CN102081070A - Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof - Google Patents
Three-electrode acetylene sensor of carbon nanotube film and concentration measurement method thereof Download PDFInfo
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Abstract
The invention discloses a three-electrode acetylene sensor of a carbon nanotube film and a concentration measuring method thereof. The sensor comprises a first electrode, a second electrode and a third electrode, wherein the three electrodes are sequentially distributed; the first electrode is provided with an air vent, and the inner surface of the first electrode is bonded with a substrate distributed with the carbon nanotube film; the center of the second electrode is provided with an extraction hole; the panel of the third electrode is provided with a blind hole; and the three electrodes are mutually isolated. The method comprises the following steps of: (1) placing the acetylene sensor, a temperature sensor and a humidity sensor with different electrode distances in acetylene gas to be measured; (2) applying voltages to the electrodes; (3) measuring the ion flow value of each sensor; (4) constituting the measured ion flow values and the calibration values of acetylene concentration, temperature and humidity into a sample, and fabricating the sample and an interpolation sample into a gas concentration measurement database; (5) fabricating a data fusion instrument, and establishing an acetylene concentration measurement model; and (6) inputting the actual measurement value of the sensor into the measurement model to obtain the accurate acetylene concentration measurement value. The sensor disclosed by the invention has the advantages of high acetylene concentration sensitivity, good linearity and high accuracy.
Description
Technical field
The present invention relates to the gas sensing field, particularly a kind of based on carbon nano-tube film and gas discharge principle three electrode acetylene sensors and measure the method for concentration of acetylene.
Background technology
Along with pressing for and the development of nanometer technology of all trades and professions gasmetry, nano-sensor has obtained considerable progress.Especially along with the discovery of carbon nano-tube in latter stage in 20th century, carbon nano-tube shows tempting application prospect in gas, temperature, moisture measurement field.Film two electrode sensors in carbon nano-tube gas-sensitive, temperature sensitive, the moisture sensor, advantage such as, measurement gas wide ranges highly sensitive with its measurement, response are fast becomes the research focus in gas, temperature, moisture measurement field.Carbon nano-tube film two electrode gas sensors have overcome the shortcoming of carbon nano-tube gas-sensitive sensors saturated poisoning in tested gas of other type based on gas discharge principle, and gas concentration measurement scope and tested gaseous species scope are wideer.As air-sensitive, temperature sensitive, moisture sensor that sensitive material constitutes, have the irreplaceable advantage of conventional sensors with carbon nano-tube: the one, the specific surface area of carbon nano-tube is big, under the less situation of sensor overall dimensions, can improve the area of electrode greatly; Two are based on the tip curvature radius of carbon nanotube level, and working sensor voltage is greatly reduced, and obtain extremely strong electric field intensity near the carbon nano-tube tip, make tested gas ionization under low-voltage; The 3rd, the size of having dwindled sensor greatly, dynamic response is fast.Therefore, it has result of extraction at aspects such as biology, chemistry, machinery, aviation, military affairs, anti-terrorisms.
Existing carbon nano-tube film two electrode sensors comprise by people such as Liu Junhua, the Zhang Yong of Xi'an Communications University, Li Xin, professors Zhu Changchun at the international vaccum microelectronics international conference disclosed carbon nano-tube film two-electrode gas sensor (shown in Figure 1) of the 14th IVMC of calendar year 2001.This working sensor is afterwards because interpolar discharge rear space electric charge is difficult to diffusion, sensor is difficult to return to original state, and (Fig. 2 Fig. 3), can't measure gas concentration to present multivalued relation between sensor voltage breakdown, breakdown current and the gas concentration.People such as NikhilKoratkar of U.S. Rensselaer Polytech Inst (Rensselaer Polytechnic Institute) and Pulickel M professor Ajayan have developed carbon nano-tube film anode two-electrode gas sensor.Present nonlinear relationship between this sensor voltage breakdown and the gas concentration, linear error is bigger between disruptive discharge electric current and the gas concentration; Sparking voltage and discharge current are bigger; Can't realize of the measurement of carbon nano-tube film anode to pure gas.The Hui Guohua of Zhejiang University's biomedical engineering and instrumental science institute, Chen Yuquan professor develops carbon nano-tube thin film cathode two-electrode gas sensor under the condition of 120 microns die openings, studied the flash-over characteristic of sensor in three kinds of pure gases, because sensitivity is lower, do not constitute the gas sensor of measuring concentration.
