in the sensor is a chemical sensor, and gas sensor is the important component part of chemical sensor.The particle size of forming the gas sensing modulator material is more little, and specific surface area is high more, and sensor takes place to interact big more with contacting of ambient gas, and susceptibility is high more.The hollow structure of carbon nano-tube and outer wall make it have very big surface area for gas absorption.And in the different atmosphere at room temperature, their electrology characteristic can change again, therefore is being with a wide range of applications aspect the making senser element.The applied research of nano-sensor is just at the early-stage, but it has demonstrated the advantage that other sensors can't be reached: the susceptibility height, and body is little, and energy consumption is low, and function is many etc.According to the data-searching that the applicant carried out, do not find the document relevant with the utility model.
Three, summary of the invention
The purpose of this utility model provides a kind of simple in structure, reliable operation, long service life, the simple gas sensor of preparation technology, can be widely used in methane, carbon monoxide, and hydrogen, the test of gases such as acetylene has satisfied susceptibility.
To achieve these goals, the technical solution adopted in the utility model is: a kind of carbon nano-tube film gas sensor comprises the substrate and the outside lead of glass or semiconductor material or metal; It is characterized in that, in substrate, be printed with the interdigitation electrode, and on the interdigitation electrode, be coated with silicon dioxide insulating layer, the THIN COMPOSITE rete that on silicon dioxide insulating layer, has one deck multi-walled carbon nano-tubes and silicon dioxide to mix.
Some other characteristics of the present utility model are that described silicon dioxide insulating layer is a silica sol-gel.
Silica sol-gel adopts regular acetoacetic ester, absolute ethyl alcohol, concentrated hydrochloric acid, deionized water to mix in proportion.
The THIN COMPOSITE rete that multi-walled carbon nano-tubes and silicon dioxide mix adopts the dispersion in isopropyl alcohol, through stirring, after ultrasonic, the heating, fully mixing to obtain SiO2 and MWNTS composite mortar with the SiO2 sol-gel;
The interdigitation electrode adopts the silk-screen printing technique preparation, and electrode material is selected golden or silver-colored or other conductive material slurrying of aluminium to print to form; Also can adopt rotation to get rid of and be coated with the method preparation.
Because adopting, the utility model on the interdigitation capacitance electrode, transplants multi-walled carbon nano-tubes-silicon dioxide (SiO2 and MWNTS) laminated film, as the absorption type interdigital capacitor type carbon nano-tube film gas sensor of gas sensitive element, have simple in structure, reliable operation, long service life, an advantage such as preparation technology is simple, susceptibility is good.Can be widely used in methane, carbon monoxide, hydrogen, the test of gases such as acetylene.
Description of drawings
Fig. 1 is the utility model cross section structure figure;
Fig. 2 is the carbon nano-tube Electronic Speculum figure of transmission electron microscope observation, and wherein (a) amplifies 10000 times figure; (b) be to amplify 50000 times figure;
Fig. 3 is the utility model interdigital capacitor electrode domain;
Fig. 4, Fig. 5 are sample 1# and 2# test result curve map in hydrogen;
Fig. 6 is sample 2# test result curve in C2H2.
Embodiment
The embodiment that finishes by technique scheme below in conjunction with accompanying drawing and designer is described in further detail the utility model.Following embodiment is more excellent example just, and utility model is not limited to this embodiment.
Referring to Fig. 1, a kind of carbon nano-tube film gas sensor comprises the substrate 1 and the outside lead of glass or semiconductor material or metal; In substrate 1, be printed with interdigitation electrode 4, and on interdigitation electrode 4, be coated with silicon dioxide insulating layer 2, the THIN COMPOSITE rete 3 that on silicon dioxide insulating layer 2, has one deck multi-walled carbon nano-tubes and silicon dioxide to mix.
Silicon dioxide insulating layer 2 is silica sol-gels, is regular acetoacetic ester, absolute ethyl alcohol, concentrated hydrochloric acid, deionized water to be mixed with by a certain percentage form; MWNT and SiO
2Carbon nano-tube in the mixolimnion 3 is to be prepared from by the low pressure chemical vapor deposition method, and impurity content is low, and carbon nano-tube is twined as shown in Figure 2 mutually.Dispersion in isopropyl alcohol, through stirring, after ultrasonic, the heating, with SiO
2Sol-gel fully mixes and obtains SiO
2With the MWNTS composite mortar; The domain of interdigitation electrode 4 as shown in Figure 3, interdigitation electrode 4 is separated by silicon dioxide insulating layer 2, and is covered by silicon dioxide insulating layer 2 above making interdigitation electrode 4.Figure 1 shows that the sensor cross-section structure, with silk-screen printing technique the silver slurry is printed as the interdigitation electrode in substrate, thickness of electrode is 20~30um, and electrode separation is 500um, and live width is 500um.
