CN102051590A - 发电用太阳能高温集热管镀膜方法及卧式镀膜机 - Google Patents
发电用太阳能高温集热管镀膜方法及卧式镀膜机 Download PDFInfo
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CN201010610639.3A CN102051590B (zh) | 2010-12-29 | 2010-12-29 | 发电用太阳能高温集热管镀膜方法及卧式镀膜机 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102268648A (zh) * | 2011-06-28 | 2011-12-07 | 黄峰 | 易换靶材组件式旋转靶装置 |
CN103147057A (zh) * | 2013-03-28 | 2013-06-12 | 有度功能薄膜材料扬州有限公司 | 复式轨道双对称可分离腔体磁控溅射镀膜设备 |
CN105568246A (zh) * | 2016-02-02 | 2016-05-11 | 广州粤海真空技术有限公司 | 太阳能集热钢管连续溅射镀膜设备的镀膜钢管转动架 |
CN106906446A (zh) * | 2015-12-23 | 2017-06-30 | 深圳市拓日新能源科技股份有限公司 | 一种集热膜的真空镀膜方法及真空镀膜设备 |
CN107022748A (zh) * | 2017-05-23 | 2017-08-08 | 上海子创镀膜技术有限公司 | 一种卧式连续圆管式表面真空磁控镀膜结构 |
CN107574406A (zh) * | 2017-08-31 | 2018-01-12 | 山东奇威特太阳能科技有限公司 | 一种太阳能槽式集热管的钢管表面处理工艺 |
CN110527966A (zh) * | 2019-09-05 | 2019-12-03 | 西安交通大学 | 一种用于长管镀膜的卧式磁控溅射设备 |
CN116623141A (zh) * | 2023-07-20 | 2023-08-22 | 江苏微镀新能源科技有限公司 | 一种pvd真空离子射流镀膜机 |
Citations (7)
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CN2245619Y (zh) * | 1995-09-15 | 1997-01-22 | 天津雷霆真空系统工程有限公司 | 金属膜、氧化膜电阻高速高质镀膜机 |
US20010022992A1 (en) * | 2000-03-16 | 2001-09-20 | Gerhard Regittnig | Evaporation apparatus, particularly adapted to an evaporation plant for forming thin layers on a substrate |
US20050005860A1 (en) * | 2003-07-07 | 2005-01-13 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd) | Vacuum evaporator |
JP2006077308A (ja) * | 2004-09-13 | 2006-03-23 | Murata Mfg Co Ltd | 真空蒸着装置 |
CN2813637Y (zh) * | 2005-02-06 | 2006-09-06 | 朱刚毅 | 卧式电子束蒸发式真空镀膜机 |
CN101086059A (zh) * | 2006-06-05 | 2007-12-12 | 黄鸣 | 太阳能集热管真空磁控溅射连续镀膜线系统 |
CN201942744U (zh) * | 2010-12-29 | 2011-08-24 | 衡阳市真空机电设备有限公司 | 发电用太阳能高温集热管卧式镀膜机 |
-
2010
- 2010-12-29 CN CN201010610639.3A patent/CN102051590B/zh not_active Expired - Fee Related
Patent Citations (7)
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CN2245619Y (zh) * | 1995-09-15 | 1997-01-22 | 天津雷霆真空系统工程有限公司 | 金属膜、氧化膜电阻高速高质镀膜机 |
US20010022992A1 (en) * | 2000-03-16 | 2001-09-20 | Gerhard Regittnig | Evaporation apparatus, particularly adapted to an evaporation plant for forming thin layers on a substrate |
US20050005860A1 (en) * | 2003-07-07 | 2005-01-13 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd) | Vacuum evaporator |
JP2006077308A (ja) * | 2004-09-13 | 2006-03-23 | Murata Mfg Co Ltd | 真空蒸着装置 |
CN2813637Y (zh) * | 2005-02-06 | 2006-09-06 | 朱刚毅 | 卧式电子束蒸发式真空镀膜机 |
CN101086059A (zh) * | 2006-06-05 | 2007-12-12 | 黄鸣 | 太阳能集热管真空磁控溅射连续镀膜线系统 |
CN201942744U (zh) * | 2010-12-29 | 2011-08-24 | 衡阳市真空机电设备有限公司 | 发电用太阳能高温集热管卧式镀膜机 |
Non-Patent Citations (1)
Title |
---|
《真空电子技术》 20051231 朱刚毅 新型卧式离子辅助电子束蒸发真空镀膜机 参见期刊第45-46、56页 6-9 , 第6期 2 * |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102268648A (zh) * | 2011-06-28 | 2011-12-07 | 黄峰 | 易换靶材组件式旋转靶装置 |
CN103147057A (zh) * | 2013-03-28 | 2013-06-12 | 有度功能薄膜材料扬州有限公司 | 复式轨道双对称可分离腔体磁控溅射镀膜设备 |
CN106906446A (zh) * | 2015-12-23 | 2017-06-30 | 深圳市拓日新能源科技股份有限公司 | 一种集热膜的真空镀膜方法及真空镀膜设备 |
CN106906446B (zh) * | 2015-12-23 | 2019-09-03 | 深圳市拓日新能源科技股份有限公司 | 一种集热膜的真空镀膜方法及真空镀膜设备 |
CN105568246A (zh) * | 2016-02-02 | 2016-05-11 | 广州粤海真空技术有限公司 | 太阳能集热钢管连续溅射镀膜设备的镀膜钢管转动架 |
CN107022748A (zh) * | 2017-05-23 | 2017-08-08 | 上海子创镀膜技术有限公司 | 一种卧式连续圆管式表面真空磁控镀膜结构 |
CN107574406A (zh) * | 2017-08-31 | 2018-01-12 | 山东奇威特太阳能科技有限公司 | 一种太阳能槽式集热管的钢管表面处理工艺 |
CN110527966A (zh) * | 2019-09-05 | 2019-12-03 | 西安交通大学 | 一种用于长管镀膜的卧式磁控溅射设备 |
CN116623141A (zh) * | 2023-07-20 | 2023-08-22 | 江苏微镀新能源科技有限公司 | 一种pvd真空离子射流镀膜机 |
CN116623141B (zh) * | 2023-07-20 | 2023-10-13 | 江苏微镀新能源科技有限公司 | 一种pvd真空离子射流镀膜机 |
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