Therefore, at present all kinds of pure gases of sensitivity are comprised the carbon nano-tube film electrode sensor of acetylene and the research of measuring the method for acetylene gas concentration thereof, become the technical matters that needs to be resolved hurrily.
Summary of the invention
One of purpose of the present invention, provide a kind of carbon nano-tube film three electrode acetylene sensors, the output current of conventional carbon nano-tube film two electrode sensors is divided into electron stream and ion flow, set up the single-valued relationship of ion flow that the present invention's three electrode acetylene sensor collectors collect and concentration of acetylene, temperature, humidity, overcome carbon nano-tube film two electrode sensor gas-sensitive properties and the many-valued nonlinear problem of the quick characteristic that wets.This sensor construction is simple, and cost is low, and measurement gas is highly sensitive.
Another object of the present invention provides a kind of method based on carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene; Form sensor array by different poles spacing carbon nano-tube film three electrode sensors and measure concentration of acetylene to be measured, temperature and humidity respectively; The hardware configuration that this concentration measuring method requires is simple, adopts data anastomosing algorithm, measurement gas accuracy height.
The objective of the invention is to realize by following technical proposals.
Carbon nano-tube film three electrode acetylene sensors, it is characterized in that: comprise three first electrode, second electrode and third electrodes that distribute successively from top to bottom, the electrode that described first electrode is bonded with the substrate of the carbon nano-tube film that distributing by inside surface and is provided with bleeder vent constitutes; Second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
Architectural feature of the present invention also is:
The die opening of adjacent two electrodes is 30～250 μ m in described three electrodes;
Described first electrode and second electrode pad are 0.01～17mm over against area
2, second electrode and third electrode pole plate are 0.01～190mm over against area
2
The bleeder vent of the electrode surface of described first electrode is 1～4, is attached with carbon nano-tube film in the bonding substrate of electrode inner surface;
The described second electrode extraction pole center is provided with 1～4 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4.
The present invention gives a kind of method based on carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene, and this method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set at carbon nano-tube film three electrode sensors of 30～250 μ m;
Carbon nano-tube film three electrode acetylene sensors, carbon nano-tube film three electrode temperature sensors and the carbon nano-tube film three electrode humidity sensors of three different poles spacings (2) will setting respectively are placed in the atmosphere that contains acetylene gas to be measured;
(3) be 0V to the first electrode on-load voltage of carbon nano-tube film acetylene sensor, temperature sensor and the humidity sensor of three three-electrode structures respectively, the second electrode on-load voltage, 2～200V, third electrode on-load voltage 1～180V;
(4) in concentration of acetylene to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in the measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that in concentration, temperature and humidity measurement range, records in the step (4), with corresponding concentration of acetylene, temperature and humidity calibration value, form different experimental calibration samples, adopt the piecewise interpolation technology that the experimental calibration sample is carried out interpolation then, obtain interpolated data, obtain interpolated sample, and set up the concentration of acetylene measured database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt the data fusion technology, make up the data fusion instrument, set up the measurement model of acetylene sensor, temperature sensor and humidity sensor; With input sample and the desired output sample of the data in the concentration of acetylene measured database as the data fusion instrument, and train and check as the training sample and the test samples of data fusion instrument respectively with data different in the range ability, when assay satisfies the measurement error requirement, the accurate measurement model of concentration of data fusion instrument output acetylene sensor;
The accurate measurement model of concentration of acetylene that the ion flow valuve input step (6) of output obtains during (7) with carbon nano-tube film three electrode acetylene sensors, temperature sensor and humidity sensor actual measurement, the accurate measured value of this model output concentration of acetylene.
The inventive method feature also is:
In the carbon nano-tube film sensor of described three-electrode structure, second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.