Adopt SiO
2With the MWNTS laminated film, the hollow structure of carbon nano-tube and outer wall make it have very big surface area for gas absorption, and sensor takes place to interact big more with contacting of ambient gas, and susceptibility is high more.
The preparation method of described carbon nano-tube also can adopt other form, such as pyrolysismethod, arc discharge and PEVCD method etc.
Described SiO
2With the moulding of MWNTS laminated film, both can adopt silk screen print method, also can adopt rotation to get rid of Tu Fa etc.
Described interdigitation capacitance electrode material can be selected other materials such as aluminium, gold, silver.
The carbon nano-tube film gas sensor of making is placed in the closed type gas test device measures.
1. closed type gas test device
It is 25 * 25 * 30cm that closed type gas test device is one
3The sealing gas tank, band valve control device draft tube and escape pipe are installed, gas tank one side is equipped with the round rubber gas injection window that diameter is 3cm, can inject gas to be measured by this window in gas tank with syringe, gas concentration to be measured is:
Wherein, c is a gas concentration to be measured, V
iBe the gas volume to be measured that injects, V is the gas tank volume.Place one bottle of saturated NaCl solution in the gas tank, guarantee that wherein relative humidity is 75%, to get rid of the interference of humidity test.
2. the present invention prepares according to following common process:
(1), interdigital electrode: capacitance type transducers is widely used in gas sensor, has designed plane interdigitation electrode capacitance sensor, and this geometric configuration can provide sensor and gas to make the time spent maximum surface area.The electrode domain Figure 1 shows that the sensor cross-section structure as shown in Figure 3, with silk-screen printing technique the silver slurry is printed as the interdigitation electrode on substrate of glass, and thickness of electrode is 20~30um, and electrode separation is 500um, and live width is 500um.
(2), SiO
2Insulation course: regular acetoacetic ester, absolute ethyl alcohol, concentrated hydrochloric acid, deionized water are mixed by a certain percentage, prepare SiO
2Sol-gel.Deposit one deck SiO on the interdigitation electrode of plane
2, to guarantee that electrode is not by the carbon nano-tube short circuit.
(3), carbon nano-tube disperses: the carbon nano-tube impurity content that the CVD method is prepared is low, but the carbon pipe twines mutually, could prepare the carbon nano-tube slurry after needing fully to disperse.Dispersion in isopropyl alcohol, through stirring, after ultrasonic, the heating, with SiO
2Sol-gel fully mixes and obtains SiO
2With the MWNTS composite mortar, and after mixing, organism obtains the MWNTS organic ink.
(4), sensor component is made: with getting rid of the method that is coated with respectively with SiO
2Get rid of to be coated in MWNTS composite mortar and pure MWNTS organic ink and made two kinds of capacitance type transducers on the interdigitation electrode of plane.The device that gets rid of after being coated with is dried at room temperature, send in high temperature (580 ℃) sintering furnace sintering under nitrogen protection, eliminate the organism in the carbon pipe, obtain purer SiO
2With MWNTS composite membrane and MWNTS film, reduce to room temperature after, with lead ag paste electrode is drawn.
2. experiment test:
The sensor of producing is placed in the test macro to be tested, and found that SiO
2-MWNTS composite membrane sensor demonstrates the trend that changes with gas concentration.
According to SiO
2The size of-MWNTS composite membrane area is divided into 1# and 2# sample, and the area of 2# sample approximately is 2 times of 1# sample area.Fig. 4~6th, measurement result, tested gas is respectively hydrogen and acetylene, and testing tool is the RLC tester, and Fig. 4, Fig. 5 are respectively 1# and the test result of 2# sample in hydrogen atmosphere, and the longitudinal axis is the change in impedance value scope; Transverse axis is the density of hydrogen changing value, and unit is ppm, 1ppm=1, and 1/000th, 000, be the volumetric concentration ratio.
As can be seen from Figure 4, when the hydrogen volume concentration ratio when 0 rises to 800ppm, along with the increase of hydrogen volume concentration ratio, impedance becomes greatly gradually, from 4.75 kilo-ohms to 5.22 kilo-ohms.The different manifestations of Fig. 5 and Fig. 4 for its change in impedance value remain on one more among a small circle in, from 0 to 800ppm, resistance value rises to 1.18 kilo-ohms from 1.06 kilo-ohms.
Fig. 6 is 1# test result in acetylene atmosphere, and transverse axis is an acetylene gas concentration change value, and scope is 0~3000ppm, and the impedance variation scope is 3.83 kilo-ohms to 4.03 kilo-ohms.
As can be seen, this thin film gas sensor all has strong sensitivity to hydrogen and acetylene, and the output response is all arranged in the larger context.