The described concentration of acetylene measured database of setting up, be that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with concentration of acetylene, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
Based on the method for carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene, form sensor array by different poles spacing carbon nano-tube film three electrode sensors and measure concentration of acetylene to be measured, temperature and humidity respectively; Power by the sensor electrical potential source; Export by pA level current measurement system detecting sensor; Adjust electrode separation, adjust electrode voltage, in acetylene to be measured, in temperature, humidity environment, carry out the calibration experiment of sensor; Based on the piecewise interpolation technology experimental calibration data are carried out interpolation, obtain interpolated data; All data that will comprise experimental calibration data and interpolated data are formed the concentration of acetylene measured database, obtain monodrome gas-sensitive property, monodrome responsive to temperature characteristic, the monodrome humidity sensitive characteristic of acetylene; According to the data in the concentration of acetylene measured database, based on the data fusion technology, eliminate the influence of temperature, humidity, set up the accurate measurement model of concentration of acetylene sensor; The concentration of acetylene measurement model is imported in the output of sensor array in real time during with actual measurement, just can obtain the measured result of concentration of acetylene.This concentration of acetylene measuring method has overcome the many-valued nonlinear problem of carbon nano-tube film two electrode sensor gas-sensitive properties and wet quick characteristic, the hardware configuration that requires is simple, and cost is low, and the measurement acetylene gas is highly sensitive, accuracy is high, is suitable for promoting the use of.
Concentration of acetylene measuring method of the present invention can realize the measurement of concetration of acetylene, and accuracy is 1%.The concentration measuring method of tradition three electrode probes that use in this novel concentration of acetylene measuring method and the existing ionization detector chromatograph is compared, because adopt carbon nano-tube film to do electrode, sensor has the measurement of concetration accuracy of high sensitivity and 1% to acetylene.And carbon nano-tube film three electrode sensors can be realized working sensor voltage with the tip curvature radius of carbon nanotube level, from the safe and practical scope below 600 volts of high pressure drop to 200 volts of ionization detector.Novel concentration of acetylene measuring method of the present invention integrates sensor array technology, pA level current measurement techniques, piecewise interpolation technology and the data fusion technology of different poles spacing, the influence of temperature, humidity can be eliminated, the accurate measurement of concentration of acetylene can be realized.
Description of drawings
Fig. 1 is carbon nano-tube thin film cathode two electrode sensor structural representations.
Fig. 2 is the voltage breakdown of prior art carbon nano-tube film two-electrode gas sensor and the many-valued non-linear gas-sensitive property of gas concentration.
Fig. 3 is the breakdown current of prior art carbon nano-tube film two-electrode gas sensor and the non-linear many-valued gas-sensitive property of gas concentration.
Fig. 4 is carbon nano-tube film three electrode acetylene sensor construction synoptic diagram of the present invention;
Fig. 5 is carbon nano-tube film three electrode acetylene sensor spatial structure side views of the present invention.
Fig. 6 is the gas discharge ion flow exported in acetylene of carbon nano-tube film three electrode acetylene sensors of the present invention and the single valued relation of gas concentration.
Among the figure: 1, first electrode; 2, second electrode; 3, third electrode; 4, be provided with the electrode of bleeder vent; 5, carbon nano-tube film substrate; 6, carbon nano-tube film; 7, insulation column.
Embodiment
The present invention will be further described below in conjunction with drawings and the specific embodiments.
As Fig. 4, shown in Figure 5, these carbon nano-tube film three electrode acetylene sensors, comprise by three successively from top to bottom the electrode of mutual superposition constitute, these three mutual superposition electrodes are respectively equipped with first electrode 1, second electrode 2 and third electrode 3, and the electrode 4 that its first electrode 1 is bonded with the substrate 5 of the carbon nano-tube film 6 that distributing by inside surface and is provided with bleeder vent constitutes; Second electrode 2 is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode 3 is made of the collector that the battery lead plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column 7 respectively.
Among the carbon nano-tube film three electrode acetylene sensor embodiment shown in Figure 4, the bleeder vent of the electrode surface of first electrode 1 has 2, and bleeder vent is circular; Side surface at this bleeder vent is bonded with carbon nano-tube film substrate 5, is distributed with carbon nano-tube film 6 on it, and this carbon nano-tube mouth of pipe is downward.Second electrode, 2 centers are provided with 1 fairlead and fairlead is circle.Third electrode 3 collector blind holes are corresponding with the fairlead of second electrode, provided among Fig. 4, Fig. 5 a blind hole to be set and blind hole is the embodiment of cylindrical structure.Insulation column 7 is separately positioned between the carbon nano-tube film substrate 5 and second electrode 2, between second electrode 2 and the third electrode 3, promptly insulation column 7 is distributed in second electrode 2 over against the surperficial both sides at the carbon nano-tube film substrate two ends of first electrode 1 and the both sides of the inner surface of third electrode 3.
The present invention is provided with the electrode 4 plate faces and the carbon nano-tube film substrate 5 of bleeder vent and all adopts silicon sheet material to make; Described carbon nano-tube film 6 can adopt FePC as catalyzer, and adopts carbon source, and carbon nano-tube film 6 is made in growth in carbon nano-tube film substrate 5, and perhaps the serigraphy carbon nano-tube film 6.Second electrode 2 and third electrode 3 all adopt silicon wafer to manufacture.The two sides that are provided with the electrode 4 of bleeder vent and third electrode 3 medial surfaces, second electrode 2 are equipped with metal film.
On the electrode in the present invention's first electrode 12 bleeder vents are arranged, be convenient to gas to be measured and enter electrode gap; Have conductive capability at the bottom of the silicon wafer-based of carbon nano-tube film, and strong bond is at the first electrode inner surface; Through the fairlead of second electrode 2, third electrode 3 collectors can be collected the positive ion stream that gas ionization produces.Between first electrode 1 and second electrode 2, isolate mutually by insulation column 7 between second electrode 2 and the third electrode 3; Tested gas enters in the gap of adjacent two electrodes of sensor by the gap between the sensor peripheral electrode.
The present invention takes the carbon nano-tube film three electrode acetylene sensors of said structure when measuring concentration of acetylene, and second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.Second electrode and first electrode form the electron stream loop, and the third electrode and first electrode form the ion flow loop, realize electron stream is separated with ion flow.Between the ion flow of carbon nano-tube film three electrode acetylene sensors output and concentration of acetylene, temperature, the humidity, apply at second electrode on the basis of certain voltage, present single valued relation (Fig. 6).By piecewise interpolation and data fusion, realized the accuracy of measurement of concentration of acetylene 1%.Carbon nano-tube film three electrode sensor array techniques, pA level current measurement techniques, piecewise interpolation technology and the data fusion technology of different poles spacing are the features of concentration measuring method of the present invention.
Below by an instantiation, the method for carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene of the present invention is described further.
Adopt the fixing carbon nano-tube film three electrode acetylene sensors of die opening, experiment has obtained the monodrome gas-sensitive property (shown in Figure 6) of pure gas acetylene, concentration of acetylene measurement model that the ion flow data input data fusion of sensor output is set up has obtained accuracy less than 1% pure gas concentration of acetylene measured value.