Claims (2)
1. carbon nano-tube film gas sensor comprises the substrate (1) and the outside lead of glass or semiconductor material or metal; It is characterized in that, in substrate (1), be printed with interdigitation electrode (4), and on interdigitation electrode (4), be coated with silicon dioxide insulating layer (2), the THIN COMPOSITE rete (3) that on silicon dioxide insulating layer (2), has one deck multi-walled carbon nano-tubes and silicon dioxide to mix.
2. carbon nano-tube film gas sensor as claimed in claim 1 is characterized in that, described silicon dioxide insulating layer (2) is silicon dioxide gel-gel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200320109975 CN2700876Y (en) | 2003-12-23 | 2003-12-23 | Carbon nano tube thin film gas transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200320109975 CN2700876Y (en) | 2003-12-23 | 2003-12-23 | Carbon nano tube thin film gas transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
CN2700876Y true CN2700876Y (en) | 2005-05-18 |
Family
ID=34762057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200320109975 Expired - Fee Related CN2700876Y (en) | 2003-12-23 | 2003-12-23 | Carbon nano tube thin film gas transducer |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN2700876Y (en) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100595576C (en) * | 2007-08-16 | 2010-03-24 | 中国科学院合肥物质科学研究院 | Surface-sensitive condenser type gas transducer and manufacturing method thereof |
CN102072784A (en) * | 2011-02-16 | 2011-05-25 | 西安交通大学 | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof |
CN102081069A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Carbon nanotube (CNT) film based three-electrode sensor and method for detecting concentration of single gas by adopting same |
CN102095781A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same |
CN102095791A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode sensor and method for detecting concentration of two-component gas |
CN102095790A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nanotube film ionizing sensor and method for detecting concentration of mixed gas |
CN102095792A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Online gas detection device based on carbon-nano-tube membrane micron-nano electrode |
CN102095783A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas |
CN102175757A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film three-electrode sensor and manufacturing method thereof |
CN102175755A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
CN102590315A (en) * | 2007-07-19 | 2012-07-18 | 郡是株式会社 | Hydrogen gas sensor and method for producing same |
CN101458221B (en) * | 2008-12-26 | 2012-08-22 | 尚沃医疗电子无锡有限公司 | Metallic oxide/carbon nanotube gas sensors |
CN105244450A (en) * | 2015-10-09 | 2016-01-13 | 北京大学深圳研究生院 | Organic light-emitting device driven by alternating electric field and preparation method for organic light-emitting device |
CN105651814A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Nanometer tin-sulfide-based gas sensor and preparation method thereof |
CN105651816A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Novel ammonia gas sensor and preparation method thereof |
CN105651815A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Nitrogen dioxide sensor and preparation method thereof |
CN106802339A (en) * | 2017-01-19 | 2017-06-06 | 烟台睿创微纳技术股份有限公司 | A kind of array type MEMS gas sensors |
CN114487032A (en) * | 2020-10-26 | 2022-05-13 | 戴念华 | Gas sensing element and detection system |
WO2022134494A1 (en) * | 2020-12-22 | 2022-06-30 | 杭州未名信科科技有限公司 | Capacitive hydrogen sensor and preparation method therefor |
-
2003
- 2003-12-23 CN CN 200320109975 patent/CN2700876Y/en not_active Expired - Fee Related
Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102590315A (en) * | 2007-07-19 | 2012-07-18 | 郡是株式会社 | Hydrogen gas sensor and method for producing same |
CN100595576C (en) * | 2007-08-16 | 2010-03-24 | 中国科学院合肥物质科学研究院 | Surface-sensitive condenser type gas transducer and manufacturing method thereof |
CN101458221B (en) * | 2008-12-26 | 2012-08-22 | 尚沃医疗电子无锡有限公司 | Metallic oxide/carbon nanotube gas sensors |
CN102095783B (en) * | 2011-02-16 | 2012-11-28 | 西安交通大学 | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas |
CN102175755B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
CN102095790A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nanotube film ionizing sensor and method for detecting concentration of mixed gas |
CN102095792A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Online gas detection device based on carbon-nano-tube membrane micron-nano electrode |
CN102095783A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode sensor array and method for detecting concentration of mixed gas |
CN102175757A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film three-electrode sensor and manufacturing method thereof |
CN102175755A (en) * | 2011-02-16 | 2011-09-07 | 西安交通大学 | Carbon nanotube film micro-nano ionizing sensor and manufacture method thereof |
CN102095781A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same |