Among the embodiment of carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene shown in Figure 6, the experimental situation condition is 26.5 ℃ of temperature, relative humidity 23.0%RH, atmospheric pressure 93.7KPa.Sensor first electrode 1 and second electrode, 2 die openings, second electrode 2 are 200 μ m with third electrode 3 die openings; The die opening of the carbon nano-tube film three electrode sensor adjacent electrodes that monitor temperature is used is 170 μ m; The die opening of the carbon nano-tube film three electrode sensor adjacent electrodes that monitoring humidity is used is respectively 200 μ m, 100 μ m.First electrode 1 of above-mentioned three carbon nano-tube film three electrode sensors and second electrode, 2 pole plates are 17mm over against area
2, second electrode 2 is 190mm with third electrode 3 pole plates over against area
2Acetylene sensor first electrode 1 cathode voltage is 0V, second electrode, 2 extraction pole on-load voltage 80V, third electrode 3 collector on-load voltage 10V; Temperature sensor first, second, third electrode voltage is respectively 0V, 70V, 10V; Humidity sensor first, second, third electrode voltage is respectively 0V, 90V, 10V.Along with the increase of concentration of acetylene, the ion flow that collector is collected reduces, and presents monodrome decline relation between ion flow and the concentration of acetylene; Temperature, humidity sensor sensing characteristic and acetylene sensor are similar.In 0～30ppm concentration of acetylene scope, 13 groups of experimental calibration data have been obtained.Three sensor ion flow valuves are as the input sample, and the concentration of acetylene calibration value is as the desired output sample data.Adopt linear interpolation to 13 groups of experimental calibration sample data interpolation, adopting step-length in 0～30ppm concentration of acetylene scope is that 0.2ppm carries out interpolation, obtains 151 groups of interpolated datas, and forms database with 13 groups of experimental calibration data; Select for use 151 groups of interpolated datas and 1 group of experimental calibration data totally 152 groups of data as training sample, 12 groups of experimental calibration data that are different from training sample and as 1 group of experimental calibration data of training sample totally 13 groups of experimental calibration data as test samples, input data fusion instrument, by the training check, obtain pure gas concentration of acetylene measurement model.The linearity of pure gas concentration of acetylene measurement model is that the assay fiducial error maximal value of 0.09%, 13 group of test samples is 0.25%, has reached 1% pure gas concentration of acetylene accuracy of measurement.
Present embodiment basic structure is with embodiment 1, and different is: adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m in three electrodes of carbon nano-tube film three electrode acetylene sensors, and first electrode 1 and second electrode, 2 pole plates are 0.01mm over against area
2, second electrode 2 is 0.01mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of first electrode 1 has 1, and bleeder vent is quadrilateral, pentagon or hexagon; Second electrode, 2 center fairleads are 4, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 4, and blind hole is 3～6 prisms or pyramid.
The detection method of present embodiment is substantially the same manner as Example 1, and different is:
The first electrode cathode voltage of sensor is 0V, the second electrode extraction pole on-load voltage 2V, third electrode collector on-load voltage 1V.
Present embodiment basic structure is with embodiment 1, and different is: adjacent two interelectrode die openings are respectively 250 μ m, 30 μ m in three electrodes of carbon nano-tube film three electrode acetylene sensors, and first electrode 1 and second electrode, 2 pole plates are 10mm over against area
2, second electrode 2 is 100mm with third electrode 3 pole plates over against area
2
The bleeder vent of the electrode surface of first electrode 1 has 4, and bleeder vent is quadrilateral, pentagon or hexagon; Second electrode, 2 center fairleads are 2, and fairlead is quadrilateral, pentagon or hexagon; The quantity of third electrode 3 blind holes is 2, and blind hole is 3～6 prisms or pyramid.
The detection method of present embodiment is substantially the same manner as Example 1, and different is:
The first electrode cathode voltage of sensor is 0V, the second electrode extraction pole on-load voltage 200V, third electrode collector on-load voltage 180V.
The present invention forms sensor array, the output of pA level current measurement system survey sensor, piecewise interpolation and data fusion method by different poles spacing carbon nano-tube film three electrode sensors, form a kind of novel, can measure acetylene gas, antijamming capability is strong, accuracy is high concentration of acetylene measuring method.The sensor of different poles spacing in the sensor array is measured the disturbing effect of temperature, humidity in real time, directly measures concentration of acetylene; PA level current measurement system can be measured the pA level electric current of each sensor output of corresponding each component gas concentration, temperature and humidity simultaneously; Piecewise interpolation and data fusion method can be eliminated temperature, humidity interference, the high concentration of acetylene measured value of output accuracy.
Though the present invention has made detailed description with above-mentioned preferred embodiment to the present invention, the foregoing description also is not used in qualification the present invention.Under the situation that does not break away from given technical characterictic of technical solution of the present invention and range of structures, the increase that technical characterictic is done, distortion or with the replacement of the same content in this area all should belong to protection scope of the present invention.
Claims (6)
1. carbon nano-tube film three electrode acetylene sensors, it is characterized in that: comprise three first electrode, second electrode and third electrodes that distribute successively from top to bottom, the electrode that described first electrode is bonded with the substrate of the carbon nano-tube film that distributing by inside surface and is provided with bleeder vent constitutes; Second electrode is made of the extraction pole pole plate that the center is provided with fairlead; Third electrode is made of the collector that the plate face is provided with blind hole; These three electrodes are isolated mutually by insulation column respectively.
2. carbon nano-tube film three electrode acetylene sensors according to claim 1, it is characterized in that: the die opening of adjacent two electrodes is 30～250 μ m in described three electrodes; Described first electrode and second electrode pad are 0.01～17mm over against area
2, second electrode and third electrode pole plate are 0.01～190mm over against area
2
3. carbon nano-tube film three electrode acetylene sensors according to claim 1, it is characterized in that: the bleeder vent of the electrode surface of described first electrode is 1～4, is attached with carbon nano-tube film in the bonding substrate of electrode inner surface;
The described second electrode extraction pole center is provided with 1～4 fairlead;
Described third electrode collector blind hole is corresponding with the fairlead of second electrode, and the quantity of blind hole is 1～4.
4. based on the method for carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene, it is characterized in that this method comprises the steps:
(1) select the die opening of adjacent two electrodes in three electrodes to be set at carbon nano-tube film three electrode sensors of 30～250 μ m;
Carbon nano-tube film three electrode acetylene sensors, carbon nano-tube film three electrode temperature sensors and the carbon nano-tube film three electrode humidity sensors of three different poles spacings (2) will setting respectively are placed in the atmosphere that contains acetylene gas to be measured;
(3) be 0V to the first electrode on-load voltage of carbon nano-tube film acetylene sensor, temperature sensor and the humidity sensor of three three-electrode structures respectively, the second electrode on-load voltage, 2～200V, third electrode on-load voltage 1～180V;
(4) in concentration of acetylene to be measured, temperature and humidity measurement range, corresponding different concentration, temperature and humidity calibration value, the gas discharge ion flow valuve of all the sensors output in the measuring process (2) respectively;
(5) with all the sensors output ion flow valuve that in concentration, temperature and humidity measurement range, records in the step (4), with corresponding concentration of acetylene, temperature and humidity calibration value, form different experimental calibration samples, adopt the piecewise interpolation technology that the experimental calibration sample is carried out interpolation then, obtain interpolated data, obtain interpolated sample, and set up the concentration of acetylene measured database according to all samples that comprised experimental calibration sample and interpolated sample;
(6) adopt the data fusion technology, make up the data fusion instrument, set up the measurement model of acetylene sensor, temperature sensor and humidity sensor; With input sample and the desired output sample of the data in the concentration of acetylene measured database as the data fusion instrument, and train and check as the training sample and the test samples of data fusion instrument respectively with data different in the range ability, when assay satisfies the measurement error requirement, the accurate measurement model of concentration of data fusion instrument output acetylene sensor;
The accurate measurement model of concentration of acetylene that the ion flow valuve input step (6) of output obtains during (7) with carbon nano-tube film three electrode acetylene sensors, temperature sensor and humidity sensor actual measurement, the accurate measured value of this model output concentration of acetylene.
5. the method based on carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene according to claim 4, it is characterized in that: in the carbon nano-tube film sensor of described three-electrode structure, second electrode potential is higher than first electrode potential, and the third electrode current potential is lower than second electrode potential and is higher than first electrode potential.
6. the method based on carbon nano-tube film three electrode acetylene sensor measurement concentration of acetylene according to claim 4, it is characterized in that: the described concentration of acetylene measured database of setting up, be that experimental calibration data and interpolated data are formed database, with each sensor output ion flow valuve and interpolated data thereof as the input sample, with concentration of acetylene, temperature and humidity calibration value and interpolated data thereof as the desired output sample.
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