CN102081069A (en) * | 2011-02-16 | 2011-06-01 | 西安交通大学 | Carbon nanotube (CNT) film based three-electrode sensor and method for detecting concentration of single gas by adopting same |
CN102095781B (en) * | 2011-02-16 | 2012-09-05 | 西安交通大学 | Carbon nano tube film ionizing sensor and method for detecting concentration of single gas based on same |
CN102072784B (en) * | 2011-02-16 | 2012-11-28 | 西安交通大学 | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof |
CN102072784A (en) * | 2011-02-16 | 2011-05-25 | 西安交通大学 | Carbon nanotube film ionizing gas temperature sensor and temperature measuring method thereof |
CN102175757B (en) * | 2011-02-16 | 2013-01-02 | 西安交通大学 | Carbon nanotube film three-electrode sensor and manufacturing method thereof |
CN102095791A (en) * | 2011-02-16 | 2011-06-15 | 西安交通大学 | Carbon nano tube film three-electrode sensor and method for detecting concentration of two-component gas |
CN102081069B (en) * | 2011-02-16 | 2013-03-13 | 西安交通大学 | Carbon nanotube (CNT) film based three-electrode sensor and method for detecting concentration of single gas by adopting same |
CN102095791B (en) * | 2011-02-16 | 2013-05-22 | 西安交通大学 | Method for detecting concentration of two-component gas based on carbon nano tube film three-electrode sensor |
CN105651814A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Nanometer tin-sulfide-based gas sensor and preparation method thereof |
CN105651816A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Novel ammonia gas sensor and preparation method thereof |
CN105651815A (en) * | 2014-11-12 | 2016-06-08 | 长沙理工大学 | Nitrogen dioxide sensor and preparation method thereof |
CN105651815B (en) * | 2014-11-12 | 2018-07-31 | 长沙理工大学 | A kind of nitrogen dioxide sensor and preparation method thereof |
CN105651816B (en) * | 2014-11-12 | 2019-01-25 | 长沙理工大学 | A kind of novel ammonia gas sensor and preparation method thereof |
CN105244450A (en) * | 2015-10-09 | 2016-01-13 | 北京大学深圳研究生院 | Organic light-emitting device driven by alternating electric field and preparation method for organic light-emitting device |
CN106802339A (en) * | 2017-01-19 | 2017-06-06 | 烟台睿创微纳技术股份有限公司 | A kind of array type MEMS gas sensors |
CN114487032A (en) * | 2020-10-26 | 2022-05-13 | 戴念华 | Gas sensing element and detection system |
WO2022134494A1 (en) * | 2020-12-22 | 2022-06-30 | 杭州未名信科科技有限公司 | Capacitive hydrogen sensor and preparation method therefor |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN2700876Y (en) | Carbon nano tube thin film gas transducer | |
Muñoz et al. | Trends in electrochemical impedance spectroscopy involving nanocomposite transducers: Characterization, architecture surface and bio-sensing | |
Penza et al. | Metal-modified and vertically aligned carbon nanotube sensors array for landfill gas monitoring applications | |
Ong et al. | A wireless, passive carbon nanotube-based gas sensor | |
Qi et al. | Humidity sensing properties of KCl-doped ZnO nanofibers with super-rapid response and recovery | |
Nasri et al. | Gas sensing based on organic composite materials: Review of sensor types, progresses and challenges | |
Gu et al. | Humidity sensors based on ZnO/TiO2 core/shell nanorod arrays with enhanced sensitivity | |
Ma et al. | An overview: Sensors for low humidity detection | |
Yoo et al. | Effects of O2 plasma treatment on NH3 sensing characteristics of multiwall carbon nanotube/polyaniline composite films | |
Bai et al. | Effect of humidity on the gas sensing property of the tetrapod-shaped ZnO nanopowder sensor | |
Mascini et al. | Sensors for chemical and biological applications | |
US20120111093A1 (en) | Method for detecting an analyte gas using a gas sensor device comprising carbon nanotubes | |
TW587165B (en) | Gas sensor and the manufacturing method thereof | |
US20060263255A1 (en) | Nanoelectronic sensor system and hydrogen-sensitive functionalization | |
Chen et al. | Ringed electrode configuration enhances the sensitivity of QCM humidity sensor based on lignin through fringing field effect | |
CN111812171A (en) | Integrated photoelectrochemical sensing electrode and application thereof | |
Li et al. | A surface acoustic wave ethanol sensor based on uniform ZnO nanoparticles-reduced graphene oxide composite film | |
CN2751305Y (en) | Carbon nanometer tube thin film gas sensor | |
CN1384355A (en) | Electrochemical sensor and its prepn and use | |
Xu et al. | Development and performance of an all-solid-stated pH sensor based on modified membranes | |
Xu et al. | A Layered Nano-structured Perovskite-type Oxide LaNiTiO3 for nonenzymatic catalytic detection of hydrogen peroxide | |
Ionete et al. | SWCNT-Pt-P 2 O 5-Based Sensor for Humidity Measurements | |
Wang et al. | Research on highly sensitive humidity sensor based on Tr-MWCNT/HEC composite films | |
US11192780B1 (en) | Templated nanostructure sensors and methods of manufacture | |
Hu et al. | Solid-state gas sensors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C19 | Lapse of patent right due to non-payment of the annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |